JPS60202651A - 荷電粒子エネルギ−分析装置 - Google Patents

荷電粒子エネルギ−分析装置

Info

Publication number
JPS60202651A
JPS60202651A JP59059195A JP5919584A JPS60202651A JP S60202651 A JPS60202651 A JP S60202651A JP 59059195 A JP59059195 A JP 59059195A JP 5919584 A JP5919584 A JP 5919584A JP S60202651 A JPS60202651 A JP S60202651A
Authority
JP
Japan
Prior art keywords
energy
charged particle
magnetic field
electrons
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59059195A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0578137B2 (enrdf_load_stackoverflow
Inventor
Sumio Kumashiro
熊代　州三夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP59059195A priority Critical patent/JPS60202651A/ja
Publication of JPS60202651A publication Critical patent/JPS60202651A/ja
Publication of JPH0578137B2 publication Critical patent/JPH0578137B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP59059195A 1984-03-26 1984-03-26 荷電粒子エネルギ−分析装置 Granted JPS60202651A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59059195A JPS60202651A (ja) 1984-03-26 1984-03-26 荷電粒子エネルギ−分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59059195A JPS60202651A (ja) 1984-03-26 1984-03-26 荷電粒子エネルギ−分析装置

Publications (2)

Publication Number Publication Date
JPS60202651A true JPS60202651A (ja) 1985-10-14
JPH0578137B2 JPH0578137B2 (enrdf_load_stackoverflow) 1993-10-28

Family

ID=13106394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59059195A Granted JPS60202651A (ja) 1984-03-26 1984-03-26 荷電粒子エネルギ−分析装置

Country Status (1)

Country Link
JP (1) JPS60202651A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0578137B2 (enrdf_load_stackoverflow) 1993-10-28

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