JPS60202651A - 荷電粒子エネルギ−分析装置 - Google Patents
荷電粒子エネルギ−分析装置Info
- Publication number
- JPS60202651A JPS60202651A JP59059195A JP5919584A JPS60202651A JP S60202651 A JPS60202651 A JP S60202651A JP 59059195 A JP59059195 A JP 59059195A JP 5919584 A JP5919584 A JP 5919584A JP S60202651 A JPS60202651 A JP S60202651A
- Authority
- JP
- Japan
- Prior art keywords
- energy
- charged particle
- magnetic field
- electrons
- analyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59059195A JPS60202651A (ja) | 1984-03-26 | 1984-03-26 | 荷電粒子エネルギ−分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59059195A JPS60202651A (ja) | 1984-03-26 | 1984-03-26 | 荷電粒子エネルギ−分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60202651A true JPS60202651A (ja) | 1985-10-14 |
| JPH0578137B2 JPH0578137B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-28 |
Family
ID=13106394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59059195A Granted JPS60202651A (ja) | 1984-03-26 | 1984-03-26 | 荷電粒子エネルギ−分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60202651A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-03-26 JP JP59059195A patent/JPS60202651A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0578137B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-28 |
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