JPS60205071A - Ceramic bellows - Google Patents

Ceramic bellows

Info

Publication number
JPS60205071A
JPS60205071A JP5989784A JP5989784A JPS60205071A JP S60205071 A JPS60205071 A JP S60205071A JP 5989784 A JP5989784 A JP 5989784A JP 5989784 A JP5989784 A JP 5989784A JP S60205071 A JPS60205071 A JP S60205071A
Authority
JP
Japan
Prior art keywords
ceramic
bellows
ceramic thin
thin sheet
bonding material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5989784A
Other languages
Japanese (ja)
Inventor
Shigetaka Wada
重孝 和田
Atsushi Danno
団野 敦
Toshihiko Sakai
敏彦 酒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP5989784A priority Critical patent/JPS60205071A/en
Publication of JPS60205071A publication Critical patent/JPS60205071A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J3/00Diaphragms; Bellows; Bellows pistons
    • F16J3/04Bellows
    • F16J3/041Non-metallic bellows

Abstract

PURPOSE:To make a ceramic thin sheet applicable under the high temperature environment of more than a temperature of 900 deg.C, by joining plural ceramic thin sheets consisting of silicon nitride, silicon carbide, etc., with a ceramic bonding material composed of te same type component as this thin sheet. CONSTITUTION:A doughnut plate type ceramic thin sheet 1 provided with a round hole in the almost nearly central part is superposingly set up in bellows form via a spacer 2 so as to cause end edge parts themselves at both inner and outer circumferential sides of two ceramic thin sheet surfaces adjoined with each other to be alternately joined in succession. A contact surface between the ceramic thin sheet 1 and the spacer 2 is joined together with a ceramic bonding material 3. As for the ceramic thin sheet 1, for example, those of silicon carbide, silicon nitride, cyaron, etc., are suitable. The ceramic bonding material 3 consists in the same or similar component as the main component of the ceramic thin sheet 1.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、流体通路などに応力吸収等のため取付けられ
るベローズに係り、特に約900℃以上の高温環境下で
の使用に適するように工夫されたセラミックス製ベロー
ズに関する。
Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a bellows attached to a fluid passage for stress absorption, etc., and is particularly designed to be suitable for use in a high-temperature environment of about 900°C or higher. related to ceramic bellows.

(従来技術) 一般に、流体の通路においては、従来よりベローズなど
がそこで生じる振動や熱変形に伴なう変位を吸収し当該
流路系の破損を防止するための緩衝材として利用されて
いる。そして、従来のこの種のベローズは、ベローズと
して備えるべき弾性および加工性などを考慮して、通常
ステンレス鋼などの金属製のものが使われてきた。
(Prior Art) In general, in fluid passages, bellows and the like have conventionally been used as cushioning materials to absorb displacements caused by vibrations and thermal deformation occurring therein and to prevent damage to the flow passage system. Conventional bellows of this type have generally been made of metal such as stainless steel, taking into account the elasticity and workability that the bellows should have.

ところで、近年ガソリン・エンジンやディーゼルエンジ
ンの小型、高出力化に伴って、気筒内の燃焼温度が一層
高まり(特に過剰給気を行なった場合には燃焼温度は更
に高くなる)、排気ガス温度が900℃を越える新規な
エンジンが開発されている。このエンジンの排気系にベ
ローズを使用する場合において、従来より利用してきた
鉄系鋳物製ベローズなどでは、酸化変形ひび割れ笠金生
じ、耐熱性が不足している。
By the way, in recent years, as gasoline engines and diesel engines have become smaller and have higher output, the combustion temperature inside the cylinder has increased further (particularly when excess air is supplied, the combustion temperature becomes even higher), and the exhaust gas temperature has increased. A new engine that can exceed 900 degrees Celsius is being developed. When bellows are used in the exhaust system of this engine, the bellows made of iron-based castings that have been used conventionally suffer from oxidation deformation, cracks, and lack of heat resistance.

また近年、ターボチャージのハウジングやタービン・ホ
イールのセラミックス化の開発が進められており、この
場合においてセラミックス製のハウジングやタービンホ
イールに吸排気管系を通じてエンジンの振動が直接伝達
されると、それらが破損するrI&力、がある。しかし
ながら、仁の用途においては、従来使用のベローズでは
、十分にエンジンの振動や変位を吸収することができな
い。そこで、約900℃以上の高温環境下においても、
機能を十分に果たすベローズが望まれていた。
In addition, in recent years, the development of ceramic housings and turbine wheels for turbochargers has progressed, and in this case, if engine vibrations are directly transmitted to ceramic housings or turbine wheels through the intake and exhaust pipe system, they will be damaged. There is rI & power to do. However, in engine applications, conventionally used bellows cannot sufficiently absorb engine vibrations and displacements. Therefore, even in high-temperature environments of approximately 900℃ or higher,
A bellows that satisfactorily performs its functions was desired.

(発明の目的) 本発明は、前記の事情を考慮してなされたもので、その
目的とするところは、約900℃以上の高温環境下(例
えば、高温のガス流路内)に適用可能なセラミックス製
ベローズを提供することにある。
(Object of the Invention) The present invention has been made in consideration of the above-mentioned circumstances, and its purpose is to be applicable to high-temperature environments of approximately 900°C or higher (for example, in high-temperature gas flow paths). Our objective is to provide ceramic bellows.

(発明の構成) 本発明のセラミックス製ベローズは、窒化珪素、炭化珪
素等より成りかつ中央に穴を設けた複数のセラミックス
薄板を、互いに隣接し合う両セラミックス薄板面の内周
側端縁部および外聞側91縁部同士が交互に連接される
ように必要ならばセラミックススペーサを介して雷ね配
性し、その各部材間の接触部//J−を、前号「;セラ
ミックス薄板の主成分と同一まfcは類似の成分を有す
るセラミックス接合材で接合してなることを特徴とする
ものである。即ち、本発明は高温環境下において十分な
弾性を維持しtiするセラミンク材料でベローズk 1
重成したものである。さらに、本発明を図面に埜づき詳
述するに、本発明のベローズは、−典型例として 第1
図および第2図に示すように、t6?Y中火に丸穴を設
けfcドーナツ板形のセラミックス71へ板l・・・を
、互いvc隣接し合う両セラミックスli’)板面の内
周側端縁部および外局側端縁部同士が交互に連接される
ように、所謂蛇腹状になるようにセラミックススペーサ
2を介して重ね配置し、セラミックス薄板1とスペーサ
2の接触面をセラミックス接合材3,3で接合してなる
ベローズを挙げることができる。セラミックス7’、j
i板trL約c+o。
(Structure of the Invention) The ceramic bellows of the present invention includes a plurality of ceramic thin plates made of silicon nitride, silicon carbide, etc., each having a hole in the center. If necessary, the edges of the outer side 91 are alternately connected with each other through ceramic spacers, and the contact area between each member is defined as the main component of the ceramic thin plate in the previous issue. The fc is characterized in that it is bonded with a ceramic bonding material having similar components.That is, the present invention is characterized in that the bellows k1 is made of a ceramic bonding material that maintains sufficient elasticity in a high temperature environment.
It is a superimposed product. Furthermore, to describe the present invention in detail with reference to the drawings, the bellows of the present invention is as follows:
As shown in the figure and FIG. 2, t6? Make a round hole in the Y medium heat and insert the plate l... into the donut plate-shaped ceramic 71 between the inner circumferential edge and outer circumferential edge of the plate surfaces of both adjacent ceramics li') A bellows is made by arranging the ceramic thin plates 1 and the spacers 2 so that they are alternately connected with each other through ceramic spacers 2 in a so-called bellows shape, and bonding the contact surfaces of the ceramic thin plates 1 and the spacers 2 with ceramic bonding materials 3, 3. be able to. Ceramics 7', j
i board trL approx. c+o.

℃以上の高温環境下において十分に大きな弾性を有する
セラミック材料より成るものであればよく、例えば炭化
珪素(SiC)、窒化珪素C8’sN+)、サイアロン
などが適する。また、薄4h 1の形状は、流体の流通
路に使用する場合にilSはぼ中央に穴を設けるなど、
その使用に適するようfC工夫された形状であればよく
、第1図VC示す円形のものには限られず、第3図に示
すような楕円形の薄板1′でもよい。さらに、薄182
1の寸法(例えば、内へ外径、厚さなど)は、ベローズ
fC負荷される応力およびその応力に対(、てベローズ
に許容される変形量など全考慮して適宜設定すればよい
。但し、セラミックス薄板(I−jrP−肉にし禍ぎる
と、変形量が極めて小さくなってしまう一方、それを薄
肉にし〕員ぎると、’;!l1In″不足になることよ
り、薄板l/7)厚さは、約()、1〜1.、 Ovn
x程度、好捷しくけ約0.2〜0.7ガ稈鳴゛で也)る
と都合が良い。
Any material may be used as long as it is made of a ceramic material that has sufficiently high elasticity in a high-temperature environment of .degree. In addition, the thin 4h1 shape has a hole in the center of the ILS when used as a fluid flow path.
The shape of the thin plate 1' is not limited to the circular shape shown in FIG. 1, but may be an elliptical thin plate 1' as shown in FIG. Furthermore, thin 182
The dimensions of 1 (for example, inward outer diameter, thickness, etc.) may be set as appropriate by taking into consideration the stress applied to the bellows fC and the amount of deformation allowed for the bellows. , If the thickness of the ceramic thin plate (I-jrP- is too large, the amount of deformation will be extremely small, but if it is made too thin, there will be a shortage of ';!l1In'', so the thickness of the thin plate l/7) is , about (), 1~1., Ovn
It is convenient to have a culm noise of about 0.2 to 0.7 when the culm is approximately x.

・ド発明で用いるセラミックス接合材3は、セラミック
ス薄板1の主成分と同一または類似の成分會有すること
を必須とし、好ましくはそのヒラミック分がセラミック
スs@tと同一の成分である場合で、さらに好ましくけ
セラミック分がセラミックス9:う板1と同一成分でか
つ同一組成である場合である。例えば、セラミックス薄
板が、空化珪素(Si、 N4 ) 94重訃パーセン
ト、酸化イツトリウム(Yz 03 ) 3 重1〜パ
ーセント、およびスピネル(MgA404 )3市量パ
ーセントの組成からなる場合のように、空化珪素を主成
分とするセラミック材であるとf!に畦、セラミックス
接合材は空化珪素またはこれと類似の成分を含むことを
必要とする1、壕7’(jp化珪素、酸化イツトリウム
およびスピネルを含む接合材を用いてもよい。甘た例え
ば、セラミックス薄板が、炭化珪素(SiC) 97.
6 IIT吊パ吊上−セントーボンブラック2重訃パー
セント、および炭化硼素0.4市量パーセントの組成か
らなる場合のように、炭化珪素を主成分とするセラミッ
ク材であるときには、セラミックス接合材は炭化珪素ま
たはこれと類似の成分に−含むことを必要とし、さらに
、炭化珪素、カーボンブラック、炭化硼素およびアルミ
ニウムなどを含む接合Hを用いてよい。従来、セラミッ
クス同士を接合する方法としては、ガラスを接合材に用
いる方法や、金属Mを介在させて接合する方法などが知
ら11.−Cいる。しかし、これらの方法を利用して窒
化珪素、炭化珪素等のセラミックスの接合材にガラスや
全域等を用いたのでは、約900℃程度の高輻環憶下に
おいて振動や応力が負荷されると、当該接合セラミック
ス1ま、接合部に割れやひび等をlトし、容易に分離し
易くなる。
- The ceramic bonding material 3 used in the invention must have the same or similar component composition as the main component of the ceramic thin plate 1, preferably when its helical component is the same component as the ceramic s@t, and further Preferably, the ceramic component is the same as Ceramic 9:Plate 1 and has the same composition. For example, when a ceramic thin plate has a composition of 94 percent by weight of silicon oxide (Si, N4), 1 to percent by weight of yttrium oxide (Yz 03 ), and 3 percent by weight of spinel (MgA404), If it is a ceramic material whose main component is silicone f! In addition, the ceramic bonding material must contain hollow silicon or a similar component. , the ceramic thin plate is silicon carbide (SiC) 97.
6 IIT Lifting Padding - When the ceramic material is composed of silicon carbide as the main component, as in the case where the composition consists of centaurbon black double weight percent and boron carbide 0.4 percent by weight, the ceramic bonding material A bond H that requires inclusion in silicon carbide or a similar component and further includes silicon carbide, carbon black, boron carbide, aluminum, etc. may be used. Conventionally, methods of joining ceramics together include methods using glass as a joining material and methods of joining with a metal M interposed between them.11. -C is here. However, if glass or the entire area is used as a bonding material for ceramics such as silicon nitride or silicon carbide using these methods, if vibrations or stress are applied under a high-radiance environment of about 900°C, the problem will occur. Bonded ceramics 1 prevent cracks and cracks in the bonded parts, making them easier to separate.

こねVこ対して、本発明に従ってセラミックス薄板の主
成分と同一またけ類似の成分を有する接合材を甲いると
、約900℃以上の高温下でベローズVC大きな振動や
応力が負荷されても、セラミックス薄板間の接合部に割
れやひび等’ttく生じず、接合力が劣化しない。これ
は、本発明の接合材が、セラミックス薄板と近似の成分
よりなり該薄板と多くは同程度の耐熱性を有すること、
また成分が似ているため焼成時におけるセラミックス薄
板との相溶性が良好で接合強度が大きくなることなどの
理由によると推察される。また、本発明の接合材は、セ
ラミックス)W板表面に被覆し易い形態VC加工し!ζ
ものが望ましく、例えばセラミックス薄板の主成分と同
一成分をαむセラミックス粉末を適当な八(媒(例えば
、ブチルアルコールなど)に混合・′摩拌したスラリー
状またはペースト状の接合(A♀用いるとよい。
On the other hand, if a bonding material having the same and similar components as the main components of the ceramic thin plate is used according to the present invention, the bellows VC will not be damaged even if large vibrations and stress are applied at high temperatures of approximately 900°C or higher. No cracks or cracks occur in the joints between thin ceramic plates, and the joint strength does not deteriorate. This is because the bonding material of the present invention has a composition similar to that of a ceramic thin plate, and has heat resistance that is almost the same as that of the thin ceramic plate.
It is also assumed that this is due to the fact that since the components are similar, the compatibility with the ceramic thin plate during firing is good and the bonding strength is increased. In addition, the bonding material of the present invention is VC-processed so that it can be easily coated on the surface of a ceramic (W) plate! ζ
For example, it is preferable to use a slurry-like or paste-like bonding method in which a ceramic powder containing the same main components as the main component of the ceramic thin plate is mixed with a suitable medium (such as butyl alcohol) and agitated. good.

また、本発明で用いるセラミックススペーサ2は、約9
0 り ℃以上の高温下で使…されても、分解、破壊せ
ず、咬た々面に亀裂等を生じ、ないものならばよく、好
ましくけセラミックス薄板やセラミックス接合材の主成
分と同一または司似の成分を含むセラミック材でちる。
Further, the ceramic spacer 2 used in the present invention has a diameter of about 9
It is fine if it does not decompose or break even if used at high temperatures of 0°C or higher, does not cause cracks on the interlocking surfaces, and is preferably one that is the same as the main component of ceramic thin plates or ceramic bonding materials, or Chilled with ceramic material containing ingredients similar to Tsukasa.

また、セラミックス薄板の重ね合わせに当っては、第2
図に示したようにセラミックススペーサ2を介在させて
もよいが、第4図eこ示すようにセラミックス薄板1a
の内周glIlお・よび外内側の端縁双方1/C肉厚部
4,4を互いに反対四に設けたりまたは第5図に示すよ
うにセラミックス薄板1bの内周側または外周側端Ft
のいすハか一方に肉厚部4′を交互に設けたりするなど
して、セラミックス薄板が所望の間隔を取って並列する
ようにせしめることにより、スペーサ全不要にしてもよ
い。咬な、他の方法として、セラミックス薄板を折曲ま
たけ湾曲せしめて一定の間隔を作ることも考えられ、そ
の方法による例として、第6図に示すような、内周[端
縁部および外用側端縁部が互いに逆方向に幾分屈曲しf
c形状のセラミックス薄板1c・・・全表裏交互に重ね
合わせてなるベローズや、第7図に示すような、断面が
波形金なす形状のセラミックス薄板1d・・・を表裏交
互に重ね合わせてなるベローズなどを挙げることができ
る。この種のベローズは、スペーサが不要であるだけで
なく、大きく伸縮でき変形の許容量が相対的に大きい。
In addition, when stacking ceramic thin plates, a second
As shown in the figure, a ceramic spacer 2 may be interposed, but as shown in FIG.
The inner periphery glIl and both the outer and inner edges 1/C thick parts 4, 4 are provided oppositely to each other, or as shown in FIG.
It is also possible to eliminate the need for spacers altogether by alternately providing thick wall portions 4' on one side or the other so that the ceramic thin plates are arranged in parallel with a desired spacing. Another possible method is to bend and curve ceramic thin plates to create a certain spacing. The side edges are slightly bent in opposite directions f
A bellows formed by stacking c-shaped ceramic thin plates 1c alternately on the front and back sides, and a bellows formed by stacking ceramic thin plates 1d with a corrugated egg-shaped cross section alternately on the front and back as shown in Fig. 7. etc. can be mentioned. This type of bellows not only does not require a spacer, but also can expand and contract significantly and has a relatively large amount of deformation tolerance.

さらrCl 第8図Vこ示すような、内周側端縁部およ
び外1iffi 1+II端M部を反対方向に折曲げる
と共に、内周側端縁と外周側端縁の中間部分上り内周側
および外周側の両端縁にかけて徐々に肉厚になるように
形成したセラミックス薄[1e・−・を表裏交互に重ね
合わせたベローズにすかば、スペーサ不要の他に、ベロ
ーズや体の一1件が、!スいVこも拘らず変形の許容量
が大きく、しかもセラミックス薄板間の接合面への負荷
応力が小さくてっては、例えばドクターブレード法ン・
利III +、てセラミックス薄板′(r−製浩しこね
を所定の形t(に打チ抜く方法、スラリー状のセラミッ
クス#!l成物をある甚板上Vこ噴霧して所定の11み
〆l)セラミックスシートを形成し、しかる陵パンチン
グまfcは切断によって所定の形状のヒラミックス;’
、’i板に1iFi製する方法、押出成形の後所定の形
状にパンチングする押出し法、あるいは粉末プレス法や
射出成形法などにより得られたセラミックス薄板を焼成
することによってl!l!!潰される、また、セラミッ
クス薄板同士を接合するに当っては、例えば、燐酸前の
セラミックス111板にスラリー状またはペースト状の
セラミックス接合材を塗布し、該セラミックス薄板を必
要にょリスペーサを介して重ね合わせ、しかる後焼成し
、セラミックス薄板同士を薄板自体の焼成と同時に接合
する方法で行なってもよく、また予め焼成1.j(セラ
ミックス薄板してスラリー状等のセラミックス接合材を
塗布し、該セラミックス薄板ヲ重ね合わせ、しかる後焼
成しセラミックス薄板同士を接合する方法で行なっても
よい。
Further rCl Fig. 8V As shown in Fig. 8, bend the inner peripheral edge and the outer 1iffi 1+II end M part in the opposite direction, and also bend the intermediate part between the inner peripheral edge and the outer peripheral edge on the inner peripheral side and The bellows is made by stacking ceramic thin sheets [1e... ! However, if the allowable amount of deformation is large and the stress applied to the joint surface between thin ceramic plates is small, for example, the doctor blade method
A method of punching out a ceramic thin plate' (R-) into a predetermined shape, by spraying a slurry-like ceramic #!l product onto a certain board to form a predetermined shape. 〆l) Form a ceramic sheet and punch it into a predetermined shape by cutting it;
, by firing a ceramic thin plate obtained by a method such as a method of producing 1iFi on an i-plate, an extrusion method in which punching into a predetermined shape after extrusion molding, or a powder press method or an injection molding method. l! ! When joining ceramic thin plates that are crushed together, for example, a slurry-like or paste-like ceramic bonding material is applied to the ceramic 111 plate before phosphoric acid, and the ceramic thin plates are overlapped with a necessary spacer. , and then firing, and joining the ceramic thin plates to each other at the same time as the thin plates themselves are fired. Alternatively, the firing may be performed in advance. j (This may be carried out by applying a ceramic bonding material such as a slurry to thin ceramic plates, overlapping the thin ceramic plates, and then firing them to bond the thin ceramic plates to each other.

(実施例) 以下、本発明の実施例を図面により説明する。(Example) Embodiments of the present invention will be described below with reference to the drawings.

実施例 l 蒸化珪素(813N4 ) 94重量・パーセント、酸
化イツトリウム<YtO13重量パーセント、督よびス
ピネル(MIl’ALy 04 ) 3重階バーtント
の組成を持つセラミックス粉末(平均粒径077ミフロ
ン〕ヲメチルセルローズ、ポリビニルアルコール訃よび
水と混合して、セラミックス粉末を50体積パーセント
含む泥状物を調製し、これを押出成形機のスリット(中
0.65m1より押出してセラミックスシートを形成し
た。次に、核シートを第1図に示す如きドーナツ形状(
内径50■、外径L 25 vm )に打ち抜き、次い
で速やかに第9図に示すように乾燥台5の傾斜+Tfi
 6の下端側に載置し、自然軟弾を行なってセラミック
ス薄板の前駆成形体7を製造した。しかる祷該成形体7
ft第1O図に示すように泡化rn+ :P(BN)粉
末を表面被覆した窒化珪素質セラミックス製焼成台8の
傾斜面と端側に載置12、約500℃まで加熱しながら
減圧してメチルセルローズk(Tの前記有機結合剤を成
形体7中より除去し、続いて窒素雰囲気中で1780℃
1で1111熱しその後その状態の−1ま2時間維持し
て焼成を行ない、第11図に示すセラミックス薄板lC
′を製造した。′Aグ板1c’の寸法は、17さ0.5
−1内径40耀、外径100錦であった。
Example 1 Ceramic powder (average particle size: 077 microfron) having the composition of evaporated silicon (813N4) 94% by weight, yttrium oxide <YtO 13% by weight, and spinel (MIL'ALy 04) triple grade bart. A slurry containing 50 volume percent of ceramic powder was prepared by mixing methyl cellulose, polyvinyl alcohol, and water, and this was extruded through a slit (0.65 ml inside) of an extruder to form a ceramic sheet. , the nuclear sheet is shaped like a donut (
The inner diameter is 50 mm, the outer diameter L is 25 vm), and then, as shown in FIG.
6 was placed on the lower end side and subjected to natural softening to produce a precursor molded body 7 of a ceramic thin plate. The molded body 7
ft As shown in Fig. 1O, foamed rn+:P(BN) powder was placed on the inclined surface and end side of a firing table 8 made of silicon nitride ceramics, and the pressure was reduced while heating to about 500°C. The organic binder of methylcellulose K (T) was removed from the molded body 7, and then heated at 1780°C in a nitrogen atmosphere.
The ceramic thin plate 1C shown in FIG.
' was manufactured. The dimensions of 'Ag plate 1c' are 17 x 0.5
-1 The inner diameter was 40mm and the outer diameter was 100mm.

一方、窒化硅素85重奇パーセント、酸化イツトリウム
5重曖パーセント、およびスピネルlO重量パーセント
の組成を持つセラミノクスツクス接合材全W4!I!!
シた。しかる後、らII紀の一ヒラミックス薄板1c’
を20枚表裏交互に重ね合わせ、その内周側端縁および
外周側端縁の接触面rこVi調製済のセラミックス接合
拐全印刷法により約;10ミクロンの厚さに塗布し、次
に、重ね合わせた薄板′(I−窒素雰囲気中で約170
0 ℃に加熱しその後そのまま2時間維持して、焼成を
行ない、第6図に示すようなベローズを製造した。なお
、焼成の際には、変形防止のために、窒化珪累の粗大顆
粒を重ね合わせたセラミックス薄板1c′の固りに充填
した。
On the other hand, all W4 ceramic bonding materials have a composition of 85 weight percent silicon nitride, 5 weight percent yttrium oxide, and 10 weight percent spinel! I! !
Shita. After that, one hiramix thin plate 1c' of the La II period
20 sheets were stacked on top and back alternately, and the contact surfaces of the inner and outer edges were coated to a thickness of about 10 microns using the pre-prepared ceramic bonding printing method, and then, Superimposed thin plates' (I - approx. 170 mm in nitrogen atmosphere)
The material was heated to 0.degree. C. and then maintained for 2 hours for firing to produce a bellows as shown in FIG. Incidentally, during firing, in order to prevent deformation, coarse granules of silicon nitride were filled into the mass of stacked ceramic thin plates 1c'.

製造したベローズの性能試験を行なったところ、900
℃の高温下で、変位量を1.0箇以内に調節して10 
回以上ベローズを伸縮させても、ベローズ表面にひび割
れ等の異常(同所は見られなかった。また、このベロー
ズに軸方向変位を与えて破壊させた。このベローズの破
壊変位量は3.5鴎であった(破壊点は接合部であった
)0実施例 2 平均粒径0.45ミクロンの炭化珪素97.6重量バー
セント、平均粒径210Aのカーボンブラック2重量パ
ーセント、寂よび平均粒径063ミクロンの炭化11素
0.4i1j品パーセントのi11成になるように溶媒
として−rセトンをIll・つて混合したセラミックス
粉末′V/Jを1,1ン力末吻100止量部に対して夫
々、17i1jj4部のポリビニルブチラール、8重1
部のフタル酸エステル、および60重量部のエチルアル
コールと混合しC1泥状物を調製し、これを)・“クク
ー・ブレード法によ0厚さ0.7 mの柔軟性看!イT
する(・ラミノクスシートに成形した。この場合、エチ
ルアルコール等の有機i′1g剤は揮(1にすしり)ら
ハて層ろ。次に、該シートを第12図に示すホットプレ
ート9の中に人ね、ある程度の加熱加圧の1灸勢いよく
プレスを行なって、ytr J:(図VC7]”:す」
:う庁、内筒側および外内側の両端縁双方に悶f、7部
ケq。
When we conducted a performance test on the manufactured bellows, it was found that 900
At a high temperature of ℃, adjust the amount of displacement to within 1.0 degrees.
Even when the bellows was expanded and contracted more than once, no abnormalities such as cracks were observed on the bellows surface.Also, this bellows was destroyed by giving an axial displacement.The amount of fracture displacement of this bellows was 3.5 times. Example 2: 97.6% by weight of silicon carbide with an average particle size of 0.45 microns, 2% by weight of carbon black with an average particle size of 210A, and an average particle size of Ceramic powder 'V/J mixed with -r setone as a solvent so as to have an i11 composition of 0.4i1j 0.4i1j product percent of 0.063 micron 11 carbide is applied to 100 parts of 1.1 N force end. 17i1jj 4 parts polyvinyl butyral, 8 ply 1
A C1 slurry was prepared by mixing 60 parts by weight of phthalate ester and 60 parts by weight of ethyl alcohol.
(It was formed into a laminox sheet. In this case, the organic i'1g agent such as ethyl alcohol was evaporated and filtered. Next, the sheet was placed on a hot plate 9 shown in FIG. 12. There is a person inside, apply moxibustion vigorously to a certain degree of heat and pressure, and press ytr J: (Figure VC7).
: The inner cylinder side and both edges of the outer and inner sides have scratches and scratches on both sides.

いに反対側に設けたセラミックス1fVtfj l a
’ f製造した。
Ceramics 1fVtfj l a provided on the opposite side
'f Manufactured.

一方、平均粒径o、ssミクσンの炭化珪Ji97.6
重量 パーセント、平均粒径210Aのカーボンブラッ
ク1.6重月・パーセント、・[ξ均才1ン径0.63
ミクロンの炭化硼素0.4重量パーセント、および平均
粒径1ミクロンの粉末アルミニウム0.4重ケバ−セン
トの組成を持つセラミックス粉末を、適−唐のブチルア
ルコールと混合して、スラリー状のセラミックス接合材
を調製した。
On the other hand, silicon carbide Ji97.6 with average particle size o and ss miku σ
Weight percent, carbon black with average particle size 210A 1.6 weight percent, [ξ average particle diameter 0.63
Ceramic powder having a composition of 0.4 weight percent of micron boron carbide and 0.4 weight percent of powdered aluminum with an average particle size of 1 micron is mixed with a suitable amount of butyl alcohol to form a slurry of ceramic bonding. The material was prepared.

しかる鏝、前記のセラミックス薄板La’Th20枚表
裏交互に重ね合わせ、薄板la′の接触する肉厚部表面
Vこ調製済のセラミックス接合材を印刷法により約15
ミクロンの厚さに塗布し、しかる後重ね合わせた薄板を
黒鉛製容器に収納し、アルゴンガス雰囲気中で約210
0℃に加熱しその鏝そのまま1時間維持して1.焼成を
行なりた。
Using a trowel, stack 20 of the thin ceramic plates La' Th on top and bottom alternately, and apply the prepared ceramic bonding material to about 15 mm using a printing method.
The thin plates were coated to a thickness of microns, then stacked and placed in a graphite container, and heated to about 210 μm in an argon gas atmosphere.
Heat the iron to 0℃ and keep it there for 1 hour.1. I did the firing.

この罰金、重ね合わせた形状をそのま棟維持するために
、各薄板間に黒鉛板を嵌挿した。
In order to maintain this superimposed shape, a graphite plate was inserted between each thin plate.

而して、第14図に示すようなベローズを製造L fc
oこのベローズの寸法は、内径40園、外径110mで
、接合部の厚さが1.50■、それ以外の可撓部の平均
厚さが0.55 vsmでちった。
Thus, a bellows as shown in Fig. 14 was manufactured L fc
o The dimensions of this bellows are an inner diameter of 40mm, an outer diameter of 110m, a thickness of the joint part of 1.50mm, and an average thickness of the other flexible parts of 0.55vsm.

また、有効内径は50圏、有効外径は100舗であった
。このベローズの伸縮性能試験を行なつたところ、11
00℃の高温下で、室位賃)を、1.0mに調節して1
06回以Fベローズr反C′す圧縮させても、ベローズ
表面1こひび1:11れ1゛ス・は卵、られず、ベロー
ズの破壊呟全く無かった。1k、このベローズの室温に
おける伸長破壊変位ζ)は、3、7 mでちった(破壊
点は接合部校よび1IT4.Q部約半々であつfc )
 。
Also, the effective inner diameter was 50 circles and the effective outer diameter was 100 circles. When we conducted an expansion/contraction performance test on this bellows, we found that 11
At a high temperature of 00℃, adjust the room height to 1.0m and
Even when the bellows was compressed more than 06 times, no cracks occurred on the bellows surface (1:11), and there was no breakage of the bellows at all. 1k, the extensional fracture displacement ζ) of this bellows at room temperature was 3.7 m (the fracture point is about half of the joint part and 1IT4.Q part and fc)
.

(発明の効果) 以上説明したように、本発明のセラミックス製ベローズ
は、情化桂朱、I:’tj(ヒ珪素フトよりなるセラミ
ックス薄板を重ね合わせ、該、ぺη板と近似の成0を持
つセラミックス接合(〕で啼合したことにより、約90
 (] ℃以上の高稚項境下においても十分に大きな蓮
性を1!?Iiえることができ、そのような高温+i 
te金影形成る自動中エンジンの排ガス系などの帷体流
曲路に摘甲■丁能である。
(Effects of the Invention) As explained above, the ceramic bellows of the present invention is produced by laminating ceramic thin plates made of arsenic foam and forming an approximate structure with Approximately 90
() It is possible to obtain a sufficiently large temperature even under high temperature conditions of 1!?Ii at temperatures above ℃;
It is necessary to remove the metal flow path in the exhaust gas system of an automatic engine, etc., which forms a golden shadow.

【図面の簡単な説明】[Brief explanation of drawings]

ff11図は本発明のナラミックス製ベローズの一典型
例を示す平面jjll、 第2図は第1図のII −II *!における断++’
+i II4、第3図は第1図のベローズのセラミック
ス薄板の変型例を示す平面図、 第4図ない(7第8図は本発明のベローズの他の各種典
型例を示す図、 第9[シ1ないし7第11図は本発明の一実施例のベロ
ーズの製浩工程全示す図、 第12図ないし第14図1本発明の他の実施例のベロー
ズの製造工程を示す図であるう図中、 1.1’、la、la’、lb、lc、Ic’、ld。 le−・・・・・・・・ セラミックス薄板2・・・・
・・・・・スベー廿 3・・・・・・・・セラミックス接合材牙1図 牙3図 1′ 第4図 牙5図 オ/6図 C オフ図 28図 29図 牙12図 第13図 18′ 才14図
ff11 is a plan view showing a typical example of the Naramix bellows of the present invention, and FIG. 2 is a plane II-II*! of FIG. 1. break in ++'
+i II4, Fig. 3 is a plan view showing a modified example of the ceramic thin plate of the bellows in Fig. 1, Fig. 4 (not shown) (7 Fig. 8 is a view showing various other typical examples of the bellows of the present invention, Fig. 9 [ Figures 1 to 7 are diagrams showing the entire process of manufacturing a bellows according to one embodiment of the present invention, and Figures 12 to 14 are diagrams showing the manufacturing process of a bellows according to another embodiment of the present invention. In the figure, 1.1', la, la', lb, lc, Ic', ld. le-... Ceramic thin plate 2...
...Sube 3... Ceramic bonding material Fig. 1 Fig. Fig. 3 Fig. 1' Fig. 4 Fig. 5 O/Fig. 6 C Off Fig. 28 Fig. 29 Fig. Fig. 12 Fig. 13 18' year old 14 figure

Claims (1)

【特許請求の範囲】[Claims] 窒化珪素、炭化珪素等より成りかつ中央に穴を設けた複
数のセラミックス薄板を、互いに隣接し合う両セラミッ
クス薄板面の内局側端縁部および外周側端縁部同士が交
互に連接されるように必要ならばセラミックススペーサ
を介して重ね配置し、その各部材間の接触部分を、前記
セラミックス薄板の主成分と同一または類似の成分を有
するセラミックス接合材で接合してなることを特徴とす
るセラミックス製ベローズ。
A plurality of ceramic thin plates made of silicon nitride, silicon carbide, etc. and having a hole in the center are connected so that the inner edge and the outer edge of the adjacent ceramic thin plates are alternately connected to each other. If necessary, the ceramics are arranged one on top of the other with a ceramic spacer interposed therebetween, and the contact portions between the members are bonded with a ceramic bonding material having the same or similar components as the main components of the ceramic thin plate. Made of bellows.
JP5989784A 1984-03-28 1984-03-28 Ceramic bellows Pending JPS60205071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5989784A JPS60205071A (en) 1984-03-28 1984-03-28 Ceramic bellows

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5989784A JPS60205071A (en) 1984-03-28 1984-03-28 Ceramic bellows

Publications (1)

Publication Number Publication Date
JPS60205071A true JPS60205071A (en) 1985-10-16

Family

ID=13126365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5989784A Pending JPS60205071A (en) 1984-03-28 1984-03-28 Ceramic bellows

Country Status (1)

Country Link
JP (1) JPS60205071A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7182923B2 (en) * 2001-09-28 2007-02-27 Institut Francais Du Petrole Reaction chamber that comprises a jacket that contains at least one module that is connected by flexible means to the jacket and that contains heat exchange means

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7182923B2 (en) * 2001-09-28 2007-02-27 Institut Francais Du Petrole Reaction chamber that comprises a jacket that contains at least one module that is connected by flexible means to the jacket and that contains heat exchange means

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