JPS60228072A - Method of regenerating grinding liquid in fully automatic manner - Google Patents

Abstract

PURPOSE:To enable the reusing of a waste grinding liquid instead of draining it to the outside, by dividing the waste grinding liquid into a regenerated liquid and sludge through filtration, returning the regenerated liquid to a grinding liquid feeder, changing the liquid into a grinding liquid of a prescribed composition, and supplying the grinding liquid to a grinder. CONSTITUTION:A waste grinding liquid discharged from a grinder 1 is filtered by a rotary filter press 6 so that the waste grinding liquid is divided into a regenerated liquid and sludge. The regenerated liquid is returned to a grinding liquid feeder 18 which changes the liquid into a grinding liquid of a prescribed composition. The grinding liquid is supplied from the feeder 18 to the grinder 1 through a liquid temperature controller 20. The grinding liquid is then recycled.

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a fully automatic grinding fluid regeneration treatment method, and more particularly, to a grinding fluid fully automatic regeneration treatment method for treating waste fluid discharged during precision grinding of a workpiece. It is.

[Prior Art] Conventionally, demand for aluminum magnetic disk substrates has been rapidly increasing as external storage devices for Combi-L-Y because they are non-magnetic, lightweight, and inexpensive.・With the increase in density, it is becoming mainstream as an external storage device. The method for producing a magnetic disk substrate made of aluminum is to process an aluminum material into a thin disk, then pressure-anneal it to obtain a blank material (pressure-annealed substrate), finish the blank material with a grinding machine, The process consists of creating a substrate (mirror finished material) and magnetically coding the surface of the substrate.

Furthermore, processing of the waste fluid discharged after precision grinding of the substrate requires specialized technology, so it is common to outsource the processing. Since the substrate manufacturing process requires minute machining, the waste liquid discharged contains fine grinding debris, and with the rapid increase in substrate production, processing costs are particularly high. It has become so. For this reason, for example, the following treatment method has been proposed for treatment of waste liquid.

First, the waste liquid is neutralized by adjusting the P Ll, and a flocculant is injected into the waste water to impart ionic repulsion to suspended solids such as grinding chips (hereinafter referred to as 88 minutes) to flocculate the SS content, and the 412 particles are After settling with a thickener, sedimentation layer, etc., the waste liquid is sucked in vacuum from one side of the filter cloth through a filter cloth coated with diatomaceous earth, and the SS content is captured in the diatomaceous earth layer and dehydrated. There is a method of discharging waste liquid.

However, in the above method, as shown in Table 1 below,
There is a problem in that the COD content greatly exceeds the regulatory value, and further costly treatment such as evaporation treatment is required to treat this COD content.

Table 1 As shown above, various treatment methods have been studied, but
Even if the above-mentioned method is considered the best, COD and BOD
The amount exceeded the regulatory value, making it difficult to treat the wastewater.

[Objective of the Invention] Therefore, the object of the present invention is to precisely process the material without discharging suspended solids in the waste liquid discharged when grinding objects, and substances indicating COD and BOD to the outside. The purpose of the present invention is to provide a fully automatic grinding fluid regeneration processing method that can simplify and reduce costs.

[Structure of the Invention] The structure of the present invention made to achieve the above object is as follows: A grinding waste liquid discharged from a grinding device using a grinding liquid is solid-liquid separated into a regenerated liquid and a sludge by filtration, and the regenerated liquid is separated into a regenerated liquid and a sludge. is recirculated to the grinding fluid supply device, and the regenerated fluid is adjusted to a grinding fluid having a predetermined composition in the grinding fluid supply device, and then the grinding fluid is supplied from the grinding fluid supply device to the grinding device. Fully automatic regeneration of grinding fluid! I! It provides a summary of how to fill in the IL.

The present invention will be described below with reference to examples and drawings.

[Example] FIG. 1 shows a system diagram of a grinding fluid treatment method when the fully automatic grinding fluid regeneration treatment method according to the present invention is applied to a substrate manufacturing process.

First, the outline of the grinding fluid treatment method will be explained. A blank material is ground by a grinding machine 1 using a grinding fluid using a grinding toilet. Next, the grinding waste liquid discharged from the grinding device 1 during the grinding is separated into solid and liquid into a regenerating liquid and sludge by a rotary filter press 6, which will be described later, via a waste liquid storage tank 2 and a pump 4.

Note that 8 is a regenerated liquid receiving tank, 10 is a concentrated liquid receiving tank, 12 is a pump, 14 is a sludge receiving tank, and 16 is a pump.

The regenerating fluid is then recirculated to the grinding fluid supply device 18,
After the regenerating fluid is adjusted to a grinding fluid having a predetermined composition in the grinding fluid supply device 18, the grinding fluid is supplied to the fluid temperature control device 20 (
JTC) and then supplied to the grinding machine @1 again.

Next, the above-mentioned grinding fluid treatment method will be explained in detail. Grinding device 1
is located in the clean room 22, and the inside of the clean room 22 is of class 100°0OO1, that is, 1ft'
The temperature is maintained at 23° C. so that less than 100,000 particles with a particle size of 0.5 μm or more are present in the room. This is for precisely grinding the blank material.

Then, using the grinding device 1, the aluminum blank material is ground into a straight shape. The grinding is carried out, for example, by applying vibrations while supplying a grinding fluid and pressing a fine-grained grinding toilet against the blank material under low pressure, so that the blank material is polished to a mirror surface. The reason for supplying the grinding fluid is that grinding with only fresh water will damage the straight. In addition, grinding 1 to Ishi contain an artificial abrasive material and its binder.

When such grinding is performed, grinding waste liquid will be discharged, but the grinding waste liquid contains fine aluminum grinding waste from the blank material generated during grinding, and artificial abrasive materials. , its binder, other components that generate high COD and high BOD, and N-hexadiene.

Next, the grinding waste liquid discharged from each grinding device 1 is temporarily stored in a waste liquid storage tank 2, and then is pumped to a []-tarifiltable press 6 by a pump 4. In the rotary filter press 6, the grinding waste liquid is separated into a regenerated liquid and a concentrated liquid by filtration, and further in the rotary filter press 7, the concentrated liquid is solid-liquid separated into a regenerated liquid and a sludge. The sludge contains, for example, approximately several micrometers of aluminum grinding waste.

This solid-liquid separation is performed by trapping the 88 minutes themselves by a cake layer consisting of the 88 minutes deposited on the filter cloth of the rotary filter press 6.

Further, the filtration efficiency of the cake layer is optimally adjusted by a stirring plate in the rotary filter press 6 so that the thickness does not exceed a predetermined thickness, thereby achieving optimal clarity. This clear water contains 88 minutes of bacteria with a particle size of only 0.3 microns or less. Furthermore, high COD-B
Components exhibiting OD remain in the regenerated liquid without being filtered.

During operation, the rotary filter press 6 separates the grinding waste liquid into a regenerating liquid and a concentrated liquid for a certain period of time, sends the regenerated liquid to the regenerated liquid receiving tank 8, and transfers the concentrated liquid to the concentrated liquid receiving tank 1.
On the other hand, during a certain predetermined period, the concentrated liquid is further supplied to the rotary filter press 6 from the C concentrated liquid receiving tank 10 via the pump 12, and the concentrated liquid is supplied to the rotary filter press 6 by the rotary filter press 6 which also serves as the 1 coater filter press 7. Solid-liquid separation is performed into a regenerating liquid and sludge, and the sludge is discharged to the sludge receiving tank 14, while the regenerating liquid is discharged to the regenerating liquid receiving tank 8. In other words, one rotary filter press 6 serves two stages of stroke.

The regenerating fluid is adjusted to a liquid temperature of, for example, 18°C (preferably 15° to 20'C) using a drying device, and furthermore, impurities of the abrasive in the grinding fluid are removed using another rotary filter press 6.
It may be removed by The above liquid temperature a is adjusted by using the low refilter press 6 for regenerating liquid! This process generates heat (30 to 50°C), and this heat is removed to precipitate the dissolved components, followed by microfiltration. For 88 minutes, the Ifi percentage is 20% in the sludge, 4.5% in the concentrate, and 1n+g/9. Contains approximately

Next, the regenerating fluid is recirculated to the grinding fluid supply device 18 by the pump 16 and adjusted to a grinding fluid having a predetermined composition. That is, the recirculated regenerating liquid and the grinding stock liquid 1 through the pump 30! The grinding stock solution supplied from f32 is mixed in mixer 34. In this case, the supply zone of the grinding liquid is determined according to the volume of the regenerating liquid. That is, the grinding liquid is injected through a metering injection valve (not shown), and the volume percentage of the grinding liquid in the mixed liquid after mixing in the mixer 34 is in the range of 0.5% to 0.9% to adjust the concentration of the grinding liquid. It is controlled to become.

The mixed liquid is then sent to the grinding liquid tank 36.

Others: pure water from the pure water supply device 38 and grinding stock solution 4f
The grinding liquid pumped from the i32 by the pump 40 is mixed and adjusted by the mixer 42, and is sent to the grinding liquid replenishment tank 4 as a grinding replenishment liquid.
Sent to 4. Note that the volumetric ratio of the grinding stock solution in the grinding replenishment liquid is adjusted to 1%.

In addition, the concentration of substances indicating COD, BOD is approximately 5000
It is ppm. The grinding replenishment liquid is pumped to the grinding liquid tank 36 by a pump 46.

In this case, the amount of grinding replenishment liquid supplied to the grinding liquid tank 36 is controlled on and off depending on the position of the liquid level in the grinding liquid tank. That is, when the liquid level drops to, for example, 2,500 ft, replenishment of the grinding replenishing liquid is started, and when the liquid level reaches 3,000 ft, replenishing of the grinding replenishing liquid is stopped. In other words, the grinding fluid discharged together with the sludge is replenished into the Juki sludge receiving tank 14.
In other words, they are making adjustments for their own needs. -Soshi C
1 Grinding replenishment fluid from the grinding fluid replenishment tank 44 and Miki"j゛34
The mixed liquid from is once stored in the cutting liquid tank 36 and then pumped to the liquid temperature control device 20 by the pump 48.

Further, in the liquid temperature control device 20, the temperature of the grinding liquid is adjusted to, for example, 23°C (preferably 20 to 25°C).

The reason for this is that in winter, when the liquid temperature is 5.6°C, the cooling effect becomes excessive and the surface of the substrate becomes rough.

This is because in the summer, when the liquid temperature sometimes reaches 30°C or higher, the work surface of the substrate and the surface of the grinding toilet become clogged, resulting in poor grinding efficiency. Then, the grinding fluid is again supplied to the grinding device @1.

Next, the structure of the rotary filter press 6 shown in FIG. 2 will be explained. The grinding waste liquid is pumped to the filtration chamber 50 by the pump 4. The pressurized grinding waste liquid flows through the m-passing plate 52 into iI! be treated well. 54 is a stirring plate, which is rotated by a torque control device [56]. 58 is a discharge valve, which controls discharge of the concentrated liquid. When the concentrated liquid is filtered, the concentrated liquid is supplied and the sludge and regenerated liquid are discharged.

As described above, according to this embodiment, the grinding waste liquid is filtered under pressure and the regenerated liquid is recirculated, so that approximately 0.
It can remove bacteria up to 3 microns in 88 minutes without any chemical treatment.

Therefore, the regenerated liquid can be made clear and the machining accuracy of the substraight can be improved. In particular, the bacterial component has a size of 0°45 μm or more and can be easily removed. Even if bacteria remain in the regenerated liquid without being captured, the amount is small, and even if they multiply, the regenerated liquid will not spoil because it will be filtered again in the rotary filter press 6 during the regeneration process. There are advantages. In addition, the processing system has been simplified and downsized, reducing grinding fluid consumption, and uses only electricity (pumps) and pneumatics (valves, etc.) as power sources, and normally does not require consumables. Since only the filter cloth of the rotary filter press 6 is used, maintenance can be simplified.

By continuing to recirculate the problematic component showing 1,300,000, it can be treated without being discharged to the outside.

In addition, it is a very effective waste treatment method in places with strict drainage standards and places with limited water supply.

The advantages of using a rotary filter press include the following. Fully automatic continuous operation saves labor. Small footprint. Since filtration is performed in a completely sealed environment, a good working environment can be achieved. The regenerated liquid is clear. Wide range and precise control becomes possible. Cleaning is possible up to high replacement rates.

Although the present invention has been described in detail above, the present invention is not limited to these embodiments in any way, and it goes without saying that the present invention can be implemented in various forms without departing from the gist of the present invention.

For example, the grinding waste liquid may be filtered more precisely by using a precision filter made of Iζ stainless steel, which is equipped with a stainless steel filter instead of the low-purity filter press. In this case, filtration and washing of the cake layer are repeated alternately.

In the grinding fluid supply device 18, the grinding replenishment fluid and
It is also possible to directly mix it with the regenerating liquid.

Then, another rotary filter press 6 may be installed and the process 1) mentioned above may be discontinued. Furthermore, a centrifugal separator may be provided in the next step of the rotary filter press 6 to remove SS components to a higher degree.

[Effects of the Invention] As detailed above, the fully automatic grinding fluid regeneration processing method according to the present invention separates grinding waste fluid discharged from a grinding device using the grinding fluid into solid and liquid into a regeneration fluid and sludge by filtration, After recirculating the regenerating fluid to the grinding fluid supply device and adjusting the regenerating fluid to a grinding fluid with a predetermined composition in the grinding fluid supply device, the grinding fluid is transferred from the grinding fluid supply device to the grinding device. supplying.

Therefore, during solid-liquid separation, suspended solids (SS) and microorganisms such as bacteria can be removed without chemical treatment. Therefore, the surface of the workpiece can be finished with high precision.

Furthermore, since the grinding fluid is recycled and used, waste fluid with high COD and Boo is not discharged to the outside, and the grinding fluid can be processed without releasing any substances exhibiting COD1BOD to the outside.

Then, the grinding fluid treatment system can be downsized and simplified, and furthermore, the amount of grinding fluid consumed can be reduced and maintenance can be simplified.

[Brief explanation of the drawing]

FIG. 1 is a system diagram of the grinding fluid treatment method for Zaburstraight, and FIG. 2 is a structural diagram of a low-refilter press. 1... Grinding device 6... Low refilter press 30... Grinding liquid tank 34. 42... Mixer 44... Grinding fluid supply tank Representative Patent attorney Tsutomu Adachi and 1 other person Figure 1 Figure 2 figure

Claims (1)

[Scope of Claims] 1. Grinding waste fluid discharged from a grinding device using grinding fluid is separated into solid-liquid into a regenerating fluid and sludge by filtration, and the regenerating fluid is recirculated to the grinding fluid supply device, and the above-mentioned regeneration is performed. A fully automatic grinding fluid regeneration processing method, which comprises adjusting the liquid to a grinding fluid having a predetermined composition using the grinding fluid supply device, and then supplying the grinding fluid from the grinding fluid supply device to the grinding device. 2. The process of solid-liquid separation of the grinding waste liquid into a regeneration liquid and sludge by filtration involves separating the grinding waste liquid into a regeneration liquid and a concentrated liquid by filtration, and further separating the concentrated liquid into a regeneration liquid and sludge. Valve 111'! 1. A fully automatic grinding fluid regeneration processing method according to claim 1, which is carried out by: 3. The fully automatic grinding fluid regeneration processing method according to claim 2, wherein the regenerating fluid is used during the recirculation of the regenerating fluid. 4. The step of adjusting the grinding fluid to a predetermined composition using the grinding fluid supply device mixes the recirculated regenerating fluid and the grinding stock solution supplied from the grinding stock solution tank, and also adjusts the grinding fluid to a predetermined composition. 2. The fully automatic grinding fluid regeneration processing method according to claim 1, wherein the grinding fluid replenishment processing method is carried out by replenishing the adjusted grinding replenishment fluid to the mixed fluid. 5. The fully automatic grinding fluid regeneration processing method according to claim 4, wherein the supply amount of the grinding stock solution supplied from the grinding crude oil tank is determined according to the recirculation amount of the recirculation fluid. . 6.1- The grinding replenishment liquid is prepared by mixing pure water and a grinding liquid supplied from a grinding liquid tank.
Fully automatic grinding fluid regeneration processing method described in Section 1. 7. The fully automatic grinding fluid regeneration processing method according to any one of claims 4 to 6, wherein the mixed liquid and the grinding replenishment liquid are temporarily stored in a grinding liquid tank. 8. The fully automatic grinding fluid regeneration processing method according to claim 1, wherein the amount of the grinding replenishment fluid supplied to the grinding fluid tank is controlled on and off depending on the position of the liquid level in the grinding fluid tank. 9. Detecting a state in which the solid-liquid separation is not performed normally;
In the case of this state, the fully automatic grinding fluid regeneration processing method according to any one of claims 1 to 8, wherein recirculation of the regeneration fluid is stopped. 10. The fully automatic grinding fluid regeneration processing method according to any one of claims 1 to 9, wherein the grinding device is placed in a clean room. 11. Set the temperature of the grinding fluid supplied to the grinding device to a predetermined temperature r! A fully automatic grinding fluid regeneration processing method according to any one of claims 1 to 10, hereinafter referred to as the following claims. 12. The fully automatic grinding fluid regeneration processing method according to claim 11, wherein the temperature of the recirculated regeneration fluid is controlled within a predetermined temperature range.