JPS60225039A - Vacuum degree detection apparatus of vacuum breaker - Google Patents

Vacuum degree detection apparatus of vacuum breaker

Info

Publication number
JPS60225039A
JPS60225039A JP8031184A JP8031184A JPS60225039A JP S60225039 A JPS60225039 A JP S60225039A JP 8031184 A JP8031184 A JP 8031184A JP 8031184 A JP8031184 A JP 8031184A JP S60225039 A JPS60225039 A JP S60225039A
Authority
JP
Japan
Prior art keywords
vacuum
detector
shield
cable
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8031184A
Other languages
Japanese (ja)
Inventor
Kunio Yokokura
邦夫 横倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP8031184A priority Critical patent/JPS60225039A/en
Publication of JPS60225039A publication Critical patent/JPS60225039A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66Vacuum switches
    • H01H33/668Means for obtaining or monitoring the vacuum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To make it possible to detect the vacuum degree of a vacuum valve during the supply of a current, by using a coaxial cable as the output wire connected to a discharge detector and coaxially providing a conductor connecting an earthing electrode and a ground potential part to the outer periphery of said cable. CONSTITUTION:A discharge detector 6 using an elastic wave piezoelectric sensor and an earthing electrode 7 close to said detector 6 are attached to the outer peripheral surface of an insulating cylinder 1 and the outlet wires of the detector 6 and the electrode 7 are connected to one terminal of a coaxial cable 9. The cable 9 is formed by coaxially arranging the core wire 10 coming to the output wire of the detector 6 and a shield 11 through an insulating layer 12 and further providing a shield 13 and an insulating layer 14 to the outer periphery of said insulating layer 12. When a vacuum degree is lowered during the supply of a current to a vacuum valve, discharge is generated between electrodes 4a, 4b and the electrode 7 and charged particles are impinged to the shield 5 or the cylinder 1 to generate minute collision sound. This collision sound is converted to an electric signal by the detector 6 while said electric signal is transmitted to a control apparatus through the core wire 10 and the shiel 11 of the cable 9 to perform display, alarm or the detachment of the vacuum breaker.

Description

【発明の詳細な説明】 〔発明の技術分野〕 不発明は、真空しゃ断器(二係夕、4!it二真空パル
プ内(;おける放醒現!1により発生する、音、縦波。
[Detailed Description of the Invention] [Technical Field of the Invention] The invention is directed to the sound and longitudinal waves generated by a vacuum breaker (two strands, two vacuum pulps).

磁界等の変化を、真空パルプ(=設けた放磁検出器およ
び接地44111で検出する出力線の改良(二t!lr
る。
Improvement of the output line that detects changes in the magnetic field, etc. using the vacuum pulp (= installed magnetic discharge detector and grounding 44111) (2t! lr
Ru.

〔発明の技術的背景とその間照点3 濁知のより(=、真空しゃ断器が所定の性能を発揮する
(=は、真空パルプの真空度が所定の1@−内(二維持
されていることが必要cbる。ところで、従来使用を始
めてからの真空パルプの真空fft検出する方法として
、(1)、真空バルブ内の耐岨圧を測定する、(2)、
真空し十I!R器が開績時(二負荷側(二発生する磁圧
を測定する等が適宜採用されていた。
[Technical Background of the Invention and Points of Interest 3: From the perspective of Nakuchi (=, the vacuum breaker exhibits a predetermined performance (= means that the degree of vacuum of the vacuum pulp is maintained within a predetermined 1@-(2) By the way, conventional methods for detecting the vacuum fft of vacuum pulp after it has been used include (1) measuring the pressure resistance inside the vacuum valve; (2)
Vacuum Shiju I! Measurement of the magnetic pressure generated when the R machine is open (2nd load side) was adopted as appropriate.

しかしながら、これらの方法は、何れも真空しゃ断器が
通鴫状悪での真空匿検出で扶ないので、もし通磁中1=
真空度が低下した場合(二は、この低下した状態で磁流
をし一?所しなければならなくなるが、しゃ断性能が低
下してしまっているから4流をしゃ断することはできな
い(3相回婚の場合は、他相で4ftをしゃ断するので
、結果的1二真空度が低下した真空パルプでも磁流をし
ゃ断したよう(=みえる)。
However, none of these methods can rely on vacuum shielding detection when the vacuum breaker is in a bad condition, so if 1 =
When the degree of vacuum decreases (secondly, in this decreased state, the magnetic current must be placed in one place), but it is not possible to shut off the 4th flow because the breaking performance has deteriorated (3-phase In the case of regenerator, the other phase cuts off 4ft, so it appears that even vacuum pulp, which has a lower degree of vacuum, cuts off the magnetic current (= it appears).

したがって1通磁中における真空パルプの真空度検出を
可能(ニすることは、真空しゃ断器の信頼性を大きく向
上させることになる。
Therefore, making it possible to detect the degree of vacuum in the vacuum pulp during one magnetization greatly improves the reliability of the vacuum breaker.

近年、センナ技術の進歩(二より、微小な物理現象から
信号を取シ出すことが可能になってきた。
In recent years, advances in Senna technology have made it possible to extract signals from minute physical phenomena.

そこで、真空パルプが通電中(=真空度が低下したとき
(二生ずる種々の物m現象から信号を取シ出して真空度
を検出する手法も検討されており、本出頭人も先C二真
空パルプの真空容器を構成する絶縁円筒の外i+*−二
放4L横出器を設ける手法を提案した。
Therefore, a method of detecting the degree of vacuum by extracting signals from various phenomena that occur when the vacuum pulp is energized (= when the degree of vacuum decreases) is also being considered, and the present applicant also investigated the method of detecting the degree of vacuum by We proposed a method of installing an i++-2 4L side extractor outside the insulated cylinder that constitutes the pulp vacuum container.

ところで、このような手法における検出器の信号は微小
であるから、真空しゃ断器が接続される高醸圧04力系
統では、検出器から増幅器を含む制御装置までの4朦で
ある出力線(二誘導(=起因すると考えられるノイズが
X萱されて1g号が不正となる。そこで、このノイズ賃
を低減することが、上記した手法(=よる真空度の検出
にとって重要な線層となり、この解決が望まれていた。
By the way, since the signal from the detector in such a method is minute, in the high-pressure 04 power system to which the vacuum breaker is connected, there are four output lines (two wires) from the detector to the control device including the amplifier. The noise that is thought to be caused by induction (= is was desired.

〔発明の目的〕[Purpose of the invention]

不発明は、通峨中感二おける真空パルプの真空度を高n
度艦二検出可能とした真空しゃirr器の真空度検出装
置を提供することを目的とする。
The invention is to increase the degree of vacuum of the vacuum pulp in the two-dimensional process.
An object of the present invention is to provide a vacuum degree detection device for a vacuum shield device that is capable of detecting degree of vacuum.

〔発明の概要〕[Summary of the invention]

本発明は、絶縁円筒の両端(=端板な設けた真空容器の
内S(二接嫌自在とした一対のilE極を設けるととも
に、絶縁円筒の外側(二放鑞検出器と接地検出器を設け
た真空しゃ断器の真空度検出装[+二おいて、放電検出
器(二接続される出力線を同軸ケーブルとし、この同軸
ケーブルの外周(二同軸状に接地磁極と大地戒位部を接
続rる導体を設けることにより、放電検出器からのイ!
号(二外部からの鱒導(二よ9重畳されるノイズを低減
するようにしたものである。
The present invention provides a pair of ilE poles that can be connected freely to the inside of the vacuum vessel S (= end plates) provided at both ends of the insulating cylinder (= end plates), and a pair of ilE electrodes that are freely connected to the outside of the insulating cylinder (= end plates). The vacuum level detection device of the vacuum breaker installed [+2, the discharge detector (2) The output line to be connected is a coaxial cable, and the outer circumference of this coaxial cable (2 coaxially connects the ground magnetic pole and the earth positioning part) By providing a conductor, the electric current from the discharge detector can be removed.
This is designed to reduce the noise that is superimposed on the external noise.

〔発明の実施例〕[Embodiments of the invention]

以下本発明の一実施例を図面(二ついて説明する。 An embodiment of the present invention will be described below with reference to two drawings.

(〕 第1図および第2図(二おいて、絶縁筒1とこの両4(
=設けられた端板2.2で構成された真空容器3内(二
は、接離自在とした一対の電極4a、4bが配設され、
この電極4a、4bの周囲にシールド5が設けられてい
る。また、絶縁層@1の外周面(=は弾性波圧電センナ
を用いた放11&検出器6とこの放(検出器6の近接し
て接地IIE極7を取付け、この接地4極7と放電検出
器6を絶縁層8で被覆する。しかして、放電検出器6の
口出線と接地4極70日出線を、詳細を後述する同軸ケ
ーブル9の一端(二接続する。なお、この同軸ケーブル
9の他端は、増幅器を含む図示しない制御装置(=接続
される。同軸ケーブル9は、第2図1:、1lFr面形
状を示すように放電検出器6の出力線となる芯@ioと
7−ルド11が同軸状(二装置され、この芯#10とシ
ールド11の間(;絶創12が設けられ、また、この絶
縁ノー12の外f41=は接地4E極7(′−接続され
るシールド13が、芯様lOおよびシールド11と同軸
状(二装置され、シールド13の外周(=##414が
設けられ被覆した構成となっている。なお、シールド1
3の一端は真空しゃ断器の金属材から形成された枠体の
ような大地醸位部へ接続される。
() Figures 1 and 2 (2) Insulating cylinder 1 and both 4 (
=Inside the vacuum container 3 composed of the provided end plate 2.2 (the second is a pair of electrodes 4a and 4b which can be freely brought into contact and separated,
A shield 5 is provided around the electrodes 4a, 4b. In addition, the outer circumferential surface of the insulating layer @1 (= is the discharge 11 using an acoustic wave piezoelectric sensor & detector 6 and this discharge (a grounded IIE pole 7 is installed near the detector 6, and this grounded 4 pole 7 and discharge detection The device 6 is coated with an insulating layer 8.The output wire of the discharge detector 6 and the grounding 4-pole 70 wire are connected to one end (two ends) of a coaxial cable 9, which will be described in detail later. The other end of 9 is connected to a control device (not shown) including an amplifier. The coaxial cable 9 is connected to the core @io which becomes the output line of the discharge detector 6, as shown in FIG. 7 - The lead 11 is coaxially arranged (2 devices, and between the core #10 and the shield 11 (; an insulation node 12 is provided, and the outer f41 of this insulation node 12 is connected to the ground 4E pole 7 ('- connected). The shield 13 is coaxial with the core lO and the shield 11, and the outer periphery of the shield 13 (=##414) is provided and covered.
One end of 3 is connected to a grounding part such as a frame made of metal material of the vacuum breaker.

次に上記構成(=よる真空度の検出方法を説明する。真
空パルプの通電中(二真空度が低下すると、題他4m、
4bと接地磁極70間(二、シールド5、Kffl 4
a 、 4bもしくは7−ルド5から発生する荷鑞粒子
がシールド5もしくは絶縁円筒1(=衝突し、微小な衝
突音を発生する。この衝突音が絶縁円筒1を伝幡し、放
電検出器6へ到達し、放電検出器6で嘔気信号(二変換
される。この変換された信号は、同軸ケーブル9の芯線
10とシールド11を介して増幅器を含む図示しない制
御装置へ伝達され、真空度が所定範囲または所定値を超
えて低下した場合(二は、外部へ表示して警告し、また
必要(二応じ真空しゃf!R器の引き外しもしくは関連
機器の制御を行なう。
Next, we will explain the method for detecting the degree of vacuum according to the above configuration.
4b and the ground magnetic pole 70 (2, shield 5, Kffl 4
a, 4b or 7- The charged solder particles generated from the shield 5 collide with the shield 5 or the insulating cylinder 1 (= = generate a minute collision sound. This collision sound propagates through the insulating cylinder 1, and the discharge detector 6 and is converted into a nausea signal (2) by the discharge detector 6. This converted signal is transmitted to a control device (not shown) including an amplifier via the core wire 10 of the coaxial cable 9 and the shield 11, and the degree of vacuum is determined. If the drop exceeds a predetermined range or value (2), display a warning externally, and if necessary (2) remove the vacuum shutoff unit or control related equipment.

真空中(=おける絶縁耐圧(二ついては、第3図(=示
すようなパッシェンカーブとして周知の特性がある。こ
の特性から判かるよう(=、真空度が低下してくると急
激に絶縁耐圧が低下し、さら(二真空就が低下すると絶
縁耐圧が再び向上する。このため、磁極4a、4bと接
地[極1間の放44流は、同図(一点線で示すよう(二
山形の特性を有する。したがって、真空度が低下し絶縁
耐圧が極小値となりf−J−裔l−鯵dd麿げ姶すkか
スーネた−故I直訛は、第4図(=示すように接地1[
極70面積が大きくなるC二従って増大する傾向がある
。この現象は、*jtmmE47と磁極4&14bの間
(=生ずる漂遊キャパシタンスにたくわえられた罐荷が
放題するものと考えられる。即ち、−戒(二4極開のキ
ャパシタンスCは次の(1)式に示す関係がある。
There is a well-known characteristic known as the Paschen curve as shown in Figure 3 (= dielectric strength voltage in vacuum). As the dielectric strength decreases, the dielectric strength increases again. Therefore, the discharge current between the magnetic poles 4a and 4b and the grounding pole 1 is as shown in the same figure (as shown by the dotted line (the characteristic of a double peak). Therefore, as the degree of vacuum decreases and the dielectric strength voltage reaches its minimum value, [
There is a tendency for C2 to increase as the area of the pole 70 increases. This phenomenon is thought to be caused by the charge stored in the stray capacitance generated between *jtmmE47 and the magnetic poles 4 & 14b being released. In other words, the capacitance C of the 24-pole open circuit is expressed by the following equation (1). There is a relationship to show.

0〜足 ・・・・・・(1) ここで、5rilL極の面積、dは磁極間距離を示す。0~foot・・・・・・(1) Here, the area of the 5rilL pole and d indicate the distance between the magnetic poles.

また、キャパシタンスC(二だくわえられる颯荷Qは次
の(2)式でpされる。
In addition, the capacitance C (capacitance Q that can be added) is calculated by the following equation (2).

Q −eV ・・・・・・(2) ここで、■は4E極間の罐位差を示す。鑞荷Qと放4E
<AIはほぼ比例するから、放題11L流工は(1)。
Q −eV (2) Here, ■ indicates the cap position difference between the 4E poles. Qing Q and Ho 4E
<Since AI is almost proportional, unlimited 11L flow is (1).

12)一式から次の(3)式(=示す関係がある。12) From the set, there is the relationship shown in the following equation (3).

””r ・・・・・つ3) この(3)式から、峨他面積が増大すると放alE4E
流の増大することが判かる。しかしながら、(3)式)
2示す面積Sは有効面積であり、真空パルプのような複
雑な電極構造を有する場合、接地IIL億7の面積を単
純に大きくしても有効面積が比例的;:増大せず、第4
図(2示tようにサチユレーションするが、中容量以下
の真空しゃ断器で100騙t、m度の領域では(3)式
が成立する。したがって、接地lIE極7(二よって真
壁低下時の放4E4Aは増大し、絶縁円筒1への画題粒
子の衝突音も大きくなp、結果的(二放鑞検出器6の出
力信号も増大する。
""r...tsu3) From this equation (3), as the other area increases, aalE4E
It can be seen that the flow increases. However, equation (3))
2 The area S shown is the effective area, and when the electrode structure is complex like vacuum pulp, even if the area of the ground IIL 7 is simply increased, the effective area does not increase proportionally;
Although saturation occurs as shown in Figure 2, equation (3) holds true in the region of 100 t and m degrees for a vacuum breaker with a medium capacity or less. The radiation 4E4A increases, the sound of the particle colliding with the insulating cylinder 1 also becomes louder, and as a result, the output signal of the second radiation detector 6 also increases.

一方、同軸ケーブルの芯線(=誘起するノイズは、シー
ルド数をバクメータとすればs5図に示すようになる。
On the other hand, if the number of shields is used as a back meter, the noise induced in the core wire of a coaxial cable will be as shown in diagram s5.

これから、シールド数が増加するごとにより芯線へのノ
イズが大幅(二低減することが判かる。同軸ケーブルの
シールドが完全であれば、7一ルド層は一層でよいこと
(二なるが、実際(二は完全なシールドを設けることが
不可能であるから、シールド層を多層化することがiA
実的であシかり製作費も安価となる。
From this, it can be seen that the noise to the core wire is significantly reduced as the number of shields increases.If the coaxial cable is perfectly shielded, only one lead layer is required (2), but in reality ( Second, it is impossible to provide a complete shield, so it is important to have multiple shield layers.
It is practical and the production cost is low.

以上のようC二放罐検出器6の出力線と接地磁極7の接
続線を同軸状に一体化したので、通磁中の真空パルプの
真空度を1%精度(=検出することができるとともに、
A!しゃ断器への取付配線もきわめて容易となる。
As described above, since the output line of the C2 discharge can detector 6 and the connection line of the ground magnetic pole 7 are coaxially integrated, the degree of vacuum of the vacuum pulp during magnetization can be detected with 1% accuracy (= ,
A! Installation and wiring to the circuit breaker is also extremely easy.

(lIA明の効果〕 本発明は以上のよう(二構成されているから、通電中の
真空パルプの真空度を高精度に構出でき、員fl@の運
転の管埋を容易とすることができる。
(Effects of IIA Akira) As described above, since the present invention has two configurations, the degree of vacuum of the vacuum pulp during energization can be configured with high precision, and the pipe filling of the operation of the member fl@ can be made easy. can.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明(二関遵する真空パルプの断面図、第2
図は本@明の一実施例の要部の断面図、第3図は真空パ
ルプの真空度と絶縁耐力および放題磁流との関係を示す
曲線図、弗4図は真空パルプの接jIl&−他の面積と
放亀成滝の関係を示す曲巌崗、第5図は同軸ケーブルの
シ・−ルド数と芯線への誘起磁圧との関係を示す曲線図
である。 l・・・・・・絶縁容器、 3・・・・・・真空容器4
a、 4b・・・・・・磁極、6・・曲数I4f!IL
出器7・・・・・・接地磁極、 9・・四同軸クープル
111、、、、、、jtai醜111A、、、−、、J
〕m−L”13、15・曲・絶縁層 (8733)代理人 弁理士 猪 股 祥 晃(はが1
名ン第 1 図 第 3 図 111−1シー)しド散
Figure 1 is a cross-sectional view of vacuum pulp according to the present invention (Second Edition).
The figure is a cross-sectional view of the main part of an example of this @mei, Figure 3 is a curve diagram showing the relationship between the degree of vacuum, dielectric strength and unlimited magnetic current of vacuum pulp, and Figure 4 is a diagram showing the relationship between the vacuum pulp and the dielectric strength and unlimited magnetic current. FIG. 5 is a curve diagram showing the relationship between the number of shields of a coaxial cable and the magnetic pressure induced in the core wire. l...Insulating container, 3...Vacuum container 4
a, 4b...Magnetic pole, 6...Number of songs I4f! IL
Output device 7...Ground magnetic pole, 9...Four coaxial couple 111,,,,,jtai ugly 111A,,,-,,J
]m-L”13,15・Curve・Insulating layer (8733) Agent Patent attorney Yoshiaki Inomata (Haga1
Figure 1 Figure 3 Figure 111-1

Claims (1)

【特許請求の範囲】[Claims] (1)絶縁円筒の両端(二端板な設けた真空容器の内部
C二接離自在とした一対の4他を設けるとともに、前記
絶縁円筒の外IQN二放峨検出器と接地磁極を設けた真
空しゃfr器の真空度検出装置において、前記放磁検出
器(二接続される出力線を同軸ケーブルとし、この同軸
ケーブルの外周(=同軸状(二11tI記接地域他と大
地鴫位部を接続する導体を設けたことを特徴とする真空
しゃ断器の真空度検出装置。 12) 同軸ケーブルの外周(二同軸状に設けた導体の
外周(二絶縁被覆層を設けたことを特徴とする特#!F
請求の範囲第1項記載の真空しゃ断器の真空度検出装置
(1) Both ends of the insulating cylinder (two-end plates) were provided inside the vacuum vessel, and a pair of four others were provided, and an IQN two-radius detector and a ground magnetic pole were provided outside the insulating cylinder. In the vacuum level detection device of the vacuum breaker, the output line connected to the magnetic discharge detector (2) is a coaxial cable, and the outer periphery of this coaxial cable (= coaxial shape (211tI) ground area and other A vacuum level detection device for a vacuum breaker, characterized in that a connecting conductor is provided. #!F
A vacuum degree detection device for a vacuum breaker according to claim 1.
JP8031184A 1984-04-23 1984-04-23 Vacuum degree detection apparatus of vacuum breaker Pending JPS60225039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8031184A JPS60225039A (en) 1984-04-23 1984-04-23 Vacuum degree detection apparatus of vacuum breaker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8031184A JPS60225039A (en) 1984-04-23 1984-04-23 Vacuum degree detection apparatus of vacuum breaker

Publications (1)

Publication Number Publication Date
JPS60225039A true JPS60225039A (en) 1985-11-09

Family

ID=13714716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8031184A Pending JPS60225039A (en) 1984-04-23 1984-04-23 Vacuum degree detection apparatus of vacuum breaker

Country Status (1)

Country Link
JP (1) JPS60225039A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105719900A (en) * 2016-04-01 2016-06-29 三峡大学 Microwave vacuum breaker vacuum degree pre-warning device
CN110197784A (en) * 2019-05-31 2019-09-03 江苏鲁汶仪器有限公司 A kind of protective device of the vacuum measurement tool of ion beam etching system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105719900A (en) * 2016-04-01 2016-06-29 三峡大学 Microwave vacuum breaker vacuum degree pre-warning device
CN110197784A (en) * 2019-05-31 2019-09-03 江苏鲁汶仪器有限公司 A kind of protective device of the vacuum measurement tool of ion beam etching system
CN110197784B (en) * 2019-05-31 2021-07-27 江苏鲁汶仪器有限公司 Protection device of vacuum measuring tool of ion beam etching system

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