JPS60211461A - Electrophotographic sensitive body - Google Patents

Electrophotographic sensitive body

Info

Publication number
JPS60211461A
JPS60211461A JP6672784A JP6672784A JPS60211461A JP S60211461 A JPS60211461 A JP S60211461A JP 6672784 A JP6672784 A JP 6672784A JP 6672784 A JP6672784 A JP 6672784A JP S60211461 A JPS60211461 A JP S60211461A
Authority
JP
Japan
Prior art keywords
layer
boat
uniform
degree
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6672784A
Other languages
Japanese (ja)
Inventor
Hiroshi Nagame
宏 永目
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP6672784A priority Critical patent/JPS60211461A/en
Publication of JPS60211461A publication Critical patent/JPS60211461A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02Charge-receiving layers
    • G03G5/04Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

PURPOSE:To reduce residual potential by laminating on the surface of a conductive substrate, an Se layer, a layer made of a mixture of Se and Se-Te.S, an Se-Te.S layer low in Te content, and a uniform Se-Te.S layer high in Te content in succession. CONSTITUTION:The Se layer 2 having 30-100mum thickness, 4 nines, or preferably, >=5 nines purity, and <=1 ppm oxygen content is formed on the surface of the conductive substrate 1 made of Al, Ni, or stainless steel. On this layer 2, Se and Se-Te(S) are vapor deposited at the same time to form the 2-5mum thick Se and Se-Te(S) mixture layer 3, and further, the Se-Te(S) layer 4 having a Te concn. 4-10wt%, and the uniform Se-Te(S) layer 5 having a Te concn. of 15- 20wt% are formed to obtain an electrophotographic sensitive body.

Description

【発明の詳細な説明】 技術分野 この発明は、電子写真感光体に関1−・、1!1にカラ
ー複写機用の電子写真感光体に関する。
DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to an electrophotographic photoreceptor (1-.1!1) and relates to an electrophotographic photoreceptor for a color copying machine.

従来技術 カラー複写機用の5e−3e ・王0構成の感光体は、
3e層Iの5o−Toの成分分布が、表層に向ってTO
瀧IQが増大Jるような分布になっており、このような
構成の場合、長期使用中に摩耗のために、分光感光、帯
電特性等が劣化し、耐久1ノ1も劣・)てくる3゜Se
層−にの5O−70の成分分イli−’C゛i’ f!
 澗麿が均一’、r S e ・1’ 4N層であれば
、耐久+’lμ向」ニして実用!−の問題(,1,解d
′1りるが、繰返し使用1)ているどさのI?槓電(サ
ノが増加し1.Ll、−1表面電位の低下0大きい1゜ 目 的 この発明の目的は、残留電位が低く、繰返しリピート電
位変1FIlが小ざく、フルカー、シー複写機に用いる
ことがで・きる感光体をl1ffi IILりることで
ある、1 構 成 この発明の構成は、導電111支持体の表面に順次3c
層、Seと5e−1−c(S)の混合層、Te9度が小
さい3e −Te (S)唐、Te amが大きい5e
−Te (S)均一層を有することを特徴する電子写真
感光体である。
A photoreceptor with a 5e-3e/K0 configuration for a conventional color copier is:
The 5o-To component distribution in layer I of 3e is TO toward the surface layer.
The distribution is such that the Taki IQ increases, and in the case of such a configuration, the spectral sensitivity, charging characteristics, etc. deteriorate due to wear during long-term use, and the durability also deteriorates. 3゜Se
The component of 5O-70 in the layer Ili-'C゛i' f!
If the layer is uniform and r S e ・1' 4N layer, it is durable and practical! -problem (,1, solution d
'1 Riruga, repeated use 1) Dosano I? The object of this invention is to have a low residual potential, a small repeated potential change 1 FIl, and to be used in full car and sea copying machines. 1 Configuration The configuration of the present invention is to attach a photoreceptor that can be
layer, mixed layer of Se and 5e-1-c (S), 3e -Te (S) with small Te9 degree, 5e with large Te am
-Te (S) This is an electrophotographic photoreceptor characterized by having a uniform layer.

この発明の感光体の構成を図面を参照して具体的に説明
すると、第1図に示すように)9電性支持体1の表面に
Se層2、その上に3eとSe −Te (S)の混合
層3、更にT(! 1IIlllfが小さいSe −T
e (S)層4、Te濃度が大きいSe −Te (S
)Ml 5ヲffU()たものである。
The structure of the photoreceptor of the present invention will be specifically explained with reference to the drawings. As shown in FIG. ) mixed layer 3, and Se −T where T(! 1IIllf is small)
e (S) layer 4, Se -Te (S) with a large Te concentration
)Ml5offU().

導電層支持体1はアルミニウム(A1)、ニラクル(N
1)あるいはステンレス#lWの>9電性材別でつくら
れる。AIであればJIS 3003.1050.10
70等の材料に適正な酸化被膜を形成するように表面処
理を施したものが用いられる。
The conductive layer support 1 is made of aluminum (A1), Niracle (N
1) Or made of stainless steel #lW >9 electrically conductive material. For AI, JIS 3003.1050.10
A material such as No. 70 that has been surface-treated to form an appropriate oxide film is used.

3c層2は電荷輸送層(CTL)、電荷保持層の役目を
する。したがって、正孔のトラップが形成される材料は
、繰返し表面電位を上昇させ、コピーに地肌汚れや解像
度の低下が起り好ましくない。材1’i+としては、4
ナイン、好ましくは5ナイン以上のseであり、酸素の
含有量がlppm以下が望ましい。膜厚は30〜100
μmが一般的であるが、好ましくは50〜70μmであ
る。
The 3c layer 2 serves as a charge transport layer (CTL) and a charge retention layer. Therefore, materials in which hole traps are formed are undesirable because they repeatedly increase the surface potential, causing background smudges and a decrease in resolution on copies. As material 1'i+, 4
9, preferably 5 nines or more, and the oxygen content is desirably 1 ppm or less. Film thickness is 30~100
Generally, the thickness is 50 to 70 μm.

Seと3e −Te (S)の混合層3および丁em度
が小さい5a−Tc (SKFi4はSe層とTO哨度
の高い3e −”le (S)層のバンドギVツブの違
いか−)牛しる■孔1〜ラップあるいは電子1−ラップ
によって生じる電荷、光疲労を減らり゛作用をJる。こ
れらはネガ残像、ポジ残像が発生し、J、た、電位変動
の原因になり易い。
Mixed layer 3 of Se and 3e-Te (S) and 5a-Tc with low density (SKFi4 is the difference between the Se layer and the 3e-”le (S) layer with high TO density) The effect is to reduce the charge and optical fatigue caused by the hole 1-wrap or electron 1-wrap.These tend to cause negative afterimages and positive afterimages, and cause potential fluctuations.

製造方法どしては、3eど5e−Tc(S)が同時に蒸
着できるようにする。これ1,1.3eの蒸着が終了し
たら直りに3e−Te (S)を蒸着しても人体IPi
1様な結q!が生じるが、使用環境により多少差が生じ
る。リピー1〜特+1で電位変動は同時に蒸着した方が
少ない。この混合層の厚さは2へ・5μ程度である。ま
たSeの蒸着終了間近に3 e−1−e層が蒸発される
J:うな蒸着形態をどる。
The manufacturing method is such that 3e and 5e-Tc(S) can be deposited simultaneously. Even if 3e-Te (S) is deposited immediately after the evaporation of 1 and 1.3e is completed, the human body IPi
1-like result! However, there will be some differences depending on the usage environment. Between repeat 1 and special +1, potential fluctuations are smaller when deposited at the same time. The thickness of this mixed layer is about 2.5 μm. In addition, the 3e-1-e layer is evaporated near the end of the Se deposition, resulting in a J: undulating deposition pattern.

3e−1−e層4の丁eは15−20wt%にするから
、Seと3c −TO(8)の混合層3の上層4のTe
濃度は4〜10W[%あればよい。
Since the Te of the 3e-1-e layer 4 is set to 15-20 wt%, the Te of the upper layer 4 of the mixed layer 3 of Se and 3c-TO(8)
The concentration may be 4 to 10 W [%].

この混合層3の上層のSc −Te (S)層4のTe
が4〜10wt%に達すると一度5e−T(! (S)
用のボートのシャッターを閉じる。
The upper layer of this mixed layer 3 is Sc-Te (S) The layer 4 is Te
Once 5e-T (! (S)
Close the shutters of the boat.

この蒸着量は、蒸着時間で調節するか、計測器でモニタ
ーする。一定時間後、Te11度が15−20wt%に
達り−るとボートのシャッターを開け、Se −Te 
(S)を1〜5μm(Dqさに蒸着する。Teは25w
t%までは使用可能であるが、実用的には20wt%ま
でである。このときの表面の3e −Te (S)層5
のTe濃度は15〜20wt%となるようにシャッター
を閉じる。すなわち5e−Te (S)層のTe濃度が
高く、かつ均一な層5を形成する。
The amount of evaporation is adjusted by the evaporation time or monitored by a measuring device. After a certain period of time, when Te11 degrees reaches 15-20wt%, the shutter of the boat is opened and Se-Te
(S) is evaporated to 1 to 5 μm (Dq.Te is 25W
Although it is possible to use up to t%, the practical limit is up to 20wt%. At this time, the 3e-Te (S) layer 5 on the surface
The shutter is closed so that the Te concentration becomes 15 to 20 wt%. That is, the 5e-Te (S) layer has a high Te concentration and forms a uniform layer 5.

第2図はこの蒸着のタイムチャートを示す。FIG. 2 shows a time chart of this vapor deposition.

■は5OJPli2の蒸着時間、■はSeと3e −T
e (S)との混合層3の蒸着時間、■はTe11度の
小さいSe −Te (S)層4の蒸着時間、IVはT
e濃度の高いse −Te (S)層5の蒸着時間を示
す。
■ is the deposition time of 5OJPli2, ■ is Se and 3e -T
e is the deposition time of the mixed layer 3 with (S), ■ is the deposition time of the Se -Te (S) layer 4 with a small Te of 11 degrees, and IV is T
The deposition time of the se -Te (S) layer 5 with high e concentration is shown.

se −Te (S)層は電荷発生層(CG !−)の
役目を有し、Se −Te (S)層の均一層5− 5を有することで、連続使用時に膜の摩耗が生じても画
像m麻、色調の変化を極力少なくするためのものである
。硫黄(イオウ)は特に添加する必要がないが、添加覆
れば高抵抗化する。その添加用は0.5〜10wt%で
あるが、好ましくは1〜3wt%で、ぞの串が多いと繰
返し残留電位を」−胃さけ、また感度を低下させるので
好ましくない。
The se -Te (S) layer has the role of a charge generation layer (CG!-), and by having a uniform layer 5-5 of the Se -Te (S) layer, even if the film is worn out during continuous use, This is to minimize changes in image size and color tone. There is no particular need to add sulfur, but adding it will increase the resistance. The amount to be added is 0.5 to 10 wt%, preferably 1 to 3 wt%. If the amount is too large, it is not preferable because it may cause repeated residual potential and decrease sensitivity.

第3図は感光層中の3cどSe −T(4(S)混合層
3、TeFJ度が低いSe −Te (S)層4および
Te11度が高いSe・−To (S)均一層5中のT
OIIi11度分布を定性的に示したグラフである。
Figure 3 shows the 3c Se-T(4(S) mixed layer 3 in the photosensitive layer, the Se-Te(S) layer 4 with a low TeFJ degree, and the Se・-To(S) uniform layer 5 with a high TeFJ degree). T of
It is a graph qualitatively showing the OIIi 11 degree distribution.

横軸に記載の3.4.5はそれぞれ3eと5c−Te 
(S)混合層3、Te濃度が小さいSe −TO(S)
Ilii? 4、Te1度が大きい5−Tc (S)層
5に相当する位置を示すものである。
3.4.5 on the horizontal axis are 3e and 5c-Te, respectively.
(S) Mixed layer 3, Se-TO(S) with low Te concentration
Ilii? 4. This shows the position corresponding to the 5-Tc (S) layer 5 with a large Te1 degree.

以下、実施例によって、この発明を具体的に説明する。Hereinafter, the present invention will be specifically explained with reference to Examples.

6− 実施例1 ステンレス14 S tJ S −304でつくられた
Se用蒸発ボートとSe −Te (S)用のシトツタ
−何蒸発ボート各1本づつを有する真空熱@装置の第1
のボートに5ナイン級の3e 145gr 、第2のボ
ートに5Q−Te(T’018wt%) 100grを
投入し、真空度2×1O−5T orr 、下地湿度7
8℃で120mmφの清浄な△l製ドラムに3e 、 
3e−’l”eを真空蒸♀な し 1こ 。
6- Example 1 The first vacuum heat @ apparatus having one evaporation boat for Se and one evaporation boat for Se-Te (S) made of stainless steel 14 S tJ S-304.
145gr of 59 class 3e was put into the second boat, 100gr of 5Q-Te (T'018wt%) was put into the second boat, the degree of vacuum was 2×1O-5T orr, and the base humidity was 7
3e in a clean △l drum of 120 mmφ at 8℃,
3e-'l"e without vacuum steaming.

まず、第1のボートから290℃でSeを蒸発させ、蒸
発開始より、25分後に第2のボー1〜に通電1.、シ
ャッターを聞け、4.5〜5μmの3e−T(4層が積
層する時間でシャッターを閉じた。
First, Se is evaporated from the first boat at 290°C, and 25 minutes after the start of evaporation, electricity is applied to the second boats 1 to 1. , listen to the shutter, 4.5-5 μm 3e-T (the shutter was closed in the time it took for 4 layers to be stacked).

第1のボー1−はSe蒸発終了後2分後に加熱のための
通電を止めた。表層のTe濃度は7〜8wt%になった
。そして、第2のボートにはそのまま通電を続け5e−
Te層が3〜3.5層1mでTe濃度が均一になる時間
にシャッターを聞き、閉じた。この11、rのTe濃度
は18.7wt%である。蒸着終了後直t5に冷却し、
真空蒸着装置外に取り出し、511間暗中保質をした。
The first boat 1- was turned off for heating 2 minutes after the completion of Se evaporation. The Te concentration in the surface layer was 7 to 8 wt%. Then, the power continues to be applied to the second boat 5e-
The shutter was turned on and closed at a time when the Te concentration became uniform with 3 to 3.5 layers of 1 m of Te layer. The Te concentration of this 11,r is 18.7 wt%. Immediately after the completion of vapor deposition, cool at t5,
It was taken out of the vacuum evaporation apparatus and kept in the dark for 511 hours.

比較例1 S U S −304でつくられたSo川熱蒸発ボー1
と5e−Te(S)用蒸介ボー1へ各1木を備えた蒸着
賛同を用い、第1のボー1へに5ナイン級3e 145
gr 、第2のボー1〜に5o−Te (Te 12w
1%)10Bを投入し、真空度2X 1051− Or
r 、’l= 11!I Mi1度78°CT−120
n1mφの△1PIJドラムに5O1So−Toをil
i空蒸看し Iこ 。
Comparative Example 1 So River thermal evaporation bowl 1 made with SUS-304
and 5e-Te(S) to 5e-Te(S) using a evaporation support with 1 tree each to the 5e-Te(S) grade 3e 145 to the first bow 1
gr, 5o-Te (Te 12w
1%) 10B, vacuum degree 2X 1051- Or
r,'l=11! I Mi1 degree 78°CT-120
Ill 5O1So-To on △1PIJ drum of n1mφ
I'm watching the sky.

第1のボー1〜を290℃に通電加熱し、蒸着時間50
分で厚さ5271mの80層を形成した。
The first bow 1~ was heated to 290°C for a vapor deposition time of 50
80 layers with a thickness of 5271 m were formed in minutes.

ついで第2のボー1〜を通電1ノ、340°Gで8分間
蒸着し、3(、tmのS O−T Q膜(表層のT e
 flJ q i8,4W+ % ) を 1!7 ノ
こ 。
Next, the second bow 1 to 1 current was applied for 8 minutes at 340°G to deposit the S O-T Q film (T e
flJqi8,4W+%) by 1!7.

以後実施例1ど同じ条flで試Flを取出し、保管した
。、 実施例2 実施例1同じ真空蒸着装置を用い、第1のボー1−に5
ナイン級の3 e 145grを投入し、第2のボート
にSe −Te −8(Te 18wt%、32wt%
) 100grを投入し、真空度2×1O−51orr
、下地温度78℃で120mmφの清浄A1ドラムにS
eと3e−1−eを真空蒸着した。
Thereafter, the sample Fl was taken out using the same fl conditions as in Example 1 and stored. , Example 2 Using the same vacuum evaporation apparatus as Example 1, 5
Nine-class 3e 145gr was introduced into the second boat, and Se-Te-8 (Te 18wt%, 32wt%
) Inject 100gr, vacuum degree 2×1O-51orr
, S on a clean A1 drum with a diameter of 120 mm at a substrate temperature of 78°C.
e and 3e-1-e were vacuum deposited.

まず、第1のボートに通電し、温度290℃で3eを蒸
着、2.3分後第2のボートに通電し、5e−Tc、(
S)を蒸発させ、第1のボーI〜は5分後に通電を停止
した。また、第2のボートは5分後にシャッターを閉じ
た。この時の表層のTe濃度は9〜10wt%であった
First, the first boat is energized to deposit 3e at a temperature of 290°C, and after 2.3 minutes, the second boat is energized and 5e-Tc, (
S) was evaporated, and after 5 minutes, the electricity supply to the first vessel I~ was stopped. The second boat also closed its shutters five minutes later. At this time, the Te concentration in the surface layer was 9 to 10 wt%.

そのまま通電を続け、se −Te (S)層が3〜3
,5μでTe11度が均一になる時間にシlジッターを
開き、そして閉じた。
Continuing to apply current, the se -Te (S) layer becomes 3 to 3
The sysitter was opened and closed at the time when Te11 degrees became uniform at ,5μ.

以下実施例1と同じ条件で試料を取出し、同じ条件で保
管した。
Thereafter, samples were taken out under the same conditions as in Example 1 and stored under the same conditions.

比較例2 実施例2と同じ装置に同じSe剤を用い、9− 第2のボートにはSc 、Te (Te18w+%)1
00grを投入し、同じ圧力、同じ下地湿度で ゛蒸着
した。
Comparative Example 2 The same Se agent was used in the same equipment as in Example 2, and the 9-second boat contained Sc, Te (Te18w+%)1
00gr was added and vapor deposition was performed at the same pressure and the same substrate humidity.

第1のボー1〜を290℃で50分間通電し、厚さ52
μmの3e膜を得た。ついで第2のボートにシャッター
をした;1:ま360℃に通電加熱し、シャッター操作
で3e−1−e層が701度19wt%、厚さ3μmの
蒸若膜を形成した。
The first bow 1~ was energized at 290℃ for 50 minutes, and the thickness was 52mm.
A 3e film of μm was obtained. Next, the second boat was shuttered; it was heated with electricity to 360° C. for 1 minute, and by operating the shutter, a young film was formed in which the 3e-1-e layer had a temperature of 701° C., 19 wt %, and a thickness of 3 μm.

蒸@終了後は実施例1と同じ条件で試filを取出し、
同じ条件で保管した。
After steaming, take out the test film under the same conditions as in Example 1.
stored under the same conditions.

以上の各実施+41おJ、び比較例でつ(った4種のド
ラムをリコー製フルカラー実験機で試゛験した結果は下
記の表に示すとおりであった、1表 10− 処−jL 以上の説明から明らかなように、この発明の感光体は、
残留電位が低く、リピートによるダーク電位の低下が従
来の1/2〜1/3以下、ライ1〜電1i1の1−胃が
極めて少ない。そしてフルカラー複写機に適した感光体
である。
The four types of drums used in each of the above implementations +41 and comparative examples were tested on a Ricoh full-color experimental machine, and the results were as shown in the table below. As is clear from the above description, the photoreceptor of the present invention is
The residual potential is low, the decrease in dark potential due to repeating is less than 1/2 to 1/3 of that of the conventional method, and the 1-stomach of Lie 1 to Lie 1i1 is extremely small. It is a photoreceptor suitable for full-color copying machines.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この発明の電子写真感光体の一員体例の拡大
断面図、 第2図は、上記感光体を形成するための蒸着のタイムヂ
ャ−1へ、 第3図は、上記感光体にお(プる丁eの分布を定tl的
に示すグラフである。 1・・・導電性支持体、2・・・Se層、3−3eとS
e−丁e (S)の混合層、4・・・To濶度が小さい
se −Te (S)層、5− ■(! ′a度が大ぎ
いSe −Te (S)層。 11− 才1図 才2図 才3図 ←−6−+□4−←5闇
FIG. 1 is an enlarged sectional view of an example of an electrophotographic photoreceptor according to the present invention, FIG. 2 is a timer 1 of vapor deposition for forming the photoreceptor, and FIG. (This is a graph showing the distribution of pullout e in a constant tl manner. 1... Conductive support, 2... Se layer, 3-3e and S
Mixed layer of e-Te (S), 4... se -Te (S) layer with small To degree, 5- ■(! ' Se -Te (S) layer with large degree. 11- years old 1 figure 2 figure 3 figure ←−6−+□4−←5 darkness

Claims (1)

【特許請求の範囲】[Claims] 導電↑η支持体の表面に順次(2レン(Sc )層、セ
レン(So )とレレン(So)−jルル(Te ) 
−[硫黄(S)1の混合層、T’0瀧度が小さい5O−
TO・(S)Fi、To澗度が大きいSC−TO・(S
)均一層を右Jることを特徴ど1jる電子写真感光体。
Conductivity ↑η On the surface of the support are sequentially (2 ren (Sc) layers, selenium (So) and ren (So)-j ruru (Te)
- [Mixed layer of sulfur (S) 1, 5O with small T'0 waterfall degree -
TO・(S)Fi, SC-TO・(S) with large To degree
) An electrophotographic photoreceptor characterized by having a uniform layer.
JP6672784A 1984-04-05 1984-04-05 Electrophotographic sensitive body Pending JPS60211461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6672784A JPS60211461A (en) 1984-04-05 1984-04-05 Electrophotographic sensitive body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6672784A JPS60211461A (en) 1984-04-05 1984-04-05 Electrophotographic sensitive body

Publications (1)

Publication Number Publication Date
JPS60211461A true JPS60211461A (en) 1985-10-23

Family

ID=13324212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6672784A Pending JPS60211461A (en) 1984-04-05 1984-04-05 Electrophotographic sensitive body

Country Status (1)

Country Link
JP (1) JPS60211461A (en)

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