JPS60215540A - Production unit for porous parent material of optical fiber - Google Patents

Production unit for porous parent material of optical fiber

Info

Publication number
JPS60215540A
JPS60215540A JP59069569A JP6956984A JPS60215540A JP S60215540 A JPS60215540 A JP S60215540A JP 59069569 A JP59069569 A JP 59069569A JP 6956984 A JP6956984 A JP 6956984A JP S60215540 A JPS60215540 A JP S60215540A
Authority
JP
Japan
Prior art keywords
porous
target
optical fiber
shielding layer
parent material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59069569A
Other languages
Japanese (ja)
Other versions
JPS632903B2 (en
Inventor
Masaaki Yoshida
吉田　雅朗
Shigeki Endo
茂樹 遠藤
Shigeru Kisanuki
木佐貫　茂
Hideo Kakuzen
覚前　英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP59069569A priority Critical patent/JPS60215540A/en
Priority to DE8585102837T priority patent/DE3583168D1/en
Priority to EP85102837A priority patent/EP0157238B1/en
Priority to CA000477509A priority patent/CA1234971A/en
Priority to AU40405/85A priority patent/AU565670B2/en
Priority to KR1019850002028A priority patent/KR870001741B1/en
Priority to DK142085A priority patent/DK163659C/en
Publication of JPS60215540A publication Critical patent/JPS60215540A/en
Priority to US06/940,203 priority patent/US4713107A/en
Publication of JPS632903B2 publication Critical patent/JPS632903B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/10—Non-chemical treatment
    • C03B37/12—Non-chemical treatment of fibres or filaments during winding up
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/0144—Means for after-treatment or catching of worked reactant gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

PURPOSE:The inner surface of the chamber containing the target and the oxyhydrogen burner is covered with an electroconductive layer to stabilize the sooting onto the target whereby porous parent material of high quality is produced in high yield. CONSTITUTION:The chamber made of glass walls 5 is provided with the target 2 and an oxyhydrogen burner 3 so that the fine particles of SiO2, GeO2 and others formed in the burner 3 (4 stands for its flame) is made to accumulate on the top of the target whereby the porous parent material for optical fibers 1 is allowed to grow. In the chamber 1, a shielding network layer 7 of an electroconductive substance such as aluminum is set in a sphere shape along the inner surface of the wall 5.

Description

【発明の詳細な説明】 （イ）技術分野 この発明は光フアイバー用の多孔質母材を製造するため
に用いる、主としてＶＡＤ装置の改良（ＶＡＤ以外にも
、それと原１！ｌ！を同じくする外すす付は方法におい
て効果を有する）に関するものである。Detailed Description of the Invention (a) Technical field This invention mainly relates to improvements in VAD equipment (in addition to VAD, it also has the same basic characteristics as the original 1!l! Removing the attachment has an effect on the method).

（ロ）技術背景 ＶＡＤ装置において、Ｓｉｎ、を主成分とする光フアイ
バー用の多孔質母材を成長させている際に多孔質母材の
表面の一部に異常に多くの５Ｌｏ２微粒子が付着したり
、割れたり、あるいはそれらの結果落下するような現象
がよく生じる。(b) Technical background In a VAD device, when growing a porous base material for optical fiber containing Sin as a main component, an abnormally large number of 5Lo2 fine particles adhere to a part of the surface of the porous base material. It is common for objects to crack, break, or fall as a result.

そしてこのような異常の生じた多孔質母材はほとんどが
不良品となるのである。Most of the porous base materials in which such abnormalities occur are defective products.

即ち、ＶＡＤ装置の多孔質母材と成長させている部分を
取囲むマツフルと呼ばれる隔離室の隔壁は、一般にガラ
スや石英で作られている。そしてこの部分に酸水素バー
ナからでた帯電した５Ｌｏ２の微粒子が当ると、隔壁の
ガラスや石英の帯電のための静電気効果により、これが
吸引されて隔壁としてのガラスや石英面に積層する。そ
して時間とともにその積層量が増加すると、その一部が
自重により落下し、その途中で成長中の多孔質母材に接
触したり、または下部にある酸水素バーナにより吹き上
げられて多孔質母材の表面上に異常なＳｉ　０２の突起
状物体を形成したりする。That is, the partition wall of an isolated chamber called a matsufuru that surrounds the porous base material and the growing part of the VAD apparatus is generally made of glass or quartz. When charged fine particles of 5Lo2 emitted from the oxy-hydrogen burner hit this part, they are attracted by the electrostatic effect due to the charging of the glass or quartz of the partition and are deposited on the glass or quartz surface of the partition. As the amount of stacked layers increases over time, some of them fall due to their own weight and come into contact with the growing porous base material, or are blown up by the oxyhydrogen burner located at the bottom of the porous base material. Abnormal Si 02 protrusions are formed on the surface.

このため多孔質１１（Ａの持つべき長手軸方向に一様性
であるべき特１）＋を１１うのである。For this reason, the porosity 11 (characteristic 1 that A should have, which should be uniform in the longitudinal axis direction) is 11.

このことを従来使用されている光フアイバー用材製造の
ための第１図のようイｆＶΔｒＬＨ［について説明する
と、２がターゲラ１〜（Ａの石英棒（Ｔどであり、この
ターゲツト材祠の先端に光ファイバーの多孔質母材１が
成長ηる。To explain this about the case of fVΔrLH [as shown in FIG. The porous base material 1 of the optical fiber grows.

３は酸水素バーナで、酸素ど水素を燃焼ガスどし、さら
にこの酸水素バーブ３　＋、１バーナ内部が多重管（図
示省略）になっていてＳｉ、　ＣＲ４、Ｇ３Ｃ９４、Ａ
ｒなどを同時に吹田−リことができるＪ：うに′／′に
、）でいる。3 is an oxyhydrogen burner, which converts oxygen and hydrogen into combustion gases, and the inside of this oxyhydrogen barb 3 +, 1 burner is made up of multiple tubes (not shown), and Si, CR4, G3C94, A
r etc. can be Suita-ri at the same time.

４はその焔であり、この内部には酸化した５１０２、Ｇ
ａＯ，などの微粒子が存在する。4 is the flame, and inside it is oxidized 5102, G
There are fine particles such as aO.

５はこれらを取囲むマツフルと呼ばれる隔壁であって、
外界との隔＃１を目的としており、一般には通常のガラ
ス、石英質ガラス２Ｚどからイ【っている。5 is a bulkhead called Matsuful that surrounds these,
The purpose is to provide #1 separation from the outside world, and it is generally made of ordinary glass, quartz glass 2Z, etc.

このガラス類は一般に帯電しやすく、付近に微小物体が
飛来してくると、それらの帯電関係により吸着してしま
う。このため酸水素バーナ３により隔壁５内で発生する
Ｓｉ　Ｇ２、Ｇｅｎｅなどの微粒子は、多孔質母材製造
中に隔壁の内面に堆積する。Generally, this type of glass is easily charged, and if minute objects fly nearby, they will be attracted to them due to their charging relationship. Therefore, fine particles such as Si G2 and Gene generated within the partition wall 5 by the oxyhydrogen burner 3 are deposited on the inner surface of the partition wall during the production of the porous base material.

また、これらの微粒子自体も帯電しているので、隔壁の
帯電に対する異種帯電粒子は吸着が加速される。Further, since these fine particles themselves are electrically charged, the adsorption of charged particles of a different type to the electrical charge of the partition wall is accelerated.

このにうにして堆積が発生し、それが成長すると重力の
ためにその一部が落下し、一時的に隔壁内部は不安定な
状態となり、母材の表面に多量のＳｉ　Ｇ２が付着した
り、落下物が多孔質母材に当ることににす、母材にクラ
ックが発生し、また一部の落下が見られる。Deposition occurs in this way, and as it grows, part of it falls due to gravity, temporarily creating an unstable state inside the partition wall, and causing a large amount of Si G2 to adhere to the surface of the base material. When a falling object hits the porous base material, cracks occur in the base material, and some parts are seen falling.

これによりＶＡＤ生産歩留りが低下する。This reduces VAD production yield.

第１図において、６は隔壁に取付けられた排気孔であり
、酸水素バーナ３により流入したガス、発生したガスあ
るいは廃棄物質がこの排気孔６により外部へ排出される
。In FIG. 1, reference numeral 6 denotes an exhaust hole attached to the partition wall, through which gas flowing in, generated gas, or waste materials from the oxyhydrogen burner 3 is discharged to the outside.

（ハ）発明の開示 このような従来のＶＡＤ装置における隔壁表面での５Ｌ
０２やＧ１０２の微粒子の堆積、あるいはこれら３− の落下にＪ：る多孔質用材への悪影響といった欠点を改
善すべく検問の結束得られたのが、この発明の隔壁内表
面に導電ＩＩＩ　４４質の遮蔽層を母材と酸水素バーナ
を取巻くように設置ｌノたＶ　Ａ　Ｄ　ＨＩＩＱ？であ
・　る。(C) Disclosure of the Invention In such a conventional VAD device, 5L on the partition wall surface
In order to improve the drawbacks such as the accumulation of fine particles of 02 and G102, or the adverse effect on porous materials caused by the falling of these 3-, the present invention was able to achieve the result of using conductive III-44 material on the inner surface of the partition wall. A shielding layer was installed around the base material and the oxyhydrogen burner. That's it.

即ち、この発明のＶＡｒ）装置−Ｉでは隔壁が帯電し、
Ｄつこの帯電のために発生する電界を隔壁内部にで及ぼ
さずにシールドすることにＪζり川４Ａ　Ｉ！　造中の
空間を外部電界の影響を断ち、安定化するのである。That is, in the VAr) device-I of the present invention, the partition wall is charged,
JζRikawa 4A I! To shield the electric field generated due to the charging of the D-tube from reaching the inside of the partition wall. This stabilizes the space under construction by cutting off the influence of external electric fields.

このために１１＋Ｊ　！ＩＩ　％Ｊで、その全過程中に
おいて安定したすすＭ　ｔ−Ｊが可能となるのである。11+J for this! II %J allows for stable soot M t-J during the entire process.

以下、この発明に＜−７６装置をその一実７ｉｌｌｉ例
を示す第２図を参照して具体的に説明する。Hereinafter, the <-76 device according to the present invention will be specifically explained with reference to FIG. 2, which shows an example of the device.

なおこの第２図中、第１図と間部位で同じ働きをする部
分については第１図と同一符号を付１ノでその説明を省
略り゛る。Note that in FIG. 2, parts that have the same functions as those in FIG. 1 are designated by the same reference numerals as in FIG.

第２図において、ＷＡＡｓ２多孔質の光フアイバー用母
材１、酸水素バーナ３から出る焔４との間を導電性材質
からなる遮蔽層７で取囲む。（但し、４− 光フアイバー母材のターゲツト材２に近い側は一部囲み
の中に物理的に入れることは無理であるが）この場合、
最も現実的に遮蔽層７を隔壁５内面に取付は容易にする
形状は、網状のほぼ球形状の物体で、これを遮蔽層７と
して取付けるものである。In FIG. 2, a shielding layer 7 made of a conductive material surrounds the gap between the WAAs2 porous optical fiber base material 1 and the flame 4 emitted from the oxyhydrogen burner 3. (However, 4- It is impossible to physically put part of the side of the optical fiber base material closer to the target material 2 into the enclosure) In this case,
The shape that most realistically makes it easy to attach the shielding layer 7 to the inner surface of the partition wall 5 is a net-like, approximately spherical object, which is attached as the shielding layer 7.

この場合、球形状の網状の遮蔽層７は酸水素バーナ３の
取イ」けや光フアイバー母材１の通過のための所定の孔
をあ番ノでおくことが好ましい。In this case, it is preferable that the spherical net-like shielding layer 7 has predetermined holes at appropriate numbers for the removal of the oxyhydrogen burner 3 and the passage of the optical fiber base material 1.

このような網状の球形状の導電性材質からなる遮蔽層７
を隔壁５の内面に取付けた場合は、その外側に存在する
電界が遮蔽層７の内部には全く影響を及ぼさない。換言
すれば、隔壁５のガラスが帯電したために、それによる
周辺に存在する電界、隔壁５の内側に付着、形成された
Ｓｊ　Ｏ２の微粒子による電界は、この遮蔽層７の有す
る遮蔽効果により内部に電界が及ばない。The shielding layer 7 made of such a net-like spherical conductive material
When the shielding layer 7 is attached to the inner surface of the partition wall 5, the electric field existing outside the shielding layer 7 has no effect on the inside of the shielding layer 7. In other words, since the glass of the partition wall 5 is electrically charged, the electric field existing around it, and the electric field due to the SjO2 fine particles attached and formed inside the partition wall 5, are suppressed internally due to the shielding effect of the shielding layer 7. Electric field does not reach.

なお、上記では導電性材質からなる遮蔽層として網状の
球形状のものを用いた場合について説明したが、隔壁５
が、例えば円柱状であるような場合においては、これに
見合う円柱状またはそれに底のついた導電ｆ１材質で、
網状か２１、たはパンチメタル状の遮蔽層を用いてｂ同
様の効果が１ｑられる。In addition, although the case where a net-like spherical shielding layer made of a conductive material is used is described above, the partition wall 5
For example, in the case of a cylindrical shape, a conductive f1 material with a cylindrical shape or a bottom corresponding to the cylindrical shape,
An effect similar to b can be obtained by using a shielding layer in the form of a mesh or a punched metal.

このような状況下で光ファイバーの多孔質ＩＩ祠１の製
造中に隔壁５内に浮遊１゛るＳシＯｆ！やＧａ０ｅの微
粒子は、遮蔽層７の外に右づる電気的な影響を受けるこ
とはない。Under such circumstances, during the manufacture of the porous optical fiber II structure 1, there are S particles floating inside the partition wall 5! The fine particles of Ga0e and Ga0e are not affected by any electrical influence outside the shielding layer 7.

即ち、外部電界に引さつ【ノられて隔壁５の内壁面に付
着することはあって−ｂ、Ｉｌｌ積することはないので
ある。That is, it may be attracted to the external electric field and adhere to the inner wall surface of the partition wall 5, but it will not result in a -b,Ill product.

また酸水素バーナ３ｈ１１らの８１０３、ＧａＯ２など
の微粒子の流れも外乱を受（）ることなく流れるため、
光ファイバーの多孔ｗＩＩ目イを１’ｌＪ　造”Ｊるに
当り、安定した品質の予定通りの形状のものができ、製
造途中で隔壁内面をＳ（０，を主体どりる微粒子のＩｆ
ｌ積物の落下による破旧どいったおそれもなくなり、ま
た同時に母材表面に局部的に微粒子が（！Ｉ　ｎ−する
という異常現象も見られないのである。In addition, the flow of fine particles such as 8103 and GaO2 from the oxyhydrogen burner 3h11 etc. also flows without receiving any disturbance.
In manufacturing the optical fiber's porous holes 1'lJ, a product with stable quality and the expected shape is obtained, and during the manufacturing process, the inner surface of the partition wall is coated with If
There is no fear of damage caused by falling objects, and at the same time, there is no abnormal phenomenon in which fine particles are locally formed on the surface of the base material.

なお、この発明で遮蔽層を構成する導電（１１＋、４質
としては、導電ｆ１を有Ｊるものであれば、そのｌ１的
を達しうるが、光ファイバーを製造する装置内に装填す
るという点からはその材質を吟味することも必要であり
、そのような点からアルミニウムが最−ｔ）良好である
。In addition, in this invention, as the conductive (11+, 4 materials) constituting the shielding layer, if it has conductivity f1, it can achieve the l1 target, but from the point of view of loading it into the equipment for manufacturing optical fibers, It is also necessary to carefully examine the material, and from this point of view aluminum is the best.

そしてこの発明の遮蔽層の形状としては、前述した球状
かご型が適当である。As for the shape of the shielding layer of the present invention, the above-mentioned spherical cage shape is suitable.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のＶＡＤ装置の断面図、第２図はこの発明
のＶＡＤ装置の断面図である。 １・・・多孔質母材　２・・・ターゲツト材３・・・酸
水素バーナ　４・・・焔　５・・・隔壁６・・・排気孔
　７・・・遮蔽層 特許出願人　住友電気工業株式会社 代　埋　人　弁理士　和　１）　昭FIG. 1 is a sectional view of a conventional VAD device, and FIG. 2 is a sectional view of a VAD device of the present invention. 1... Porous base material 2... Target material 3... Oxyhydrogen burner 4... Flame 5... Partition wall 6... Exhaust hole 7... Shielding layer patent applicant Sumitomo Electric Industries, Ltd. Company representative Kazu 1) Akira

Claims (2)

【特許請求の範囲】[Claims] （１）光ファイバー用多孔質用月の製造装置であって、
先端にて多孔質母材を成長させるターゲツト材と酸水素
バーナを収容する隔離室の内壁面に導電性材質によりな
る遮蔽層を設けたことを特徴とする光ファイバー用多孔
質ＰＪ材の製造装置。(1) A manufacturing device for porous material for optical fiber,
An apparatus for manufacturing a porous projector material for optical fibers, characterized in that a shielding layer made of a conductive material is provided on the inner wall surface of an isolation chamber that accommodates a target material for growing a porous base material at the tip and an oxyhydrogen burner. （２）導電性材質Ｊ：りなる遮蔽層がかご型形状からな
ることを特徴とする特許請求の節囲第１項記載の光ファ
イバー用多孔質用材の製造装置。(2) Conductive material J: The apparatus for producing a porous material for optical fibers according to claim 1, wherein the shielding layer has a cage shape.
JP59069569A 1984-04-06 1984-04-06 Production unit for porous parent material of optical fiber Granted JPS60215540A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP59069569A JPS60215540A (en) 1984-04-06 1984-04-06 Production unit for porous parent material of optical fiber
DE8585102837T DE3583168D1 (en) 1984-04-06 1985-03-12 DEVICE FOR PRODUCING POROUS PREFORMS FOR OPTICAL FIBERS.
EP85102837A EP0157238B1 (en) 1984-04-06 1985-03-12 Apparatus for producing porous preforms for optical fibers
CA000477509A CA1234971A (en) 1984-04-06 1985-03-26 Apparatus for producing porous preforms for optical fibers
AU40405/85A AU565670B2 (en) 1984-04-06 1985-03-27 Producing fibre optical preforms
KR1019850002028A KR870001741B1 (en) 1984-04-06 1985-03-27 Apparatus for making of optical fiber preform
DK142085A DK163659C (en) 1984-04-06 1985-03-29 Apparatus for the preparation of porous articles for use in the production of optical fibers
US06/940,203 US4713107A (en) 1984-04-06 1986-12-10 Apparatus for producing porous preforms for optical fibers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59069569A JPS60215540A (en) 1984-04-06 1984-04-06 Production unit for porous parent material of optical fiber

Publications (2)

Publication Number Publication Date
JPS60215540A true JPS60215540A (en) 1985-10-28
JPS632903B2 JPS632903B2 (en) 1988-01-21

Family

ID=13406540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59069569A Granted JPS60215540A (en) 1984-04-06 1984-04-06 Production unit for porous parent material of optical fiber

Country Status (8)

Country Link
US (1) US4713107A (en)
EP (1) EP0157238B1 (en)
JP (1) JPS60215540A (en)
KR (1) KR870001741B1 (en)
AU (1) AU565670B2 (en)
CA (1) CA1234971A (en)
DE (1) DE3583168D1 (en)
DK (1) DK163659C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007131487A (en) * 2005-11-10 2007-05-31 Fujikura Ltd Method for manufacturing glass preform for optical fiber

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Publication number Priority date Publication date Assignee Title
US6003342A (en) * 1991-10-25 1999-12-21 The Furukawa Electric Co., Ltd. Apparatus for production of optical fiber preform
US5472509A (en) * 1993-11-30 1995-12-05 Neomecs Incorporated Gas plasma apparatus with movable film liners
JP3485697B2 (en) * 1995-11-07 2004-01-13 古河電気工業株式会社 Optical fiber preform manufacturing equipment
DE10111733B4 (en) * 2001-03-09 2007-02-08 Heraeus Tenevo Gmbh Process for producing a SiO 2 blank

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007131487A (en) * 2005-11-10 2007-05-31 Fujikura Ltd Method for manufacturing glass preform for optical fiber
JP4494325B2 (en) * 2005-11-10 2010-06-30 株式会社フジクラ Manufacturing method of glass preform for optical fiber

Also Published As

Publication number Publication date
DK142085D0 (en) 1985-03-29
KR850007234A (en) 1985-12-02
DK163659B (en) 1992-03-23
EP0157238A3 (en) 1989-05-24
EP0157238A2 (en) 1985-10-09
DE3583168D1 (en) 1991-07-18
US4713107A (en) 1987-12-15
KR870001741B1 (en) 1987-09-26
DK142085A (en) 1985-10-07
EP0157238B1 (en) 1991-06-12
CA1234971A (en) 1988-04-12
AU565670B2 (en) 1987-09-24
DK163659C (en) 1992-08-17
JPS632903B2 (en) 1988-01-21
AU4040585A (en) 1985-10-10

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