JPS60195829U - 基板反転装置 - Google Patents

基板反転装置

Info

Publication number
JPS60195829U
JPS60195829U JP8314784U JP8314784U JPS60195829U JP S60195829 U JPS60195829 U JP S60195829U JP 8314784 U JP8314784 U JP 8314784U JP 8314784 U JP8314784 U JP 8314784U JP S60195829 U JPS60195829 U JP S60195829U
Authority
JP
Japan
Prior art keywords
substrate
board
utility
substrate reversing
reversing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8314784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130422Y2 (enExample
Inventor
研一 中村
Original Assignee
大日本スクリ−ン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造株式会社 filed Critical 大日本スクリ−ン製造株式会社
Priority to JP8314784U priority Critical patent/JPS60195829U/ja
Publication of JPS60195829U publication Critical patent/JPS60195829U/ja
Application granted granted Critical
Publication of JPH0130422Y2 publication Critical patent/JPH0130422Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Attitude Control For Articles On Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Registering Or Overturning Sheets (AREA)
JP8314784U 1984-06-04 1984-06-04 基板反転装置 Granted JPS60195829U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8314784U JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8314784U JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Publications (2)

Publication Number Publication Date
JPS60195829U true JPS60195829U (ja) 1985-12-27
JPH0130422Y2 JPH0130422Y2 (enExample) 1989-09-18

Family

ID=30631509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8314784U Granted JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Country Status (1)

Country Link
JP (1) JPS60195829U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62181540U (enExample) * 1986-05-08 1987-11-18
JPH073138U (ja) * 1993-12-10 1995-01-17 東京エレクトロン株式会社 半導体ウエハの搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62181540U (enExample) * 1986-05-08 1987-11-18
JPH073138U (ja) * 1993-12-10 1995-01-17 東京エレクトロン株式会社 半導体ウエハの搬送装置

Also Published As

Publication number Publication date
JPH0130422Y2 (enExample) 1989-09-18

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