JPS60227434A - Pattern recognizing apparatus - Google Patents
Pattern recognizing apparatusInfo
- Publication number
- JPS60227434A JPS60227434A JP8532384A JP8532384A JPS60227434A JP S60227434 A JPS60227434 A JP S60227434A JP 8532384 A JP8532384 A JP 8532384A JP 8532384 A JP8532384 A JP 8532384A JP S60227434 A JPS60227434 A JP S60227434A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- image
- recognized
- solid
- cameras
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は半醇体集積回路装置（工Ｃ）などの主面部に
形成されているパターンを認識するパターン認識装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a pattern recognition device that recognizes a pattern formed on the main surface of a semi-solid integrated circuit device (C).
第１図は従来のパターン認識装置の一例の主要構成要素
を説明するための図である。FIG. 1 is a diagram for explaining the main components of an example of a conventional pattern recognition device.
図において、（１）は主面部に認識すべきパターンが形
成されているＩＣ？ｚどの被認識パターン形成物体、（
２）は被認識パターン形成物体（１）の主面部処形成さ
れているパターンを光学レンズ（３）を介して撮像しデ
ジタルの画像信号に変換して出力する撮像管カメラ、（
４）は撮像管カメラ（２）が出力する画像信号を記憶す
る半導体メモリなどの画像信号記憶媒体、（５）は画像
信号記憶媒体（４）に記憶されている画像信号に対して
画像分析を行い被認識パターン形成物体（１）の主面部
に形成されているパターンの認識を行うマイクロコンピ
ュータである。In the figure, (1) is an IC with a pattern to be recognized formed on its main surface. zWhich pattern-forming object to be recognized, (
2) is an image pickup tube camera that images the pattern formed on the main surface of the object to be recognized (1) through an optical lens (3), converts it into a digital image signal, and outputs the image;
4) is an image signal storage medium such as a semiconductor memory that stores the image signal output by the image pickup tube camera (2), and (5) is an image signal storage medium that performs image analysis on the image signal stored in the image signal storage medium (4). This is a microcomputer that recognizes a pattern formed on the main surface of a pattern-formed object (1) to be recognized.
ところで、この従来例では、被認識パターン形成物体（
１）の主面部のパターン形成＃ｆ域が撮像管カメラ（２
）の撮像視野より広い場合には、被認識パターン形成物
体（１）を移動させるか、または撮像管カメラ（２）を
光学レンズ（３）とともに移動させて、マイクロコンピ
ュータ（５）による画像分析を繰返し行い、被認識パタ
ーン形成物体（１）の主面部に形成されているパターン
の認識を行う必要があるので、このパターンの認識に要
する時間が長くなる。しかも、被認識パターン形成物体
（１）または撮像管カメラ（２）を移動させる移動機構
を設けねばならないので、パターン認識装置の構成が複
雑になる。更に１撮像管カメラ（２）の動作状態が変動
しやすいので、撮像管カメラ（２）のパターンの撮像時
に撮像管カメラ（２）の動作状態をチェックする必要が
あった。By the way, in this conventional example, the pattern forming object to be recognized (
The pattern formation area #f on the main surface of 1) is connected to the image pickup tube camera (2).
), move the pattern-forming object to be recognized (1) or move the image pickup tube camera (2) together with the optical lens (3) to analyze the image by the microcomputer (5). Since it is necessary to repeat the process and recognize the pattern formed on the main surface of the pattern-formed object (1) to be recognized, the time required to recognize this pattern becomes long. Furthermore, since a moving mechanism must be provided to move the pattern-forming object to be recognized (1) or the image pickup tube camera (2), the configuration of the pattern recognition apparatus becomes complicated. Furthermore, since the operating state of the single image pickup tube camera (2) tends to fluctuate, it is necessary to check the operating status of the image pickup tube camera (2) when capturing a pattern of the image pickup tube camera (2).
この発明は、上述の欠点を除去する目的でなされたもの
で、被認識パターン形成物体の主面部に形成されている
パターンを複数個の部分に分割し、これらの複数個の部
分のパターンを複数個の固体撮像素子カメラでそれぞれ
撮像し画像信号に変換して画像信号記憶媒体に記憶させ
、この画像信号記憶媒体に記憶されている画像信号に対
して複数個ノマイクロコンピュータによる画像分析を同
時に行い、被認識パターン形成物体の主面部に形成され
ているパターンの認識を行うようにすることによって、
被認識パターン形成物体の主面部のパターン形成領域が
広い場合においても、装置の構成が簡単で、パターンの
認識時間が短かく、シかも動作の安定なパターン認識装
置を提供するものである。The present invention has been made for the purpose of eliminating the above-mentioned drawbacks, and involves dividing a pattern formed on the main surface of a pattern-forming object to be recognized into a plurality of parts, and dividing the pattern of these plurality parts into a plurality of parts. Each image is captured by a solid-state image sensor camera, converted into an image signal, and stored in an image signal storage medium, and multiple microcomputers simultaneously perform image analysis on the image signals stored in the image signal storage medium. , by recognizing the pattern formed on the main surface of the pattern-forming object to be recognized,
To provide a pattern recognition device that has a simple configuration, short pattern recognition time, and stable operation even when the pattern formation area on the main surface of a pattern-formed object to be recognized is wide.
第２図はこの発明の一実施例のパターン認識装置の主要
構成要素を説明するための図である０図において、第１
図に示した符号と同一符号は同等部分を示す。シηは被
認識パターン形成物体（１）の主面部の左半分の部分に
形成されているパターンを反射鏡（６１ａ） 、 （６
１ｂ）および光学レンズｃｌηを介して撮像しデジタル
の画像信号に変換して出力する固体撮像素子カメラ、（
２）は被認識パターン形成物体（１）の主面部の右半分
の部分に形成されているパターンを反射鏡（ａｚａ）、
（６ｚｂ）および光学レンズに）を介して撮像しデジタ
ルの画像信号に変換して出力する固体撮像素子カメラで
ある。なお、画像信号記憶媒体（４）は固体撮像素子カ
メラｅυ、＠が出力する画像信号を記憶し、複数個のマ
イクロコンピュータ（５）は画像信号記憶媒体（４）に
記憶されている画像信号を互いに分担して同時に画像分
析し被認識パターン形成物体（１）の主面部に形成され
ているパターンの認識を行う。FIG. 2 is a diagram for explaining the main components of a pattern recognition device according to an embodiment of the present invention.
The same symbols as those shown in the figures indicate equivalent parts. η is a reflection mirror (61a), (6
1b) and a solid-state image sensor camera that captures an image through an optical lens clη, converts it into a digital image signal, and outputs it, (
2) The pattern formed on the right half of the main surface of the pattern-forming object to be recognized (1) is reflected by a mirror (aza);
This is a solid-state image sensor camera that captures an image through a (6zb) and an optical lens, converts it into a digital image signal, and outputs it. The image signal storage medium (4) stores the image signals output by the solid-state image sensor camera eυ,@, and the plurality of microcomputers (5) stores the image signals stored in the image signal storage medium (4). They are assigned to each other to simultaneously analyze the image and recognize the pattern formed on the main surface of the pattern-formed object (1) to be recognized.
このように構成された実施例では、被認識パターン形成
物体（１）の主面部に形成されているパターンを二分割
し、これらの分割されたパターンの部分をそれぞれ固体
撮像素子カメラ＠１） 、 ＠で撮像するので、被認識
パターン形成物体（１）の主面部のパターン形成領域が
広い場合においても、従来例のように被認識パターン形
成物体（１）または固体撮像素子カメラ（２）、＠を移
動させる必要がなく、装置の構成を簡単にすることがで
きる。また、複数個のマイクロコンピュータ（５）が画
像信号記憶媒体（４）に記憶されている画像信号を互い
に分担して画像分析するので、パターンの認識時間を１
台のマイクロコンピュータを用いる従来例の場合より短
かくすることができる。しかも、固体撮像素子カメラψ
υ、弼の動作が従来例の撮像管カメラの動作より安定で
あるので、固体撮像素子カメラシυ、＠のパターンの撮
像時に固体撮像素子カメラＱυ、＠の動作状態をチェッ
クする必要がない。In the embodiment configured in this way, the pattern formed on the main surface of the pattern-forming object to be recognized (1) is divided into two parts, and each of these divided pattern parts is connected to a solid-state image sensor camera @1), Since the image is captured with @, even if the pattern formation area on the main surface of the pattern-forming object (1) to be recognized is wide, the pattern-forming object (1) to be recognized or the solid-state image sensor camera (2), @ There is no need to move the device, and the configuration of the device can be simplified. In addition, since the plurality of microcomputers (5) divide the image signals stored in the image signal storage medium (4) into image analysis, the pattern recognition time is 1
It can be shorter than the conventional example using one microcomputer. Moreover, the solid-state image sensor ψ
Since the operation of the solid-state image sensor Qυ, @ is more stable than the operation of the conventional image pickup tube camera, there is no need to check the operating state of the solid-state image sensor camera Qυ, @ when imaging the pattern of the solid-state image sensor Qυ, @.
なお、この実施例では、被認識パターン形成物体（１）
の主面部に形成されているパターンを二分割する場合に
ついて述べたが、この発明はこれに限らず、三分割以上
に分割する場合にも適用することができる。In addition, in this example, the pattern forming object to be recognized (1)
Although the case where the pattern formed on the main surface of is divided into two parts has been described, the present invention is not limited to this, and can also be applied to the case where the pattern is divided into three parts or more.
以上、説明したように１この発明のパターン認識装置で
は、被認識パターン形成物体の主面部に形成されている
パターンを複数個の部分に分割し、これらの複数個の部
分のパターンを複数個の固体撮像素子カメラでそれぞれ
撮像し画像信号に変換して画像信号記憶媒体に記憶させ
、この画像信号記憶媒体に記憶されている画像信号に対
して複数個のマイクロコンピュータによる画像分析を同
時に行い、被認識パターン形成物体の主面部に形成され
ているパターンの認識を行うようにしたので、被認識パ
ターン形成物体の主面部のパターン形成領域が広い場合
においても、被認識パターン形成物体または固体撮像素
子カメラを移動させる必要がなく、装置の構成を簡単に
することができ、パターンの認識時間を短かくすること
ができる。しかも、固体撮像素子カメラの動作が撮像管
カメラの動作より安定であるので、固体撮像素子カメラ
のパターンの撮像時に固体撮像素子の動作状態をチェッ
クする必要がない。As described above, (1) the pattern recognition device of the present invention divides the pattern formed on the main surface of the pattern-forming object to be recognized into a plurality of parts, and divides the pattern of these plurality parts into a plurality of parts. Each image is captured by a solid-state image pickup device camera, converted into an image signal, and stored in an image signal storage medium, and multiple microcomputers simultaneously perform image analysis on the image signal stored in the image signal storage medium. Since the pattern formed on the main surface of the recognition pattern formation object is recognized, even if the pattern formation area on the main surface of the recognition pattern formation object is wide, the recognition pattern formation object or the solid-state image sensor camera can be easily recognized. There is no need to move the device, the configuration of the device can be simplified, and the pattern recognition time can be shortened. Furthermore, since the operation of the solid-state image sensor camera is more stable than that of the image pickup tube camera, there is no need to check the operating state of the solid-state image sensor when capturing a pattern with the solid-state image sensor camera.
第１図は従来のパターン認識装置の一例の主要構成要素
を説明するための図、第２図はこの発明の一実施例のパ
ター／認識装置の主要構成要素を説明するための図であ
る。
図において、（１）は被認識パターン形成物体、（４）
は画像信号記憶媒体、（５）はマイクロコンピュータ、
Ｑυおよび（イ）は固体撮像素子カメラである。
なお、図中同一符号はそれぞれ同一または相当部分を示
す。
代理人大岩増雄
第１図FIG. 1 is a diagram for explaining the main components of an example of a conventional pattern recognition device, and FIG. 2 is a diagram for explaining the main components of a putter/recognition device according to an embodiment of the present invention. In the figure, (1) is the pattern forming object to be recognized, (4)
is an image signal storage medium, (5) is a microcomputer,
Qυ and (a) are solid-state image sensor cameras. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent Masuo Oiwa Figure 1
Claims (1)
認識パターン形成物体の上記パターンを複数個の部分に
分割してそれぞれの部分のパターンを撮像し画像信号に
変換して出力する複数個の固体撮像素子カメラ、これら
の複数個の固体撮像素子カメラが出力する画像信号を記
憶する画像信号記憶媒体、およびこの画像記号記憶媒体
に記憶されている画像信号を互いに分担して同時に画像
分析し上記被認識パターン形成物体の主面部に形成され
ている上記パターンの認識を行う複数個のマイクロコン
ピュータを備えたパターン認識装置。(1) A plurality of devices that divide the pattern of a pattern-forming object to be recognized, which has a pattern to be recognized on its main surface, into a plurality of parts, image the pattern of each part, convert it into an image signal, and output it. A solid-state image sensor camera, an image signal storage medium that stores image signals output from the plurality of solid-state image sensor cameras, and image signals stored in the image symbol storage medium are shared among each other and images are analyzed simultaneously. A pattern recognition device comprising a plurality of microcomputers that recognize the pattern formed on the main surface of the pattern-formed object to be recognized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8532384A JPS60227434A (en) | 1984-04-25 | 1984-04-25 | Pattern recognizing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8532384A JPS60227434A (en) | 1984-04-25 | 1984-04-25 | Pattern recognizing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60227434A true JPS60227434A (en) | 1985-11-12 |
Family
ID=13855411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8532384A Pending JPS60227434A (en) | 1984-04-25 | 1984-04-25 | Pattern recognizing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60227434A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100702107B1 (en) | 2005-09-29 | 2007-03-30 | (주)세븐데이타 | Solid inspecting apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50137039A (en) * | 1974-04-17 | 1975-10-30 | ||
| JPS5760776A (en) * | 1980-09-27 | 1982-04-12 | Fujitsu Ltd | Electric charge transfer device |
-
1984
- 1984-04-25 JP JP8532384A patent/JPS60227434A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50137039A (en) * | 1974-04-17 | 1975-10-30 | ||
| JPS5760776A (en) * | 1980-09-27 | 1982-04-12 | Fujitsu Ltd | Electric charge transfer device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100702107B1 (en) | 2005-09-29 | 2007-03-30 | (주)세븐데이타 | Solid inspecting apparatus |
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