JPS60197913A - Magnetic head and its manufacture - Google Patents
Magnetic head and its manufactureInfo
- Publication number
- JPS60197913A JPS60197913A JP5272284A JP5272284A JPS60197913A JP S60197913 A JPS60197913 A JP S60197913A JP 5272284 A JP5272284 A JP 5272284A JP 5272284 A JP5272284 A JP 5272284A JP S60197913 A JPS60197913 A JP S60197913A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- glass
- wafers
- grooves
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
- G11B5/1475—Assembling or shaping of elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/10—Structure or manufacture of housings or shields for heads
- G11B5/105—Mounting of head within housing or assembling of head and housing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
(イ)産業上の利用分野
本発明はVTR等において使用する磁気ヘッド並びにそ
の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a magnetic head used in a VTR or the like and a method of manufacturing the same.
(ロ)従来技術
センダスト等の合金磁性材料を主コアとした磁気ヘッド
は特開昭58−222427号公報に記載されている。(b) Prior Art A magnetic head whose main core is made of an alloy magnetic material such as Sendust is described in Japanese Patent Laid-Open No. 58-222427.
斯る磁気ヘッドにおける主コアを形成する従来の方法は
、第1図に示すように一対のセンダストウェハ[111
21の一方(1)に溶着孔[31141及び巻線孔(5
)を機械加工で作成し、これらウェハfl)i21のギ
ャップ形成面に鏡面仕上げを行なった後、両者を突き合
せ、溝(3)+41 +51にガラス棒(6)を挿入し
加重「)を加えた状態で該ガラス棒(6)を溶着するこ
とによって第2図及び第6図に示すよう4Cウエハ+1
1121の対接面にガラスを浸み込ませてコアブロック
を形成する工程を有している。出来上ったコアブロック
には別途施された810,171により0.2μm程度
のギャップ(8)が形成される(第3図参照)ことにな
るがギャップ部分にガラス(6)が十分に浸透しないた
めウェハ(11121は部分的にしか接着されない。そ
のため機械的強度が弱く第4図の(9)で示す如くスラ
イスを行なって第5図の如く主コアチップを作るときに
前記ギャップに部分的に溶着されていたガラス(6)が
@6図に示すように割れて2μmであったギャップ(8
)が5μm程に広がる。また、溶着時にガラス16)が
ギャップに十分浸透していかないため溝(5)において
空洞叫がわずかに生じるだけであるので、溝(5)中に
巻線孔を形成するのに時間がかかるという欠点があった
。更に所定のギャップの長さくトラック幅)を研磨によ
って形成する際にビデオ用ヘッドではトラック幅が極め
て小さいためコア半休の接合力が弱いと、反りや離脱が
生じるという虞れがある。また上述した従来の方法で形
成された磁気ヘッドは2枚のコア半休の突き合せ面にお
ける接合力が弱いのでギャップ間隔が変化して再生出力
が悪くなるなど信頼性の点にも問題があった。The conventional method for forming the main core in such a magnetic head is to use a pair of Sendust wafers [111
21 (1) has a welding hole [31141 and a winding hole (5
) were created by machining, and the gap forming surfaces of these wafers fl)i21 were mirror-finished, then they were butted together, glass rods (6) were inserted into grooves (3) +41 +51, and a load was applied. By welding the glass rod (6) in the state shown in FIGS. 2 and 6, a 4C wafer +1
It has a step of infiltrating the opposing surface of 1121 with glass to form a core block. A gap (8) of about 0.2 μm will be formed in the completed core block by the separately applied 810 and 171 (see Figure 3), but the glass (6) should fully penetrate into the gap. Because the wafer (11121) is not bonded, it is only partially bonded. Therefore, the mechanical strength is weak and when slicing is performed as shown in (9) in Fig. 4 and the main core chip is made as shown in Fig. 5, some parts are bonded in the gap. As shown in Figure @6, the welded glass (6) broke and the gap (8) was 2 μm.
) spreads to about 5 μm. In addition, since the glass 16) does not fully penetrate into the gap during welding, only a slight cavity occurs in the groove (5), so it takes time to form the winding hole in the groove (5). There were drawbacks. Furthermore, when a predetermined gap length (track width) is formed by polishing, since the track width of a video head is extremely small, if the bonding force between the half cores is weak, there is a risk of warping or separation. In addition, the magnetic head formed using the above-mentioned conventional method has problems in terms of reliability, such as weak bonding force at the abutting surfaces of the two half-core cores, which changes the gap distance and deteriorates the reproduction output. .
(ハ)発明の目的
それ故に本発明の目的は主コアを形成する一対のコア半
休の接合力が強固な磁気ヘッド及びその製造方法を提供
することを目的とする。(c) Purpose of the Invention Therefore, it is an object of the present invention to provide a magnetic head in which the bonding force between the pair of core halves forming the main core is strong, and a method for manufacturing the same.
に)発明の構成
本発明の磁気ヘッドは合金磁性材料よりなるコア半休の
突き合せ面にガラス材よりなる作動ギャップを形成した
主コアを有する磁気ヘッドにおいて、前記ガラス材とコ
ア半休との間に遷移金属層が設けられていることを特徴
とするものであり、また本発明による磁気ヘッドの製造
方法は合成磁性材料よりなる一対のウェハの一方に複数
の溝を設けると共に前記ウェハの各々の対接面にイオン
ブレーティング法により遷移金属層を設け、前記一対の
ウェハな対接せしめ且つ加圧保持すると共に前記切欠に
ガラス棒を挿入し、該ガラス棒を溶着することによって
前記各々のウニ/%の対接面の前記遷移金属層間にガラ
スを浸透させ、しかる後スライス及び研磨加工を行なっ
て主コアを作成するようにしたことを特徴とするもので
ある。B) Structure of the Invention The magnetic head of the present invention has a main core in which an operating gap made of a glass material is formed on the abutting surface of the core half-hole made of an alloy magnetic material. The method of manufacturing a magnetic head according to the present invention is characterized in that a transition metal layer is provided, and the method for manufacturing a magnetic head according to the present invention includes providing a plurality of grooves in one of a pair of wafers made of a synthetic magnetic material, and forming grooves in each pair of the wafers. A transition metal layer is provided on the contact surface by an ion blating method, the pair of wafers are brought into contact with each other and held under pressure, and a glass rod is inserted into the notch and the glass rod is welded. % between the transition metal layers on the opposing surfaces, and then slicing and polishing are performed to create the main core.
(ホ)実施例
第7図に示すように突き合せるべき一方のセンダストウ
ェハu11に溶着用の溝t12(1mと巻線用の溝Iを
設け、次に前記ウェハ■に第8図に示す如きチタン(T
1)膜による遷移金属層(至)を周知のイオンブレーテ
ィング法にて形成する。尚、チタンの代りにクロム、モ
リブデン又はタングステンであってもよい。このような
遷移金属層(15+は第9図の如く前記ウェハ(111
に突き合せられる他方のセンダストウェハ叫の対接面に
も設けられる。尚、前記ウェハ111αυの一方又は双
方に、それらを突き合せたときのギャップ長(ハ)を決
めるための5103膜111が隅部a鎧に設けられてい
る。第9図のように両ウェハ(In(lGを衝合し2#
の加重(0を加えた状態で溝■113(141中に施さ
れたガラス棒(11を第10図の如く高温度(真空中)
で溶かすと第11図に示すようにガラスα−′が前記ウ
ニノー%ttnaeの突き合せ面に形成された遷移金属
層間に容易に浸透していく。これはガラスが金属や合金
に対しては馴染みが悪く、それらの上を延在していかな
いが、遷移金属に対しては馴染み易く、その上を延在し
ていき易いためと思われる。尚、前記ガラスα優′とし
てはセンダストに対し線膨張係数が近似している鉛リン
酸系ガラス又はバリウム11ン酸系ガラスが適当である
。(e) Example As shown in FIG. 7, a welding groove T12 (1 m) and a winding groove I are provided on one of the sendust wafers U11 to be matched, and then a groove I for winding is provided on the wafer (2) as shown in FIG. Titanium (T
1) A transition metal layer (or layers) is formed by a well-known ion blasting method. Note that chromium, molybdenum, or tungsten may be used instead of titanium. Such a transition metal layer (15+ is the wafer (111) as shown in FIG.
It is also provided on the opposing surface of the other Sendust wafer that is butted against the other Sendust wafer. A 5103 film 111 is provided on one or both of the wafers 111αυ at the corner a for determining the gap length (c) when they are butted. As shown in Figure 9, both wafers (In(lG) are abutted and
The glass rod (11) placed in the groove (113) (141) was heated to a high temperature (in a vacuum) as shown in Figure 10 with a load (0 applied).
As shown in FIG. 11, the glass α-' easily penetrates between the transition metal layers formed on the abutting surfaces of the UNINO %TTNAE. This is thought to be because glass is poorly compatible with metals and alloys and does not extend over them, but is easily compatible with transition metals and easily extends over them. It should be noted that lead phosphate glass or barium 11 phosphate glass, which has a coefficient of linear expansion similar to that of Sendust, is suitable as the glass .alpha.'.
このようにしてガラス(11’が突き合せ面に十分浸透
していくと、溝αzutt41には断面が真円に近い大
きな空洞■が形成される。このため巻線用の溝Q41に
おいては、この空洞を巻線孔として利用できるので、製
造作業上有利である。次に、このように接合されて形成
されたブロックを従来と同様にスライスして主コアチッ
プに分断し、各々の主コアチップに所望の研磨を施こす
ことにより主コアが完成される。この主コアは、第12
図及び第13図に示す如くフェライト等の磁性体部@と
ガラス等の非磁性体部のとからなる補強コアan I2
Dによって挾持される如く接合されサンドイウチ状に形
成される。しかる後、コイル@を第12図の如く巻装し
て磁気、ヘッドが完成する。When the glass (11') sufficiently penetrates into the abutting surfaces in this way, a large cavity ■ whose cross section is close to a perfect circle is formed in the groove αzutt41. Therefore, in the groove Q41 for winding, this The cavity can be used as a winding hole, which is advantageous in manufacturing operations.Next, the block formed by joining in this way is sliced into main core chips in the same manner as before, and each main core chip has the desired shape. The main core is completed by polishing the 12th
As shown in FIG.
They are joined so as to be sandwiched by D and formed into a sandwich shape. After that, a coil is wound as shown in FIG. 12 to complete the magnetic head.
(へ)発明の効果
以上の通り本発明の磁気ヘッドによれば、主コアを形成
するコア半休の接合力は強固になるため機械的に安疋し
、且つ電気的な再生特性も向上するという効果がある。(f) Effects of the Invention As described above, according to the magnetic head of the present invention, the bonding force between the core halves forming the main core is strong, resulting in mechanical stability and improved electrical reproduction characteristics. effective.
また、本発明の製造方法では溶着したガラスが2つのウ
ェハの突き合せ面に設けられた遷移金属層間に十分に浸
透していくため接合力が強く、スライスや研磨作業中に
ギャップ長が変化したり、離脱したりすることがない。In addition, in the manufacturing method of the present invention, the bonding force is strong because the welded glass sufficiently penetrates between the transition metal layers provided on the abutting surfaces of the two wafers, and the gap length does not change during slicing or polishing. There is no possibility of leaving or leaving.
従って、特にビデオヘッドの如くトラック幅の小さいも
のを作成する場合の研磨において信頼性を発揮する。ま
た、前記ガラスが前記遷移金属層間に十分浸透していく
やで、溝内のガラスに大きな空洞ができるので、この空
洞を巻線孔として利用できるという効果もある。Therefore, it exhibits reliability especially in polishing when producing a small track width such as a video head. Furthermore, once the glass has sufficiently penetrated between the transition metal layers, a large cavity is formed in the glass in the groove, and this cavity can be used as a winding hole.
@1図、@2図は従来の磁気ヘッド及びその製造方法を
説明するための図であり、第3図は第2図の一部を拡大
して示す図である。第4図及び第5図は従来の磁気ヘッ
ド及びその製造方法を説明するための図であり、第6図
はその一部を拡大して示す図である。第7図、第8図、
第9図及び第10図は本発明の磁′気ヘッド及びその製
造方法を説明するための図であり、第11図は第10図
の要部拡大図である。第12図は本発明の磁気ヘッドの
平面図であり、第13図はその側面図である。
(111(I!−・・ウェハ、a3+13ta41・・
・溝、a9・・・遷移金属層、(19・・・ガラス棒、
(11’・・・ガラス。
出願人 三洋電機株式会社
代理人 弁理士 佐 野 静 夫
第2図
第4図
第10図
11
第12図 第13図
n
手 続 補 正 書 (自発)
昭和59年5月4日
1、事件の表示
昭和59年特許願第52722号
2、発明の名称
磁気ヘッド及びその製造方法
6、補正をする者
事件との関係 特許出願人
名称 (188)三洋電機株式会社
4、代 理 人
住所 守口市京阪本通2丁目18番地
記載を「0.2μm」 と訂正する。
以上・1 and 2 are diagrams for explaining a conventional magnetic head and its manufacturing method, and FIG. 3 is an enlarged view of a part of FIG. 2. 4 and 5 are diagrams for explaining a conventional magnetic head and its manufacturing method, and FIG. 6 is a partially enlarged diagram. Figure 7, Figure 8,
9 and 10 are diagrams for explaining the magnetic head of the present invention and its manufacturing method, and FIG. 11 is an enlarged view of the main part of FIG. 10. FIG. 12 is a plan view of the magnetic head of the present invention, and FIG. 13 is a side view thereof. (111(I!-...wafer, a3+13ta41...
・Groove, a9...Transition metal layer, (19...Glass rod,
(11'...Glass. Applicant Sanyo Electric Co., Ltd. Agent Patent Attorney Shizuo Sano Figure 2 Figure 4 Figure 10 Figure 11 Figure 12 Figure 13 n Procedural Amendment (Spontaneous) 1982 May 4th 1, Display of the case Patent Application No. 52722 of 1988 2, Name of the invention Magnetic head and its manufacturing method 6, Person making the amendment Relationship to the case Name of the patent applicant (188) Sanyo Electric Co., Ltd. 4 , the agent address 2-18 Keihan Hondori, Moriguchi City is corrected to "0.2 μm".
Claims (1)
ラス材よりなる作動ギャップを形成した主コアを有する
磁気ヘッドにおいて、前記ガラス材とコア半休との間に
遷移金属層が設けられていることを特徴とする磁気ヘッ
ド。 (2) 前記合金材料はセンダストであることを特徴と
する特許請求の範[ffi@1項記載の磁気ヘッド。 (3)前記遷移金属層はチタン膜であることを特徴とす
る特許請求の範囲第2項記載の磁気ヘッド。 (4)前記ガラス材は鉛リン酸系ガラスであることを特
徴とする特許請求の範囲第3項記載の磁気ヘッド。 15+ 前記ガラス材はバリウムリン酸系ガラスである
ことを特徴とする特許請求の範囲第5項記載の磁気へウ
ド。 。 (6)合成磁性材料よりなるー゛対のウェハの一方に複
数の溝を設けると共に前記ウェハの各々の対接面にイオ
ンブレーティング法により遷移金属層を設け、前記一対
のウェハを対接せしめ且つ加圧保持すると共に前記溝に
ガラス棒を挿入し、該ガラス棒を溶着することによって
前記各々のウニ11の対接面の前記遷移金属層間にガラ
スを浸透させしかる後スライス及び研磨加工を行なって
主コアを作成するようにしたことを特徴とする磁気ヘッ
ドの製造方法。Scope of Claims: (1) A magnetic head having a main core in which an operating gap made of a glass material is formed on the abutting surface of the core half-hole made of an alloy magnetic material, wherein a transition metal is inserted between the glass material and the core half-hole. A magnetic head characterized by being provided with a layer. (2) The magnetic head according to claim 1, wherein the alloy material is Sendust. (3) The magnetic head according to claim 2, wherein the transition metal layer is a titanium film. (4) The magnetic head according to claim 3, wherein the glass material is lead-phosphate glass. 15+ The magnetic chamber according to claim 5, wherein the glass material is barium phosphate glass. . (6) A plurality of grooves are provided in one of a pair of wafers made of a synthetic magnetic material, and a transition metal layer is provided on the facing surface of each of the wafers by an ion blating method, so that the pair of wafers are brought into contact with each other. While pressurizing and holding, inserting a glass rod into the groove and welding the glass rod, glass is infiltrated between the transition metal layers on the facing surface of each sea urchin 11, and then slicing and polishing are performed. A method of manufacturing a magnetic head, characterized in that a main core is created using a method of manufacturing a magnetic head.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5272284A JPS60197913A (en) | 1984-03-19 | 1984-03-19 | Magnetic head and its manufacture |
CA000475768A CA1247737A (en) | 1984-03-16 | 1985-03-05 | Magnetic head |
DE8585102618T DE3570786D1 (en) | 1984-03-16 | 1985-03-07 | Magnetic head |
EP85102618A EP0156220B1 (en) | 1984-03-16 | 1985-03-07 | Magnetic head |
US07/097,316 US4807075A (en) | 1984-03-16 | 1987-09-14 | Magnetic head |
US07/304,286 US4891878A (en) | 1984-03-16 | 1989-01-31 | Method of making a magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5272284A JPS60197913A (en) | 1984-03-19 | 1984-03-19 | Magnetic head and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60197913A true JPS60197913A (en) | 1985-10-07 |
Family
ID=12922807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5272284A Pending JPS60197913A (en) | 1984-03-16 | 1984-03-19 | Magnetic head and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60197913A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55117723A (en) * | 1979-02-28 | 1980-09-10 | Sony Corp | Magnetic head |
-
1984
- 1984-03-19 JP JP5272284A patent/JPS60197913A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55117723A (en) * | 1979-02-28 | 1980-09-10 | Sony Corp | Magnetic head |
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