JPS60235002A - Viewer for non-contacting optical type deviation measuring apparatus - Google Patents
Viewer for non-contacting optical type deviation measuring apparatusInfo
- Publication number
- JPS60235002A JPS60235002A JP9015384A JP9015384A JPS60235002A JP S60235002 A JPS60235002 A JP S60235002A JP 9015384 A JP9015384 A JP 9015384A JP 9015384 A JP9015384 A JP 9015384A JP S60235002 A JPS60235002 A JP S60235002A
- Authority
- JP
- Japan
- Prior art keywords
- viewer
- light flux
- measuring device
- image
- displacement measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 43
- 238000005259 measurement Methods 0.000 claims abstract description 23
- 230000035945 sensitivity Effects 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims description 38
- 238000012937 correction Methods 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 230000004907 flux Effects 0.000 abstract description 11
- 238000012544 monitoring process Methods 0.000 abstract 1
- 230000008859 change Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、光学的に捕捉した明暗ターゲットを電子像に
変換し、電子的に処理して変位測定を行う非接触光学式
変位測定装置の照準を得るためのビュワーに関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a viewer for obtaining aiming for a non-contact optical displacement measuring device that converts an optically captured bright and dark target into an electronic image and electronically processes it to measure displacement. It is something.
非接触光学式変位測定装置は、被測定対象に直接接触す
ることなくクーゲットを光学的に捕捉することによって
、微小変位を測定することが可能であるため、各種製造
ラインや検査ラインをはしめ試験・研究等に多用されて
いる。この非接触光学式変位測定装置は、光学的に捕捉
できれば十分であるため、危険箇所や悪雰囲気等でも測
定が可能である利点がある。Non-contact optical displacement measuring devices can measure minute displacements by optically capturing the cuget without directly touching the object to be measured, so they can be used on various production lines and inspection lines for testing and testing. It is widely used for research, etc. This non-contact optical displacement measuring device has the advantage of being able to perform measurements even in dangerous locations or in bad atmospheres, since it is sufficient to be able to capture optically.
かかる非接触光学式変位測定装置によって測定を行う場
合には、被測定部の明暗部分又は被測定部に取りつけら
れた明暗ターケ・ノドを撮像用カメラで正確に照準し７
４′りればならない。これは、被測定部の明暗境界像の
変位が確実に捕捉されていない限り、引き続く電子的信
号処理が正確に行われず、したがって、正確な変位測定
は不可能なためである。When measuring with such a non-contact optical displacement measuring device, the imaging camera is used to accurately aim the bright and dark areas of the part to be measured or the bright and dark areas attached to the part to be measured.
Must be 4'. This is because unless the displacement of the bright-dark boundary image of the part to be measured is reliably captured, subsequent electronic signal processing cannot be performed accurately, and therefore accurate displacement measurement is impossible.
従来の非接触光学式変位測定装置においては、変位測定
の準備中に照準を得る場合には、カメラ部の主レンズ系
の中間にビュワーを挿入して捕捉光束を取り出して、タ
ーゲットの状態を調整者が視覚的に確認し、その後ビュ
ワーを復旧させて測定を行っていた。このような測定が
短時間に終了する場合はともかく、長時間にわたる場合
や測定条件が変化した場合等には、再照準のためにヒコ
ーワーを上下しなければならない事態が発生ずる。In conventional non-contact optical displacement measurement devices, when obtaining a sight while preparing for displacement measurement, a viewer is inserted into the middle of the main lens system of the camera section to extract the captured light beam and adjust the condition of the target. A person visually confirmed the situation, and then the viewer was restored and measurements were taken. Regardless of whether such a measurement is completed in a short time, if the measurement lasts for a long time or the measurement conditions change, a situation may arise in which the lifter must be moved up and down for re-aiming.
かかるビュワーの上下に伴ってカメラ部の変移を来′す
ことがあり、微小変位を正確に測定するだめの装置とし
ては問題があった。As the viewer moves up and down, the camera section may shift, which is problematic as a device for accurately measuring minute displacements.
本発明の目的は、必要に応して測定中もビュワーによる
照準状態の監視・確認が可能である非接触光学式変位測
定装置用ビュワーを提供することである。SUMMARY OF THE INVENTION An object of the present invention is to provide a viewer for a non-contact optical displacement measuring device that allows the viewer to monitor and confirm the aiming state even during measurement if necessary.
この目的は、特許請求の範囲に記載の構成を有する非接
触光学式変位測定装置用ビュワー、すなわち、光学像撮
像用カメラの主レンズ系光路に配設され、撮像光束の一
部を取り出すための光束分割部材と、該光束分割部材の
特性に応して非接触光学式変位測定装置の測定系の感度
を補正するための信号補正回路と、を具備する非接触光
学式変位測定装置用ビュワーによって達成される。This purpose is to provide a viewer for a non-contact optical displacement measuring device having the configuration described in the claims, that is, a viewer disposed in the optical path of the main lens system of a camera for optical imaging to take out a part of the imaging light beam. A viewer for a non-contact optical displacement measuring device comprising a beam splitting member and a signal correction circuit for correcting the sensitivity of the measurement system of the non-contact optical displacement measuring device according to the characteristics of the beam splitting member. achieved.
本発明にかかるヒ１−ワーＧこより、カメラ部と被測定
部位との相対関係すなわら被測定部ターゲットの照準状
態を常時又は選択的に監視可能な状態において変位測定
を継続することができる。したがって、この間におりる
所要操作が減少するとともに、不所望なカメラ部の変移
に基づく測定誤差の発生が回避される。By using the heater G according to the present invention, displacement measurement can be continued in a state where the relative relationship between the camera section and the part to be measured, or the aiming state of the part to be measured target, can be constantly or selectively monitored. . Therefore, the required operations during this time are reduced, and measurement errors due to undesired displacement of the camera section are avoided.
以下、好）願な実施例を示す添付図を参照して、本発明
を詳述する。The invention will now be described in detail with reference to the accompanying drawings, which illustrate preferred embodiments.
本発明にかかるビュワーの使用対象としての非接触光学
式変位測定装置は、明暗境界部を有する被測定対象（タ
ーゲット）を、イメージディセクタ管のフォトカソード
上にレンズ系により光学像として結像せしめ、この光学
像を電子像に変換した後、電子的に処理して変位測定を
行うものである。電子的測定処理としては、例えば、明
暗境界像の変位に基づく出力変化を補償するために必要
な出力を利用し、あるいは明暗境界像の変位に起因する
出力パルスの位相変化を利用するものが考えられ、本発
明にかかるビュワーは、いずれにも適用することができ
る。The non-contact optical displacement measuring device to which the viewer according to the present invention is used forms an optical image of an object to be measured (target) having a bright-dark boundary on a photocathode of an image dissector tube using a lens system. After converting this optical image into an electronic image, it is processed electronically to measure displacement. As an electronic measurement process, for example, it is possible to use the output necessary to compensate for the output change due to the displacement of the contrast boundary image, or to utilize the phase change of the output pulse caused by the displacement of the contrast boundary image. The viewer according to the present invention can be applied to any of the above.
第１図は、上述の出力変化を補１ハするタイプの非接触
光学式変位測定装置の基本回路を示すもので、明暗ター
ゲット１を主レンズ系２で捕捉し、イメージディセクタ
管ＩＤのフォトカソード上に結像させる。この光学像は
、光電効果により光電子に変換されて、アパーチャ４上
に光電子像を形成する。その後、アパーチャ４を通過し
た光電子は、光電子増倍部（フォトマルチプライヤ部）
５で１０５〜１０７倍程度に二次電子増倍され、アノー
ド６上に到達した電子量に応じた出力が取り出される。Figure 1 shows the basic circuit of a non-contact optical displacement measuring device of the type that compensates for the above-mentioned output changes. An image is formed on the cathode. This optical image is converted into photoelectrons by the photoelectric effect to form a photoelectron image on the aperture 4. After that, the photoelectrons that have passed through the aperture 4 are transferred to a photomultiplier section (photomultiplier section).
5, the secondary electrons are multiplied by about 105 to 107 times, and an output corresponding to the amount of electrons reaching the anode 6 is extracted.
この出力はプリアンプ７を経た後、時分割スイッチ８に
よって切り換えられ、水平軸回路９・水平偏向コイルｌ
Ｏ；垂直軸回路１１・垂直偏向コイル１２に適宜印加さ
れると同時に、イメージディセクタ管ＩＤに印加される
べき高電圧を制御するだめのライトザーボ回路Ｉ３・ラ
イトサーボ整合アンプ１４を介してイメージディセクタ
管用高電圧電源】５に印加される。この非接触光学式変
位測定装置におりる変位測定は、各偏向電流の一部を取
り出す水平軸データ回路１６・水平軸出力端子１７およ
び垂直軸データ回１ｉ１８・垂直軸出力端子１９の出力
によって行われる。After passing through a preamplifier 7, this output is switched by a time division switch 8, and is then switched by a horizontal axis circuit 9 and a horizontal deflection coil l.
O: Image dissipation is applied to the vertical axis circuit 11 and the vertical deflection coil 12 as appropriate, and at the same time, it is applied to the image dissector tube ID via a light servo circuit I3 and a light servo matching amplifier 14. High voltage power supply for sector tube]5. Displacement measurement in this non-contact optical displacement measuring device is performed by outputs from the horizontal axis data circuit 16/horizontal axis output terminal 17 and the vertical axis data circuit 1i18/vertical axis output terminal 19 from which a portion of each deflection current is taken out. be exposed.
かかる構成において、レンズ系２によって捕捉されてい
る、明暗境界を有するターゲット１が矢印Ｙのように変
位しているとする。もし、なんらの補償もしないとする
と明部分と暗部分とではアノード６に到達する電子量が
異なるので、出力も変動する。ここで、ターゲットの変
位にもかかわらず、アパーチャ４上の明暗境界像（電子
像）が常に一定となるように、すなわぢプリアンプ７の
出力が一定となるように偏向コイル１２ （または１０
）に補償偏向電圧を印加する。この時補償が完全に行わ
れたとすると、所要偏向出力はターゲットの変位を表す
筈である。そこで、この電圧の振幅および周波数を適宜
処理することにより、被測定対象たるターゲットの変位
が測定される。In this configuration, it is assumed that the target 1, which is captured by the lens system 2 and has a bright/dark boundary, is displaced as indicated by an arrow Y. If no compensation is performed, the amount of electrons reaching the anode 6 will be different between the bright and dark areas, and the output will also fluctuate. Here, the deflection coil 12 (or 10
) is applied with a compensation deflection voltage. Assuming that compensation is complete at this time, the required deflection output should represent the displacement of the target. Therefore, by appropriately processing the amplitude and frequency of this voltage, the displacement of the target, which is the object to be measured, is measured.
一方、変位するターゲツト像のパルス出力の変化を、基
準波形と比較することによって変位測定する非接触光学
式変位測定装置も知られている。On the other hand, a non-contact optical displacement measuring device is also known, which measures displacement by comparing changes in pulse output of a displaced target image with a reference waveform.
しかし、本発明の通用上は、第１図の装置と同様に扱う
ことができるため、詳述はしない。However, since the present invention can generally be handled in the same manner as the apparatus shown in FIG. 1, detailed description thereof will not be given.
第２図は、本発明にかかるビュワーを備えた非接触光学
式変位測定装置の要部を示すもので、カメラ部Ｃの主レ
ンズ系２の光路にビュワー■が配設される。このビュワ
ー■は、カメラ部Ｃの主レンズ系２の光路にビームスプ
リッタのような光束分割部材ＬＳが位置するので、上方
へ光束の一部を分割して取り出す構成を有するので、タ
ーゲット１の照準状態を必要に応じて確認することがで
きる。また、この光束分割部材は、ハーフミラ−とする
ごともできることはいうまでもない。FIG. 2 shows the main parts of a non-contact optical displacement measuring device equipped with a viewer according to the present invention, and a viewer (2) is disposed in the optical path of the main lens system 2 of the camera section C. This viewer (2) has a beam splitting member LS such as a beam splitter located in the optical path of the main lens system 2 of the camera section C, so it has a configuration that splits a part of the beam upward and takes it out. The status can be checked as needed. Further, it goes without saying that this light beam splitting member can also be used as a half mirror.
しかし、かかるビュワー■を測定中にも挿入しておくと
、イメージディセクタ管ＩＤに到達する光束が減少し、
これが測定精度に影響を与えることがある。そこで、本
発明にかかるビュワー■はビームスプリッタまたはハー
フミラ−のような光束分割部材の分割特性に応じて、イ
メージディセクタ管ＩＤの感度を予め補償するための信
号補正回路ＳＣを配設する。この補正回路は、イメージ
ディセクタ管ＩＤに到達する光束の減少に相当する分だ
け感度を上昇させることによって補償するものである。However, if such a viewer ■ is inserted during measurement, the light flux reaching the image dissector tube ID will decrease.
This may affect measurement accuracy. Therefore, the viewer (1) according to the present invention is provided with a signal correction circuit SC for compensating the sensitivity of the image dissector tube ID in advance according to the splitting characteristics of a beam splitting member such as a beam splitter or a half mirror. This correction circuit compensates by increasing the sensitivity by an amount corresponding to the decrease in the luminous flux reaching the image dissector tube ID.
信号補正回路ＳＣの出力を、第１図の高電圧電源１５に
作用せしめることにより、イメージディセクタ管ＩＤの
感度を補正しようとするものである。By applying the output of the signal correction circuit SC to the high voltage power supply 15 shown in FIG. 1, the sensitivity of the image dissector tube ID is corrected.
かかる補正回路ＳＣが十分に効果を発揮するには、クー
ゲット１からの光束が所定の大きさ以上である必要があ
る。これは、通常は図示されていない光源の選択および
配置等を適宜考慮することにより可能である。しかし、
かかる配慮にもかかわらず、十分な光束が得られない場
合には、このビュワー■を光路から除去する必要のある
場合も考えられる。このように、構成されたビュワーを
光路から除去した場合には、イメージディセクタ管■Ｄ
の感度を元に戻してやらないかぎり、測定誤差を大きく
する。そのため、本発明では、必要に応してビュワーＶ
を光路内に配設しまたは光路から除去するための、ビュ
ワー昇降機構ＵＤを設け、かつビュワー■が光路中にあ
るが否かを検出機構ＤＭにより検出し、この検出結果に
応じて信号補正回路ＳＣを入切制御するものである。In order for this correction circuit SC to be sufficiently effective, the luminous flux from the Couget 1 needs to be larger than a predetermined size. This is possible by appropriately considering the selection and arrangement of light sources, which are not normally shown. but,
If sufficient luminous flux cannot be obtained despite such considerations, it may be necessary to remove the viewer (2) from the optical path. In this way, when the constructed viewer is removed from the optical path, the image dissector tube ■D
This will increase the measurement error unless the sensitivity is restored to its original value. Therefore, in the present invention, the viewer V
A viewer elevating mechanism UD is provided for placing the viewer in the optical path or removing it from the optical path, and a detection mechanism DM detects whether or not the viewer is in the optical path, and a signal correction circuit is installed according to the detection result. This is to control the SC on/off.
本発明にかかる構成によれば、必要に応じてビュワー■
を光路中に置きまたは光路から除去することができ、し
かも光路中に置かれた場合には、イメージディセクタ管
ＩＤの感度が自動的に補正される。また、このビュワー
■が光路がら除去された場合には、自動的に信号補正回
路ＳＣの動作が休止せしめられるため、不注意による測
定誤差も発生しない。その結果、測定精度を犠牲にする
ことなしに、使い腓手の向上した非接触光学式変位測定
装置が得られる。According to the configuration according to the present invention, the viewer
can be placed in or removed from the optical path, and when placed in the optical path, the sensitivity of the image dissector tube ID is automatically corrected. Further, when the viewer (2) is removed from the optical path, the operation of the signal correction circuit SC is automatically stopped, so that no measurement error occurs due to carelessness. As a result, a non-contact optical displacement measuring device with improved ease of use is obtained without sacrificing measurement accuracy.
第１図は、本発明にかかるビュワーの取りつけ対象とな
る非接触光学式変位測定装置の一例である。
第２図は、本発明にかかるビュワーを備えた非接触光学
式変位測定装置の要部説明図である。
図中、参照符号の対応は、以下の通りである。
１：被測定対象（クーゲット）
２：レンズ系
Ｃ：カメラ部
■Ｄ＝イメージディセクク管
■：ヒュワー
ＳＣ：信号補正回路
ＬＳ：光束分割部材
ＵＤ：昇降装置
ＤＭ：検出装置
代理人江崎光好
代理人 江 崎 光 史FIG. 1 is an example of a non-contact optical displacement measuring device to which a viewer according to the present invention is attached. FIG. 2 is an explanatory diagram of main parts of a non-contact optical displacement measuring device equipped with a viewer according to the present invention. In the figure, the correspondence of reference numerals is as follows. 1: Object to be measured (couget) 2: Lens system C: Camera section ■D = Image dissector tube■: Huwer SC: Signal correction circuit LS: Luminous flux splitting member UD: Lifting device DM: Detection device representative Mitsuyoshi Ezaki People Mitsufumi Esaki
Claims (1)
、電子的に処理して変位測定を行う非接触光学式変位測
定装置の照準を得るためのビュワーにおいて、 光学像撮像用カメラの主レンズ系光路に配設され、撮像
光束の一部を取り出すための光束分割部材を具備するこ
とを特徴とする非接触光学式変位測定装置用ビュワー。 ２、特許請求の範囲第１項記載のビュワーにおいて、 前記光束分割部材の特性に応じて非接触光学式変位測定
装置の測定系の感度を補正するための信号補正回路を具
備することを特徴とする非接触光学式変位測定装置用ビ
ュワー。 ３）特許請求の範囲第２項記載の非接触光学式変位測定
装置用ビュワーにおいて、 前記光束分割部材が主レンズ系光路内外に任意に移動可
能であり、該光路内外移動に応じて対応する信号を発生
ずる部材を具備するもの。[Claims] ■) In a viewer for obtaining aiming for a non-contact optical displacement measuring device that converts an optically captured bright and dark target into an electronic image and electronically processes it to measure displacement, an optical image; 1. A viewer for a non-contact optical displacement measuring device, characterized by comprising a beam splitting member disposed in the main lens system optical path of an imaging camera and for extracting a part of the imaging light beam. 2. The viewer according to claim 1, further comprising a signal correction circuit for correcting the sensitivity of the measurement system of the non-contact optical displacement measuring device according to the characteristics of the light beam splitting member. Viewer for non-contact optical displacement measuring device. 3) In the viewer for a non-contact optical displacement measuring device according to claim 2, the light beam splitting member is movable arbitrarily in and out of the optical path of the main lens system, and a corresponding signal is generated in accordance with the movement in and out of the optical path of the main lens system. Equipped with a member that generates
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9015384A JPS60235002A (en) | 1984-05-08 | 1984-05-08 | Viewer for non-contacting optical type deviation measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9015384A JPS60235002A (en) | 1984-05-08 | 1984-05-08 | Viewer for non-contacting optical type deviation measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60235002A true JPS60235002A (en) | 1985-11-21 |
Family
ID=13990544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9015384A Pending JPS60235002A (en) | 1984-05-08 | 1984-05-08 | Viewer for non-contacting optical type deviation measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60235002A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55156913A (en) * | 1979-05-26 | 1980-12-06 | Touitsu Kogyo Kk | Optical instrument |
| JPS58213207A (en) * | 1983-05-23 | 1983-12-12 | Canon Inc | Recognizing device of image of object |
-
1984
- 1984-05-08 JP JP9015384A patent/JPS60235002A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55156913A (en) * | 1979-05-26 | 1980-12-06 | Touitsu Kogyo Kk | Optical instrument |
| JPS58213207A (en) * | 1983-05-23 | 1983-12-12 | Canon Inc | Recognizing device of image of object |
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