JPS60195015A - Production of high-purity metallic silicon - Google Patents

Production of high-purity metallic silicon

Info

Publication number
JPS60195015A
JPS60195015A JP59048984A JP4898484A JPS60195015A JP S60195015 A JPS60195015 A JP S60195015A JP 59048984 A JP59048984 A JP 59048984A JP 4898484 A JP4898484 A JP 4898484A JP S60195015 A JPS60195015 A JP S60195015A
Authority
JP
Japan
Prior art keywords
metallic silicon
acid
less
silicon
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59048984A
Other languages
Japanese (ja)
Other versions
JPH02285B2 (en
Inventor
Yoshiyuki Nakamura
中村 美幸
Yozo Kuranari
倉成 洋三
Koichi Uchino
内野 紘一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59048984A priority Critical patent/JPS60195015A/en
Publication of JPS60195015A publication Critical patent/JPS60195015A/en
Publication of JPH02285B2 publication Critical patent/JPH02285B2/ja
Granted legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/20Recycling

Landscapes

  • Silicon Compounds (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

PURPOSE:Metallic silicon for industrial purposes is melted and recrystallized or further, acid-treated to reduce Ca as one of impurities less than a specific value, simultaneously other contaminants are reduced. CONSTITUTION:Metallic silicon of industry grade containing less than 1wt% of Ca as an impurity is melted by heating it over 1,500 deg.C under normal pressure, and the temperature is kept under stirring for more than 1hr, then the melt is cooled down to room temperature to effect recrystallization and the edge parts of the resultant ingot are lathed off to give high-purity metallic silicon. Or, additionally, the purified product is crushed and treated with an acid such as a hydrochloric acid-hydrofluoric acid mixture to effect purification. The content of Ca can be decreased less than 100ppm and other elements such as Mg, Al, Fe and so on also are reduced whereby the product is used as a starting material for high-quality ceramics.

Description

【発明の詳細な説明】 (産業上の利用分野〉 本発明は金属けい鋼中に含まれる不純物のCaを主とし
て除去する、高品質のセラミックス原料に適した高純度
金属けい素の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for producing high-purity silicon metal suitable as a raw material for high-quality ceramics, which mainly removes impurity Ca contained in silicon metal.

(従来技術) 従来から高純度金属(プい素の製法はいろいろ提案され
、たとえば(1)シリコンウェハー用のものは気相合成
法により得られたものやさらにキャ明#lII円の浄書
(内容に変更なし)スト法、チョコラルスキー法、リボ
ン結晶法などにより再加工したものを用いているが、こ
れらは複雑な1桿を経て高純度金属1ノい累とするので
レラミックス原料としては高価であるので実用的ではな
く、また(2)工業用金属()い素たとえば5181号
品には不純物としてCa 、Mg等が500〜2000
DDljlと多量に含有され、製品中にガラス相が多量
に生成したり、成形体としたときにその高〈発明の目的
) 本発明は工業用金属lノい素を溶融し、再結晶さけるか
、又はさらにこれを酸処理することにより主としてQa
の不ll1i吻を1100pp以下に減少さけることを
目的とする。
(Prior art) Various methods for producing high-purity metals have been proposed. For example, (1) those for use in silicon wafers have been obtained by vapor phase synthesis; (no change)) Reprocessed materials are used using methods such as the strike method, Czochralski method, and ribbon crystallization method, but these are expensive as raw materials for Reramix because they are made into one layer of high-purity metal through a complicated process. (2) Industrial metals (for example, product No. 5181) contain impurities such as Ca, Mg, etc.
DDljl is contained in a large amount, and a large amount of glass phase is generated in the product, or the glass phase is high when formed into a molded product. , or by further acid treatment, mainly Qa
The purpose is to avoid reducing the size of the proboscis to 1100 pp or less.

(発明の構成) 本発明は金属けい素中の不純物を除去するにあた′す、
不純物のCaの含有ωが、1重量%以下である金属けい
素を常圧下、温度1500℃以上に加熱して融液とする
と共にその温度以上に保持しながら少くとも1時間以上
攪拌するか、又はさらにその凝固しlζ破砕物に酸処理
を施すことを特徴とする高純度金属けい素の製造方法で
ある。
(Structure of the Invention) The present invention is for removing impurities in metal silicon.
Metallic silicon having an impurity Ca content ω of 1% by weight or less is heated to a temperature of 1500°C or higher under normal pressure to form a melt, and is stirred for at least 1 hour or more while being maintained at that temperature or higher, or Alternatively, there is provided a method for producing high-purity metallic silicon, which further comprises subjecting the solidified lζ crushed product to acid treatment.

以下さらに本発明の詳細な説明する。まず本発明に用い
る原料金属けい素としては不純物のCaの含有量が1重
広%以下であるものが用いられる。
The present invention will be further explained in detail below. First, as the raw material metal silicon used in the present invention, one whose content of impurity Ca is 1% or less is used.

その理由はCaの含有量が1重量%をこえると、金属け
い素粉末を加熱溶融して得られた融液からこれら成分の
蒸発が十分に行われず、これを除去するためにはその温
度を高くしたり、再処理りるなどの操作が必要となるか
らCある。
The reason for this is that when the Ca content exceeds 1% by weight, these components cannot be sufficiently evaporated from the melt obtained by heating and melting the metal silicon powder, and in order to remove it, the temperature must be adjusted. It is rated C because it requires operations such as raising the price and reprocessing.

この原料金属けい素は10龍以下に粗砕し、次いでこれ
を黒鉛るつぼなどに入れ好ましくは電11攪屯lす好適
に1500〜1800℃に加熱溶融する。
This raw material silicon metal is crushed to a size of 10 mm or less, and then placed in a graphite crucible or the like and heated and melted preferably at 1500 to 1800 DEG C., preferably under 11 tons of heat.

加熱炉として高周波電気炉を用いると、黒鉛るつぼを介
し°C融液内に磁界を生じ、その電磁力による攪拌作用
が活用され得る。
When a high-frequency electric furnace is used as the heating furnace, a magnetic field is generated in the °C melt through the graphite crucible, and the stirring action of the electromagnetic force can be utilized.

融液中の不純物成分が気化し易い温度、蒸散し易い粘度
での加熱下に融液からCaなどの不純物が蒸散され融液
中の不純物含有量が減少する。
Impurities such as Ca are evaporated from the melt under heating at a temperature at which impurity components in the melt are easily vaporized and at a viscosity at which they are easily evaporated, thereby reducing the impurity content in the melt.

本発明において金属けい素の融液を攪拌する時間は少く
とも1時間にわたり前記温度に保持するが、1時間未満
ではCaの蒸散が十分行われない。
In the present invention, the metal silicon melt is stirred at the above temperature for at least 1 hour, but if it is less than 1 hour, sufficient evaporation of Ca will not occur.

このようにして得た金属けい素の融液を金型に流して空
冷するか、又はそのまま再結晶させ、次いでこれを破砕
して所定の大きさたとえば1n以下とすると製品中Ca
の含有量が1ooppm以下のものを得ることができる
If the metal silicon melt thus obtained is poured into a mold and cooled in the air or recrystallized as it is, and then crushed to a predetermined size, for example 1n or less, the product contains Ca.
can have a content of 1 ooppm or less.

以上主として不純物のCa除去について説明をしたが、
Caは勿論のこと他の不純物も除去量に多少の差異はあ
るが除去することができる。
Above, we mainly explained about the removal of impurity Ca.
Not only Ca but also other impurities can be removed, although there are some differences in the amount removed.

前記方法によって得られた破砕物の形でさらに酸処理し
、その後分離、乾燥すると製品中のCa明A1旧11・
のr’l”;’f’(内容に変更なし)の9右Wが11
00pp以下となる他、F e 50ppm以下Δ久1
001)pHl以下の高純度金属番ノい素が得られる。
When the crushed product obtained by the above method is further treated with acid, separated and dried, the Ca Ming A1 old 11 and
r'l''; 9 right W of 'f' (no change in content) is 11
00pp or less, Fe 50ppm or less Δku1
001) A high purity metal element with pH below 1 is obtained.

酸処理する場合の粒「Lはなるべく微細なものである稈
りr a: L <、例えば11IIIll以壬、さら
に好ましくは100μm以下である。
In the case of acid treatment, the grain size L is as fine as possible, ra: L <, for example, 11IIIll or more, more preferably 100 μm or less.

また酸処理に用いられる鉱酸としては特に制限はないが
、これらの中ふっ酸ヌはぶつ酸と塩酸との混酸が好まし
い。
There are no particular restrictions on the mineral acid used in the acid treatment, but a mixed acid of hydrofluoric acid and hydrochloric acid is preferred.

(実施例) 実施例1 第1表に示す市販品金属番ノい素3i純度98重量%の
工業用5iJIS1号品を101IIl以下に粒度調m
し、10kOヲ秤J& L/ T 直f¥130111
111 fX 8300mm (7) m鉛るつぼ(東
海カーボン(株)製)に入れ高周波誘導電気j)i (
富士電波(株)製)にてf′!2磁攪拌さt!ながら常
圧下1600℃のt品1良で2時間にわたり加熱した。
(Example) Example 1 The commercially available metal No. 3i industrial grade 5i JIS No. 1 product with a purity of 98% by weight shown in Table 1 was adjusted to a particle size of 101IIl or less.
10kO scale J & L/T direct f ¥130111
111 fX 8300mm (7) Place in a lead crucible (manufactured by Tokai Carbon Co., Ltd.) and conduct high frequency induction electricity (
f'! (manufactured by Fuji Denpa Co., Ltd.). 2 Magnetic stirring! While heating at normal pressure at 1600° C. for 2 hours.

その後、その金属りい素融液を室温まで冷却し再結晶し
た。
Thereafter, the lithium metal melt was cooled to room temperature and recrystallized.

次いで、黒鉛るつぼから上記再結晶金属【ノい素明細書
−の/7+門(内容に変更なし)跣を取り出し、そのイ
ンゴットの下部及び周辺部を削りとり精製金属けい素塊
(A>9に9を得た。
Next, the above-mentioned recrystallized metal ingot (no change in content) was taken out from the graphite crucible, the lower part and surrounding area of the ingot was scraped off, and a refined metal silicon block (A>9) was removed. I got a 9.

次に、この精製金属けい素塊(A)をジョークラフシ1
シーで粗砕し、粒径0.7i+nl!ij度の大きさに
調整シタモノ9kgニ対シ、35% m fiII30
.i 47% フッ115、Mと’7) 111rm 
4 si ヲ用イ、80℃ノ)W+u(”11111酸
処理した。
Next, this purified metal silicon lump (A) is
Coarsely crushed with sea, particle size 0.7i+nl! Adjusted to the size of ij degree Shitamono 9kg vs. shi, 35% m fiII30
.. i 47% fu 115, M and '7) 111rm
4 si wo, 80°C) W+u ("11111 acid treated.

その後瀘過機で濾過し、そのケークを真空乾燥器(東洋
製作所(株)製、商品名バキウム ドライング オーブ
ンrVAcUM DRYINGOVEN)に入れ、−7
1(lam Hg、温度100℃で1昼夜乾燥し、v1
¥4J金属【)い素(B)8k(lを得た。
After that, it is filtered with a filter, and the cake is placed in a vacuum dryer (manufactured by Toyo Seisakusho Co., Ltd., trade name: VAcUM DRYINGOVEN).
1 (lam Hg, dried for 1 day and night at a temperature of 100°C, v1
¥4J metal [)Iron (B) 8k (I obtained.

このfi製金金属い素(B)の不純物の測定結果を、精
製金属【ノい素塊(A)についての測定結果とともに第
1表にまとめて示す。
The measurement results of impurities in the fi gold metal element (B) are summarized in Table 1 together with the measurement results for the purified metal element ingot (A).

尚、比較のために実施例で用いた市販品金属()い素を
実施例と同様にして酸処理して得られた比較金属けい素
(C)についても成績を第1表にあわせ示す。
For comparison, Table 1 also shows the results of comparative silicon metal (C) obtained by acid-treating the commercially available silicon metal () used in the examples in the same manner as in the examples.

尚、第1表の不純物の分析値は原子吸光法によ明細書の
浄書(内容に変更なし) )°ζ行った。
The impurity analysis values in Table 1 were determined by atomic absorption spectrometry.

第1表 実施例2 原料全屈りい素として第1表のJIS1号品及び第2 
′iAに示1市販品を用い、融液の温度と保持時間を変
えた以外は実施例1と同様にして精製金属けい素塊を得
、これについての不純物測定結果を第3表に示′!J。
Table 1 Example 2 JIS No. 1 and No. 2 products in Table 1 as raw materials
A refined metal silicon ingot was obtained in the same manner as in Example 1 except that the commercial product shown in iA was used and the melt temperature and holding time were changed, and the impurity measurement results for this are shown in Table 3. ! J.

第2表 明細書の浄S(内容に変更なし) 第3表 (発明の効果) 本発明による効果をあげると次のとJ3りである。Table 2 Specification S (no change in content) Table 3 (Effect of the invention) The effects of the present invention are as follows.

1)金属けい素中の不純物であるCaを1重量%から1
001)p m以下までに除去低減させることができる
1) Ca, an impurity in silicon metal, is reduced from 1% by weight to 1% by weight.
001) Removal can be reduced to below pm.

2)Ca以外のMCI 、 Al1 及びFe等の不純
物も減少させることができる。
2) Impurities other than Ca such as MCI, Al1, and Fe can also be reduced.

3)高品位のセラミックス原料として用いるごとができ
る。
3) It can be used as a raw material for high-grade ceramics.

特許出願人 工 業 技 術 院 長 手続補正円c方式) %式% [ 2、発明の名称 高純度金属けい素の製造方法 3、補正をする者 事f1との関係 特6′[出願人 昭和59年6 Jl 26日(発送[1)5、補正の対
象 明m出の発明の詳細な説明の欄 6、補正の内容 明細書く第2頁、第5〜8頁)の浄書。
Patent applicant Director of Industrial Technology Director's procedure amendment circle c method) % formula % [ 2. Name of the invention Method for manufacturing high purity metal silicon 3. Relationship with the person making the amendment f1 Patent 6' [Applicant Showa 1959, 6 Jl 26th (Shipping [1) 5, Column 6 for detailed description of the invention that is subject to amendment, page 2 for details of amendment, pages 5 to 8).

(内容に変更なし)(No change in content)

Claims (1)

【特許請求の範囲】[Claims] 1、金属(プい素中の不純物を除去するにあたり、不純
物のCaの含有mが1重量%以下rある金属けい素を常
圧下、温度1500℃以上に加熱しC融液とすると共に
、その温度以上に保持しながら少くとも1時間攪拌する
か、又はさらにその凝固した破砕物に酸処理を施すこと
を特徴と覆る高純度金属けい素の製造方法。
1. Metal (In order to remove impurities in silicon, metal silicon containing impurity Ca of 1% by weight or less is heated to a temperature of 1500°C or higher under normal pressure to form a C melt, and A method for producing high-purity metallic silicon, characterized by stirring for at least one hour while maintaining the temperature above the temperature, or further subjecting the solidified crushed material to acid treatment.
JP59048984A 1984-03-16 1984-03-16 Production of high-purity metallic silicon Granted JPS60195015A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59048984A JPS60195015A (en) 1984-03-16 1984-03-16 Production of high-purity metallic silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59048984A JPS60195015A (en) 1984-03-16 1984-03-16 Production of high-purity metallic silicon

Publications (2)

Publication Number Publication Date
JPS60195015A true JPS60195015A (en) 1985-10-03
JPH02285B2 JPH02285B2 (en) 1990-01-05

Family

ID=12818501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59048984A Granted JPS60195015A (en) 1984-03-16 1984-03-16 Production of high-purity metallic silicon

Country Status (1)

Country Link
JP (1) JPS60195015A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009263154A (en) * 2008-04-23 2009-11-12 Admatechs Co Ltd Method for producing spherical silica and method for producing resin composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009263154A (en) * 2008-04-23 2009-11-12 Admatechs Co Ltd Method for producing spherical silica and method for producing resin composition

Also Published As

Publication number Publication date
JPH02285B2 (en) 1990-01-05

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