JPS60218009A - Shape measuring instrument - Google Patents

Abstract

PURPOSE:To measure without contacting the shape of an object having a three- dimensional shape by providing a noncontacting displacement meter at the tip of an arm movable toward a material to be measured and by detecting potential vectors of the movement quantity and rotation quantity of an axial direction of from the basis point of a non-contacting displacement meter. CONSTITUTION:The direction of a vector EF between a basic point E of an optical displacement meter 22 and a measuring point F on a runner blade 4 to be measured is found by finding a rotary angle against a rotary base 12 of a rotary ring 14 with the 1st servomotor 16 and the size of vector is found by a trigonometrical survey of the noncontacting displacement meter 22. And the movement position of to the axial direction of the noncontacting displacement meter 22 is detected with the 2nd servomotor 28 and the size of vector DE is found therefrom, also the direction of vector DE from point light sources 10a, 10b, 10c is found. Further vector CD is found and a potential vector AF from a fixed coordinate origin A is found.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a shape measuring device, and particularly to a shape measuring device that can non-contactly measure the shape of an article having a complicated flow path shape, such as a water turbine launch. Regarding measuring devices.

[Technical background of the invention and its problems]

Figures 1 and 1 show a two runner of a water wheel, this runner l has a runner crown and a launch band 3, and between them there are a plurality of two liner blades, ri,...l. is being held. The flow paths formed between these lunch feathers have a complicated shape, and the shapes of the flow paths between the two are difficult to inspect. In the past, workers only measured dimensions at several measurement points using gauges, and it was not possible to accurately measure the overall shape of the flow path. In particular, it was extremely difficult to grasp the continuous shape of the flow path using a gauge, and required a long time to work.

[Purpose of the invention]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a shape measuring device that can measure the shape of an object having a three-dimensional shape in a non-contact manner.

[Summary of the invention]

To achieve the above object, the present invention has the following features: (1) an arm movable toward an object to be measured; a plurality of point light sources mounted at predetermined positions on this arm; A non-contact displacement meter held at the tip, a device that rotates this displacement meter around the axis of the arm, a device that moves the displacement meter linearly in the axial direction of the arm, and a position where the light from the point light source reaches. The system is equipped with a device for measuring the three-dimensional coordinates of a point light source installed at a point light source.

[Embodiments of the invention]

An embodiment of the shape measuring apparatus according to the present invention is shown in FIG. 3, in which reference numeral 1 indicates a lunch as an object to be measured, and an example is shown in which the shape of a 2-nare runner ginseng is measured. Reference numeral j in the figure indicates a multi-jointed robot that can bend freely at joints 6 and 7, and this μ robot j is equipped with an arm l that can extend and contract. A header is provided at the end of this arm t, and three point light sources 10&, 10 are placed on this header.
b.

10a is provided.

On the other hand, a three-dimensional coordinate measuring device // is installed on the installation surface of the robot, and this three-dimensional coordinate measuring device ll receives radiation light from one of the point light sources, for example, the point light source 10a, to perform triangulation It is a space created using the principle of

A rotary pace l is fixed to the tip of the head saw, and a bearing is rotatably attached to the rotary ease saw. A rotator 73 is fixed to the base of the rotary ring IQ, and is rotatably driven by a first servo. Note that the rotation angle around the center of the rotary ring Qda can be detected from the pulse generator of the seventh servo motor 16.

Further, a guide rod 1 and a feed screw rod 19 are fixed to the end face of the rotary cylinder/lender, and these rods are fixed to each other and are connected at their tips by a stop plate I.

Further, the guide is mounted so as to be slidable in the axial direction of the carrier, and a non-contact displacement meter is mounted on the carrier. This non-contact displacement meter n includes, for example, a semiconductor laser light source 22a and an OOD camera 2.
2b is preferred, but the present invention is not limited to this, and a known optical displacement meter may also be used.

Further, a drive gear U is supported inside the carriage 21 via a bearing n, and a female screw hole 6 is formed in the center of the drive gear U, and is screwed to the feed screw rod 19. The drive gear U is formed with external teeth and meshes with the pinion gear n. This pinion gear n is driven by the second servo motor 28.

Note that it is possible to detect the amount of movement of the guide rod 18 of the non-contact displacement meter along the axial direction from the pulse generator of this second servo motor path.

As a result of this configuration, when the first servo motor 16 rotationally drives the pinion 17, the rotating gear 15 rotates the arm 8.
The guide rod 1 is rotated together with the rotating ring 14.
8 and the feed threaded rod 19 are rotated, thereby causing the non-contact displacement meter n to rotate around the axis of the arm 8.

On the other hand, when the second servo motor rotates the pinion gear n, the drive gear rotates, so the carriage 21 moves linearly along the guide rod 18, and the non-contact displacement meter n moves in the axial direction.

Figure 6 shows the state in which the shape of the lunch blade number is being measured.
The nine reference points of the dimensional coordinate measuring device 11 are point light sources of 10 m.
, 10b and 10a, one point is the reference point of the optical displacement meter n, and one point is the measurement point on the launch blade 4.

Next, the operation of the shape measuring device according to the present invention will be described.

In FIG. 6, the vector π between the reference point E of the optical displacement meter n and the measuring point F on the launch blade 4 to be measured is determined by the pulse generator of the first servo motor 16. The direction of the vector g can be determined by determining the rotation angle with respect to the rotation pace 12, and the magnitude of the vector can be determined by triangulation using the non-contact displacement meter n. Further, the movement position of the non-contact displacement meter n in the axial direction is detected by the second servo motor 4/force generator, and the magnitude of vector 1 is correct, and the direction of the top of the vector is 10a, 10b, 10a. It is requested that K measure the point light source of , using a three-dimensional coordinate measuring device. Furthermore, by the same measurement, the vector (2) has a fixed value for Waka@, so the position vector a from the fixed coordinate origin A can be determined.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, a non-contact displacement meter is provided at the tip of the arm, and the position vector of the axial movement amount and rotation amount from the reference point of this non-contact displacement meter can be detected. Because of this, it is possible to enter a place to be measured that has a complex shape and measure the internal shape, and the position relative to the fixed coordinates of the non-contact displacement meter is measured by the tip position measuring device. It is possible to accurately measure narrow measurement locations without being affected by positional errors caused by bending of the robot arm.

[Brief explanation of the drawing]

Figure 1 is a plan cross-sectional view showing a part of the lunch as an object to be measured, Figure 2 is a vertical cross-section of the same lunch, and Figure 3 is the entire shape measuring device according to this initiative for the 2-runner. Fig. 4 is a perspective view showing the main parts of the present invention, Fig. 5 is a vertical sectional view showing the measuring device, and Fig. 6 shows vectors during measurement. It is an explanatory diagram. 8... Arm, 10a, 10b, 10a-.
Point light source, 16--First servo motor, 18--Guide support, 19--Feed screw rod, n--Non-contact displacement meter,
28...Second servo seventh. Applicant's agent Kiyohisa Inomata l Figure 2 @ L 3 Figure 5

Claims (1)

[Claims] An arm movable toward an object whose shape is to be measured, a plurality of point light sources attached to predetermined positions on this arm, a non-contact displacement meter held at the tip of the arm, and this displacement meter. A device for rotating the displacement meter around the arm axis, a device for linearly moving the displacement meter in the axial direction of the arm, and a device installed at a position where the light from the point light source can reach and measuring the three-dimensional coordinates of the point light source. Shape measuring device.