JPS60234788A - Method for adjusting optical axis of laser - Google Patents

Abstract

PURPOSE:To adjust easily and exactly the optical axis of a laser by making incident the laser light on the 2nd mirror in parallel with a material to be machined through the pinhole of the 1st mirror provided on the laser light exit side of a condenser lens and reflecting the laser light by said mirror. CONSTITUTION:An optical axis adjuster 27 provided with the 1st mirror having a pinhole 21 is proximity to the laser light exit side of the condenser lens 13 and the 2nd mirror 25 imposed on a working table 19 in parallel with the 1st mirror is disposed to a laser beam machine which executes laser machining on the table 19 by conducting horizontally the laser light LB oscillated from a CO2 laser oscillator 3, refracting perpendicularly the laser light by the bent mirror 11 and forming further the focus by the condenser lens 13. The visible laser light LB is oscillated from an He-Ne laser oscillator 15 and is irradiated through the above- mentioned pinhole 21 via a half mirror 17 and the mirror 11. The opertor observes the light LB reflected from the 2nd mirror 25 from above, and adjusts the optical axis of the laser by adjusting the inclination of the mirror 11 until the reflected points P1, P2, etc. coincide with a center O.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for adjusting the optical axis of a laser beam of, for example, a laser processing machine.

[Technical background and problems] Generally, in a laser processing machine, the optical axis of the laser is required to coincide with the ideal optical axis that is designed.

However, due to slight changes in the inclination and position of the output mirror, pen 1 to mirror, and other optical systems on the path of the laser beam, the laser optical axis deviates from the ideal optical axis, causing the liquid to be added to the processing table. The incident may not be exactly perpendicular to the target. In this way, if the laser beam does not accurately enter the workpiece and is inclined by a certain angle θ, the cutting surface will be inclined obliquely, and accurate cutting may not be possible. Furthermore, the phenomenon of burning is likely to occur, resulting in the problem that -C cutting becomes unstable.

``Purpose of the Invention'' This invention has been developed in view of the above-mentioned problems in the prior art. The aim is to provide a method for adjusting the optical axis of a laser.

[Summary of the Invention] This invention involves installing two mirrors on the laser first output side of a condensing lens parallel to the two objects, and making the laser beam enter the second mirror through the pinhole of the first mirror. The present invention is characterized in that the position of the laser beam optical system is adjusted while monitoring the anti-θ·J state of the laser beam between both mirrors.

[Embodiments of the Invention] Hereinafter, embodiments shown in the figures will be described in detail. FIG. 1 shows the entirety of a laser processing machine 1 used in an embodiment of the present invention, in which a laser oscillation device 3 that oscillates a laser beam “B” and a laser beam LB are condensed to form a plate-shaped workpiece. It consists of a laser machining section 5 that processes W.

The laser oscillation device 3 is a device that generates laser light, and for example, a CO2 gas laser oscillation device is used. Then, in the laser oscillation device 3 (the oscillated laser beam 1B is led out in the horizontal direction by the output mirror 7, guided horizontally in the conduit 9, and reaches the bent mirror 11. The laser beam is refracted downward at right angles and enters the condensing lens 13.The laser beam is condensed and irradiated onto the object W in addition to the liquid, and the energy of this laser beam causes the workpiece W to be It is processed.

In such laser processing Ia1, as the laser processing continues, the energy of the laser beam LB from the oscillator 3 of the sheet 11 causes the output mirror 7 and the vent mirror 11 to become humid.
[It may rise, thermally expand, deform, or change its position. If such deformation or positional movement occurs, the laser beam LB
The optical axis of the workpiece is deviated from the ideal optical axis, so it cannot be used perpendicularly to the workpiece W, and it must be used at a slight angle.
It will look like this. Therefore, it is necessary to adjust the inclination of such a laser optical axis in the vertical direction.

FIG. 2 shows an example of adjusting the laser optical axis as described above, in which a 1-1e-Ne laser oscillator 15 for adjusting the optical axis is installed in parallel with the CO2 laser oscillation device 3, and the optical axis is adjusted. This He-Ne laser, which emits visible light, is used for adjustment. The visible laser beam IB from the He--Ne laser oscillator 15 is analyzed horizontally and vertically by the half-bent mirror 17 and reaches the mirror 11 for the pen 1 .

And with this pen 1 to mirror 11, it becomes vertical again! The beam is refracted at an i-angle, reaches a condenser lens 13, and is condensed there to be condensed onto a processing table 17.

By the way, when the vent mirror 11 is at a position B that is slightly shifted from the normal position shown by the imaginary line, the laser beam LB
will be incident on the laser 19 at an angle of θ degrees with respect to the vertical direction.

In order to detect the inclination of this Rayleigh 9LB, an optical axis adjustment device 2 is integrated so that the first mirror 23 with the pinhole 21 and the second mirror 25 face I'fj.
7 is placed on the processing table 19. The first mirror 23 is installed close to the output side of the condenser lens 13 .

Now, the optical axis of Rayleigh' light LB is the vertical axis C, which is the ideal optical axis.
When the condenser lens 13 is in the Iζ state tilted by θ degrees with respect to i
) The ray light 1-B emitted from the pin hole 21 passes through the center 0 of the C second mihoo 2b and reaches the center 1.
, :Position 1) 1 is entered (J becomes J, so the second melon 7-25 J, -) and the reflected light is fouled (, ↓, the melon is the outer periphery of the first melon 23 and is reflected there (
Enter the outer part of the second min. 25 1) 2.
＞・Do. However, the player is again violated and ends up outside the device 27. Therefore, when looking at this second mirror 25 from above, the point 1)+, p2, where the actual laser beam LB is incident, has a subtone hS+ as shown in FIG.
, S2 can be seen.

Therefore, the vent mirror 11 is moved from the 13th position E6 to the A position so that these spots S1.32 overlap as one and are located at the center of the second mirror 25 as shown in J in FIG. If it is written like this, the laser beam LB is transmitted by the bent mirror 11! It is refracted downward to the second mirror 25 through the pinhole 21 and enters the center 〇 of the second mirror 25.

, and the laser beam LB reflected here goes out through the pinhole 21 of the first mirror 23 again. Therefore, only the spot a5 located at the center O of the second mirror 25 can be seen, indicating that the adjustment of the optical axis has been completed.

In the above optical axis adjustment, the optical axis was adjusted only in the X-axis direction, but if the optical axis misalignment also occurs in the Y@right direction, Y'l! Similar adjustments need to be made in the I11 direction as well.

Note that in the above embodiment, the optical axis was adjusted by adjusting the position of the hexagon, but it is also possible to correct the deviation of the optical axis due to fluctuations in the output mirror and other optical systems by using the same method. ,.

[Efficacy of invention 5! ! 1 This invention places a first mirror and a second mirror facing each other in parallel on the output side of a condensing lens, and directs the laser beam through the first mirror to the second mirror with a large diameter Ll, There is a way to adjust the optical axis while looking at the reflection state of the Rayleigh light.
Adjust the optical axis so that the reflected light of the laser beam exits the 1st Mihu bottle again? ! By adjusting the optical axis of the laser beam, the tilt of the Rayleigh optical axis can be easily corrected.

[Brief explanation of the drawing]

Fig. 1 is a front view of a laser processing machine used in an embodiment of the present invention, Fig. 2 is a diagram of an optical system of an embodiment of the invention, and Fig. 3 is a diagram of the same embodiment before optical axis adjustment. FIG. 4 is a plan view of the second mirror after optical axis adjustment.

Claims (1)

[Claims] A first mirror with a pinhole is provided on the laser beam output side of the condensing lens, and a second mirror is provided parallel to the workpiece so that both mirrors face each other, and the laser beam from the laser oscillation device is directed to the first mirror. A laser optical axis characterized in that the laser optical axis is adjusted so that the laser beam enters the C second mirror through a pinhole in the mirror, and the reflected light of the incident laser exits through the pinhole in the first mirror. Adjustment method.