JPS60228095A - Drive - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a drive device, and particularly to a drive device using a shape memory alloy suitable for application to a robot manipulator.

[Background of the invention]

Shape-memory alloys have been proposed as elements for driving robot arms, etc., but conventional ones have had the disadvantage of poor response in return operations because they lack effective cooling means.

As a method for improving responsiveness, Japanese Patent Application Laid-Open No. 57-1688
A method such as that described in Publication No. 91 has also been proposed.

This is characterized in that a P-type semiconductor element and an N-type semiconductor element are bonded to the surface of a shape memory alloy element so as not to inhibit the shape change of the shape memory alloy element, and the direction of current flow is controlled by switching. It is an invention of an actuator element that
A device with better responsiveness than conventional ones has been proposed by bonding a semiconductor element to a shape memory alloy element, heating it by the exothermic action generated at the joint, and cooling it by the endothermic action. There was a problem that a long life could not be expected and the cost was high.

[Purpose of the invention]

The present invention was made in order to solve the above-mentioned problems of the prior art, and it is possible to accurately heat and cool the shape memory alloy part used in the drive device, thereby achieving reliability and durability using inexpensive means. The purpose is to provide a drive device that is flexible and has good responsiveness.

[Summary of the invention]

The configuration of the drive device according to the present invention includes at least one shape memory alloy wire that expands and contracts when cooled and heated, with one end of the wire connected to a fixed body and the other end connected to a movable body. A driving device that converts expansion and contraction into displacement of a driven object via a movable body, the wire surrounding the shape memory alloy wire in the longitudinal direction thereof and allowing one end of the wire to be communicated with a fluid supply source. A pipe is provided, and at least one of fluids for cooling and heating the wire can flow through the pipe surrounding the wire.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 1 to 14.

First, FIG. 1 is a schematic configuration diagram of a drive device according to an embodiment of the present invention, FIG. 2 is a sectional view taken along the line I-1' in FIG. This is a detailed sectional view of the main parts of the figure, showing the structure of the shape memory alloy wire rod and the wire surrounding tube, as well as the flow of the cooling fluid.

In the figure, 1 is a drive device, 2 is a wire-shaped shape memory alloy wire, and 3 is a compression coil spring that is an elastic member that imparts a piascus to the shape memory alloy wire 2.

The shape memory alloy wire 2 has been subjected to memory treatment in advance so that it contracts at a high temperature higher than the transformation temperature.

Reference numeral 4 denotes a reinforcing tube for preventing unnecessary bending or other deformation of the drive device 1, and the compression coil spring 3 is mounted inside the reinforcing tube 4.

Reference numeral 5 denotes a base on the fixed side of the fixed body, to which the shape memory alloy wire 2 and reinforcing tube 4 are fixed.

The base 5 of this example is a flat cylindrical sealed body forming a fluid circulation chamber 5a, and as shown in FIG. ) is fixed.

6 is an end plate on the movable side of the movable body, and the end plate 6 has a spring receiver 6a in which the compression coil spring 3 is set, and the wire rod 2 is fixed thereto.

Reference numeral 7 indicates a drive wire attached to the end plate 6, and reference numeral 8 indicates an object to be driven.

Reference numeral 9 denotes a wire surrounding tube that covers the wire 2 in the longitudinal direction of the wire 2. One end of the wire surrounding tube 9 is fixed to the base 5 and opens into the fluid circulation chamber 5a, and the other end is open. . The length of the wire surrounding tube 9 is designed to prevent the tube end from coming into contact with the end plate 6 when the wire 2 is shrunk.

The fluid inlet side 9a of the wire surrounding tube 9 opens into the fluid circulation chamber 5a of the base 5 as described above, and communicates with the fluid supply source 11 via the fluid supply tube 10 connected to the base 5.

Here, the fluid supply source 11 means a compressor, a blower, or the like. Further, the fluid outlet side 9b of the wire surrounding tube 9 is open to the atmosphere as described above.

In the example shown in FIG. 1, the wire 2 is heated by being energized by a power source 13 via a lead wire 12, and is cooled by forced cooling with a fluid.

Next, the principle of operation of the drive device having such a configuration will be explained.

When the wire 2 is energized and heated by the power source 13, the temperature of the wire 2 increases. Then, when the temperature becomes higher than the transformation temperature during heating of the shape memory alloy of the wire, the wire 2 tries to contract to its original memorized shape and generates a recovery force F1. Since this restoring force F1 is considerably larger than the pie spacing F2 of the compression coil spring 3, the end plate 6 moves to the left in FIG. 1 with the force (Ft F2). Therefore, the drive wire 7 attached to the end plate 6 can move the driven object 8 to the left.

Next, when heating by energization is stopped, the wire 2 is forcibly cooled by the fluid (at a temperature lower than the transformation temperature during cooling) sent into the wire surrounding tube 9 from the fluid supply source 11.

The fluid is then released from the fluid outlet side 9b of the wire surrounding tube 9. Since the fluid outlet side 9b is open to the atmosphere,
It is also desirable that the fluid be air, which is harmless.

The flow of the cooling fluid described above is indicated by arrows 15 in FIG.

When the wire rod 2 is cooled, the temperature of the wire rod 2 decreases. Then, when the temperature becomes lower than the transformation temperature of the shape memory alloy when it is cooled, the recovery force F1 of the wire 2 becomes smaller than the pie spacing F2 of the compression coil spring 3, and the end plate 6 is moved to the position shown in FIG. Move to the right. Therefore, the driven object 8 can be moved rightward.

Note that the number of wire rods 2 may be determined in consideration of the required driving force and responsiveness.

As mentioned above, by repeating heating and cooling of the wire 2, the magnitude of the recovery force Fi generated in the shape memory alloy of the wire 2 is changed, and the compression coil spring 3.

By reversing the magnitude relationship of the force with the pie-scar F2, it is possible to perform a constant repetitive linear motion. The arrow 14 in FIG. 1 indicates the amount of displacement.

Next, FIGS. 4 and 5 are diagrams showing examples of other configurations of the wire surrounding tube in the drive device shown in FIG. There is. In the figure, parts with the same symbols as in Figure 3 are equivalent parts, and arrow 15
indicates the flow of fluid.

□゛In the example shown in Fig. 4, a T-shaped tube 16 is arranged at the end of the wire surrounding tube on the base 5 side, and the wire surrounding tube 9 is fixed to the base 5 via the T-shaped tube 16, and the T-shaped tube is One end 16a of the fluid supply tube 16 is communicated with the fluid supply source 11 via a fluid supply pipe.

The fluid outlet side 9b of the wire surrounding tube 9 is open.

In the example shown in FIG. 5, one end is attached to the base 5 and the other end is attached to the end plate 6.
The wire rod 2 connected to the wire rod is covered with wire rod surrounding tubes 9-1 and 9-2, and a T-shaped tube 16 is disposed between these wire rod surrounding tubes 9-1 and 9-2. T on the inlet side 9a, 9-2a
The T-shaped tube 16 is connected to the T-shaped tube 16, and one end 16a of the T-shaped tube 16 is communicated with the fluid supply source 11 via the fluid supply tube.

Each fluid inlet side 9-1b, 9 of the wire surrounding tube 9-1, 9-2
-L2b are both open, and the fluid is arrow 15
flows like.

According to the drive device described above, since each of the shape memory alloys of the wire rod 2 is covered with the wire surrounding tube 9, the shape memory alloy to be cooled can be accurately cooled, and the shape memory alloy that does not need to be cooled nearby. It never cools down. According to this embodiment, since the cooling effect is greatly improved compared to the conventional one, the shape memory alloy can expand and contract quickly, and a drive device that operates quickly can be provided.

In the above embodiment, since there is no means for controlling the flow of the fluid for cooling the shape memory alloy, the cooling fluid continues to flow even when the wire 2 is heated with electricity. Therefore, the amount of electricity consumed for heating is increasing compared to conventional natural cooling. When it is necessary to maintain this amount of electricity at the same level as before,
A control valve is required to open and close the fluid flow depending on whether it is being heated or cooled. Therefore, an example in which a control valve is provided will be described next.

FIG. 6 is a schematic configuration diagram of a device in which the drive device in FIG. 1 is provided with a fluid supply control means. In the figure, the same reference numerals as in FIG. 1 are the same parts, so the explanation thereof will be omitted. .

In FIG. 6, reference numeral 17 denotes a control valve, which is disposed in the fluid supply pipe 10. 18 is a fluid tank that stores fluid.

19 is a control device including a power source 13 for energization heating;
The control valve 17 is actuated by the lead wire 12'.

Thus, the apparatus of FIG. 6 has control valve 17. Fluid tank 1
8. A fluid supply control means consisting of a control device 19 is provided.

The control device 19 controls the power source 1 when heating the wire 2 with electricity.
3 ON, control valve 17 OFF, conversely when cooling wire 2,
By controlling the power supply 13 OFF and the control valve 17 ON, efficient heating and cooling can be performed.

Next, another embodiment of the present invention will be described with reference to FIGS. 7 to 9.

FIG. 7 is a schematic structural diagram of a drive device according to another embodiment of the present invention, and FIGS. 8 and 9 are sectional views taken along the line nn' in FIG. 7. In the figure, the same reference numerals as in FIGS. 1 and 6 are the same parts as in the previous embodiment, and the explanation thereof will be omitted.

In FIGS. 7 and 8, the drive device IA of the present embodiment uses a tension coil spring 20 as a device that provides a bias spacing.

The tension coil spring 20 is attached to the base 5A.

21 is a column, 22 is a shaft, and 23 is a pulley related to a movable body. The pulley 23 is attached to the column 2 via the shaft 22.

8A is an object to be driven, which is attached to a pulley 23,
It performs repeated rotational movement by a displacement amount 14' about the axis 22. 24 is a terminal for connecting the drive wire 7' to the wire rod 2 and the tension coil spring 2o.

While the compression coil spring 3 in the example shown in FIG. 1 has a piascus in the direction of expansion, the tension coil spring 20 in FIG. 7 has a piascus in the direction of contraction. The operating principle of A is the same as the example of FIG. By reversing the magnitude relationship of the force, the expansion and contraction of the wire rod 2 is converted into rotation of the pulley 23, and a repetitive rotational movement of the displacement ff114' is applied to the driven object 8A.

In the example shown in FIG. 8, the wire 2 and the tension coil spring 20 are a pair, and one drive wire 7' is attached to the pulley 23. When a larger force is required to drive the driven object 8A, a multi-thread pulley 23A and shaft 22A using a plurality of drive wires 7' (three in the figure) are used as shown in FIG. A plurality of (for example, three) wire rods 2 and tension coil springs 20 connected to the drive wire 7' must be used, each having the same properties and dimensions.

The drive device described above combines a shape memory alloy with an elastic member such as a coil spring that imparts a piascus to the shape memory alloy, and heats the shape memory alloy.

By cooling, the structure was such that the magnitude relationship between the recovery force generated in the shape memory alloy and the pie spacing of the elastic member was reversed to drive the shape memory alloy. It may also be a combination of alloys.

Next, an example will be explained with reference to FIG.

FIG. 10 is a suggested configuration diagram of a drive device according to still another embodiment of the present invention, and the same reference numerals as in FIG. 7 are the same parts as in the previous example, so a description thereof will be omitted. .

In the embodiment of FIG. 1O, the configuration of the drive device IA' is almost the same as the device of FIG. 7, except that the tension coil spring 20 of FIG. 7 is replaced by a shape memory alloy wire 2b. .

A three-way valve 25 is a switching valve that controls the flow of fluid supplied to the shape memory alloys of the two wire rods 2a and 2b, and is disposed in the fluid supply pipe 10 to branch into two fluid supply pipes 10A.

First, as shown in the figure, when the lower wire-shaped shape memory alloy 2b is electrically heated and at the same time the upper wire 2a is cooled with a cooling fluid, the lower heated wire 2b contracts in the direction. A large restoring force is generated and the pulley 23 is rotated clockwise.

Then, the driven object 8A rotates downward about the shaft 22.

Next, the electrical heating of the lower wire 2b is stopped, and the upper wire 2a is electrically heated, and at the same time, the three-way valve 2
When the wire rod 2b is cooled by the cooling fluid, the upper heated wire rod 2a generates a larger recovery force in the direction of contraction, causing the pulley 23 to rotate counterclockwise. Therefore, the driven object 8A rotates upward about the shaft 22.

By repeating the above operations, the driving device IA' shown in FIG. 10 can repeatedly rotate the driven object 8A by a displacement amount of 14'.

In addition, the three-way valve 25 may be made into two on-off valves, and each may be connected to the fluid inlet side 16a of the wire surrounding tube 9 of the wire rods 2a and 2b.

Next, another example using two shape memory alloys similar to the example shown in FIG. 10 will be described with reference to FIG. 11.

FIG. 11 is a schematic configuration diagram of a drive device according to still another embodiment of the present invention, and the same reference numerals as in FIG. 10 are the same parts as in the previous example, so a description thereof will be omitted. .

Whereas the previous example in Figure 1O is for repetitive rotational motion,
The example of FIG. 11 is a drive suitable for repetitive linear movements.

In FIG. 11, the drive device IB is equipped with bases 5B related to fixed bodies on both sides of the device, a movable body 6B and a driven object 8B in the center, and these bases 5B and movable bodies 6B each have shape memory. The alloy wire rods 2c and 2d are connected to each other so that these wire rods 2c and 2d also have the function of an elastic member.

Furthermore, wire rod surrounding tubes 9 that cover the wire rods 2c and 2d in the longitudinal direction are fixed to the bases 5B on both sides, and each of these wire rod surrounding tubes 9 is fixed to the base 5B on both sides.
One end 16a' on the fixed body side is connected to the fluid supply pipe 10B to communicate with the fluid supply source 11.

In the driving bag RIB having such a configuration, by alternately heating and cooling the wire rods 2c and 2d, a repetitive linear motion with a displacement of 14'' is obtained in the driven object 8B, as in the example shown in FIG. 10 above. be able to.

In the drive devices in each of the above embodiments, the fluid outlet side 9b of the wire surrounding tube 9 is all open, so fluid such as air is released into the atmosphere around the drive device 9. However, under special environments, , even air may not be able to be released. In that case, it is necessary to recover the fluid used for cooling, etc. Next, one embodiment will be described with reference to FIG. 12.

FIG. 12 is a schematic configuration diagram of a drive device according to still another embodiment of the present invention, and in the figure, the same reference numerals as in FIGS. 1 and 6 are the same parts as in those embodiments. , the explanation thereof will be omitted.

In FIG. 12, the driving device 1c includes a base 6C on the outside of an end plate 6' corresponding to the end plate explained in FIG. 1 on the movable body side as well, forming a fluid circulation chamber 5a'. The fluid circulation chamber 5a' is formed in the same shape as the fluid circulation chamber 5a on the fluid inflow side, and the wire surrounding tube 9C connects its fluid outlet side 9d to the end plate 6' and is connected to the fluid circulation chamber 5a'. It is open to 26 is a discharge pipe connected to the base 6C,
These constitute a closed fluid system for cooling fluid. In this case, the wire surrounding tube 9C needs to be configured to be able to expand and contract in accordance with the expansion and contraction of the wire 2.

The fluid supplied from the fluid supply source 11 is guided from the fluid circulation chamber 5a to the wire surrounding tube 9C as indicated by an arrow 15', flows to the right inside the tube, and is then collected in the fluid circulation chamber 5a'.
The gas is guided through the discharge pipe 26 to an atmosphere where it can be discharged and is discharged.

Next, an example of the effects of the present invention will be explained with reference to FIG. 13.

FIG. 13 is a diagram showing an example of the effect of the present invention.
This is a summary of comparative experiments on the responsiveness of the shape memory alloy wire in the drive device illustrated in the figure, with natural cooling and forced cooling.

In this figure, the horizontal axis represents the elapsed time (seconds), and the vertical axis represents the temperature (° C.) of the shape memory alloy, with the forced cooling of the present invention being shown by a solid line and the conventional natural cooling being shown by a broken line.

The drive device used in this experiment has the configuration explained in FIG.
The one shown in the figure was used.

The shape memory alloy wire 2 is an alloy of nickel and titanium.
The wire diameter is 0.35 mm.

The transformation temperatures are as follows: transformation start temperature As = 64°C during heating, transformation end temperature Af = 95°C during heating, transformation start temperature M s = 70°C during cooling, transformation end temperature Mf = 45 during cooling.
It is ℃.

The temperature of the wire 2 was measured by bonding a 25 μm copper/constantan thermocouple near the fluid outlet side 9b of the wire surrounding tube 9.

Air was used as the fluid, and its pressure was measured between the fluid tank 18 and the control valve 17.

As the wire surrounding tube 9, a glass tube having an outer diameter of 3 mm and an inner diameter of 2 mm was used.

The experiment was carried out using a method of electrical heating for 15 seconds from a room temperature of 18° C. and then cooling, and a comparison was made between conventional natural cooling and the forced air cooling of the present invention.

Fluid supply pressure P during forced cooling is 0.3, 0.5°0
, 7 MPa.

FIG. 13 shows the experimental results.

Since the heating is the same for all four types, the same temperature curve is obtained. Looking at the time required to reach the transformation temperature, the heating time from the As point to the Af point is about 2.5 seconds.

On the other hand, when looking at the cooling time, the effect of the forced air cooling of the present invention is greatly evident. Looking at the cooling time from the Ms point to the Mf point, the conventional natural air cooling takes about 5 seconds, and the forced air cooling of the present invention takes about 1.5 seconds at a pressure of P '' 0 and 3 MPa, P
” About 1 second at 0, 5 MPa, P=0.7MP
a is approximately 0.7 seconds.

Compared to natural cooling, forced air cooling shortens the cooling time to about 115, and compared to heating time, it also shortens by about half, indicating that the effect is fully manifested.

The drive devices of each of the embodiments described above are suitable for driving an arm of a robot or the like. An example thereof is shown in FIG.

FIG. 14 is a perspective view of a robot arm to which a driving device of the present invention is applied, and among the reference numerals in the figure, the same reference numerals as those of each embodiment described above are used for each application of each embodiment. A specific explanation of that part will be omitted.

The repetitive vertical movement of the palm of this robot arm is performed by the drive device shown in FIG. 7, and the repetitive movement of the fingers is performed by the drive device shown in FIG. 1.

In the figure, 29 is a box, and the box 29 has a fluid tank 1.
8. A control device 19 is coupled to form the arm of the robot. 30 is a joint for connecting this arm to the robot body or another arm.

10 is a fluid supply pipe, and 17 is a control valve.

In the box body 29, a shape memory alloy wire 2. A wire surrounding tube 9 and a tension coil spring 20 are attached.

Reference numeral 27 denotes a palm that repeatedly moves up and down about the shaft 22 by the rotation of the pulley 23, and the palm 27 supports the fingers (driving object) 8. 28 is a joint of the finger 8. 7 and 7' indicate drive wires.

As described above, by applying the drive device of each embodiment of the present invention, the shape memory alloy wire can be quickly expanded and contracted, and the palm and fingers of the robot arm can be operated quickly and accurately.

In each of the above embodiments, a wire-shaped shape memory alloy wire was described, but the present invention is not necessarily limited to a wire-shaped wire, but may be a coiled spring-shaped wire. In particular, when a large amount of displacement is required for the object to be driven, a coil spring shape is effective.

Furthermore, instead of the compression coil spring, an elastic member such as a bellows or rubber may be used to provide the piascus.

Furthermore, the cross-sectional shape of the wire surrounding tube is not limited to only circular.
It may be any shape such as a rectangle.Furthermore, in this embodiment, a case has been described in which the fluid forced to flow from the fluid supply source to the wire surrounding tube is a cooling fluid such as air. The drive device of the present invention is not limited to forced air cooling, and if necessary, it is also possible to flow a fluid for heating the wire.

〔Effect of the invention〕

As described above, according to the present invention, the shape memory alloy parts used in the drive device can be accurately heated and cooled, and a reliable, durable, and responsive drive can be achieved using inexpensive means. equipment can be provided.

[Brief explanation of drawings]

FIG. 1 is a schematic configuration diagram of a drive device according to an embodiment of the present invention, FIG. 2 is a sectional view taken along line I-I in FIG. 1, and FIG. 3 is a wire rod and a wire rod in FIG. Cross-sectional view of main parts of enveloping pipe, etc., No. 4
, 5 is a diagram showing an example of another configuration of the wire surrounding tube in the drive device of FIG. 1, and FIG. 6 is a schematic structural diagram of a device in which the drive device of FIG. 1 is provided with a fluid supply control means. FIG. 7 is a schematic configuration diagram of a drive device according to another embodiment of the present invention, FIG. A schematic configuration diagram of a drive device according to another embodiment,
FIG. 11 is a schematic block diagram of a drive device according to still another embodiment of the present invention, FIG. 12 is a schematic block diagram of a drive device according to still another embodiment of the present invention, and FIG. A diagram showing an example of the effects of the invention, regarding a shape memory alloy wire,
FIG. 14, which is a diagram comparing the difference in responsiveness between natural cooling and forced cooling, is a perspective view of a robot arm to which the drive device of the present invention is applied. 1, LA, IA', IB, IB'...driver, 2
゜2a, 2b, 2c, 2d... shape memory alloy wire rod,
3... Compression coil spring, 4... Reinforcement tube, 5.5A. 5B...Base, 5a, 5a'...Fluid distribution chamber, 6
゜6'... End plate, 6B... Movable body, 7,7'...
Drive wire, 8, 8A, 8B... Drive target, 9.9
-1°9-2. '9c...Wire surrounding tube, 9 a, 9
'71 a, 9-2 a-Fluid inlet side, 9b, 9'-
1b, 9-2b. 9d...Fluid outlet side, 10. IOA, 1. OB...
Fluid supply pipe, 11...Fluid supply source, 12.12'...
・Lead wire, 13...Power supply, 14.14', 1.4
'... Displacement amount, 16... T-shaped pipe, 17... Control valve, 18... Fluid tank, 19... Control device, 20...
...Tension coil spring, 22.22A...Shaft, 23.
23A...Pulley, 25...￥3 1 %Z diagram Figure 3 fJ4 Figure T5 Figure t Figure ■ 7 Figure l ■3 Figure Member q Figure

Claims (1)

[Scope of Claims] 1. At least one shape memory alloy wire rod that expands and contracts when cooled and heated, with one end of the wire connected to a fixed body and the other end connected to a movable body, the wire rod expanding and contracting. The driving device converts the displacement of a driven object through a movable body, and includes a wire enclosing tube that covers the shape memory alloy wire in the longitudinal direction and allows one end of the wire to be communicated with a fluid supply source. 1. A driving device, characterized in that the wire enclosing tube is provided with at least one of fluids for cooling and heating the wire through which it flows. 2. A drive device according to claim 1, which is provided with an elastic member that imparts a piascus to a shape memory alloy wire. 3. A drive device according to claim 1, wherein the wire surrounding tube is connected to a fluid supply tube communicating with a fluid supply source, and a fluid supply control means is disposed in the fluid supply tube. . 4. The drive device according to claim 1, wherein the wire surrounding tube is connected to a fluid circulation chamber formed in a fixed body and communicating with a fluid supply source. 5. In any one of claims 1 to 3, a compression coil spring as an elastic member is installed in a reinforcing tube fixed to a fixed body, and a plurality of wire surrounding tubes are installed around the reinforcing tube. and a drive device in which a shape memory alloy wire is positioned, and the wire is expanded and contracted to apply repetitive linear motion to a driven object via a movable body. 6. In any one of claims 1 to 3, the movable body is a pulley, and the tension coil spring and shape memory alloy wire rod of the elastic member respectively connected to the fixed body are A drive device that is connected to a drive wire attached to a pulley and applies repetitive rotational motion to a driven object via the pulley by expanding and contracting the wire. 7. In either of claims 1 or 3, the movable body is a pulley, shape memory alloy wires are connected to both ends of a drive wire attached to the pulley, and the other ends of the wires are connected to each other. A driving device is provided with a wire surrounding tube that connects the wire rod to a fixed body and covers each wire, and connects the fixed body side of these wire surrounding tubes to a fluid supply source. 8. In any one of claims 1 to 3, a shape memory alloy wire having one end connected to a fixed body and the other end connected to a movable body is covered with a wire enveloping tube, and the wire is encircled. A drive device in which a T-shaped pipe is arranged in a pipe line and communicated with a fluid supply source. 9. In either of claims 1 or 3, the device is provided with fixed bodies on both sides and a movable body in the center, and shape memory alloy wires are connected to these fixed bodies and movable bodies, respectively. A drive device, wherein a wire surrounding tube is fixed to each of the fixed bodies on both sides, and the fixed body side of each of these wire surrounding tubes is connected to a fluid supply pipe communicating with a fluid supply source. 10. In any one of claims 1 to 3, a wire enclosing tube that forms fluid circulation chambers on the fixed body side and the movable body side on both sides of the device and covers the longitudinal direction of the wire. A drive device configured to have both ends connected to fluid circulation chambers on the fixed body side and the movable body side, respectively, to allow fluid to flow within a closed circulation system. 11. In either of claims 1 or 9, a T-shaped tube is provided on the fixed body side of the wire surrounding tube connected to the fixed body, and the fluid supply source is connected through the T-shaped tube. A drive device that communicates with each other. 12. The drive device according to claim 7 or 9, wherein a switching valve is provided in a fluid supply pipe connecting the wire surrounding pipe and the fluid supply source.