JPS6226694B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a configuration for measuring and controlling the temperature of a measured object given by thermal radiation, and more particularly to a configuration for remote measurement of the temperature of a measured object. temperature measuring pyrometer (hereinafter referred to as thermovision pyrometer)
Regarding.

PRIOR ART AND PROBLEMS The invention finds use in systems for monitoring and controlling the temperature of heat treatments in metallurgy, mechanical engineering, semiconductor technology, microelectronics, thermochemistry, and also in glass manufacturing. For example,
These include temperature monitoring of epitaxial growth of semiconductor layers in microelectronics and control of thermal properties of localized heating of rolled sheets in metallurgical and mechanical industries. In such a configuration, surface non-uniformities related to the emissivity of the measured object (thin film structure with uneven thickness on the measured object surface, oxide film, scale, non-uniform substances, etc.) ) and variations in the sensitivity of the target area of image pickup tubes and television cameras, it is difficult to determine the exact temperature at a specific point on the object (object to be measured), or to measure the entire surface of the object. A problem arises when determining the correct temperature profile. Another difficulty with such known configurations is the reading, i.e.
The temperature measurement results depend on the distance between the object being measured and the television camera, the absorption properties of the intervening media (various windows, water jackets, metals, grids, opacity of gaseous media, etc.), It also depends on the parameters of the video amplifier used (ie, amplitude-frequency response).

Arrangement for measuring the temperature of a measured object, consisting of an optical device in which radiation from the measured object is emitted to the photocathode of a television camera (see Inventor's Certificate No. 409088 approved in the Republic of the Soviet Union) is publicly known. The video signal generated by the TV camera is applied to the input of a television receiver which in turn provides frame and line synchronization pulses to a device for sampling selected line video signals. It will be done. Once the selected number of scan lines has been counted, the video signal is amplified and applied to the other vertical deflection coil or plate of the picture tube. The beam brightness level is increased over the period of the line scan.
The local temperature distribution pattern (ie, temperature profile) of the object to be measured is continuously displayed on the screen along with the image of the object following the point on the dark portion of the selected line.

This configuration provides visible information only of the temperature profile along a particular line of the non-measurable object. However, this configuration has the characteristic of reading the temperature of the non-measurable object by plotting its temperature profile, and furthermore, due to the insufficient accuracy of the device that forms this temperature profile, there is a significant tend to introduce errors.

In another known arrangement for measuring the temperature of a heated object (FRG patent no. 1473258), which consists of a television camera connected to a color television receiver via an amplification stage, the amplification A signal is generated in the stage and a specific color is assigned to each point of the object image on the screen depending on the temperature of each point of the object's surface. In this way, isothermal lines and isothermal regions on the surface of the object to be measured are observed. Quantitative measurement of temperature on an isotherm is
This is done by viewing an image of a reference radiation source of known temperature displayed on the screen of a TV receiver. By comparing the color of the image of the reference source and the image of the object being scanned, the temperature of the latter is obtained.

The principle of generating the color signal of the temperature image in this configuration is based on the discrimination value of the video signal generated by the television camera, but this discrimination value is adversely affected by the occurrence of sensitivity variations over the entire image. receive. Therefore, when this configuration is used to measure the temperature of an object to be measured, a non-negligible error will occur (even if the object to be measured does not exhibit non-uniform emissivity characteristics).

Reducing background shading due to variations in sensitivity over the target area of an image pickup tube (see US Pat. No. 3,902,011) consisting of a television camera and a video monitor connected via a video amplifier The device is known. Note that in this device, the signal is corrected under the control of a computer. This computer includes a storage device having a plurality of memory devices for storing saging correction signals, an interpolation device for interpolating the stored correction values, and a storage device that stores correction signals at storage locations of the storage device during a plurality of scanning frames. and a device for automatic storage.

This prior art technique provides accurate and reliable reproduction of a uniformly illuminated (ie, uniformly heated) image of the object on a video monitor screen.

To program the device, ie to provide the memory with information about the desired correction signal, a reference source with a completely uniform temperature range is required. However, there are certain difficulties in providing a reference source with a very large radiation surface and a uniform emissivity distribution. Therefore, the accuracy of the analysis of the temperature profile is affected overall. Furthermore, even a device that provides the most satisfactory visible image of a heat or temperature profile will not be sufficient to provide a quantitative prediction of temperature effects at at least two points on that profile, due to the essential feature of quantitative prediction. It cannot be done with great precision.

A known device for measuring the temperature difference between two points of the object to be measured, which are displayed on the screen of a cathode ray tube (see USSR Patent No. 303,812), consists of a camera that generates a video signal and a point temperature difference of the object to be measured. a video amplifier for amplifying the video signal, a device for controlling the brightness of the cathode ray beam, and a manual adjustment device coupled to the brightness control device. The manual adjustment device sequentially fixes the brightness of any two visually compared points on the image of the object being explored. This results in a dial mechanically coupled to the brightness control knob.
The temperature difference between two selected points on the object to be measured can be directly known.

However, this known device has a problem with the accuracy of the temperature evaluation value due to the essential characteristics of the method for evaluating the temperature of the object to be measured. Furthermore, mechanical devices are unreliable and, moreover, cannot be done with sufficient accuracy when determining the point of the object to be monitored.

Known radiation monitoring device (British Patent No. 1357940
The device includes an optical device that collects the heat rays emitted by the object to be measured, a reference lamp equipped with a prism system for calibrating this device, and a device that responds to the heat rays from the object to be measured and the reference lamp. a television camera for generating a density-proportional video signal; a television monitor having an input coupled to an output of the television camera; a device for generating a gating marker;・Connected to the camera's synchronization output, and the output is
an apparatus for sampling and measuring video signal amplitude values coupled to a first information input of the monitor, a signal input coupled to the output of the television camera, and a control input coupled to the output of the gating marker generator; , a character generator having a synchronization input coupled to a synchronization output of the television camera and an output coupled to a second information input of the television; and a computer electrically connected to the output of the device for sampling and measuring signal amplitude values.

This device measures the temperature of any point on the object to be measured specifically indicated by a moving dot or marker on the screen of a television monitor.

However, this device lacks accuracy when measuring temperatures at different points on the object to be measured. in this case,
The images are located at different points on the television raster. This accuracy problem is due to the following reasons. Variation in sensitivity at different points on the picture tube target (of the order of 15%) and inadequate adjustment of this variation by a reference lamp equipped with a prism system. Measurement results are affected by the distance between the object to be measured and the television camera. If this distance changes, the device must be recalibrated or its measurements modified. The measurement results are influenced by the absorption properties of the medium interposed between the object to be measured and the television camera. The measurement results are influenced by the parameters of the optical device (the aperture ratio of the lens and its focal length).
In addition, if changes occur in the optical system, recalibration,
Alternatively, appropriate modifications are required. The measurements obtained by the optical system are influenced by the parameters of the video amplifier of the television camera (ie, the amplification-frequency characteristic). This prevents accurate and reliable measurement of the temperature of objects of small size when displayed on the screen of a television monitor.

[Means for Solving the Problems] In order to solve the above problems, the present invention provides the following thermovision pyrometer. In this pyrometer, the heat rays emitted by the object to be measured are converted into video signals by the following configuration. That is, with this configuration, it is possible to eliminate the influence of the surface emissivity of the object to be measured, the parameters of the optical system, the parameters of the video amplifier, and the distance from the object on the temperature measurement results. This improves the accuracy of temperature measurement of the object to be measured.

This purpose consists of an optical system for focusing the thermal radiation flux emitted from the object to be measured; a television camera for sensing the thermal radiation flux and generating a video signal proportional to the density of the thermal radiation flux; a television monitor having an input connected to an output of the television camera; an input connected to a synchronization output of the television camera; and a first information input of the television monitor; a first output for generating a gating marker for a video signal proportional to the density of thermal radiation flux from the object under test; a control input connected to a first generation output of the gating marker generator for sampling and measuring an amplitude of the video signal that is proportional to the density of thermal radiation flux from the object under test; a sync input connected to the sync output of the television camera;
a character generator having an output connected to a second information input of said television monitor; a computer having an output connected to an input of said character generator; In a thermovision pyrometer that measures: thermal radiation from the object to be measured in at least two different spectral regions, having an input connected to the synchronous output of the television camera and focused by the optical system; an information input connected to the information output of the device for sampling and measuring the amplitude of the video signal; an information input connected to the output of the optical filter switching device; a control input connected to a second output of said gating marker generator, and a third control input connected to said first and second outputs of said video amplitude sampling and measuring device, respectively. and a fourth control input; and an information signal switching device having first and second outputs respectively connected to the first and second inputs of the computer. -Achieved by pyrometer.

By using an optical filter switching arrangement in the circuit of the thermovision pyrometer, the characteristic radiation flux from the measured object in at least two spectral configurations, i.e., in two spectral regions with different wavelengths, is reduced. ,
The light enters the photosensitive target of the television image pickup tube one after another. On the other hand, by using an information signal switching device, the density of each spectral component of the radiation flux from the object to be measured is individually extracted and fed to a computer for processing, whereby
The color of the object to be measured, that is, the accurate temperature, can be obtained.
This provides a more accurate temperature measurement.

The optical filter switching arrangement preferably includes a carrier device for at least two optical filters and a carrier in a plane parallel to the optical input of the television camera, with an input connected to the synchronization output of the television camera. A device for controlling movement of the device and a device for tracking the rate of displacement of the optical filter carrier device having an output connected to a first control input of the information signal switching device.

By using a carrier device carrying at least two optical filters, respective spectral components of the heat beam from the object to be measured are passed to the photosensitive target area of the television image tube. By using a device for controlling the displacement of the optical filter carrier, it is possible to displace the carrier relative to the photosensitive target of the television camera in synchronization with the frame frequency of the television camera. can.

By using a device for tracking the rate of displacement of the optical filter carrier, information about the phase characteristics of the optical switching process for switching the spectral components of the radiation flux from the object to be measured can be obtained. . Furthermore, by means of this device, an automatic control of the carrying frame displacement process is effected, as well as a synchronized operation of the device for switching the information signals.

A carrier device for carrying at least two optical filters includes a frame having a ferromagnetic piece located on opposite sides of the frame and in a line parallel to a line passing through the center of the optical filter; for tracking the rate of displacement of the optical filter carrier, preferably comprising a pair of electromagnetic bodies interacting with a piece of ferromagnetic material, and further comprising two opto-electrical couplings for positioning the frame. The apparatus includes first and second amplifiers each coupled to a respective optical-electrical coupler;
Preferably, the matching circuit has an input connected to the output of the first amplifier, a second input connected to the second input, and an output connected to the first control device of the information signal switching device. . A preferred device for controlling the displacement of the optical filter carrier comprises a phase detector having a first input connected to the output of the matching circuit and a second input connected to the synchronization output of the television camera; , a power supply having an input connected to the output of the phase detector, a signal input connected to the output of the power supply, a control input connected to the synchronization output of the television camera, and an input of each electromagnetic magnet, respectively. an electronic switch having first and second outputs.

This realization of the optical filter carrier greatly simplifies the possible embodiments of the optical filter construction. This implementation is required to control only the phase adjustment of the process of displacing the optical filter carrier frame. Two amplifiers used to amplify the signal from the optical sensor and a matching circuit used in the arrangement to track the displacement rate of the optical filter carrier frame are used to track the displacement rate of the carrier frame with respect to the light sensing target of the television image tube. Simplifies the process of generating signals indicating position and the rate of its displacement.

By equipping the control unit with a phase detector, a power supply and an electronic switch, in addition to generating the control pulses necessary for the operation of the optical filter carrier device, it is also possible to generate signals for adjusting the speed and phase of the displacement of the optical filter carrier frame. will be carried out. As a result, phase stability of the optical switching process for the spectral components of the radiation flux is obtained.

A suitable information signal switching device is: a flip-flop with an input connected to the output of the optical filter switching arrangement; a first connected to a second output of the device for sampling and measuring the amplitude of the video signal; and a second input connected to the first output of the flip-flop.
a matching circuit; having a first input connected to a second output of the device for sampling and measuring the amplitude of the video signal and a second input connected to the second output of the flip-flop. a second matching circuit; an information input connected to the information output of the device for sampling and measuring the amplitude of the video signal; a control input connected to the output of the first matching circuit; and a control input connected to the first input of the computer. a first memory unit having a first memory unit; an information input connected to an information output of the device for sampling and measuring video signals; a control input connected to a second matching circuit; a second memory unit having an output connected to the input of the second memory unit; a differentiation stage having an input connected to the input of the gating marker generator; a control input connected to the output of the differentiation stage; an electronic switch having a signal input connected to a first output of the device for sampling and measuring the signal, and an output connected to ground.

Flip-flop of information signal switching device,
A matching circuit, a memory unit, a differentiation stage and an electronic switch make it possible to carry out the process of measuring the amplitude of the video signal corresponding to different spectral components of the radiation flux from the object in time division, and This improves the accuracy when measuring the amplitude of a video signal, thereby increasing the accuracy of temperature measurements.

A preferred thermovision pyrometer is: a first thermovision pyrometer connected to the synchronization output of the television camera;
a second input connected to a third output of the gating marker generator for a video signal proportional to the density of the heat flux from the object under test, and a third information input of the television monitor. a gating marker generator for a video signal proportional to the density of the reference radiation flux; an output connected to the gating marker generator for a video signal proportional to the density of the reference radiation flux; and second and third control inputs respectively connected to third and fourth outputs of the information signal switching device, the video signal being proportional to the density of the reference radiation flux. a device for sampling and measuring; a logarithm having first and second inputs respectively connected to first and second outputs of the device for sampling and measuring the amplitude of the video signal proportional to the density of the reference radiation flux; a divider unit; a control input connected to the output of the logarithmic divider unit; a signal input connected to the output of the television camera; and a device for sampling and measuring the amplitude of the video signal proportional to the density of the reference radiation flux. a video signal clamping circuit having an output connected to a signal input of the device; and a device for sampling and measuring the amplitude of the video signal proportional to the density of the heat flux from the object under test.

a gating marker generator for a video signal proportional to the density of the reference radiation flux; a device for sampling and measuring the amplitude of the video signal proportional to the density of the reference radiation flux; By using a video signal clamp circuit provided with a signal, it is possible to clamp the amplitude reference point of the video signal corresponding to the image of the object to be measured to the value of the video signal corresponding to the image of the reference radiation source. This stabilizes the temperature reference point and results in accurate temperature measurements.

A preferred thermovision pyrometer has: an input connected to the synchronization output of the television camera, a first output connected to a third information input of the television monitor, and a fifth control input of the information signal switching device. a second output connected to a second output for generating a gating marker for a video signal proportional to a density of thermal radiation flux from the object under test, the gating marker being connected to one of the gating markers; a clock input of the generator connected to the other gating marker clock input; a control input connected to the first output of the device for gating marker generation; and a control input connected to the output of the television camera. an information output connected to a second information input of the information signal switching device; and first and second outputs connected respectively to a sixth and seventh control input of the information signal switching device. another device for sampling and measuring the amplitude of the video signal proportional to the density of the thermal radiation flux from the object having a Third
and a fourth input, respectively.

By inserting a second gating marker generator and a device for sampling and measuring a second video signal into the thermovision pyrometer circuit, a second
The amplitude of the video signal corresponding to the point can be monitored. This makes it possible to improve the accuracy of measuring the temperature difference between two points being monitored.

A preferred thermovision pyrometer has: an input connected to the synchronization output of the television camera, and an output connected to a third information input of the television monitor, which is proportional to the density of the heat flux from the object being measured. Gating and
another device for generating markers, the clock input of one gating marker generator being connected to the clock output of the other gating marker generator; a first control input connected to the output of the generator, second and third control inputs connected respectively to third and fourth outputs of the information signal switching device, and connected to the output of the television camera. another device for sampling and measuring the amplitude of the video signal proportional to the density of the thermal radiation flux from the object to be measured, having a signal input; another switching device having first and second control inputs connected to the first output of the device for sampling and measuring the video signal amplitude; and a signal input connected to the first output of the device for sampling and measuring the video signal amplitude; a first input connected to a first output of another device;
a first multiplier unit having a second input connected to a first output of said further switching unit;
a second multiplier unit having a first input connected to the output of the second multiplication unit; and a second input connected to the second output of said another device for sampling and measuring the video signal amplitude; a comparator circuit having a first input connected to the output of a multiplier unit and a second input connected to the output of a second multiplier unit; a comparator circuit having an input connected to the output of the comparator circuit; A unit for measuring the temperature of an object;

a thermovision pyrometer circuit comprising said further device for generating a gating marker and said further device for sampling and measuring the amplitude of the video signal; By using two multiplier units, a comparator circuit, and a unit for controlling the temperature of the object to be measured, it is possible to measure the temperature of the object to be measured as well as to control its temperature conditions more easily and efficiently. can be controlled.

A preferred thermovision pyrometer has: an input connected to the output of a television camera;
a first video signal switching device having first and second control inputs respectively connected to a third and fourth output of the information signal switching device; first and second control inputs connected to the third and fourth outputs of the information signal switching device, respectively, and a third control input connected to the synchronization output of the television camera; a first storage device having;
a division unit having a first input connected to a second output of the first video signal switching device and a second input connected to an output of the first storage device;
first and second control inputs respectively connected to the fourth and third outputs of the information signal switching device; a third control input connected to the synchronization output of the television camera; and a third control input connected to the synchronization output of the television camera. a second storage device having a signal input connected to the output; a first input connected to the output of the division unit; a second input connected to the output of the second storage device;
first and second control inputs respectively connected to the third and fourth outputs of the information signal switching device; a third control input connected to the synchronization output of the television camera; and a third control input connected to the synchronization output of the television monitor. a second video signal switching device having an output connected to the input;

By using two video signal switching devices, a dividing device, and a pair of storage devices in a thermovision pyrometer, it is possible to create an object to be measured without aging distortion due to variations in sensitivity over the target area of a television image pickup tube. temperature images can be formed on the screen of a television monitor.
This makes it possible to display the temperature profile of the object to be measured in a very stable manner.

[Examples and effects] The present invention will be described in detail below with reference to the drawings.

The present thermovision pyrometer for remote measurement of temperature consists of an optical part and an electrical part.

The optical part is the heat ray flux 2 radiated by the object to be measured 3
It is equipped with an optical system 1 (Fig. 1) that converges.

The optical system 1 may be any known one, and furthermore,
It may be in the form of an optical configuration for aligning images of two separated objects, that is, images of objects that are not on the same object plane or on the same optical axis.

The particular manufacturing process for heating the object to be measured is not critical to the nature of the invention. Therefore, the object to be measured 3 is schematically shown in the form of an object plane 3.

The switching arrangement 4 for the optical filter is a heat flux 2 which is transmitted from the optical system 1 to the television camera 5.
located in the aisle. The switching arrangement is also adapted to sequentially pass spectral components of the focused heat flux 2 of two or more different regions of its spectrum.

This switching arrangement includes an electrical circuit in addition to the optical path.

The electrical part of the thermovision pyrometer converts the heat beam 2 into an electrical signal carrying information about the temperature profile of the surface of the object to be measured 3 and generates a standard television signal, thereby:
A television camera 5 is provided which displays the thermovision image of the object 3 on the screen of a television image pickup tube. A television camera generally consists of a television image pickup tube with a system for focusing and deflecting an electron beam, a video amplifier, a sync generator, and a sync scan generator (not shown). The output of the video amplifier is also the output of the television camera 5, and the output of the sync generator is the output of the television camera 5.
It is also the synchronous output of camera 5.

The television image pickup tube of the television camera 5 is typically a vidicon sensitive to the infrared spectral region of the heat rays of the object to be measured. Such vidicons include pyroelectric materials based on triglycine sulfate, as well as special doping and mosaic P-n
Structure of single crystal silicon or germanium,
A target made of an amorphous semiconductor material based on a Sb ₂ S ₃ and Sb ₂ Se ₃ film may be provided. Considering the sensitivity in a reasonably wide spectral region, two sufficiently narrow spectral regions of different wavelengths can be selected to ensure satisfactory operation of the thermovision pyrometer proposed here. Vidicons with membrane and pyroelectric material based targets are preferred. It is also conceivable to use an equivalent of the image pickup tube of the television camera 5 of the thermovision pyrometer constructed from solid-state components, for example a photodetection matrix constructed on the basis of charge-coupled devices.

The video monitor 6 is formed by a television monitor on whose screen a thermovision image of the object to be measured 3 formed by the inherent heat radiation from the object to be measured 3 can be observed.

Television monitor 6 is comprised of a video amplifier, a television picture tube, and vertical and horizontal scan generators (not shown). The input of the television monitor 6 simultaneously serves as the input of a video amplifier and is coupled to the output of the television camera 5. The television monitor 6 is used as an information display device (for displaying numerical, textual, graphical, and other information) and therefore has a number of other information inputs.

The gating marker generator 7 selects a certain point on the thermovision image of the object to be measured 3 observed on the screen of the television monitor 6 in order to measure the temperature of the object to be measured 3 at the selected point. It works like that. This device 7 has an input connected to the synchronization output of the television camera 5, and furthermore the horizontal and horizontal synchronization pulses are connected to the television camera 5.
The synchronization generator of camera 5 provides this device. This device 7 has two outputs, the first of which is connected to the first information input of the television monitor 6.

A gating marker signal is generated at this output and displayed as a moving bright spot on the screen of a television monitor. The position of this point on the thermovision image of the object to be measured 3, which is also displayed on the screen of the television monitor 6, is controlled by a special control unit (not shown) forming part of the gating marker generator 7. ) may be adjusted manually or automatically using

A video signal amplitude sampling and measuring device 8 is used to sample the video signal from a set of scan lines of a television frame. This scanning line and the starting point of sampling within one scanning line are determined by the position of the gating marker on the thermovision image of the object to be measured 3. Here, video signal sampling refers to the extraction of the video signal of a particular portion of a particular scan line, the measurement of the amplitude of the extracted video signal, and the conversion of the measured value into digital form. The device 8 for sampling and measuring the amplitude of the video signal has two inputs. One of them is called signal input,
It is connected to the output of the television camera 5, and the other inputs are control inputs and are connected to the first output of the gating marker generator 7.

One of the three outputs of the device for sampling and measuring the amplitude of a video signal is the information output, which consists of a plurality of electrical output terminals, the number of which measures the code length of the given information and the amplitude of the video signal. Determined by the accuracy when The other two outputs are the first output and the second output.

The switching device 9 for the information signal is a switching device, by means of which a switching action, synchronized with an optical switching process, of an electrical signal representative of the amplitude of the video signal in the respective spectral range is carried out. Information about the spectral components of the radiation flux of the object to be measured 3 that are sequentially passed through the optical filter switching arrangement 4 can be extracted individually. The information signal switching device 9 has an information input consisting of a plurality of electrical input terminals, which information input is connected to the information output of the device 8 for sampling and measuring the amplitude of the video signal. The number of input terminals of switching device 9 is determined by the number of output terminals of device 8. As for its control input, its first input is connected to the output of the optical filter switching arrangement 4. Its second input is the gating marker generator 7
is connected to the second output of the. Furthermore, the third and fourth inputs are respectively connected to the first and second outputs of the device 8 for sampling and measuring the amplitude of the video signal. The two information signal outputs each constitute a plurality of information output terminals. The number of output terminals for each output is determined by the code length of the information arriving at the information input of the switching device 9.

The computer 10 is a program-controlled electronic calculator and is used to perform various operations. The first is to calculate the ratio of the two information signals applied from the output of the information signal switching device 9 to its input, and the second is to calculate the color temperature value of the object to be measured from the storage device. The method is to call the value of and make a decision based on the ratio. A calibrated relationship between the calculated video signal ratio and the temperature of the object to be measured is previously stored in this storage device. The third is an automatic modification of the radiation selectivity of the object 3 to be measured, and the fourth is the distribution of the temperature over the entire surface of the object 3 being scanned or along a given scanning line. One is to store information and the other is to provide this information to an output according to specific operating conditions. The construction of computer 10 is well known to those skilled in the art and therefore details thereof are not shown.

The character generator 11 is a device for generating television images of various characters, number frames, plots of temperature profiles, isotherms and other information displayed on the screen of the television monitor 6. The information input constitutes a plurality of electrical input terminals, the number of which is determined by the plurality of electrical output terminals of the information output of the computer 10, which are further connected to the output of the computer 10. The synchronization input is connected to the synchronization output of the television camera 5,
Its output is connected to a second information input of the television monitor 6. By means of this character generator, the television monitor 6 is able to detect the measured values at selected points on its surface and along a selected scan line, or at a particular set of selected points forming an isothermal area. It can also be used as a video terminal (or display terminal) of the computer 10 that displays numerical data regarding the temperature of the object 3. As a result, the following advantages can be obtained by using a thermovision pyrometer. That is, the temperature image of the object to be measured 3, the positions of selected points on the surface of the object to be measured 3, and the temperature values of the object to be measured 3 at these points are simultaneously and successively displayed in one and the same part of the test device. shown. Therefore, the operator's attention will be concentrated on that point.

The circuit of the character generator 11 is well known in the art (Guglin IN "Electronic Synthesis of
“Television Images” Moscow, Souetskoye
Radio, 1979), so we will not discuss this.

The optical filter switching arrangement 4 comprises a carrier device 12 for the optical filter and a television camera 5.
a device 13 for controlling the displacement of the carrier device 12 for an optical filter having a first input connected to a synchronous output of the device 13;
and a device 1 for controlling the displacement of the carrier device 12.
3 and the first input of the information signal switching device 9.
a device 14 for tracking the rate of displacement of the optical filter carrier device 12, having an output connected to a control input of the device 14;
It consists of and.

The optical filter carrying device 12 carries two filters 16 and 17 whose transmitted radiation has different wavelengths, and further includes ferromagnetic pieces 18 and 19. Note that these ferromagnetic pieces are connected to the optical filters 16 and 1.
7 at opposite ends on a line parallel to the center line. This optical filter holding device has a pair of electromagnets 2
0 and 21, and two more light-electrical couplers 22 and 2
3. Electromagnets 20 and 21 alternately interact with ferromagnetic pieces 18 and 19. 2
The two opto-electronic combination bodies 22 and 23 are arranged as follows. That is, in one steady state when the frame 15 moves in a plane parallel to the plane of the target 24 of the vidicon 25 of the television camera 5, the optical-electrical coupler 23 is moved without the frame 15 interfering with the optical-electrical coupler 22. On the other hand,
In other steady states, the optical coupling of this couple 23 is not broken, but the optical coupling of the opto-electric couple 22 is broken. The opto-electrical combinations 22 and 23 consist of a radiation source 26 (FIG. 3) (for example a light emitting diode) and a photodetector 27 (for example a photodiode or phototransistor).

The device 14 for tracking the displacement rate of the optical filter carrier 12 consists of two amplifiers 28 and 29 and a matching circuit 30 (FIG. 3), the input of each amplifier being connected to an optical-electrical coupler 22, 23 ( 2), a first input of the matching circuit 30 is connected to the output of the amplifier 28, and a second input thereof is connected to the output of the amplifier 29. , whose output is connected to a first control input of the information signal switching device 9 (FIG. 1).

The device 13 for controlling the displacement of the carrier device 12 comprises a phase detector 31 (FIG. 3), the first input of which is connected to the synchronization output of the television camera 5 (FIG. 1); The second input is the match circuit 30
(FIG. 3) and has a control input connected to the output of the phase detector 31.
and an electronic switch 33,
The signal input of the electronic switch 33 is connected to the output of the power supply 32, its control input is connected to the synchronization output of the television camera 5 (FIG. 1), and its two outputs are connected to the output of the optical filter carrier 12. are connected to respective electromagnets 20 and 21 (FIG. 3).

The specific mechanical design of the optical filter switching arrangement 4 is compatible with any other method of optically filtering and switching the spectral components of the radiation flux, e.g.
The same can be done based on mechanical, electro-optical, photo-acoustic techniques, etc.

In the embodiment of the thermovision pyrometer shown in FIG. 4, the gating marker generator 7 (FIG. 4) has an input driven by a scan line sync pulse from the sync output of the television camera. a horizontal scan function counter 35 having an input connected to the output of the pulse generator 34 and an input driven by a frame sync pulse from the sync output from the television camera 5. device 36 for selecting the location of the gating marker on the television raster;
and a horizontal coordinate counter 3 having an input connected to the output of the gating marker position selection device 36.
7, a binary code comparison circuit 38 having a first input connected to the output of the horizontal scan function counter 35 and a second input connected to the output of the horizontal coordinate counter 37; a vertical coordinate counter 39 having an input connected to a second output of the device 36 for selecting the upper gating marker position and driven by a scan line synchronization pulse from the synchronization output of the television camera 5; a first input connected to the output of the vertical scan function counter 40 and a second input connected to the output of the vertical coordinate counter 39;
a binary code comparison circuit 41 having an output connected to a second control input of the information signal switching device 9;
, a first output connected to the output of the binary code comparison circuit 38, a second input connected to the output of the binary code comparison circuit 41, and an output connected to the television.
an output connected to the monitor 6 and the first information input;
The matching circuit 42 (FIG. 4) has a matching circuit 42 (FIG. 4).

The horizontal and vertical scan function counters 35 and 40, the horizontal and vertical coordinate counters 37 and 39, and the binary code comparison circuits 38 and 41 are well known and will therefore not be described in detail. Regarding this point, Mr. Guglin IN's "Electronic
"Synthesis of Television Images", M
See Souetskoye Radio, 1979, pp. 122-130, figures 4 and 5.

A device 35 for selecting the position of gating markers on the television raster includes a control desk with suitable control equipment and a television monitor 6.
It is equipped with a keyboard for manually or automatically positioning the upper marker.

The device 8 for sampling and measuring the amplitude of a video signal comprises a matching amplifier 43 having an input connected to the output of the television camera 5, a signal input connected to the output of the matching amplifier 43, and a gating amplifier 43 having an input connected to the output of the television camera 5; an electronic switch 44 having a control input connected to the output of the matching circuit 42 of the marker generator 7; an input connected to the output of the electronic switch 44; and an information signal switching device 9.
a peak detector 45 having an output connected to a third control input of the A/A; a voltage follower 46 having an input connected to the output of the peak detector 45;
The input of the A/D converter 47 is connected to the output of the voltage follower 46, and the gating output thereof is connected to the fourth control input of the switch device 9. , whose information output is connected to the information input of the information signal switching device 9. The matching amplifier 43, the electronic switch 44, the voltage follower 46, and the D/A converter 47 are well known, and therefore their details will be omitted. The peak detector 45 is formed by a capacitor, which is connected to the switch 44.
is charged through a diode connected to the output of the electronic switch 44 until it reaches a constant voltage value proportional to the amplitude of the video pulse sampled by the video pulse.

The information signal switching device 9 is composed of a flip-flop 48, a coincidence circuit 49 (FIG. 4), a coincidence circuit 50, a storage unit 52, a differentiation stage 53, and an electronic switch 54. flip
The input to the flop 48 is connected to the matching circuit 30 (FIG. 3) of the device 14 for tracking the rate of displacement of the optical filter carrier of the optical filter switching arrangement 4 (FIG. 1) of the optical filter switching device 4 (FIG. 4). connected to the output. A first input of the matching circuit 49 is connected to the gating output of the A/D converter 47 of the device 8 for sampling and measuring the amplitude of the video signal, and a second input thereof is connected to the second input of the flip-flop 48. connected to the output of memory·
The control input of unit 51 is connected to the output of matching circuit 49, and its information input is connected to the information output of A/D converter 47 of device 8 for sampling and measuring the video signal amplitude. Further, its output is connected to a first input of the computer 10. The control input of memory unit 52 is connected to the output of match circuit 50. Its information input is connected to the information input of a D/A converter 47 of the device 8 which samples and measures the amplitude of the video signal. Its output is also connected to a second input of the computer 10. The input of the differentiation stage 53 is the binary comparison circuit 4 of the gating marker generator 7.
1 output. The control input of the electronic switch 41 is connected to the output of the differentiation stage 53, the signal input of which is connected to the output of the peak detector 45 of the device 8 for sampling and measuring the amplitude of the video signal, the output of which is connected to ground. has been done. circuit 49
and 50 are logical AND elements, units 51 and 52 are intermediate storage elements based on D-type flip-flops, and a differentiation stage 53 is a binary code comparison circuit 41.
This device extracts the leading edge of a short pulse at the output of the circuit 41 and generates a very short pulse compared to the input pulse obtained from the output of the circuit 41 to control the electronic switch 54.

When using the thermovision pyrometer shown in FIGS. 1 and 4 for measuring the temperature of the object to be measured 3, the video signal amplitude reference obtained by the device 8 for sampling and measuring the amplitude of the video signal. Measurement errors may occur due to level instability. Adjustments or readjustments to the circuitry of the television camera 5 disturb the black level at which the output of the television camera 5 is clamped. In addition, the TV station, which has become inoperable,
If the vidicon of the camera 5 is replaced with a new image pickup tube, the dark current level may change and the level of the DC current component in the output video signal will be affected in this case. The spectral components of the radiation flux 2 of the object under test 3 have a constant density, and if the DC component of the measured video signal amplitude changes, the measured amplitude value of the video signal corresponding to these spectral components of the thermal radiation flux 2 will change. Change occurs. In order to eliminate this measurement error, the video signal amplitude reference value changes in proportion to both the change in the dark current level of the video amplifier of the television camera 5 and the change in the black level of the video amplifier of the television camera 5. must be clamped to a certain value such that Such a level is considered to define a video signal generated by a reference radiation source that provides a stabilized temperature. The temperature of the reference radiation source is chosen such that the density of its radiation flux slightly exceeds the threshold sensitivity level of the television image tube. By doing this, almost no image of this radiation source appears on the screen of the television monitor 6. Clamping of the video signal amplitude reference value to the video signal from the reference radiation source is accomplished by the thermovision pyrometer of FIGS. 5 and 6.

The thermovision pyrometer includes a device 55 (FIG. 6) that generates a reference radiation flux and a gating device for the video signal that is proportional to the density of the radiation flux.
It consists of a marker generator 56, a device 57 for sampling and measuring the amplitude of the video signal, a logarithmic division unit 58, and a video signal clamping circuit 59. The radiation flux from the device 55 is transmitted to the optical system 1
and an optical filter switching arrangement 4, onto a photo target 24 (FIG. 2) of an image pickup tube 25 (FIG. 3) of a television camera 5. A first input of the device 56 is connected to the synchronization output of the television camera 5. The second input is the third input of the gating marker generator 7 for a video signal proportional to the density of the radiation flux of the object 3.
connected to the output of The output of this device 56 is connected to a third information input of the television monitor 6. A first control input of device 57 is connected to the output of gating marker generator 56 . The third control input is the information signal switching device 9
are connected to the third and fourth outputs of the. The first and second inputs of the log divider unit 58 are respectively connected to the first and second inputs of a device 57 for sampling and measuring the amplitude of the video signal. The signal input of the clamp circuit 59 is connected to the output of the television camera 5. This control input is connected to the output of log divider unit 58. Furthermore, the output of this device is connected to the signal inputs of devices 8 and 57 for sampling and measuring the amplitude of the video signal.

Unlike the gating marker generator 7,
The gating marker generator 56 (FIG. 6) comprises a unit 60 for selecting the position of the gating marker on the television raster, horizontal and vertical coordinate counters 61 and 64, and a binary code comparison circuit 62. 64, a matching circuit 65 identical to the unit 36 for selecting the position of the gating marker on the television raster, horizontal and vertical coordinate counters 37 and 39, and binary code comparison circuits 38 and 41. and a matching circuit of the gating marker generator 7.

A first input of the binary code comparison circuit 62 of the gating marker generator 56 is connected to the gating marker generator 56.
It is connected to the output of the horizontal scanning function counter 35 of the marker generator 7. On the other hand, a first input of the binary code comparison circuit 64 of the gating marker generator 56 is connected to the output of the vertical scanning function counter 40 of the gating marker generator 7.

The device 57 for sampling and measuring the amplitude of the video signal includes a matching circuit 66, a matching circuit 67, a matching amplifier 68 having an input connected to the output of the video signal clamping circuit 59, an electronic switch 69, and an electronic switch. 70, two peak detectors 71 and 72, and two voltage followers 73 and 74. A first input of the match circuit is connected to the output of the match circuit 65 of the gating marker generator 56. Its second input is the flip-flop 4 of the information signal switching device 9.
8 is connected to the first output of 8. Matching circuit 67
The first output of the gating marker generator 5
It is connected to the output of the matching circuit 65 of No. 6. Its second input is connected to the first output of the flip-flop 48 of the information signal switching device 9. The first input of the matching circuit 67 is the gating
It is connected to the output of the matching circuit 65 of the marker generator. Its second input is connected to the second output of the flip-flop 48 of the information signal switching device 9. The signal input of selection switch 69 is connected to the output of matching amplifier 68. Its control input is connected to the output of matching circuit 66. The signal input of electronic switch 70 is connected to the output of matching amplifier 68. Its control input is connected to the output of matching circuit 67. The inputs of peak detectors 71 and 72 are electronic switches 69 and 7.
0 output, respectively. The inputs of voltage followers 73 and 74 are connected to the outputs of peak detectors 71 and 72.

The logarithmic divider unit 58 has two logarithmic amplifiers 75.
and 76, and a comparison circuit 77. 2
The inputs of two amplifiers 75 and 76 are connected to the outputs of voltage followers 73 and 74, respectively, of device 57 for sampling and measuring the amplitude of the video signal.
A first input of comparison circuit 77 is connected to the output of logarithmic amplifier 75. Its second input is connected to the output of logarithmic amplifier 76. Its output is connected to a control input of a video signal clamp circuit 59.

Video signal clamp circuit 59 is a series of amplification regulating elements. The regulating element is a single common emitter transistor stage whose base circuit is the input and whose collector load output is its output (not shown). A control signal that controls the DC component of the collector voltage, ie, the DC component of the video output, is applied to the emitter circuit. The phase of the control signal applied from the output of the logarithmic division unit 58 to the regulating element of the video signal clamp circuit 59 is
It must be such that it gives a negative reduction ring.

The embodiment of the thermovision pyrometer shown in FIG. 7 allows the temperature of the object to be measured 3 to be simultaneously monitored at two points on its surface, and furthermore, the temperature difference between these two points can be directly measured. To this end, the thermovision pyrometer consists of a device 78 for generating gating markers and a device 79 for sampling and measuring the amplitude of the video signal. Gating marker generator 78
Its input is connected to the synchronization output of the television camera 5, and its clock input is connected to the clock output of the gating marker generator 7. Also, its first output is a television
It is connected to a third information input of the monitor 6 , and its second output is connected to a fifth control input of the information signal switching device 9 . The signal input of the sampling/measuring device 79 is connected to the output of the television camera 5, its control input is connected to the first output of the gating marker generator 78, and its information output is connected to the information signal switching device. 9, whose first and second outputs are connected to sixth and seventh control inputs of the information signal switching device 9, whose third and fourth information outputs are connected to the computer 10 third and fourth inputs.

The configuration of the gating marker generator 78 is the same as the gating marker generator 56 (FIGS. 5 and 6).
It is the same as that in Figure).

The arrangement of the device 79 (FIG. 7) for sampling and measuring the amplitude of a video signal is the same as the device 8 for sampling and measuring the amplitude of a video signal.

FIG. 8 shows an embodiment of a thermovision pyrometer, according to which, in addition to the temperature or temperature difference at selected points of the object 3, the control action of the object 3, for example a rolling mill, is measured. It is possible to uniformly control the heating of the sheet material being processed.

This thermovision pyrometer includes a device 80 (FIG. 8) for generating gating markers and a device 8 for sampling and measuring the amplitude of the video signal.
1, switching unit 82, and multiplication unit 8
3, a multiplication unit 84, and a comparison circuit 85.
It is made up of. The input of the generator 80 is connected to the synchronization output of the television camera 5;
Its clock input is connected to the clock output of the gating marker generator 7, and its output is connected to a third information input of the television monitor 6. The signal input of the video signal amplitude measuring device 81 is connected to the output of the television camera 5, and its first control input is connected to the gating marker generator 8.
0 and its second and third control inputs are respectively connected to the third and fourth outputs of the information signal switching device 9. The first and second control inputs of the switching unit 82 are respectively connected to the third and fourth outputs of the information signal switching device, the signal inputs of which are connected to the first output of the device 81 for sampling and measuring the amplitude of the video signal. and its second input is connected to the first output of switching unit 82. A first input of multiplication unit 84 is connected to a second output of switching unit 82, and a second input is connected to a second output of device 81 for sampling and measuring the amplitude of the video signal. The first input of the comparison circuit 85 is the multiplication unit 83
The second input is connected to the output of the device under test 3.
is connected to the output of a device 86 for controlling the temperature of. An example of the object to be measured 3 is a rolling roll 89 of a rolling mill, for example, a water-cooled reflector 8.
Power radiator 87 located at the focal point of 8
(Quartz Infrared Incandescent Lamp) includes rolled metal sheets that have been heat treated in previous or current processing steps. Radiator 87 is seat 3
installed under a specific part of The heating zones of each radiator may overlap to some extent to avoid cold gaps. The radiators 87 are each connected to a specific output of the device 86 that controls the temperature of the object 3 to be measured. This control device 86 is essentially a regulator for the power consumed by the radiator 87. The heat beam 2 from the heated sheet is transferred to a thermovision system using a device such as an optical mirror element 90.
It can be seen with a pyrometer.

Gating marker generator 80 is designed similarly to gating marker generator 56 (FIGS. 5 and 6). On the other hand, a device 81 (FIG. 8) for sampling and measuring the amplitude of the video signal includes:
It is identical to the device 57 (FIGS. 5 and 6) for sampling and measuring the amplitude of the video signal.

Switching device 82 (FIG. 8) includes two electronic switches 91 and 92 and two integrators 93 and 94. The first inputs of the two electronic switches are the third and fourth inputs of the information signal switching device 9.
and their second inputs are connected to each other and to a device 8 for sampling and measuring the amplitude of the video signal. The input of integrator 93 is connected to the output of electronic switch 91, the output of which is connected to one of the inputs of multiplication unit 84. The input of integrator 94 is connected to the output of electronic switch 92, the output of which is connected to one of the inputs of multiplication unit 83.

Specific examples of the multiplication units 83, 84, the comparison circuit 85, and the device 86 for controlling the temperature of the object to be measured 3 will not be described in detail since circuits known in this technical field can be used.

Any of the circuits described above in the various embodiments of the thermovision pyrometer allows the temperature at several preselected points on the surface of the object to be measured to be measured with high accuracy. However, according to this thermovision pyrometer, television monitor 6 (first
The "temperature" image on the screen shown in Figure) cannot be obtained accurately and satisfactorily. In other words, there are the following problems. First, in the above example, the operator will see a conventional "thermal" image on the screen of the television monitor 6. That is, information about the temperature of the object to be measured 3 and variations in the emissivity of the surface of the object to be measured 3 to be scanned, and the target 24 of the image pickup tube 25 of the television camera 5.
This is an image that includes both information about the variation in sensitivity. However, this image is sequentially observed in two spectral regions extracted by the optical filter switching arrangement 4. Second, since optical filtering of the heat ray flux 2 from the object 3 is performed in two different spectral regions, the densities of the filtered spectral components naturally differ. The result is an amplitude difference in the video signals in two adjacent television frames (or fields). This is the television monitor 6.
difference in screen brightness (different integral
screen brightness), which is visually manifested as a reduction in frame scanning frequency and a flickering effect on the screen of the television monitor 6.

As a result, the following facts were found. That is,
Distortion of the thermovision image due to non-uniformity in the surface emissivity of the object to be measured 3 (for example, an integrating circuit or other semiconductor device), and variations in the sensitivity of the photo target 24 of the videocon 25 of the television camera 5. In order to eliminate obscurity and ensure that the thermovision image only contains information about the temperature profile of the surface of the object to be measured 3,
When processing the video signal for generating the thermovision image, the same method can be used as used for processing the measured amplitudes of the video pulses for the various spectral components of the heat flux 2 from the object 3. That is, since the heat flux 2 from the object 3 is viewed in two different spectral regions, it is possible to generate a "relative" video signal obtained by dividing the analog video signal of the same pixel of the object 3. It becomes necessary. The integral of the video pulse sampled by the gating marker is
The spectral ratio temperature measurement for a specific point on a thermovision image was used to measure temperature, but since the maximum temperature reading rate is determined by the duration of two scan frames (or fields), the integration method is called a "relative" method. ” cannot be used to generate video signals. However, the video signal ratio means that the video signal of one television frame obtained when observing one of the spectral components of the heat flux 2 from the object being measured is can only be obtained by delaying. Such a delay records one of the television frames so that the second television frame's video signal reaches the input of the high speed analog division unit. This is done by a working storage device that reads out the data.

one scan frame (i.e. field)
is ``lost'' during the processing to generate the ``relative'' video signal, so the same frame of the ``relative'' video signal is played back twice to compensate for the lost information. There is a need. This is also done with the help of another working storage which generates a "relative" video signal and records the "relative" video signal as it is played back on the screen of the television monitor 6. be able to. The first storage device then records frames of the television image one after another (there is then no "relative" video signal at the output of the divider unit) while the first storage device records the frames of the television image on the screen of the television monitor 6. play back a "relative" video signal.

FIG. 9 shows a circuit of a thermovision pyrometer that can directly observe the temperature image of the object to be measured 3 on the screen of the television monitor 6 while simultaneously measuring the temperature of the spectral ratio at one selected point of the television raster. is shown.

The thermovision pyrometer of FIG. 9 further comprises a video signal switching device 95, a memory 96, a divider unit 97, a memory 98, and a video signal switching device 99. The signal input of the video signal switching device 95 is connected to the output of the television camera 5, and its first and second control signals are respectively connected to the third and fourth signals of the information signal switching device 9. A signal input of the storage device 96 is connected to a first output of a video signal switching device 95, whose first and second control inputs are respectively connected to a third and fourth output of the information signal switching device 9, and whose first and second control inputs are respectively connected to a third and fourth output of the information signal switching device 9. 3 control input is television camera 5
connected to the sync output of Division unit 9
The first input of 7 is a video signal switching device 95
, whose second input is connected to the output of storage device 96 . The signal input of storage device 98 is connected to the output of divider unit 97;
Its first and second control inputs are respectively connected to the fourth and third outputs of the information signal switching device 9, and its third control input is connected to the television camera 5.
connected to the sync output of A first signal input of the video signal switching device 99 is connected to the output of the divider unit 97, a second signal input thereof is connected to an output of the storage device 98, and the first and second
The control inputs are connected to the third and fourth outputs of the information signal switching device 9. its third control input is connected to the synchronization output of the television camera 5;
The output thereof is connected to the input of the television monitor 6.

Video signal switching device 95 includes two electronic switches (not shown). Their signal inputs are connected to each other and to the output of the television camera 5. Their control inputs are connected respectively to the first and second inputs of the flip-flop 48 (FIG. 6) of the information signal switching device (FIG. 9), and their outputs are connected to the signal input of the storage device 96 and the divider unit. 97, respectively.

The video signal switching device 99 includes two electronic switches (not shown) and a signal mixer (not shown).
Contains. The signal inputs of each of the two electronic switches are respectively connected to the output of storage device 98 and the output of divider unit 97, and the outputs are interconnected. The first input of the signal mixer is connected to the output of two electronic switches, the second input of which is connected to the synchronization output of the television camera 5, the output of which is connected to the synchronization output of the television camera 5. , its output is television
It is connected to the input of the monitor 6.

Storage devices 96 and 98 are high speed digital devices (A/
It consists of D and D/A converters, memory matrix, read/write control unit). These specific examples are well known in the art and will not be described in detail.

FIG. 10 shows an example of displaying a thermal image of the object to be measured 3 and alphanumeric information of the temperature at a monitored point on the surface of the object to be measured 3.

The object to be measured 3 is represented by a heater of an epitaxial device in the form of a graphite truncated polyhedral pyramid 100, with a semiconductor substrate 101 facing and held close together. This pyramid 10
0 is heated by a high frequency current supplied by an inductor with winding 102 appearing in the dark area against the light background of the heated pyramid. The pyramid 100 itself is a bright image against a dark, "cold" background. The temperature of the plate 101 is "pyramid surface/
Due to the thermal resistance of the board's interface, it is slightly lower, so it appears darker than the bright pyramid. The brightness distribution on the thermal image shows the temperature profile on the surface of the object to be measured 3 (FIG. 1). A specific temperature measurement point on the surface of the object to be measured is determined by a moving marker dot 103 (FIG. 10) on the thermal image of the object to be measured 3.
determined by the position of The amplitude value of the video signal is measured using this marker dot 103 for short wavelength radiation flux 2 (FIG. 1) and is measured in mV using the upper left information register 104 (10th
For the long wavelength heat ray flux 2 (Fig. 1), the upper right information register 105 (Fig. 10)
It is shown by. The bottom left information register 106 contains the accuracy of the measured object 3 (FIG. 1) at the point marked by the marker dot 103 (FIG. 10), calculated using the computer 10 (FIG. 1). temperature value. Object to be measured 3 directly connected by the thermovision pyrometer in Figure 7
The temperature difference between two points on the surface (FIG. 1) is shown in the bottom right information register 107. The second marker dot 108 (FIG. 10) is the object to be measured 3 (FIG. 1).
indicates a point on the surface of the marker dot 1 and its temperature is
03 (FIG. 10). At the bottom left edge of the screen, there is a reference radiation 55.
An image 109 (FIG. 5) is generated. This temperature is monitored by marker 110 (FIG. 10) for clamping the video amplitude reference.

Figures 11 and 12 show isothermal lines and isothermal regions 111.
(Fig. 11) and thermal profile curve 112 (Fig. 11)
The method for analyzing thermovision images based on Figure 2) is shown. The isothermal region 111 (FIG. 11) and thermal profile 112 (FIG. 12) are generated by the computer 10.
(FIG. 1) and can be generated by the character generator 11. With these, it is possible to effectively analyze the temperature distribution (isotherm line) over the entire surface of the object to be measured 3 or the temperature distribution (thermal profile) along the selected scanning line. The temperature distribution is analyzed by a thermal profile 112 (FIG. 12) along a trajectory determined by the position of a marker 113 on the vertical margin of the television raster. On the other hand, the position of a particular point on this line, ie the position at which a numerical evaluation of the temperature of the object to be measured is made, is determined by the position of the marker dot 114 on the horizontal margin of the television raster. The video amplitude of each spectral region is also indicated by information registers 104 and 105. The temperature value of the spectral ratio is indicated in the information register 106.

Next, the operation of the thermovision pyrometer will be described.

For measuring the temperature of the object to be measured 3 (FIG. 1), an optical system 1, an optical filter switching arrangement 4, and also a television camera 5 are arranged in front of the object to be measured 3.

The heat ray flux 2 from the object to be measured 3 is focused by the optical system 1 and passed through the optical filters 16, 17 (FIGS. 2 and 3) on the frame of the carrier device 12 for the optical filters 16, 17, The image is projected onto the photo target 24 of the image pickup tube 25 of the television camera 5 (FIG. 1), and
An infrared image of the object to be measured 3 (FIG. 1) is generated on the surface of FIG.

The video signal is transmitted from the television camera (first
10, 11 and 12) and then applied to the input of a television monitor 6, on which a visible thermal image (FIGS. 10, 11 and 12) of the object to be measured 3 appears. In other words, each point (Fig. 10,
An image of the temperature distribution of brightness as shown in FIGS. 11 and 12 appears.

In order to measure the temperature of the object to be measured at a particular point on its surface, the amplitude value of the video signal is measured at that point of the television raster corresponding to the thermovision image of a particular point on the surface of the object to be measured 3. There must be. For this purpose, arrangements such as a device 7 for generating gating markers and a device 8 for sampling and measuring the amplitude of the video signal are included in the thermovision pyrometer.

However, there is no one-to-one correspondence between the amplitude of the measured video signal and the temperature of the object to be measured 3. The value is the emissivity of the object to be measured 3, the change in sensitivity of the vidicon target 24 (Fig. 2), and the change in the sensitivity of the object to be measured 3.
(FIG. 1), the characteristics of the optical system 1, the characteristics of the video amplifier of the television camera 5, and other parameters. In order to eliminate these undesirable effects that may affect the thermal analysis at a particular point in the thermovision image, the "relative" amplitude of the video signal must be measured. In other words, it is not the absolute amplitude of the video signal, but rather the same point on the television raster.
It is necessary to measure the ratio of two different video amplitudes for different spectral regions of the radiation flux 2 from the object 3 to be measured. This measurement result is a signal that depends only on the temperature of the object to be measured 3 and can be calibrated on an actual temperature scale.

In order to measure the video signal for the radiation flux 2 with changing spectral components, these spectral components of the radiation flux are previously separated and the radiation flux 2
It is necessary to "identify" the video signal itself according to its respective spectral content. The separation of the spectral components of the radiation flux 2 from the object to be measured 3 is achieved by means of an optical filter switching arrangement 4 , and the identification of the video signal is effected by means of an information signal switching device 9 .

A detailed functional explanation of these devices will be provided.

The television camera 5 produces at its output a video signal U ₅ ' (FIG. 13A, a), a scan line sync pulse U ₅ (FIG. 13A, b) and a frame sync pulse U ₅ (FIG. 13A, b). 13A, c) is generated by the synchronization output of the television camera 5. A device 13 for controlling the displacement of the carrier device 12 has for that purpose one of the outputs of the phase detector 31 (FIG. 3).
It is controlled by a frame synchronization pulse _U5 applied to the control input of an electronic switch 33. signal
U ₃₀ (FIG. 13A, f) is the matching circuit 30 (third
A DC voltage is simultaneously applied from the output of the power supply 32 to the other input of the phase detector 31, while a dc voltage is applied from the output of the power supply 32 to the signal input of the electronic switch 33. Pulse U ₃₃ from the first output of electronic switch 33
(Fig. 13A, b) shows the electromagnetic magnet 20 (the third
Figure) is given to the winding. Pulse U ₃₃ (13th A
, i) is applied from the second output to the winding of the electromagnetic magnet 21 (FIG. 3) for its alternate energization.

The electromagnet 20 is mounted on panel U ₃₃ (Fig. 13A,
b), the frame 15 (FIGS. 2 and 3) begins to move to the left as a result of pulling the ferromagnetic chip 18 towards the electromagnet 20 (FIGS. 2 and 3). (See Figures 2 and 3). As a result, the optical coupling of the optical-electrical coupler 23 is released.
That is, the radiation flux no longer reaches the photodetector 27 from the radiation 26. This results in a signal U ₂₈ at the output of amplifier 28 (FIG. 13A, d)
The amplitude of is the minimum. On the other hand, amplifier 29 (third
The amplitude of the signal U ₂₉ (FIG. 13C) at the output of FIG. Signal at the output of amplifier 29 (Fig. 3)
U ₂₉ (Fig. 13A, e) is the frame 15 (second
3) does not reach its maximum value until it reaches its leftmost position.

When the frame 15 reaches its leftmost end, the thermal radiation flux 2 passes through the filter 17. frame 15
is held in its leftmost position by the residual signal U ₃₃ ' (FIG. 13A, h). Note that its value is slightly smaller than the value that would occur at the initial "starting point".
The next frame synchronization pulse U ₅ (FIG. 15, c) is applied to the input of the electronic switch 33 (FIG. 3), so that the pulse U 33 '' (FIG. 3) of the second input of the electronic switch ₃₃ (FIG. 3) 13A, i) reaches an initial trigger value sufficient to pull the frame to the right. The signal U ₃₃ ″ (13th
Figure A, i) then becomes zero. Signal U ₃₃ ″ (13th A
Figure i) is applied to the winding of the electromagnet 21 (Figure 3) and the frame 15 begins to move to the right. The optical coupling of the optical-electrical coupler 22 is immediately released. The optical coupling of the optical-electrical coupler 23 is performed by the optical filter 16 (FIGS. 2 and 3).
It does not recover until the frame 15 moves to the rightmost end determined by the conditions of complete absence or disconnection of the thermal radiation flux 2 from (FIG. 1). Frame 15 is the synchronization pulse U〓 ₅ of the next frame (Fig. 13A, c)
is held in this position under the action of the residual signal U ₃₃ ″ (FIG. 13A, i) until it reaches the input of the electronic switch 33. The signal at the output of the matching circuit 30
U ₃₀ (FIG. 13A, f) should ideally correspond to the signal U〓 ₅ (FIG. 13A, c) in that period. In this case, its two inputs are the signal U ₂₈
(Fig. 13A, d) and U ₂₉ (Fig. 13A, e). However, optical filters 16 and 17
Frame 15 of the carrier device (Figs. 2 and 3)
shows a small moving speed when operating based on the electromagnets 20, 21, so the signal U ₃₀ ′ (13th A
Fig. 13A, f) and signal U28 (Fig. 13A, d)
As a result of the distortion of U ₂₉ (Fig. 13A, e), the signal U
〓 ₅ (Figure 13A, c) is different. These distorted signals U ₂₈ ′ and U ₂₉ ′ are shown in FIGS. 13A, d and 13A.
Indicated by the dotted line in Figure, e.

Logical "modulo - 2" of signal U = ₅
With respect to the _{addition of} If carried out by integrating the resulting signal (as shown in _FIG . ) changes according to the speed of displacement.

The "exclusive OR" and "integration" operations are performed by phase detector 31 (FIG. 3). Its output-
U ₃₁ (Fig. 13A, g) is the variable power supply 32 (third
(Figure) controls the operation. Pulse U〓 ₅ (13th A
The greater the difference between FIG. 13A, c) and U ₃₀ ′ (FIG. 13A, f), i.e. the smaller the speed of displacement of the frame 15 (FIG. 2), the more the signal U ₃₁ (FIG. 13A, f) , g), power supply 32 (Fig. 3)
output voltage and trigger pulse amplitude U ₃₂ (13th
Figure A h, i) becomes even higher.

The process of displacing the frame 15 (FIGS. 2 and 3) stabilizes its phase and, as a result, stabilizes the spectral components of the thermal radiation flux from the object 3 in good synchronization with the field or frame frequency. can be switched optically. Switching configuration 4
It is desirable to specify the operating conditions as follows: The switching speed of the spectral elements of the radiation flux 2 from the object to be measured 3 does not match the frame scanning frequency of the television camera 5, but is a multiple thereof, that is, the optical switching is performed at intervals of the integral number of frames. be exposed. It can be seen that this is necessary if certain difficulties arise when performing a fast optical-mechanical displacement of the frame 15 (FIG. 3) of the carrier device 12 for the optical filters 16 and 17. . Control device 13 and frame 15
The operation of device 14 for tracking the rate of displacement of is similar to that described above. But in this case pulse U ₃₀
(FIG. 13A, f) except that the frequency is not equal to the frame scan pulse frequency.

The selection of the point in the thermovision image of the object to be measured 3 (FIG. 1), at which the temperature of the object to be measured 3 is measured, is achieved by applying the scanning line synchronization pulse U ₅ (FIG. 13A, b) and the television camera to the first The gating marker ₁₀₃ (10th
This is done by means of a device 7 which generates the following: Its synchronized operation is ensured by the scan line synchronization pulse U ₅ (FIG. 13A, b) applied to the input of the pulse generator 34 (FIG. 4). Pulse U ₃₄ (13th B
, j) is generated at the output of the generator 34. The initial digits of each pulse sequence are always the same. The scan line synchronization pulse U ₅ (FIG. 13A, b) prevents the generator 34 (FIG. 4) from oscillating. signal
U ₃₄ (FIG. 13B, j) is a horizontal scanning function signal in which a minute horizontal position on the television raster corresponds to each pulse in the signal U ₃₄ (FIG. 13B, j). The vertical scan function signal is formed by the scan line synchronization pulse U ₅ (FIG. 13A, b) itself. This is because a particular number of scan lines occupying a particular vertical position on the television raster are assigned to a particular scan line synchronization pulse U ₅ (FIG. 13A, b). Horizontal and vertical scan line function signals U ₃₄ (FIG. 13B, j) and U ₅
(FIG. 13A, b) are applied to the count inputs of horizontal and vertical scan counters 35 and 40 (FIG. 4). The code signal from its binary output is applied to the first inputs of comparator circuits 38 and 41, respectively.
The input of the device 36 for selecting the position of the gating marker 103 (FIG. 10) on the television raster is the frame synchronization pulse U ₅ (FIG. 10).
Figure A, c). These pulses are applied via a device 36 (FIG. 4) to the count inputs of horizontal and vertical coordinate counters 37 and 39, whose outputs contain the number of counted frame synchronization pulses U ₅ (FIG. 13A, c). generates a digital code. This digital code defines gating markers 103 (FIG. 10) that are generated on the television raster. Counters 37 and 39 (fourth
The code output of the figure) is the binary code comparison circuit 38 and 4.
1 (FIG. 4). Vertical and horizontal bar signals U ₃₈ (FIG. 13B, k) and U ₄₁ (FIG. 13B, l) are generated at the outputs of comparator circuits 38 and 41. These crosspoints define the location of gating markers 103 (FIG. 10) on the television raster. Signal U ₃₈ (13th B
Figure, k) U ₄₁ (Figure 13B, l) is the matching circuit 4
2 (FIG. 4). This circuit 42
generates at its output a signal U ₄₂ (FIG. 13B, m) which drives the first information input of the television monitor 6 and generates a gating marker 103 (FIG. 10) on the screen. .

Device 36 for selecting the position of gating marker 103 (FIG. 10) on the television raster
The keyboard assembly portion (FIG. 4) can move the marker 103 along the vertical and horizontal coordinate axes to any point on the television image of the object to be measured 3 (FIG. 4). This can be accomplished both manually and automatically. In the latter case, a mode for automatically scanning the entire television raster or a specific portion thereof is preset on the keyboard using marker 103 (FIG. 10). Signal U ₄₂ (FIG. 13B, m) is There is also a device 8 (fourth) for sampling and measuring video amplitude.
(Figure) controls the operation. For this reason, the signal U ₄₂ is
It is applied to the control input of electronic switch 44. The signal input of the electronic switch 44 is the matching amplifier 4.
3 by a video signal U ₅ (FIG. 13A, a) from the output of a television camera 5 (FIG. 4). Matching amplifier 43 prevents the operation of electronic switch 44 from affecting the waveform of video signal U ₅ (FIG. 13A, a). A short video pulse U ₄₄ (FIG. 13B, n) is passed to the output of switch 44 (FIG. 4). The duration of these pulses is determined by gating marker 10
3, corresponding to switch U ₄₂ (Fig. 13B, m),
Their amplitude corresponds to the amplitude of the video signal U ₅ at these points of the television raster gated by these pulses. Video Pulse U ₄₄
(FIG. 13B, n) is the peak detector 45 (fourth
) is integrated by the DC voltage signal U ₄₅ ′ (13th
Figure B, n) is generated. Its value indicates their amplitude. Voltage follower 46 (FIG. 4) operates as a buffer stage, thereby peak detector 45
The discharge current of the output capacitance of is reduced due to its high impedance. (Other analog storage units can be used in place of follower 46.) A/D converter 47 converts the analog signal
Digitize U ₄₆ =U ₄₅ ' (Figure 13B, n).

After sampling the video signal at a particular point in the television image and measuring its amplitude, a computer 10 is used to identify the video amplitudes corresponding to different spectral components of the seen radiation flux and to calculate their ratio. (Figure 10). Its control input is the matching circuit 30 (first
(FIG. _13A , f) from the output of FIG. Each pulse U ₃₀ (first
FIG. 3A, f) shows the alternating switching of the optical filters 16, 17 (FIGS. 2, 3) passing through the heat beam bundle 2 (FIG. 1).

At this time, the signal U〓 ₄₈ (Fig. 13A, c) U〓 ₄₈
The signals of (FIG. 13B, p) appear at the first and second outputs of flip-flop 48. These periods correspond to the thermal flux of one spectral component (the 9th
Figure) shows the time that it is viewed. These signals cause logic matching circuits 49 and 50 (FIG. 4) to:
A gating signal U ₄₇ (13C
Figure, q) can be passed alternately. signal
U ₄₉ (Fig. 13C, r) or U ₅₀ (Fig. 13C, r)
s) is applied from the outputs of matching circuits 49, 50 to the control input of memory unit 51 (FIG. 4).
Its information input is driven by the information output of A/D converter 47.

Signals U ₄₉ (Fig. 13C, r), U ₅₀ (Fig. 13C
Fig. s) shows memory units 51 and 52 (fourth
Since the control inputs of FIG. The information indicates the amplitude of the video signal for each spectral component of the heat flux 2 from the object 3 under test.

In order to prevent the video amplitude measurements from being influenced by the varying spectral sensitivity of the image pickup tube 25 (FIG. 3) of the television camera 5 (FIG. 4) for the selected spectral region, , the peak detector 45 (FIG. 4) immediately before each successive integration of the signal U ₄₄ (FIG. 13B, n) in order to prevent it from being influenced by changes in the spectral brightness of the object under test 3. Preferably, the capacitance is discharged. Note that information about the amplitude of the video signal is stored in this capacity (that is, information about the radiation flux of the previous spectral component is stored). This discharge is a pulse U ₄₁ from the output of the binary code comparison circuit 41 (FIG. 4) of the device 7 for generating the gating marker.
(FIG. 13B, l) by the leading edge. For this reason, the pulse U ₄₁ (Fig. 13B, l)
is applied to the input of the differentiation stage 53 (FIG. 4).
This causes a short pulse U ₅₃ (13th
C, t). This pulse activates electronic switch 54 (FIG. 4) to ground the output of peak detector 45. That is, signal U ₄₅ (13th C
Figure, u) is grounded. By this resetting of the device 8 (FIG. 4) for sampling and measuring video signals, the signal U ₄₅ =U ₄₆ (FIG. 13C,
u) can be generated. This signal indicates the amplitude of the video pulses U〓 ₁ and U〓 ₂ of the respective spectral components of the heat flux 2. The accuracy of this amplitude measurement does not depend on the spectral sensitivity of the image pickup tube 25 (FIG. 3) and the spectral brightness of the object to be measured 3 (FIG. 4). That is, this accuracy is independent of the amplitude ratio (U〓 ₁ is greater than U〓 ₂ or U〓 ₁ is U〓 ₂
). The computer 10 (FIG. 4), which receives at its input information about the spectral components of the radiation flux 2 from the object to be measured 3, calculates the ratio of the input signals and uses the result of this calculation to calculate the The color of the measurement object 3, that is, the accurate temperature can be obtained.

By means of the character generator 11 information about the temperature from the computer 10 is displayed directly on the screen of the television monitor 6.

In order to avoid video amplitude measurement errors caused by the instability of this amplitude reference level, a video signal clamp circuit 59 (FIGS. 5 and 6)
is provided in the thermovision pyrometer. In order to perform this clamping on the video signal supplied, for example, from the device 55 for generating the reference radiation flux, a second measurement channel is provided, which channels the radiation flux from the reference radiation device 55. unit 5 for generating gating markers for video signals proportional to the density of
6, a device 57 for sampling and measuring the video amplitude of the signal proportional to the density of the radiation flux from the reference radiation device 55, and a logarithmic division unit 58. The operation of these units is described below. To generate the second gating marker 110 (FIG. 10) on the television raster, the signals from the outputs of counters 35 (FIG. 6) and 40 are: It is applied simultaneously to the inputs of the respective comparison circuits 38 and 41 and to the inputs of the comparison circuits 62 and 64. The outputs of the comparison circuits 62 and 64 are sent to the matching circuit 65.
and generates a signal that is applied to the information input of the television monitor 6. As a result, a gating marker 110 (the 10th
Figure) gives an image.

The image 1 of the reference radiation generator 55 (Fig. 6) is selected by the unit 60 (Fig. 6) for selecting the position of the gating marker 110 (Fig. 10).
A marker 110 is positioned on 09.

The output of match circuit 65 also controls the operation of device 57 for sampling and measuring video amplitude.
Therefore, the output of matching circuit 65 is applied to the first inputs of matching circuits 66 and 67. The second input of match circuit 66 is connected to flip-flop 48 (fourth
The signal U〓 from the first output of ₄₈ (the first
Figure 3B, driven by o). Matching circuit 67
The second input of (FIG. 6) is driven by the signal U ₄₈ (FIG. 13B, p) from the second output of flip-flop 48 (FIG. 6).

At the output of the matching circuit 66, a signal U ₆₆ (FIG. 13C, v) of the gating marker 110 for one spectral component of the reference radiation flux is generated; The signal U ₆₇ (first
Figure 3C, w) is generated. These signals each control their own specific channels for sampling and measuring video amplitude. signal
U ₆₉ (Fig. 13C, x) is the electronic switch 6
9 and the signal U ₇₀ (Fig. 13C,
y) is generated at the output of the electronic switch 70, and the signal U ₇₃ (FIG. 13C, x) corresponding to the measured amplitude of the video signal for the first spectral component of the radiation flux /U〓 ₁ / is generated at the output of the voltage follower 73 (Figure 6)
generated in the output of The second of the radiation flux /U〓 ₂ /
A signal U ₇₄ (FIG. 13C, y) corresponding to the measured amplitude of the video signal for the spectral components of is generated at the output of voltage follower 74 (FIG. 6). The logarithmic division unit 58, based on the principle of calculating (measuring or converting) the beginning of the logarithm of the input signal with the measurement of the difference in the input signal, calculates the density of the radiation flux from the device 55 for generating the reference radiation flux. Determine the logarithm of the ratio of the spectral components of the proportional video signal. The signal obtained thereby depends only on the temperature of the device 55 for generating the reference radiation flux;
It does not depend on its emissivity. As a result, a specific reference level of the video signal can be maintained with high precision by the video signal clamp circuit 59 having a control input to which the obtained signal is applied (even if the device 55 is not a black body). friend).

In order to measure the temperature of the object to be measured 3 (Fig. 1) at several other points, it is also possible to
A gating marker 108 (Figure 10) and a device 79 (Figure 7) for sampling and measuring video amplitude for direct measurement of temperature differences at points.
is further included in the thermovision pyrometer circuit. The operation of the gating marker generator 78 is the same as the gating marker generator 7, and the operation of the video amplitude sampling and measuring device 79 is the same as that of the video amplitude sampling and measuring device 8. . In this case, the image of the other marker 108 (FIG. 10) is generated on the screen of the television monitor 6, and the numerical value of the absolute temperature difference monitored by the gating markers 103 and 108 is stored in the information register 10.
7.

For thermal control of the object to be measured 3 (FIG. 1), the thermovision pyrometer includes a device 8 for generating gating markers 108 (FIG. 10).
0 (FIG. 8), a device 81 (FIG. 8) for sampling and measuring video amplitude, a switch unit 88, first and second multiplier units 83 and 8.
4. Comparison circuit 85 and further, device under test control device 8
6.

An example of this process is temperature control of hot rolled sheet material. The radiation flux generated by the sheet 3 is displayed by a thermovision pyrometer using optical elements such as a mirror 90. Two gating markers 103 and 108
(Fig. 10) is used to select two points on the surface of sheet 3 (Fig. 8). At these points the temperatures are made equal. A thermovision pyrometer generates a signal to a temperature control device for the object being measured. This signal repowers the respective radiator 87, resulting in an equalization of the temperature profile of the seat 3.

The operation of gating marker generator 80 and video amplitude sampling and measuring device 81 is as follows:
Gating marker generator 56 (FIG. 6) and video amplitude sampling and measurement device 56
The operation is the same as that shown in (Fig. 6). At the output of the device for sampling and measuring video amplitude, an additional gating marker 108 (FIG. 10) determines the radiation flux (e.g., Wavelength λ ₁ )U〓
₁ ( _FIG . 13C, x) of a value proportional to the spectral density of one of the components. At the second output of the video amplitude sampling and measuring device 81 (FIG. 8), the radiation flux ( _{The voltage value U 74 ( 13th} C
Fig. y) is generated.

The operation of the switching unit 82 (FIG. 8) is completely controlled by electronic switches 91, 92, and the signal U ₄₅ (FIG. 13C) from the first output of the device 8 (FIG. 8) for sampling and measuring the video amplitude is controlled completely by electronic switches 91, 92. , u) is applied to its signal input. This signal is integrator 9
3 and 94, thereby causing the first spectral component (short wavelength, λ
₁ ) A signal proportional to the spectral density of U〓 ₁ (Fig. 13C, u) and a signal proportional to the spectral density of the main gating marker 103 (10th
The other spectral component (of long wavelength λ ₂ ) of the radiation flux from the object to be measured 3 to the same point on the surface of the object to be measured defined by the _position of
A signal U ₉₄ proportional to the spectral density in Fig. u) is obtained at the output of these integrators. Switch
From the second output of unit 82 (FIG. 8), the signal
U ₉₃ (U〓 ₁ ) is obtained, and the switch unit 82
A signal U ₉₄ (U〓 ₂ ) is obtained from the first input of .

In this way, two different spectra (in terms of wavelength) of the radiation flux from the object to be measured are obtained at different points on the surface of the object to be measured (points indicated by markers 108 (FIG. 10)) and points indicated by markers 103. Signals indicating the density of components U ₇₃ (U〓 ₁ ) and U ₉₄ (U〓 ₂ )
A signal U ₈₃ proportional to the product of is obtained at the output of the multiplication unit 83. Signals U ₉₃ (U〓 ₁ ) and U ₇₄ indicating the density of two other spectral components of the radiation flux from the object to be measured at different points on the surface of the object to be measured.
A signal U ₈₄ proportional to the product of (U〓 ₂ ) is generated at the output of multiplication unit 84 (FIG. 8).

The agreement of the color temperatures at two different points on the surface of the object to be measured is given by the ratio agreement of the two respective signals.

U ₇₃ /U〓 ₁ //U ₇₄ /U〓 ₂ =U ₉₃ /U〓 ₁
//U ₉₄ /U〓 ₂ / The coincidence of these temperatures holds true for the condition of coincidence of the products of the respective signals.

U ₇₃ /U〓 ₁ ×U ₉₄ /U〓 ₂ / =U ₉₃ /U〓 ₁ / ×U ₇₄ /U〓 ₂ / These are generated at the outputs of multiplication units 83 and 84, respectively.

Comparison of signals U ₈₃ and U ₈₄ is performed by comparison circuit 85. The output signal controls the temperature of the object 3 to be measured.

The thermovision pyrometer, shown in block diagram form in FIG.
The "temperature" of the object to be measured 3 is determined by taking into account the sensitivity variations on the target 24 (Figure 2) of the image pickup tube 25 (Figure 3) of the camera 5 (Figure 9) and the variations in the emissivity of its surface. Image generation can be performed. This operation is based on the generation of a "relative" video signal for two spectral components from the object under test 3. This method of generating a "relative" video signal delays the video signal with information about the distribution of the spectral density of the radiation from the object under test 3 in one spectral component and the spectral density of the radiation in the other spectral component. The point is to obtain the spectral ratio of the arrival of the video signal with information about its distribution. Video signal U ₅ (FIG. 13A, a) from the output of television camera 5 (FIG. 9) is applied to the input of video signal switch device 95. Signals U〓 ₄₈ (FIG. 13B, o) and U〓 ₄₈ (FIG. 13B, o) from the output of flip-flop 48 (FIG. 6)
p) are respectively applied simultaneously to the first and second control inputs of the switching device 9.

These television frame video signals corresponding to viewing respective bundles of spectral components from the object under test 3 are generated at first and second outputs of a video signal switch device 95 (FIG. 9). Ru. The video signal of the first television frame is written to the storage device 96 via the conduction channel of the switch device 95, ie "output of television camera 5 - input of storage device 96". This channel is gated by a pulse _U.sub.48 (FIG. 13B, o) applied to the first control input of switching device 95 (FIG. 9). The same signal is used to select the "write" mode of operation of the storage device 96 (signal, U ₄₈
(FIG. 13A, c) is applied to its first control input). Pulse U = ₄₈ operations are completed, pulse U
〓 Based on the start of the movement of ₄₈ ,
The camera 5--first input of divider unit 97 channel is enabled in switch device 95 (FIG. 9). At the same time, a pulse U ₄₈ (FIG. 13B, p) applied to the second input of storage device 96 (FIG. 9) selects the "read" mode of operation for reading information from storage device 96.
As a result, the video signals of two adjacent frames (fields) corresponding to two different spectral components of the radiation flux 2 from the object 3 reach the two inputs of the divider unit 97 simultaneously.
The ratio of these signals is given by the output of the divider unit 97 and corresponds to the "relative" video signal which is given to the input of the television monitor 6 via the conduction channel of the switch unit 99 (this channel is enabled by the pulse U ₄₈ (FIG. 13B, p) reaching its second control input). At the same time, this "relative" video signal is applied to the first control input with a pulse U 〓 ₄₈
(FIG. 13B, p) is stored in storage device 98 (FIG. 9). In the next television frame (or frames), the second pulse U〓 ₄₈ (Fig. 13B,
When o) is reached, the cycle of operation of devices 95 and 96 (FIG. 9) is repeated. In this case, no "relative" video signal appears at the output of divider unit 97. However, a channel of the switch unit is enabled and connects the input of the television monitor 6 to the output of the storage device 98. At this time,
The storage device 98 operates in a "read" mode provided by the pulse U ₄₈ provided to the second control input. The write operations of storage devices 96 and 98 (FIG. 9) are controlled synchronously with the scan line and frame frequency of television camera 5. For this purpose, the scan line synchronization pulse U〓 ₅ (Fig. 13A,
b) and frame synchronization pulse U〓 ₅ (Fig. 13A,
c) is applied from the synchronization output of the television camera 5 to the third control input of the storage devices 96 and 98. The same synchronizing pulse U〓 ₅ (Fig. 13A, b) and U
₅ is applied to the third control input of the video signal switching device 99 and incorporated into the "relative" video signal to cause the television monitor 6 to operate synchronously.

The thermovision pyrometer shown in FIG.
6 and 98, if the divider unit 97 is operated fast enough, it is possible to generate a "temperature" image in real time. Otherwise, there will be insufficient accuracy and reliability in the presentation of that information. In order to accurately generate a temperature profile, relatively slow "frame-by-frame" scanning can be performed using gating markers, using relatively slow devices. In this case, marker 103
(FIG. 10) shows the thermovision of the object 3 at discrete intervals of two scanning frames (or fields) or at intervals determined by the period of the signal U ₄₈ (FIG. 13B, o, p). Scan the image (all or part of the television raster). This temperature is measured at each discrete point and the measurements are stored in the memory of computer 10. After the marker 103 (FIG. 10) has scanned the entire thermovision image and the computer 10 has memorized the temperature information at each point on the object 3, this image is created by adding a specially differentiated isothermal image to the thermovision image of the object 3. Line or isothermal region 111 (Figure 11)
or as a temperature profile plot 112 (FIG. 12) which is similarly observed directly against the background of the thermovision image 100 (FIG. 10) of the object 3 (FIG. 1). can be displayed on the screen by the character generator 11.

The thermovision pyrometer proposed here has the following characteristics.

・ Recording temperature range 200 to 2000℃ ・ Tolerance of the device for measuring the temperature of the object to be measured
±0.5℃ ・Tolerance of temperature measurement method of measured object
±(1~1.5)% ・High-speed performance of thermovision pyrometer
40ms The thermovision pyrometer according to the invention has the following advantages over conventional devices. According to the pyrometer of the present invention, the temperature of the object to be measured can be monitored with high accuracy at any selected point of the object and over the entire surface of the object. From the temperature measurement results, it is possible to know the emissivity of the object to be measured, the radiation absorption of the intervening medium, and the variations in sensitivity on the photo target of the image pickup tube of the television camera. Furthermore, the index of the thermovision pyrometer is independent of the distance between the television camera and the object to be measured, the parameters of the optical system, and the parameters of the video amplifier of the television camera. This feature allows objects at different distances from the television camera, different focal lengths, and even different brightnesses to be measured without the need to recalibrate the thermovision pyrometer.

According to the thermovision pyrometer of the present invention, the temperature image of the object to be measured can be observed on the screen of a television monitor, an accurate image of the temperature distribution on the surface of the object to be measured can be obtained, and the sensitivity of the image pickup tube target can be improved. The occurrence of changes affecting the quality and accuracy of the image can be avoided.

According to the pyrometer of the present invention, the temperature difference at any point on the object to be measured can be measured with high accuracy, and as a result, the temperature distribution on the surface of the object can be effectively analyzed.

According to the pyrometer of the present invention, in addition to being able to directly monitor the temperature, it is also possible to control the temperature.
This ensures precise control of the temperature process.

[Brief explanation of the drawing]

1 is a block diagram of a thermovision pyrometer according to the present invention, FIG. 2 is a schematic diagram of an optical filter carrying device according to the present invention, FIG. 3 is a schematic diagram of an optical filter switching arrangement, and FIG. 4 is a schematic diagram of a thermovision pyrometer according to the present invention. FIG. 5 is a block diagram of another embodiment of the thermovision pyrometer according to the invention; FIG. 6 is a block diagram of another embodiment of the thermovision pyrometer according to the invention; FIG. 7 is a block diagram of another embodiment of the thermovision pyrometer according to the invention. FIG. 8 is a block diagram of yet another embodiment of the thermovision pyrometer of the present invention; FIG. 9 is a block diagram of yet another embodiment of the thermovision pyrometer of the present invention; FIG. 10 is a block diagram of an example, and FIG.
1 is a diagram showing another example of the thermovision image of the present invention, FIG. 12 is a diagram showing another example of the thermovision image of the object to be measured according to the present invention, and FIGS.
Figure 3C is a time chart of output amplitude changes in each unit according to the present invention. Explanation of symbols, 1: Optical system, 2: Heat ray flux, 3: Object to be measured, 4: Optical filter switching configuration, 5: Television camera, 6: Television monitor, 7: Heat from object to be measured 3 Gating marker generation device for a video signal proportional to radiation flux, 8: Device for sampling and measuring the amplitude of a video signal proportional to the density of thermal radiation flux from the object to be measured 3, 9: Information signal switching device, 10 : computer, 11: character generator, 12: at least two carrier devices for optical filters, 13: device for controlling the displacement of the carrier device for optical filters, 14: device for tracking the speed of displacement of the carrier device for optical filters, 15 : Frame, 16: Optical filter, 1
7: Optical filter, 18, 19: Ferromagnetic piece, 2
0, 21: Electromagnet, 22, 23: Optical-electrical coupler, 28, 29: Amplifier, 30: Matching circuit, 3
1: Phase detector, 32: Power supply, 33: Electronic switch, 48: Flip-flop, 49, 50: Matching circuit, 51, 52: Memory unit, 53: Differential stage, 54: Electronic switch, 56: Reference radiation flux device for generating a marker for a video signal proportional to the density of the reference radiation flux, 57; device for sampling and measuring the video signal amplitude proportional to the density of the reference radiation flux;
8: Division unit, 59: Video signal clamp circuit, 78: Device for generating a gating marker for a video signal proportional to the density of thermal radiation flux 2 from the object to be measured 3, 79: Heat from the object to be measured 3 Device for sampling and measuring the amplitude of a video signal proportional to the density of the radiation flux, 80: Gating marker generator for a video signal proportional to the density of the thermal radiation flux 2 from the object to be measured 3, 81: Object to be measured 82: a device for sampling and measuring the amplitude of a video signal proportional to the density of the radiation flux 2 from 3;
Switch unit, 83, 84: Passenger unit, 85: Comparison circuit, 86: Temperature control device for measured object 3, 95: Video signal switch device,
96: Storage device, 97: Division unit, 98: Storage device, 99: Video signal switch device.

Claims (1)

[Claims] 1. An optical system for focusing thermal radiation flux emitted from an object to be measured; and a television for sensing thermal radiation flux and generating a video signal proportional to the density of the thermal radiation flux. a camera; a television monitor having an input connected to an output of the television camera; an input connected to a synchronization output of the television camera; and a first information input of the television monitor; a first output connected to the output of the television camera; and a first output connected to the output of the television camera; input and the above gating
a control input connected to a first output of the marker generator; a character generator having a synchronization input connected to a synchronization output of a camera; and an output connected to a second information input of said television monitor; having an output connected to an input of said character generator; in a thermovision pyrometer for remotely measuring the temperature of a measured object, comprising: a computer; having an input connected to the synchronous output of said television camera 5; and having at least two an optical filter switching device 4 for sequentially passing spectral components of the thermal radiation flux 2 from the object to be measured 3 in two different spectral regions;
an information input connected to an information output of a device 8 for sampling and measuring the amplitude of said video signal; a first control input connected to an output of said optical filter switching device 4; and said gating marker generating device 7. a control input connected to a second output of the computer 10; third and fourth control inputs respectively connected to the first and second outputs of the device 8 for sampling and measuring video amplitude; The thermovision pyrometer as described above, further comprising: an information signal switching device 9 having first and second outputs connected to the first and second inputs, respectively. 2. A thermovision pyrometer according to claim 1, in which the optical filter switching device 4 comprises: a carrier device 12 for at least two optical filters 16, 17; and a synchronous output of the television camera 5. a device 13 for controlling the displacement of the carrier device 12 for the optical filters 16, 17 in a plane parallel to the optical input of the television camera 5, having an input connected to it; a device 14 for tracking the rate of displacement of the carrier device 12 for said optical filters 16, 17; Thermovision pyrometer. 3. A thermovision pyrometer according to claim 2, wherein the carrier device 12 for the at least two optical filters 16, 17: has opposite end faces, on which the optical filter 16 is mounted. , 17, ferromagnetic pieces 18 connected on a line parallel to the line passing through the center line of
19; said frame 15;
two electromagnets 20, 21 interacting with the ferromagnetic pieces 18, 19; two opto-electronic coupling bodies 26, 27 for positioning the frame 15;
and; a displacement rate tracking device 14 of the carrier device 12 for said optical filters 16, 17 comprises: amplifiers 28, 29 with inputs connected to the opto-electronic combinations 22, 23, respectively; ，
a matching circuit 30 having a first input and a second input connected to respective outputs of the information signal switching device 9 and an output connected to a first control input of the information signal switching device 9; 16,17
said displacement control device 13 for controlling the displacement of said carrier device 12 for: a first input connected to the output of said matching circuit 30;
a second input connected to the synchronization output of camera 5;
a phase detector 31 having; the phase detector 31;
a power supply 32 having an input connected to the output of the power supply 32; a signal input connected to the output of the power supply 32; a control input connected to the synchronization output of the television camera 5; and an input of the electromagnets 20 and 21. The thermovision pyrometer as described above, characterized in that it comprises: an electronic switch 33 having outputs respectively connected to; 4. A thermovision pyrometer according to claim 1, in which the information signal switching device 9 comprises: a flip-flop 48 having an input connected to the output of the optical filter switching device 4;
a first matching circuit 49 having a first input connected to a second output of the device 8 for sampling and measuring said video amplitude, and a second input connected to said flip-flop 48; a first input connected to a second output of the device 8 for sampling and measuring said video amplitude; and
a second matching circuit 50 having a second input connected to a second output of the flop 48; an information input connected to an information output of the device 8 for sampling and measuring said video amplitude; a first memory unit 51 having a control output connected to the output of the matching circuit 49 of said computer 10 and an output connected to a first input of said computer 10; a second memory unit 52 having an information input connected to an information output, a control input connected to an output of said second matching circuit 50, and an output connected to a second input of said computer 10; a differentiation stage 53 having an input connected to a second output of said gating marker generator 7; a control input connected to the output of said differentiation stage 53; and a device for sampling and measuring said video amplitude. an electronic switch 54 having a signal input connected to the first output of the thermovision pyrometer 8 and an output connected to ground. 5 an optical system for focusing the thermal radiation flux emitted from the object to be measured; a television camera for sensing the thermal radiation flux and generating a video signal proportional to the density of the thermal radiation flux; the television; a television monitor having an input connected to the output of the television camera; an input connected to the synchronization output of the television camera; and a first information input connected to the first information input of the television monitor. an apparatus for generating a gating marker for a video signal proportional to the density of thermal radiation flux from the object under test; Ing・
a control input connected to a first output of the marker generator; a character generator having a synchronization input connected to a synchronization output of a camera; and an output connected to a second information input of said television monitor; having an output connected to an input of said character generator; computer; and
In a thermovision pyrometer for remotely measuring the temperature of a measured object, the thermovision pyrometer has an input connected to the synchronized output of the television camera 5 and is focused by the optical system 1 to detect at least two different an optical filter switching device 4 for sequentially passing spectral components of the thermal radiation flux 2 from the object to be measured 3 in the spectral region;
an information input connected to an information output of a device 8 for sampling and measuring the amplitude of said video signal; a first control input connected to an output of said optical filter switching device 4; and said gating marker generator 7. a control input connected to a second output of the computer 10; third and fourth control inputs respectively connected to the first and second outputs of the device 8 for sampling and measuring video amplitude; an information signal switching device 9 having first and second outputs respectively connected to the first and second inputs; a device for generating a reference radiation flux; connected to the synchronization output of the television camera 5; a gating marker generator 7 for a video signal proportional to the density of the thermal radiation flux 2 of the object to be measured 3;
a second input connected to a third output of the television monitor 6, and an output connected to a third information input of the television monitor 6; a device 56 for generating markers; a first control input connected to the output of the gating marker generator 56 for a video signal proportional to the density of the reference radiation flux; and a third control input of the information signal switching device 9; a device 57 for sampling and measuring an amplitude of the video signal proportional to the density of the reference radiation flux, having second and third control inputs respectively connected to a fourth output; first and second outputs respectively connected to the first and second outputs of the device 57 for sampling and measuring the amplitude of the video signal proportional to
a control input connected to the output of said logarithmic divider unit 58; a signal input connected to the output of said television camera 5; connected to a signal input of a device 57 for sampling and measuring the amplitude of the video signal proportional to the signal input of the device 8 for sampling and measuring the amplitude of the video signal proportional to the density of the thermal radiation flux 2 from the object to be measured 3; a video signal clamping circuit having an output;
Thermovision, which is characterized by being equipped with
pyrometer. 6 an optical system for focusing the thermal radiation flux emitted from the object to be measured; a television camera for sensing the thermal radiation flux and generating a video signal proportional to the density of the thermal radiation flux; and the television; a television monitor having an input connected to the output of the television camera; an input connected to the synchronization output of the television camera; and a first information input connected to the first information input of the television monitor. an apparatus for generating a gating marker for a video signal proportional to the density of thermal radiation flux from the object under test; Ing・
a control input connected to a first output of the marker generator; a character generator having a synchronization input connected to a synchronization output of a camera; and an output connected to a second information input of said television monitor; having an output connected to an input of said character generator; computer; and
In a thermovision pyrometer for remotely measuring the temperature of a measured object, the thermovision pyrometer has an input connected to the synchronized output of the television camera 5 and is focused by the optical system 1 to detect at least two different An optical filter switching device 4 for sequentially passing spectral components of the thermal radiation flux 2 from the object to be measured 3 in the spectral region;
an information input connected to an information output of a device 8 for sampling and measuring the amplitude of said video signal; a first control input connected to an output of said optical filter switching device 4; and said gating marker generating device 7. a control input connected to a second output of the computer 10; third and fourth control inputs respectively connected to the first and second outputs of the device 8 for sampling and measuring video amplitude; an information signal switching device 9 having first and second outputs connected to first and second inputs, respectively; an input connected to a synchronization output of the television camera; and an input connected to the synchronization output of the television camera; a first output connected to a third information input of said information signal switching device 6; a second output connected to a fifth control input of said information signal switching device 9; and a clock output of said gating marker generator 7. a clock input connected to the device 78 for generating a gating marker for a video signal proportional to the density of the thermal radiation flux 2 of the object 3; a control input connected to one output, a signal input connected to the output of said television camera 5, an information output connected to a second information input of said information signal switching device 9, and said information signal switching. first and second outputs connected to sixth and seventh control inputs of the device 9 , the thermal radiation flux 2
a device 79 for sampling and measuring the amplitude of the video signal proportional to the density of the information signal switching device 9; third and fourth outputs of the information signal switching device 9 are connected to third and fourth inputs of the computer 10; A thermovision pyrometer characterized by: 7 an optical system for focusing the thermal radiation flux emitted from the object to be measured; a television camera for sensing the thermal radiation flux and generating a video signal proportional to the density of the thermal radiation flux; the television; a television monitor having an input connected to the output of the television camera; an input connected to the synchronization output of the television camera; and a first information input connected to the first information input of the television monitor. an apparatus for generating a gating marker for a video signal proportional to the density of thermal radiation flux from the object under test; Ing・
a control input connected to a first output of the marker generator; a character generator having a synchronization input connected to a synchronization output of a camera; and an output connected to a second information input of said television monitor; having an output connected to an input of said character generator; computer; and
In a thermovision pyrometer for remotely measuring the temperature of a measured object, the thermovision pyrometer has an input connected to the synchronized output of the television camera 5 and is focused by the optical system 1 to detect at least two different an optical filter switching device 4 for sequentially passing spectral components of the thermal radiation flux 2 from the object to be measured 3 in the spectral region;
an information input connected to an information output of a device 8 for sampling and measuring the amplitude of said video signal; a first control input connected to an output of said optical filter switching device 4; and said gating marker generating device 7. a control input connected to a second output of the computer 10; third and fourth control inputs respectively connected to the first and second inputs of the device 8 for sampling and measuring video amplitude; an information signal switching device 9 having first and second outputs connected to first and second inputs, respectively; an input connected to a synchronization output of the television camera 5; an output connected to the third information input of the monitor 6, and a clock input connected to the clock output of the gating marker generator, to detect the thermal radiation flux 2 from the object 3.
a first control input connected to the output of the gating marker generator 80; a third control input of the information signal switching device 9; second and third control inputs respectively connected to the fourth output and a signal input connected to the output of the television camera 5 for sampling the amplitude of the video signal proportional to the density. a device 81 for measuring; first and second control inputs respectively connected to third and fourth control inputs of the information signal switching device 9; and a third control input of the device 8 for sampling and measuring the amplitude of the video signal; a switching unit 82 having a signal input connected to the output of 1;
and; a first input connected to a first output of the device 81 for sampling and measuring said video amplitude;
a first multiplier unit 83 having a second input connected to a first output of said switching unit 82; a first input connected to a second output of said switching unit 82; a second multiplication unit 84 having a second input connected to a second output of the device 81 for sampling and measuring the amplitude; a first input connected to the output of said first multiplication unit 83; and a second input connected to the output of the second multiplier unit 84 ; A thermovision pyrometer characterized in that it is provided with a circuit 86 for controlling; 8 an optical system for focusing the thermal radiation flux emitted from the object to be measured; a television camera for sensing the thermal radiation flux and generating a video signal proportional to the density of the thermal radiation flux; and the television. a television monitor having an input connected to an output of the television camera; an input connected to the synchronization output of the television camera; and a first information input connected to a first information input of the television monitor. an apparatus for generating a gating marker for a video signal proportional to the density of thermal radiation flux from the object under test; Ing・
a control input connected to a first generation output of the marker generation device; a character generator having a synchronization input connected to a synchronization output of the camera and an output connected to a second information input of said television monitor; A computer with;
In a thermovision pyrometer for remotely measuring the temperature of a measured object, the thermovision pyrometer has an input connected to the synchronized output of the television camera 5, and is focused by the optical system 1 and has at least two Optical filter switching device 4 for sequentially passing spectral components of thermal radiation flux 2 from object 3 in different spectral regions.
and; an information input connected to an information output of the device 8 for sampling and measuring the amplitude of said video signal;
a first control input connected to the output of said optical filter switching device 4; a control input connected to a second output of said gating marker generator 7; and a device 8 for sampling and measuring said video amplitude. and third and fourth control inputs respectively connected to the first and second outputs of the computer 10, and first and second outputs respectively connected to the first and second inputs of the computer 10. an information signal switching device 9; a signal input connected to the output of the television camera 5; first and second control inputs respectively connected to the third and fourth outputs of the information signal switching device 9; A video signal switching device 95 having
and; a signal input connected to a first output of said video signal switching device 95, and first and second control inputs connected to third and fourth outputs of said information signal switching device 9, respectively; The above TV station
a first storage device 96 having a third control input connected to a synchronization output of the camera 5; a first input connected to a second output of the video signal switching device 95; a second input connected to the output of the storage device 96; first and second control inputs respectively connected to the fourth and third outputs of the information signal switching device 9; a second storage device 98 having: a third control input connected to the synchronization output of the television camera 5; and a signal input connected to the output of the divider unit 97; a first signal input connected to the output of the second storage device 98, a second signal input connected to the output of the second storage device 98, and a third and fourth output of the information signal switching device 9, respectively. a third control input connected to a synchronization output of said television camera 5 and an output connected to an input of said television monitor 6; A thermovision pyrometer comprising a signal switching device 99.