JPS60218009A - Shape measuring instrument - Google Patents
Shape measuring instrumentInfo
- Publication number
- JPS60218009A JPS60218009A JP7421684A JP7421684A JPS60218009A JP S60218009 A JPS60218009 A JP S60218009A JP 7421684 A JP7421684 A JP 7421684A JP 7421684 A JP7421684 A JP 7421684A JP S60218009 A JPS60218009 A JP S60218009A
- Authority
- JP
- Japan
- Prior art keywords
- displacement meter
- vector
- found
- arm
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は形状計測装置に係り、特に水車のランチのよう
な複雑な流路形状を有する物品の形状を非接触式に計測
できるようにした形状計測装置に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a shape measuring device, and particularly to a shape measuring device that can non-contactly measure the shape of an article having a complicated flow path shape, such as a water turbine launch. Regarding measuring devices.
第1図および第一図は水車の2ンナを示し、このランナ
lは、ランナクラウンコとランチバンド3とを有し、そ
れらの間には複数枚の2ンナ羽根亭、り、・・・lが挾
持されている。これらのランチ羽根参の間に形成される
流路は複雑な形態をしており、との流路の形状は複雑で
あって検査をすることは困難である。従来は数個所の測
点における寸法を、作業者がゲージを使って計測してい
るにすぎず正確な流路の全体形状を測定することができ
なかった。特に流路の連続した形状をゲージで把握する
ことは著しく困難であって長時間にわたる作業時間を必
要とした。Figures 1 and 1 show a two runner of a water wheel, this runner l has a runner crown and a launch band 3, and between them there are a plurality of two liner blades, ri,...l. is being held. The flow paths formed between these lunch feathers have a complicated shape, and the shapes of the flow paths between the two are difficult to inspect. In the past, workers only measured dimensions at several measurement points using gauges, and it was not possible to accurately measure the overall shape of the flow path. In particular, it was extremely difficult to grasp the continuous shape of the flow path using a gauge, and required a long time to work.
そこで、本発明の目的は、3次元形状を有する物体の形
状を非接触式に測定可能な形状測定装置を提供すること
にある。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a shape measuring device that can measure the shape of an object having a three-dimensional shape in a non-contact manner.
上記目的を達成するために、本発明は、形状、1−測定
すべき被測定物に向って移動可能なアームと、このアー
ム上の所定位置に取付けられた複数の点光源と、上記ア
ームの先端に保持された非接触変位計と、この変位計を
アームの軸まわりに旋回動させる装置と、上記変位計を
アームの軸方向に直線移動させる装置と、上記点光源か
らの光が届く位置に設置された点光源の3次元座標を測
定する装置とを備えてなるものである。To achieve the above object, the present invention has the following features: (1) an arm movable toward an object to be measured; a plurality of point light sources mounted at predetermined positions on this arm; A non-contact displacement meter held at the tip, a device that rotates this displacement meter around the axis of the arm, a device that moves the displacement meter linearly in the axial direction of the arm, and a position where the light from the point light source reaches. The system is equipped with a device for measuring the three-dimensional coordinates of a point light source installed at a point light source.
以下本発明による形状測定装置の一実施例を第第3図に
おいて、符号lは被測定物であるランチを示し、ランナ
/の2ンナ剖轡参の形状を測定する例を示している。図
中符号jは関節6および7のところで屈曲自在な多関節
ロボットを示し、このμボッ)jは伸縮運動可能なアー
ムlを備えている。このアームtの先にはヘッドタが設
けられ、このヘッドタの上に3つの点光源10&、10
b。An embodiment of the shape measuring apparatus according to the present invention is shown in FIG. 3, in which reference numeral 1 indicates a lunch as an object to be measured, and an example is shown in which the shape of a 2-nare runner ginseng is measured. Reference numeral j in the figure indicates a multi-jointed robot that can bend freely at joints 6 and 7, and this μ robot j is equipped with an arm l that can extend and contract. A header is provided at the end of this arm t, and three point light sources 10&, 10 are placed on this header.
b.
10aが設けられている。10a is provided.
一方、上記ロボットの据付面上には、3次元座標測定装
置//が設置され、この3次元座標測定装置llは上記
点光源の1つ例えば点光源10aからの放射光を受光し
て三角測量の原理を利用して空間ようにしたものでおる
。On the other hand, a three-dimensional coordinate measuring device // is installed on the installation surface of the robot, and this three-dimensional coordinate measuring device ll receives radiation light from one of the point light sources, for example, the point light source 10a, to perform triangulation It is a space created using the principle of
しかして、上記ヘッ゛ドタの先端には、回転ペースlコ
が固着され、この回転イースノコに対してベアりを回転
可能に装着されている。この回転リングIQの根元には
回転−ャ73が固着され、第1サーボって回転駆動され
るようになっている。なお、回転リンQダの中心まわり
の回転角は第7サーボモータ16のパルス発生器から検
知することができる。A rotary pace l is fixed to the tip of the head saw, and a bearing is rotatably attached to the rotary ease saw. A rotator 73 is fixed to the base of the rotary ring IQ, and is rotatably driven by a first servo. Note that the rotation angle around the center of the rotary ring Qda can be detected from the pulse generator of the seventh servo motor 16.
また、上記回転リン/lダの端面にはガイド棒/1およ
び送りねじ棒19が固着され、これらの棒は互いに千朽
であって先端を止め板Iによって結合されている。Further, a guide rod 1 and a feed screw rod 19 are fixed to the end face of the rotary cylinder/lender, and these rods are fixed to each other and are connected at their tips by a stop plate I.
さらに、上記ガイド@/1llcはキャリ、ジコ/カ軸
方向へ摺動可能に装架され、このキャリ、ジJ/上には
非接触変位計、;矛tsqされてiる。この非接触変位
計nは例えば半導体レーザ光源22aとOODカメラ2
2bとを組合せたものが好適であるが、これに限定され
るものではなく公知の光学式変位計を使うこともできる
。Further, the guide is mounted so as to be slidable in the axial direction of the carrier, and a non-contact displacement meter is mounted on the carrier. This non-contact displacement meter n includes, for example, a semiconductor laser light source 22a and an OOD camera 2.
2b is preferred, but the present invention is not limited to this, and a known optical displacement meter may also be used.
また、上記キャリッジ21の内側にはベアリングnを介
して駆動歯車Uが支承され、駆動歯車Uの中心にはめね
じ孔6が形成されておシ、上記送りねじ棒19にねじ結
合されている。上記駆動歯車Uには外歯部が形成されて
いてビニオン歯車nとかみ合っている。このビニオン歯
車nは第2サーボモータ28によって駆動されるように
なってhる。Further, a drive gear U is supported inside the carriage 21 via a bearing n, and a female screw hole 6 is formed in the center of the drive gear U, and is screwed to the feed screw rod 19. The drive gear U is formed with external teeth and meshes with the pinion gear n. This pinion gear n is driven by the second servo motor 28.
なお、この第2サーボモータ路のパルス発生器から非接
触変位計器のガイド棒18の軸方向に沿った移動量を検
出することが可能である。Note that it is possible to detect the amount of movement of the guide rod 18 of the non-contact displacement meter along the axial direction from the pulse generator of this second servo motor path.
このように構成された結果、第1サーボモータ16がピ
ニオン17を回転駆動すると、回転ギヤ15がアーム8
の軸心回シを回動し、回転リング14と共にガイド棒1
8および送多ねじ棒19が回転され、これによシ非接触
変位計nがアーム8の軸心まわシを回転することになる
。As a result of this configuration, when the first servo motor 16 rotationally drives the pinion 17, the rotating gear 15 rotates the arm 8.
The guide rod 1 is rotated together with the rotating ring 14.
8 and the feed threaded rod 19 are rotated, thereby causing the non-contact displacement meter n to rotate around the axis of the arm 8.
一方、第2サーボモータあがビニオン歯車nを回転駆動
すると、駆動歯車別が回転するからガイド捧18に沿っ
てキャリッジ21が直線移動し、非接″触変位計nが軸
線方向に移動する。On the other hand, when the second servo motor rotates the pinion gear n, the drive gear rotates, so the carriage 21 moves linearly along the guide rod 18, and the non-contact displacement meter n moves in the axial direction.
第6図はランチのランチ羽根番の形状を計測中の態様を
示しておシ、図中へ点は固定座標原点を示し、B点は3
次元座標測定装置11の基準点、9点は点光源10m
、 10b 、 10aを構成する平面の方向ベクトル
の始点、1点は光学式変位計nの基準点、1点はランチ
羽根4上の計測点を示している。Figure 6 shows the state in which the shape of the lunch blade number is being measured.
The nine reference points of the dimensional coordinate measuring device 11 are point light sources of 10 m.
, 10b and 10a, one point is the reference point of the optical displacement meter n, and one point is the measurement point on the launch blade 4.
次に本発明による形状計測装置の作用について述べる。Next, the operation of the shape measuring device according to the present invention will be described.
第6図において、光学式変位計nの基準点Eと計測すべ
きランチ羽根4上の測点Fとの間のベクトルπは、前記
第1サーボモータ16のパルス発生器によシ回転リング
14の回転ペース12に対する回転角をめることによっ
てベクトルgの方向がまシ、ベクトルの大きさは非接触
式変位計nの3角測量によ請求まる。また、第2サーボ
モータ四の/墾ス発生器によシ非接触変位計nの軸方向
への移動位置が検出されベクトル1の大きさがまシ、ベ
クトル頂の方向は10a 、 10b 、 10aの点
光源を3次元座標測定装置で計測することKよ請求まる
。さらに同じ計測によってベクトル■がわか@にとって
固定した値を有しているので、固的座標原点Aからの位
置ベクトルaをめることができる。In FIG. 6, the vector π between the reference point E of the optical displacement meter n and the measuring point F on the launch blade 4 to be measured is determined by the pulse generator of the first servo motor 16. The direction of the vector g can be determined by determining the rotation angle with respect to the rotation pace 12, and the magnitude of the vector can be determined by triangulation using the non-contact displacement meter n. Further, the movement position of the non-contact displacement meter n in the axial direction is detected by the second servo motor 4/force generator, and the magnitude of vector 1 is correct, and the direction of the top of the vector is 10a, 10b, 10a. It is requested that K measure the point light source of , using a three-dimensional coordinate measuring device. Furthermore, by the same measurement, the vector (2) has a fixed value for Waka@, so the position vector a from the fixed coordinate origin A can be determined.
以上の説明から明らかなように、本発明によれば、アー
ムの先端に非接触変位計を設け、この非接触変位計の基
準点からの軸方向の移動量と回動量の位置ベクトルを検
出できるようにしたから、複雑な形状を有する被計測場
所に入シ込ませて内部の形状を計測することができ、ま
たその非接触式変位計の固定座標に対する位置を先端位
置計測装置によって計測するので狭 な被計測場所をロ
ボットのアームの撓みなどによる位置誤差に影響される
ことなく正確に計測することができる。As is clear from the above description, according to the present invention, a non-contact displacement meter is provided at the tip of the arm, and the position vector of the axial movement amount and rotation amount from the reference point of this non-contact displacement meter can be detected. Because of this, it is possible to enter a place to be measured that has a complex shape and measure the internal shape, and the position relative to the fixed coordinates of the non-contact displacement meter is measured by the tip position measuring device. It is possible to accurately measure narrow measurement locations without being affected by positional errors caused by bending of the robot arm.
第1図は被計測物としてのう゛ンナの一部を示した平断
面図、第2図は同ランチの縦断面図、第3図は2ンナに
対して本率明による形状計測装置の全体をセットした状
態を示した斜視図、第4図は本発明の要部を示した斜視
図、第5図は同計測装置を示した縦断面図、第6図は計
測時のベクトルを示した説明図である。
8・・・アーム、10a 、 10b 、 10a−・
点光源、16−・・第1サーボモータ、18・・・ガイ
ド捧、19・・・送シねじ棒、n・・・非接触変位計、
28・・・第2サーボ七−タ。
出願人代理人 猪 股 清
弗 l 図
弗 2 @
L 3 図
第 5 図Figure 1 is a plan cross-sectional view showing a part of the lunch as an object to be measured, Figure 2 is a vertical cross-section of the same lunch, and Figure 3 is the entire shape measuring device according to this initiative for the 2-runner. Fig. 4 is a perspective view showing the main parts of the present invention, Fig. 5 is a vertical sectional view showing the measuring device, and Fig. 6 shows vectors during measurement. It is an explanatory diagram. 8... Arm, 10a, 10b, 10a-.
Point light source, 16--First servo motor, 18--Guide support, 19--Feed screw rod, n--Non-contact displacement meter,
28...Second servo seventh. Applicant's agent Kiyohisa Inomata l Figure 2 @ L 3 Figure 5
Claims (1)
、このアーム上の所定位置に取付けられた複数の点光源
と、上記アームの先端に保持された非接触変位計と、こ
の変位計をアーム軸まわりに旋回動させる装置と、上記
変位計をアームの軸方向に直線移動させる装置と、上記
点光源からの光が届く位置に設置され点光源の3次元座
標を測定する装置とを備えてなる形状計測装置。An arm movable toward an object whose shape is to be measured, a plurality of point light sources attached to predetermined positions on this arm, a non-contact displacement meter held at the tip of the arm, and this displacement meter. A device for rotating the displacement meter around the arm axis, a device for linearly moving the displacement meter in the axial direction of the arm, and a device installed at a position where the light from the point light source can reach and measuring the three-dimensional coordinates of the point light source. Shape measuring device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7421684A JPS60218009A (en) | 1984-04-13 | 1984-04-13 | Shape measuring instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7421684A JPS60218009A (en) | 1984-04-13 | 1984-04-13 | Shape measuring instrument |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60218009A true JPS60218009A (en) | 1985-10-31 |
JPH051884B2 JPH051884B2 (en) | 1993-01-11 |
Family
ID=13540773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7421684A Granted JPS60218009A (en) | 1984-04-13 | 1984-04-13 | Shape measuring instrument |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60218009A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06288756A (en) * | 1991-06-26 | 1994-10-18 | Sulzer Escher Wyss Ag | Method and device for determining surface profile of vane of impeller of fluid machine |
CN107923742A (en) * | 2015-08-19 | 2018-04-17 | 索尼公司 | Information processor, information processing method and program |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5537997A (en) * | 1978-09-05 | 1980-03-17 | Westinghouse Electric Corp | Photoelectric combining apparatus |
JPS58196406A (en) * | 1982-05-13 | 1983-11-15 | Kawasaki Steel Corp | Device for measuring furnace wall profile |
-
1984
- 1984-04-13 JP JP7421684A patent/JPS60218009A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5537997A (en) * | 1978-09-05 | 1980-03-17 | Westinghouse Electric Corp | Photoelectric combining apparatus |
JPS58196406A (en) * | 1982-05-13 | 1983-11-15 | Kawasaki Steel Corp | Device for measuring furnace wall profile |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06288756A (en) * | 1991-06-26 | 1994-10-18 | Sulzer Escher Wyss Ag | Method and device for determining surface profile of vane of impeller of fluid machine |
CN107923742A (en) * | 2015-08-19 | 2018-04-17 | 索尼公司 | Information processor, information processing method and program |
CN107923742B (en) * | 2015-08-19 | 2021-02-12 | 索尼公司 | Information processing apparatus, information processing method, and program |
Also Published As
Publication number | Publication date |
---|---|
JPH051884B2 (en) | 1993-01-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |