JPS60196819A - Flow rate intermittent control device to be driven by pulse - Google Patents

Flow rate intermittent control device to be driven by pulse

Info

Publication number
JPS60196819A
JPS60196819A JP5223084A JP5223084A JPS60196819A JP S60196819 A JPS60196819 A JP S60196819A JP 5223084 A JP5223084 A JP 5223084A JP 5223084 A JP5223084 A JP 5223084A JP S60196819 A JPS60196819 A JP S60196819A
Authority
JP
Japan
Prior art keywords
pulse
additive
flow rate
diaphragm
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5223084A
Other languages
Japanese (ja)
Other versions
JPH0472247B2 (en
Inventor
Masanori Honma
本間 正紀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohkura Electric Co Ltd
Original Assignee
Ohkura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohkura Electric Co Ltd filed Critical Ohkura Electric Co Ltd
Priority to JP5223084A priority Critical patent/JPS60196819A/en
Publication of JPS60196819A publication Critical patent/JPS60196819A/en
Publication of JPH0472247B2 publication Critical patent/JPH0472247B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Feedback Control In General (AREA)
  • Flow Control (AREA)
  • Control Of Non-Electrical Variables (AREA)

Abstract

PURPOSE:To improve the accuracy of the absolute value of a flow rate and the measuring accuracy of a controlled variable by using a quantitative pump to be driven by pulses and controlling discharge from the pump intermittently. CONSTITUTION:Current flowing from a power supply 19 into a driving coil 7 through a phototransistor 18 sucks a driving rod 6a, so that a diaphragm 6 is lifted up to a position 6b. Since a non-return valve 5 passing fluid only in the arrow W direction exists, an inlet valve 3 is opened and an outlet valve 4 is closed in accordance with the lift of the diaphragm 6 and a fixed quantity of an additive from an additive tank 10 is sucked into the body 2 of an electromagnetic quantitative pump 1. Since the quantity of the sucked additive is determined by the size of the body 2 and the diaphragm 6 and the stroke S of a diaphragm driving rod 6a, the adding quantity of the additive is also determined by determining the number of driving pulses to be applied to the pump 1. During the period that a necessary controlled variable is less than a fixed value, the succeeding control meter operating cycle, i.e. the succeeding density measurement, is executed when a comparatively long period has been passed after the end of addition, so that precise density measurement can be performed after mixture or reaction of an additive or the like.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、パルス駆動の流量間欠制御装置に関し、とく
に時間比例式オンオフ操作信号を発生する調節器の出力
に応じてパルス駆動の定量ポンプを間欠的に操作するパ
ルス駆動の流量間欠制御装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a pulse-driven intermittent flow rate control device, and more particularly, to a pulse-driven intermittent flow control device that controls a pulse-driven metering pump intermittently according to the output of a regulator that generates a time-proportional on-off operation signal. The present invention relates to a pulse-driven intermittent flow rate control device that is operated.

従来技術 プロセス制御、水質制御等において濃度を精密に制御す
る必要が増大している。とくに、酸又はアルカリの添加
による中和反応に係るpH制御においては、添加剤の僅
かな過不足によりpH値が制御目標値のヒトに大幅に変
動する困難な問題がある。この問題を解決するため、電
磁定量ポンプ等のパルス駆動定量ポンプを用いて添加剤
の流量を精密に制御することが提案されている。
BACKGROUND OF THE INVENTION There is an increasing need to precisely control concentrations in process control, water quality control, and the like. In particular, in pH control related to neutralization reaction by addition of acid or alkali, there is a difficult problem in that a slight excess or deficiency of an additive can cause the pH value to vary significantly compared to the control target value. To solve this problem, it has been proposed to precisely control the flow rate of the additive using a pulse-driven metering pump such as an electromagnetic metering pump.

しかし、従来の電磁定量ポンプ等による流量制御では、
単位時間の添加量で示される流量は精密に制御されるも
のの、その添加が、先行する添加の直後における制御量
の測定値に基づく駆動パルスによって行われる。そのた
め、従来の電磁定量ポンプ等による流量制御には、添加
剤が十分に混合・反応される以前に濃度測定等の制御量
測定がなされ、測定精度が低下し、その制御量が目標値
を超えるオーバシュートを起し易い欠点がある。
However, with conventional flow control using electromagnetic metering pumps,
Although the flow rate expressed as the amount added per unit time is precisely controlled, the addition is performed by a drive pulse based on the measured value of the controlled amount immediately after the previous addition. Therefore, when controlling the flow rate using conventional electromagnetic metering pumps, etc., the control amount, such as concentration measurement, is measured before the additive has been sufficiently mixed and reacted, resulting in a decrease in measurement accuracy and the control amount exceeding the target value. It has the disadvantage of easily causing overshoot.

発明の目的 従って、本発明の目的は、パルス駆動の定量ポンプを用
いると共にそのポンプからの吐出を間欠的としたパルス
駆動の流量間欠制御装置を提供することにより、従来技
術の上記欠点を解決するにある。
OBJECTS OF THE INVENTION Accordingly, an object of the present invention is to solve the above-mentioned drawbacks of the prior art by providing a pulse-driven intermittent flow rate control device that uses a pulse-driven metering pump and makes the discharge from the pump intermittent. It is in.

発明の構成 上記目的を達成するため、本発明によるパルス駆動の流
量間欠制御装置は、流量に対する所用操作量に比例した
パルス幅の操作信号を発生する調節器、一定周期で連続
的にパルスを発生するパルス発生器、前記操作信号のパ
ルス幅の時間のみ前記パルス発生器からのパルスを通す
ゲート回路、及び前記ゲート回路からのパルスにより駆
動される定量ポンプを備えてなる構成を用いる。
Structure of the Invention In order to achieve the above object, the pulse-driven intermittent flow rate control device according to the present invention includes a regulator that generates an operation signal with a pulse width proportional to the required operation amount for the flow rate, and a controller that generates pulses continuously at a constant cycle. A configuration is used that includes a pulse generator that controls the operation signal, a gate circuit that passes pulses from the pulse generator only for a time corresponding to the pulse width of the operation signal, and a metering pump that is driven by the pulses from the gate circuit.

実施例 以下、添付図を参照して本発明の詳細な説明する。第1
図は1本発明装置で使われるパルス駆動の定量ポンプの
一例として電磁定量ポンプを示すが1本発明は同図の電
磁ポンプに限定されるものではなく、ステップ争モータ
、サーボ機構、変速モータその他の機構を用いたもので
あっても、駆動パルスごとに一定酸の吐出をするポンプ
であれば足りる。電磁定量ポンプlの本体2の吸込口に
は、入口弁3が取付けられ、その吐出口には出目弁4が
取付けられる。本体2から見て入口弁3及び出口弁4の
外側に、逆上弁5が取付けられる。
EXAMPLES Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. 1st
The figure shows an electromagnetic metering pump as an example of a pulse-driven metering pump used in the device of the present invention, but the present invention is not limited to the electromagnetic pump shown in the figure, but includes step motors, servo mechanisms, variable speed motors, etc. Even if a pump uses this mechanism, it is sufficient if the pump discharges a constant amount of acid with each drive pulse. An inlet valve 3 is attached to the suction port of the main body 2 of the electromagnetic metering pump l, and an outlet valve 4 is attached to the discharge port. A reverse valve 5 is attached to the outside of the inlet valve 3 and outlet valve 4 when viewed from the main body 2.

本体2は、剛性の周壁及び底壁とダイヤフラム6により
閉ざされた頂部とを有する。
The body 2 has a rigid peripheral wall and a bottom wall and a top closed by a diaphragm 6.

ダイヤフラム6に一体的に結合された駆動ロッド6aの
周囲に駆動コイル7が配置され、制御回路8がこの駆動
コイル7に接続される。駆動ロッド6aは、コイル7が
付勢されたときに、ストッパ9に当接するまで吸引され
、ダイヤフラム6を一点鎖線6bの位置まで湾曲させ、
本体2の容積をその湾曲分だけ増大させる。従って、駆
動ロッドのストロークSは、第1図に実線で示される消
勢位置からストッパ9に当接する位置までとなる。また
、ストッパ9を矢印Xに示される様に移動することによ
り、ストロークSの大きさを調整することができる。
A drive coil 7 is arranged around a drive rod 6a integrally connected to the diaphragm 6, and a control circuit 8 is connected to this drive coil 7. When the coil 7 is energized, the drive rod 6a is attracted until it comes into contact with the stopper 9, bending the diaphragm 6 to the position indicated by the dashed line 6b,
The volume of the main body 2 is increased by the amount of curvature. Therefore, the stroke S of the drive rod is from the deenergized position shown by the solid line in FIG. 1 to the position where it abuts the stopper 9. Further, by moving the stopper 9 as shown by the arrow X, the size of the stroke S can be adjusted.

電磁定量ポンプlの吸込側は管路を介して添加剤槽lO
に連結され、その吐出側は管路を介して処理槽11に連
結、される。処理槽11では、撹拌器12が添加された
添加剤を槽内液と攪拌し、必要に応じ送出ポンプ13に
より槽内液を槽外へ送出する。
The suction side of the electromagnetic metering pump l is connected to the additive tank lO via a pipe line.
The discharge side thereof is connected to the processing tank 11 via a pipe line. In the processing tank 11, a stirrer 12 stirs the added additive with the tank liquid, and a delivery pump 13 sends the tank liquid out of the tank as necessary.

第2図は、本発明装置における電気的回路の一実施例の
説明図である0図示例では、一定周期で連続的にパルス
を発生するパルス発生器14及び調節器15が、この場
合AND回路であるゲート回路16の入力に接続される
。ゲート回路16の出力により発光ダイオード17が付
勢され1発光ダイオード17からの光が、フォトトラン
ジスタ18を導通させ、電源19からの電流を前記コイ
ル7に流す。
FIG. 2 is an explanatory diagram of one embodiment of the electrical circuit in the apparatus of the present invention. It is connected to the input of the gate circuit 16. The light emitting diode 17 is energized by the output of the gate circuit 16, and the light from the first light emitting diode 17 makes the phototransistor 18 conductive, and current from the power source 19 flows through the coil 7.

第3A図ないし第3E図を参照して動作を説明する。調
節器15は、一定周期Toで動作し、オンオフ形式のパ
ルス幅Tcの操作信号を発生し、周゛期に対するそのオ
ン信号のパルス幅の比率(Tc/To)を操作量の大き
さに比例したものとする。パルス発生器14は、例えば
第3B図に示すしる様に一定周期T、でパルス幅t+(
7)パルスを連続的に発生する。好ましくは、調節器1
5の操作信号の1周期内に、パルス発生器14から複数
個のパルスがゲート回路16に到達する様にパルス発生
器の周期T、を選定する。
The operation will be explained with reference to FIGS. 3A to 3E. The regulator 15 operates at a constant cycle To, generates an operation signal in an on-off format with a pulse width Tc, and makes the ratio (Tc/To) of the pulse width of the on signal to the cycle proportional to the magnitude of the operation amount. It shall be assumed that The pulse generator 14 has a pulse width t+(
7) Generate pulses continuously. Preferably, regulator 1
The period T of the pulse generator is selected so that a plurality of pulses from the pulse generator 14 reach the gate circuit 16 within one period of the operation signal No. 5.

ゲート回路16は1例えば、その入力にパルス発生器1
4からの信号と調節器15からの信号とが同時に存在す
るときに、第3C図に示される様にパルス発生器14と
同ず周期T、で同一パルス幅1.のパルスを発生する0
本発明で使われるゲート回路16は、調節器15からの
信号のパルス幅TCの間だけパルス発生器14からのパ
ルスを通すものであれば足り、必ずしもAND回路であ
ることを要しない。
The gate circuit 16 has a pulse generator 1 at its input, for example.
When the signal from 4 and the signal from regulator 15 are simultaneously present, the pulse generator 14 has the same period T and the same pulse width 1, as shown in FIG. 3C. generates a pulse of 0
The gate circuit 16 used in the present invention only needs to pass the pulse from the pulse generator 14 during the pulse width TC of the signal from the regulator 15, and does not necessarily need to be an AND circuit.

ゲート回路16からの信号は、発光ダイオード17を通
ってアース回路へ戻るが、その際に生ずる発光ダイオー
ド17からの光が電磁定量ポンプlの駆動コイル7の電
源回路に挿入されたフォトトランジスタ18を導通させ
る。従って、電源19からフォトトランジスタ18を介
して上記駆動コイル7に流れる電流が、駆動ロッド6a
を吸引することによりダイヤフラム6を一点鎖線6bの
位置まで引上げる。矢印Wの方向にのみ流体を通す逆止
弁5の存在のため、ダイヤフラム6の上記引上げに応じ
大口弁3が開き出口弁4が閉じ、添加剤槽1(]からの
添加剤が一定量だけ電磁定量ポンプlの本体2内へ吸込
まれる。この吸込まれる添加剤の量が、本一体2及びダ
イヤフラム6の寸法とダイヤフラム駆動ロッド6aのス
トロークSとによって定まるので、電磁定量ポンプlに
加えられる駆動パルスの数が第3C図の様に定まると、
添加剤の添加量も定まる。
The signal from the gate circuit 16 passes through the light emitting diode 17 and returns to the ground circuit, but the light generated from the light emitting diode 17 at this time drives the phototransistor 18 inserted into the power supply circuit of the drive coil 7 of the electromagnetic metering pump l. Make conductive. Therefore, the current flowing from the power supply 19 to the drive coil 7 via the phototransistor 18 is transmitted to the drive rod 6a.
By suctioning the diaphragm 6, the diaphragm 6 is pulled up to the position indicated by the dashed line 6b. Due to the presence of the check valve 5 that allows fluid to flow only in the direction of the arrow W, the large mouth valve 3 opens and the outlet valve 4 closes in response to the above-mentioned pulling up of the diaphragm 6, and only a certain amount of the additive from the additive tank 1 ( ) is released. It is sucked into the main body 2 of the electromagnetic metering pump l.The amount of the sucked additive is determined by the dimensions of the main unit 2 and the diaphragm 6, and the stroke S of the diaphragm drive rod 6a. When the number of driving pulses to be generated is determined as shown in Fig. 3C,
The amount of additive added is also determined.

本発明の一特徴は、添加剤の添加量等に相当する流量Q
(第1図)を上記の様に正確に定め得ることにある。電
磁定量ポンプlにおいては、その1回の吐出量をダイヤ
フラム駆動ロッド6aのストローク長さによって調整す
ることも可能であるが、ストローク長さの調整には、高
精度の得難い機械的位置、即ちストッパ9の位置調整が
必要である2本発明は、複雑な機械的位置調整を用いず
に電気的調整のみによ′す、添加剤の流入量等に対応す
る流量を正確に調節し、高い調節精度の流量、制御を行
なうことができる。
One feature of the present invention is that the flow rate Q corresponds to the amount of additive added, etc.
(FIG. 1) can be determined accurately as described above. In the electromagnetic metering pump l, it is also possible to adjust the discharge amount per time by the stroke length of the diaphragm drive rod 6a, but the stroke length can be adjusted by using a mechanical position that is difficult to obtain with high precision, that is, a stopper. 9 position adjustment is required.2 The present invention accurately adjusts the flow rate corresponding to the inflow amount of additives, etc. without using complicated mechanical position adjustment and only by electrical adjustment, and achieves high adjustment. Accurate flow rate and control can be performed.

従来技術と比較するに、電磁定量ポンンプ等を用1いる
従来の流量制御は、例えば制御量の偏差をl統帥に監視
し、偏差の大きさによって変わるパルス周期で操作パル
スpを第3F図の様に発生し、それらすべての操作パル
スpを連続的に電磁定量ポンプ等に加えている。これで
は、以下に述べるストローク数調節による本発明の高精
度流量調節を行うことは困難である。さらに、パルス間
隔変動の少ない第3F図の様な操作パルスpをJ!!続
的にポンプへ加えたのでは、濃度計により処理液の濃度
を検出する時点にも添加剤の添加を続けている可能性が
高く、たとえ添加を続けていなくとも添加終了から濃度
検出までの時間が短か過ぎて正確な潤度検出が困難であ
り、精度の低い測定値による流量制御とならざるを得な
い。
In comparison with the conventional technology, conventional flow rate control using an electromagnetic metering pump etc., for example, monitors the deviation of the controlled amount in a controlled manner, and controls the operating pulse p at a pulse period that changes depending on the magnitude of the deviation as shown in Fig. 3F. All of these operating pulses p are continuously applied to an electromagnetic metering pump or the like. In this case, it is difficult to perform the high-precision flow rate adjustment of the present invention by adjusting the stroke number described below. Furthermore, the operation pulse p as shown in FIG. 3F with small pulse interval fluctuation is J! ! If the additive is added to the pump continuously, there is a high possibility that the additive is being added even when the concentration of the treated liquid is detected by the concentration meter, and even if addition is not continued, the time from the end of addition to the concentration detection is likely to be high. Since the time is too short, it is difficult to accurately detect the moisture content, and the flow rate must be controlled using measured values with low precision.

これに対し、本発明では、第3C図の3T、。In contrast, in the present invention, 3T in FIG. 3C.

2T、、4T、などのパルス無し期間に示される様に、
所用操作量が一定値以下である限り、添加終了後かなり
の時間を経過してから後続の調節計動作サイクル、即ち
後続の濃度測定が行なわれるので、添加剤等の混合や反
応などの後に正確な濃度測定をすることができる。従っ
て、本発明の流量制御装置は、特定の流量制御の目的に
即した精密な流量制御を行なうことができる。また、ノ
くルス無し期間が生じない事態は、所用操作量が大きい
場合に当るから、それほど高い調節精度を必要としない
ときであるとも考えられる。
As shown in the pulseless periods such as 2T, 4T, etc.
As long as the required operation amount is below a certain value, the subsequent controller operation cycle, that is, the subsequent concentration measurement, will be performed after a considerable time has passed after the completion of addition. Concentration measurements can be made. Therefore, the flow rate control device of the present invention can perform precise flow rate control in accordance with a specific purpose of flow rate control. Furthermore, a situation in which a no-cycle period does not occur occurs when the amount of required operation is large, so it can be considered that there is no need for very high adjustment accuracy.

パルス発生器14からのパルスの周期及びノくルス幅は
、第3B図のT、、t、等に限定せず可変とすることが
好ましく1例えば用途及び制御対象の状況に応じ第3D
図のT2、t2の様に変、更可能とするのがよい。第3
E図は、パルス発生器14の出力として第3D図のノく
ルスを用1.Nた場合のゲート回路16の出力を示す、
この場合のゲート回路16の出力は、パルス幅が大きい
ので、電磁定量ポンプlに使用するだけでなく、電磁弁
(図示せず)等にも使用することができる。
It is preferable that the period and pulse width of the pulse from the pulse generator 14 are not limited to T, , t, etc. in FIG. 3B, but are variable.
It is preferable to make it changeable like T2 and t2 in the figure. Third
FIG. shows the output of the gate circuit 16 when N.
Since the output of the gate circuit 16 in this case has a large pulse width, it can be used not only for the electromagnetic metering pump l but also for an electromagnetic valve (not shown) or the like.

第3A図ないし第3E図の比較から予想される様に、パ
ルス発生器14の出力と調節器15の出力との間で同期
をとるか、又は両出力の間に位相差を設けることにより
制御態様を変えることも可能である。
As expected from the comparison of Figures 3A to 3E, control is achieved by synchronizing the output of the pulse generator 14 and the output of the regulator 15 or by providing a phase difference between the two outputs. It is also possible to change the aspect.

発明の詳細 な説明した如く、本発明によるパルス駆動の流量間欠制
御装置は、パルス信号により駆動される定量ポンプを間
欠的に駆動する構成を有するので、次の効果を奏する。
As described in detail, the pulse-driven intermittent flow rate control device according to the present invention is configured to intermittently drive a metering pump driven by a pulse signal, and therefore has the following effects.

(イ)操作端機器として吐出量が正確である定量ポンプ
を用い、さらに吐出終了後測定開始前に所用操作量に応
じた無吐出時間をおくので、流量の絶対値精度向−ヒと
制御量の測定精度向上とを同時に達成し、制御目標値に
対するオーバシュート減少などの制御の質的向上を可能
にし、従って製造プロセス等に係る流量制御の精度を著
しく向」ニさせるこ。とができる。
(a) A metering pump with accurate discharge amount is used as the operating end device, and a non-discharge time is set according to the required operation amount after the end of discharge and before the start of measurement, which improves the accuracy of the absolute value of the flow rate and the control amount. At the same time, it is possible to improve the measurement accuracy of the flow rate and to improve the quality of control such as reducing overshoot with respect to the control target value, thereby significantly improving the accuracy of flow rate control related to manufacturing processes, etc. I can do that.

(ロ)吐出量と高精度で対応するストローク数をパルス
信号で制御するので、パルス数を監視・記録することに
より制御対象流体の流量及び累積吐出量などを監視・記
録することができる。
(b) Since the number of strokes corresponding to the discharge amount is controlled with high precision using pulse signals, by monitoring and recording the number of pulses, the flow rate and cumulative discharge amount of the fluid to be controlled can be monitored and recorded.

(ハ)発光ダイオード、フォトトランジスタ等により制
御信号回路とポンプ等の操作端末機器駆動回路とを絶縁
することができるので、小電流の小型回路により高精度
の流量制御をすることができる。
(c) Since the control signal circuit and the drive circuit for operating terminal devices such as pumps can be insulated using light emitting diodes, phototransistors, etc., highly accurate flow rate control can be performed using a small circuit with a small current.

(ニ)調節器出力がいわゆるオン・オフ信号である場合
にも、電磁定量ポンプを使用することができる。
(d) An electromagnetic metering pump can also be used when the regulator output is a so-called on-off signal.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は流量間欠制御装置の図式的説明図、第2図は電
気回路の図式的断面図、第3A図ないし第3F図は電気
回路のタイムチャートである。 ■・・・電磁定量ポンプ、14・・・パルス発生器、1
5・・・調節器、16・・・ゲート回路、 Q・・・流
量、Tc・・・操作量に比例したパルス幅、T、、T2
・・・パルス発生器のパルス周期。 特許出願人 大倉電気株式会社 特許出―代理人 弁理士 市東禮次部 第1図 第2図
FIG. 1 is a schematic explanatory diagram of the intermittent flow rate control device, FIG. 2 is a schematic sectional view of the electric circuit, and FIGS. 3A to 3F are time charts of the electric circuit. ■...Electromagnetic metering pump, 14...Pulse generator, 1
5...Adjuster, 16...Gate circuit, Q...Flow rate, Tc...Pulse width proportional to the manipulated variable, T,, T2
...Pulse period of the pulse generator. Patent Applicant Okura Electric Co., Ltd. Patent Attorney Agent Patent Attorney Tsugube Ichito Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 流量に対する所用操作量に比例したパルス幅の操作信号
を発生する調節器、一定周期で連続的にパルス−を発生
するパルス発生器、前記操作信号のパルス幅の時間のみ
前記パルス発生器からのパルスを通すゲート回路4及び
前記ゲート回路からのパルスにより駆動される定量ポン
プを備えてなるパルス駆動の流量間欠制御装置。
A regulator that generates an operation signal with a pulse width proportional to the required operation amount for the flow rate, a pulse generator that continuously generates pulses at a constant period, and a pulse from the pulse generator that is generated only for a time equal to the pulse width of the operation signal. A pulse-driven intermittent flow rate control device comprising a gate circuit 4 that passes through a gate circuit, and a metering pump driven by pulses from the gate circuit.
JP5223084A 1984-03-21 1984-03-21 Flow rate intermittent control device to be driven by pulse Granted JPS60196819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5223084A JPS60196819A (en) 1984-03-21 1984-03-21 Flow rate intermittent control device to be driven by pulse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5223084A JPS60196819A (en) 1984-03-21 1984-03-21 Flow rate intermittent control device to be driven by pulse

Publications (2)

Publication Number Publication Date
JPS60196819A true JPS60196819A (en) 1985-10-05
JPH0472247B2 JPH0472247B2 (en) 1992-11-17

Family

ID=12908929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5223084A Granted JPS60196819A (en) 1984-03-21 1984-03-21 Flow rate intermittent control device to be driven by pulse

Country Status (1)

Country Link
JP (1) JPS60196819A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114883A (en) * 1976-03-22 1977-09-27 Nippon Denshi Kagaku Co Ltd Fluid flow rate control apparatus
JPS5472390A (en) * 1977-11-21 1979-06-09 Denka Engineering Device of adjusting pulse row flow rate that does not use flow meter
JPS5645902U (en) * 1979-09-11 1981-04-24

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4000329A (en) * 1975-10-07 1976-12-28 International Flavors & Fragrances Inc. Flavoring compositions and foods containing one or more alkyl side chain methyl substituted or unsubstituted 2,2,6-trimethyl-1-cyclohexen-1-vinyl alkanoates

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114883A (en) * 1976-03-22 1977-09-27 Nippon Denshi Kagaku Co Ltd Fluid flow rate control apparatus
JPS5472390A (en) * 1977-11-21 1979-06-09 Denka Engineering Device of adjusting pulse row flow rate that does not use flow meter
JPS5645902U (en) * 1979-09-11 1981-04-24

Also Published As

Publication number Publication date
JPH0472247B2 (en) 1992-11-17

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