JPS60233533A - Instrument for measuring magnetic domain - Google Patents

Instrument for measuring magnetic domain

Info

Publication number
JPS60233533A
JPS60233533A JP8850084A JP8850084A JPS60233533A JP S60233533 A JPS60233533 A JP S60233533A JP 8850084 A JP8850084 A JP 8850084A JP 8850084 A JP8850084 A JP 8850084A JP S60233533 A JPS60233533 A JP S60233533A
Authority
JP
Japan
Prior art keywords
magnetic
laser beam
film
laser
magnetic domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8850084A
Other languages
Japanese (ja)
Inventor
Hitoshi Oda
織田 仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Nippon Victor KK
Original Assignee
Victor Company of Japan Ltd
Nippon Victor KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd, Nippon Victor KK filed Critical Victor Company of Japan Ltd
Priority to JP8850084A priority Critical patent/JPS60233533A/en
Publication of JPS60233533A publication Critical patent/JPS60233533A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To obtain a distinct magnetic domain pattern and to enable exact measurement of the magnetic characteristic of a magnetic film by scanning the laser beam of a laser generating means, polarizing linearly the laser beam, condensing the beam to a system to be measured and imaging the beam passed therethrough. CONSTITUTION:Optical deflectors 2a, 2b scan two-dimensionally the laser beam having several mum or below spot diameter from a laser oscillator 1 over a 100mum square region at 100kHz frequency. A condenser lens 4 projects the linearly polarized beam on a magnetic film B of a system to be measured after stopping down the spot diameter to several mum or below. The beam transmitted through the film B is rotated with the plane of polarization according to the direction of the magnetization of the film B. The transmitted light is converted to a difference in the quantity of light by passing through a polarizing plate 6 and is inputted to a photoelectric transducer 7, by which the beam is converted to a video signal and is displayed on a CRT, etc.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁区測定装置に係シ、特にバブルメモリや光磁
気メモリ等に用いられる磁性ガーネット膜又は希土類−
遷移金属非晶質膜等の磁気特性評価に必要とされる磁区
観察の為の測定装置に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic domain measuring device, and particularly relates to a magnetic garnet film or rare earth film used in bubble memory, magneto-optical memory, etc.
The present invention relates to a measuring device for observing magnetic domains, which is necessary for evaluating the magnetic properties of transition metal amorphous films, etc.

〔従来技術とその問題点〕[Prior art and its problems]

従来、バブルメモリや光磁気メモリ等に用いら質膜等の
磁区観察には、偏光顕微鏡が用いられている。
Conventionally, a polarizing microscope has been used to observe magnetic domains in stromal films used in bubble memories, magneto-optical memories, and the like.

しかし、このような偏光顕微鏡での磁区観察は、観察し
ようとしている膜の例えばファラデー回転角が小さな場
合あるいは光透過率が小さな場合には、得られる像のコ
ントラストは低く、その為正確な磁気特性の知見を得ら
れないといった欠点がある0 〔問題点を解決する為の手段〕 レーザー発生手段と、該レーザー発生手段よりのレーザ
ービームを走査する走査手段と、該レーザービームを直
線偏光させる偏光手段と、該レー昏ビームを被測定系に
集光させる集光手段と、被測定系を通過したレーザービ
ームを結像させる結像手段とを備える。
However, when observing magnetic domains using such a polarizing microscope, if the Faraday rotation angle of the film to be observed is small or the light transmittance is small, the contrast of the image obtained is low, and therefore it is difficult to accurately obtain accurate magnetic properties. [Means for solving the problem] A laser generating means, a scanning means for scanning a laser beam from the laser generating means, and a polarizing means for linearly polarizing the laser beam. , a focusing means for focusing the laser beam on the system to be measured, and an imaging means for forming an image of the laser beam that has passed through the system to be measured.

〔実施例〕〔Example〕

第゛1図は本発明に係る磁区測定装置の1実施例の概略
説明図、第2図は本測定装置による磁性ガーネット膜の
磁区パターンの写真である。
FIG. 1 is a schematic explanatory diagram of one embodiment of the magnetic domain measuring device according to the present invention, and FIG. 2 is a photograph of the magnetic domain pattern of a magnetic garnet film obtained by this measuring device.

面M中−1は一侑1りu25mWkいった低出力のHe
−Neガスレーザー発振器である。
Surface M-1 is a low-power He such as Ichiyuki 1 u25mWk.
-Ne gas laser oscillator.

2a 、 2bは、例えばLiNbO3といった音響光
学素子を用いた前記レーザー発振器よりのレーザービー
ムを走査する為の光偏向器でsb、この光偏向器2a、
2bは、100KHzの周波数で2次元的にレーザービ
ームを偏向走査し、集光スポット径が数μm以下のレー
ザービームを例えば100μm四方の領域にわたって走
査するものである。同、2aはX軸方向に関しての光偏
向器、2bはX軸方向に関しての光偏向器である。
2a and 2b are optical deflectors for scanning a laser beam from the laser oscillator using an acousto-optic element such as LiNbO3, and sb is an optical deflector 2a,
2b is a device in which a laser beam is two-dimensionally deflected and scanned at a frequency of 100 KHz, and a laser beam having a condensed spot diameter of several μm or less is scanned over an area of, for example, 100 μm square. 2a is an optical deflector in the X-axis direction, and 2b is an optical deflector in the X-axis direction.

3は第1の偏光板であシ、この第1の偏光板3は直線偏
光のレーザービームを得る為のものである。
3 is a first polarizing plate, and this first polarizing plate 3 is for obtaining a linearly polarized laser beam.

4は集光レンズ(顕微鏡用対物レンズ、×53)であり
、この集光レンズ4は前記第1の偏光板3による直線偏
光レーザービームをそのスポット径が数μm以下となる
ように絞る為のものである。
4 is a condensing lens (objective lens for a microscope, ×53), and this condensing lens 4 focuses the linearly polarized laser beam produced by the first polarizing plate 3 so that its spot diameter is several μm or less. It is something.

つまシ、直線偏光レーザービームを被測定系である磁性
膜B上においてそのスポット径が数μm以下となるよう
にするものである。
The spot diameter of the linearly polarized laser beam is set to several μm or less on the magnetic film B, which is the system to be measured.

同、4b、4cも集光用のレンズであり、これらのレン
ズ4b、4cは光偏向器2a、2bと第1の偏光板3と
の間の光路上に設けられていて、レーザービームを集光
レンズ4の光径内に収束させる為のものである。
Similarly, lenses 4b and 4c are also condensing lenses, and these lenses 4b and 4c are provided on the optical path between the optical deflectors 2a and 2b and the first polarizing plate 3, and converge the laser beam. This is for converging the light within the optical diameter of the optical lens 4.

5は投影レンズ(顕微鏡用対物レンズ、×53)であシ
、この投影レンズ5は後述の光電変換素子面上に磁性膜
B透過レーザービームを収束させて結像させる為のもの
である。
Reference numeral 5 denotes a projection lens (objective lens for a microscope, ×53), and this projection lens 5 is used to focus and image a laser beam transmitted through the magnetic film B on the surface of a photoelectric conversion element, which will be described later.

6は第2の偏光板であり、磁性膜Bを透過する直線偏光
レーザービームは磁性膜Bの磁化の向きに応じて偏波面
が回転(ファラデー効果)するも−のとなシ、この磁化
の向きに応じて偏波面の回転した透過光が第2の偏光板
を通過することによシ光量の違いに変換されるようにす
るものである。
6 is a second polarizing plate, and the plane of polarization of the linearly polarized laser beam transmitted through the magnetic film B rotates according to the direction of magnetization of the magnetic film B (Faraday effect). The transmitted light whose polarization plane has been rotated according to the direction is converted into a difference in light amount by passing through the second polarizing plate.

7は、例えばCOD、MOS、BBD型からなる固体撮
像素子といった光電変換素子であシ′、光電変換素子7
によって得た電気信号をビデオ信号に変換し、CRT上
等に現出させる。
7 is a photoelectric conversion element such as a solid-state image sensor of COD, MOS, or BBD type.
The electrical signal obtained by this method is converted into a video signal and displayed on a CRT or the like.

上記のように構成゛されたレーザービーム型の磁区測定
装置は、光源として例えばノ・ロゲンランプあるいは水
銀ランプといった白色光源が用いられる従来の偏光顕微
鏡の場合と異なり、第2図に示す如く、磁性膜の磁区パ
ターンのコントラストは極めて高いものである。伺、第
3図に示す写真は、従来の偏光顕微鏡による磁性ガーネ
ット膜の磁区パターンである。
Unlike conventional polarizing microscopes, which use a white light source such as a nitrogen lamp or a mercury lamp as a light source, the laser beam type magnetic domain measuring device configured as described above uses a magnetic film as shown in FIG. The contrast of the magnetic domain pattern is extremely high. The photograph shown in Figure 3 shows the magnetic domain pattern of the magnetic garnet film taken using a conventional polarizing microscope.

すなわち、本発明の装置によれば明瞭な磁区ノくターン
を得ることができるので、磁区パターンの正確な巾より
記録密度の限界を正確に知ることができるようになシ、
又、外部磁場印加によるドメインの応答によってバブル
ドメインの移動速度を正確に知ることができ、メモリと
してのアクセスタイムを正確に知り得る。
That is, since the device of the present invention makes it possible to obtain clear magnetic domain turns, it is possible to accurately determine the limit of recording density from the exact width of the magnetic domain pattern.
Furthermore, the moving speed of the bubble domain can be accurately determined based on the response of the domain to the application of an external magnetic field, and the access time as a memory can be accurately determined.

〔効果〕〔effect〕

バブルメモリや光磁気メモリ等に用いられる磁性ガーネ
ット膜や希土類−遷移金属非晶質膜等の磁性膜の磁区パ
ターンといった特徴を正確にめられるようになり、従っ
て磁性膜の磁気特性を正
It is now possible to accurately characterize the magnetic domain patterns of magnetic films such as magnetic garnet films and rare earth-transition metal amorphous films used in bubble memories and magneto-optical memories.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る磁区測定装置の1実施例の概略説
明図、第2図は本発明の装置による磁性ガーネット膜の
磁区パターンの写真、第3図は従来の装置による磁性ガ
ーネット膜の磁区パターンの写真である。 1・・・レーザー発振器(レーザー発生手段)、2a、
2b・・・光偏向器(走査手段)、3・・・第1の偏光
板(偏光手段)、4・・・集光レンズ(集光手段)、5
・・・投影レンズ、6・・・第2の偏光板、7・・・固
体撮像素子。 手続補正書(方式) 昭和59年8月23日 特許庁長官殿 1、事件の表示 特願昭59−88500号 2発明の名称 磁区測定装置 a補正をする者 事件との関係 特許出願人 日本ビクター株式会社 ζ代理人 昭和59年7月l1日 &補正の対象 7、補正の内容 (1)明細書第2ページ第18〜19行目の「、第2図
・・・・・・写真」を削除する。 (2)明細書第5ページ第3〜4行目の[、第2図・−
・・・・如くJを削除する。 (3)明細書第5ページ第5〜7行目の[t#1、第・
・・・・・ある。」を削除する。 (4)明細書第6ページ第3〜6行目の「、第2・−・
・・・写真」を削除する。 (5)図面中鎖2図及び第3図を削除する。
FIG. 1 is a schematic explanatory diagram of one embodiment of the magnetic domain measuring device according to the present invention, FIG. 2 is a photograph of a magnetic domain pattern of a magnetic garnet film by the device of the present invention, and FIG. 3 is a photograph of a magnetic garnet film measured by a conventional device. This is a photograph of the magnetic domain pattern. 1... Laser oscillator (laser generation means), 2a,
2b... Optical deflector (scanning means), 3... First polarizing plate (polarizing means), 4... Condensing lens (condensing means), 5
... Projection lens, 6... Second polarizing plate, 7... Solid-state image sensor. Procedural amendment (method) August 23, 1980 Commissioner of the Japan Patent Office 1. Indication of the case Patent Application No. 88500/1982 2. Name of the invention Magnetic domain measuring device a. Person making the amendment Relationship to the case Patent applicant Victor Japan Agent for ζ Co., Ltd. July 11, 1980 & Subject of amendment 7, Contents of amendment (1) ", Figure 2... Photograph" on page 2 of the specification, lines 18 to 19 delete. (2) Page 5 of the specification, lines 3-4 [, Figure 2・-
・・・Delete J. (3) [t#1, line 5 to 7 on page 5 of the specification]
·····be. ” to be deleted. (4) Page 6 of the specification, lines 3 to 6, “, 2nd...
...Delete the photo. (5) Figures 2 and 3 in the drawings are deleted.

Claims (1)

【特許請求の範囲】[Claims] レーザー発生手段と、該レーザー発生手段よシのレーザ
ービームを走査する走査手段と、該レーザービームを直
線偏光させる偏光手段と、該レーザービームを被測定系
に集光させる集光手段と、被測定系を通過したレーザー
ビームを結像させる結像手段とを備えたことを特徴とす
る磁区測定装置。
a laser generating means, a scanning means for scanning a laser beam from the laser generating means, a polarizing means for linearly polarizing the laser beam, a focusing means for focusing the laser beam on a system to be measured, 1. A magnetic domain measuring device comprising: imaging means for imaging a laser beam that has passed through the system.
JP8850084A 1984-05-04 1984-05-04 Instrument for measuring magnetic domain Pending JPS60233533A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8850084A JPS60233533A (en) 1984-05-04 1984-05-04 Instrument for measuring magnetic domain

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8850084A JPS60233533A (en) 1984-05-04 1984-05-04 Instrument for measuring magnetic domain

Publications (1)

Publication Number Publication Date
JPS60233533A true JPS60233533A (en) 1985-11-20

Family

ID=13944541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8850084A Pending JPS60233533A (en) 1984-05-04 1984-05-04 Instrument for measuring magnetic domain

Country Status (1)

Country Link
JP (1) JPS60233533A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2628211A1 (en) * 1988-03-04 1989-09-08 Vareille Aime ELLIPSOMETRY ANALYZER, SAMPLE ELLIPSOMETRIC ANALYSIS METHOD, AND THIN FILM THICKNESS VARIATION MEASUREMENT MEASUREMENT

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2628211A1 (en) * 1988-03-04 1989-09-08 Vareille Aime ELLIPSOMETRY ANALYZER, SAMPLE ELLIPSOMETRIC ANALYSIS METHOD, AND THIN FILM THICKNESS VARIATION MEASUREMENT MEASUREMENT

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