JPS60194419A - Method and apparatus for scanning optical beam - Google Patents

Method and apparatus for scanning optical beam

Info

Publication number
JPS60194419A
JPS60194419A JP59048076A JP4807684A JPS60194419A JP S60194419 A JPS60194419 A JP S60194419A JP 59048076 A JP59048076 A JP 59048076A JP 4807684 A JP4807684 A JP 4807684A JP S60194419 A JPS60194419 A JP S60194419A
Authority
JP
Japan
Prior art keywords
light beam
hologram
wave
reproduction
scanning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59048076A
Other languages
Japanese (ja)
Other versions
JPH0311447B2 (en
Inventor
Shinya Hasegawa
信也 長谷川
Fumio Yamagishi
文雄 山岸
Hiroyuki Ikeda
池田 弘之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59048076A priority Critical patent/JPS60194419A/en
Publication of JPS60194419A publication Critical patent/JPS60194419A/en
Publication of JPH0311447B2 publication Critical patent/JPH0311447B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/106Scanning systems having diffraction gratings as scanning elements, e.g. holographic scanners

Abstract

PURPOSE:To increase the allowable value of the surface vibration or the like of a disc and to attain highly accurate scanning by irradiating a substance wave and a reference wave symmetrically to a reproducing point of the disc and using a beam diffracted by the rotation of the disc on which a hologram is formed. CONSTITUTION:A reproducing point P is set up on a part obtained by dividing the disc 2 into plural parts and the substance wave 12 and the reference wave 14 both of which are divergent spherical waves are irradiated from the symmetrical positions to the surface normal passing the reproducing point P to form the hologram. The disc 2 on which the hologram is formed is rotated, a reproducing light beam 6 is irradiated and a screen 8 is scanned by using the diffracted projection light beam 7. Thus, the allowable value of the surface vibration or axial shift of the disc 2 can be increased and highly accurate light scanning can be attained.

Description

【発明の詳細な説明】 発明の技術分野 本発明は、ホログラムを用いた光ビーム走査方法および
装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a method and apparatus for scanning a light beam using a hologram.

技術の背景 最近バーコードの読み取りや、レーザプリンタにおける
レーザ光の走査等に複雑で高価な回転多面鏡の代わpに
、構造が簡単で製造が容易なホロダラムを用いた光ビー
ム走査装置が用いられつつある。以下では簡単のため、
ホログラム形状は、円板として説明するが、勿論、球面
9円筒9円錐。
Background of the Technology Recently, light beam scanning devices using holodrams, which have a simple structure and are easy to manufacture, have been used in place of complex and expensive rotating polygon mirrors for reading barcodes and scanning laser beams in laser printers. It's coming. Below, for simplicity,
The shape of the hologram will be explained as a disk, but of course it has 9 spherical surfaces, 9 cylinders, and 9 cones.

角錐状の形状でも以下のことは全く同様になりたつ。The following is exactly the same for a pyramidal shape.

第1図には、ホログラムを用いた光ビーム走査装置の従
来例の概略の構成図が示される。図示されたように、回
転軸1の回りに高速に回転する透明な光学回転円板2上
に所定のパターンのホログラムファセット3が形成され
ており、レーザ光源4よりレンズ5を介して照射された
再生光ビーム6がホログラムファセットに照射され、こ
のホログラムファセット内に形成されている干渉縞によ
って回折された出射光ビーム7が走査ビームになってス
クリーン8上を走査する。
FIG. 1 shows a schematic configuration diagram of a conventional example of a light beam scanning device using a hologram. As shown in the figure, hologram facets 3 in a predetermined pattern are formed on a transparent optical rotating disk 2 that rotates at high speed around a rotation axis 1, and are irradiated by a laser light source 4 through a lens 5. A reproduction light beam 6 is irradiated onto the hologram facet, and an output light beam 7 that is diffracted by interference fringes formed within the hologram facet becomes a scanning beam and scans a screen 8.

従来技術と問題点 従来、上述のようなホログラムを用いて、レーザプリン
タ等に用いられる高精度直線走査を行う装置においては
、印字品質を良くするために、一般に副走査方向に対す
るレーザ光の投射角度変動を±10数秒以下とすること
が要求される。この投射角度変動はホログラムが作成さ
れた回転円板の面ぶれまたは軸ずれ等のわずかな変動(
数秒または数マイクロメートル程度)によって生じ、回
転円板の機械的な精度を上げてこれを減少させることは
非常に困難であり、問題点であった。又、ホログラムス
キャナの光使用効率も低いものであった。
Conventional technology and problems Conventionally, in devices that perform high-precision linear scanning such as those used in laser printers using holograms as described above, in order to improve printing quality, the projection angle of the laser beam with respect to the sub-scanning direction is generally adjusted. It is required that the fluctuation be within ±10 seconds or less. This projection angle variation is due to slight variations such as surface wobbling or axis deviation of the rotating disk on which the hologram was created (
(on the order of several seconds or several micrometers), and it is extremely difficult and problematic to reduce this by increasing the mechanical precision of the rotating disk. Furthermore, the light usage efficiency of the hologram scanner was also low.

前述の従来形の光ビーム走査方法については特願昭58
−066145号の明細書および図面に記載されている
Regarding the conventional light beam scanning method mentioned above, please refer to the patent application filed in 1983.
It is described in the specification and drawings of No.-066145.

発明の目的 本発明の目的は、前述の従来形における問題点にかんが
み、物体波と参照波を再生点を通る面法線に対して対称
の位置から照射してホログラムを作成し、再生光ビーム
を入射角と回折角が等しくなるように該再生点に照射し
、かつ前記物体波および参照波としては発散球面波を用
いるという構想に基づき、ホログラムを作成した回転物
体の面ぶれおよび軸ずれの許容値が大きくなるようにし
かつ、光使用効率の高いホログラムスキャナが得られ、
それによp高精度な走査を可能にすることにある。
Purpose of the Invention In view of the above-mentioned problems with the conventional type, an object of the present invention is to create a hologram by irradiating an object wave and a reference wave from positions symmetrical to the surface normal passing through the reproduction point, and to generate a reproduction light beam. is irradiated onto the reproduction point so that the incident angle and the diffraction angle are equal, and a diverging spherical wave is used as the object wave and the reference wave. A hologram scanner with a large tolerance and high light usage efficiency can be obtained.
The purpose of this is to enable highly accurate scanning.

発明の構成 本発明の一つの形態においては、回転体面上の複数個に
分割された部分に再生点を設定し、該再生点を通る面法
線に対して対称又はほぼ対称の位置からいずれも発散球
面波である物体波と参照波を照射して該部分にホログラ
ムを作成し、該ホログラムが作成された物体を回転し、
走査をするような回折された出射光ビームを得る光ビー
ム走査方法が提供される。
Structure of the Invention In one embodiment of the present invention, a reproduction point is set in a plurality of divided parts on the surface of a rotating body, and each of the reproduction points is set from a position symmetrical or almost symmetrical with respect to the surface normal passing through the reproduction point. A hologram is created in the area by irradiating an object wave and a reference wave, which are diverging spherical waves, and the object on which the hologram is created is rotated.
A light beam scanning method is provided for obtaining a diffracted output light beam for scanning.

本発明の他の形態においては、回転軸、該回転軸に取付
けられ、回転体面上の複数個の形状の部分に、該形状の
部分の一点である再生点を通る面法線に対して対称又は
ほぼ対称の位置から2つの発散球面波を照射して作成さ
れたホログラムを備えた回転物体、および再生光ビーム
を照射する再生光ビーム照射光源を具備し、それにより
該回転物体の回転に従って回折された出射光ビームが走
査をするようにした光ビーム走査装置が提供される。
In another form of the present invention, a rotating shaft is attached to the rotating shaft, and is attached to a plurality of shaped parts on the surface of the rotating body, symmetrically with respect to a surface normal passing through a reproduction point that is one point of the shaped part. Alternatively, a rotating object is provided with a hologram created by irradiating two diverging spherical waves from approximately symmetrical positions, and a reproduction light beam irradiation light source that irradiates a reproduction light beam, thereby diffracting the object according to the rotation of the rotating object. A light beam scanning device is provided in which the emitted light beam performs scanning.

発明の実施例 本発明の詳細な説明に先立ち、前述した回転円板(ディ
スク)の面ぶれおよび軸ずれの許容値が大巻くなる条件
について嬉2図および第3図を用いて説明する。第2図
には、ホログラムを用いた光ビーム走査装置の側面から
見た再生光学系の光路図が示される。ここでディスクの
面ぶれdφに伴う回折された出射光ビーム7の投射角度
変動をdθdとすると、次の一次近似式が成立する。
Embodiments of the Invention Prior to a detailed description of the present invention, the conditions under which the permissible values for surface runout and axis misalignment of the rotating disk described above become large will be explained with reference to Figs. 2 and 3. FIG. 2 shows an optical path diagram of the reproduction optical system seen from the side of the optical beam scanning device using a hologram. Here, if the projection angle variation of the diffracted outgoing light beam 7 due to the surface wobbling dφ of the disk is dθd, then the following first-order approximation formula holds true.

dθd=±(cosθi/ 008θd−1)dφ・・
・・・・(1)ここにθIはホログラムに入射する入射
角、θdはホログラムによる回折角である。(1)式か
らディスクの面ぶれの許容値を高めるためには、入射角
と回折角が等しいように設定すればよいことがわかる。
dθd=±(cosθi/ 008θd-1)dφ・・
(1) Here, θI is the incident angle of incidence on the hologram, and θd is the diffraction angle by the hologram. From equation (1), it can be seen that in order to increase the allowable value of the surface runout of the disk, the incident angle and the diffraction angle should be set to be equal.

またディスクの軸ずれdrに伴う投射角度変動’t−d
19dとすると、次の一次近似式が成立する。
Also, projection angle fluctuation due to disc axis deviation dr
19d, the following linear approximation formula holds true.

dθd=±f’(RJλdr1008θd −・−・−
+21ここにλはホログラムを用いた光ビーム走査装置
における再生光ビームの波長であり、f’(R,lはホ
ログラムの空間周波数分布f (rl (単位当りの干
渉縞の数)の半径Rでの微分値である。(2)式より、
ディスクの軸ずれの許容値を高めるためには、f’(R
)=0.すなわち半径Rで空間周波数分布f lr)が
極値をもてばよいことがわかる。
dθd=±f'(RJλdr1008θd −・−・−
+21 Here, λ is the wavelength of the reproduction light beam in a light beam scanning device using a hologram, and f' (R, l is the radius R of the spatial frequency distribution f (rl (number of interference fringes per unit) of the hologram). is the differential value of.From equation (2),
In order to increase the tolerance for disk misalignment, f'(R
)=0. That is, it can be seen that the spatial frequency distribution f lr) only needs to have an extreme value at the radius R.

第3図にはティスクーヒにホログラムを作成する時の照
射条件をめるだめの第2図と同様な図が示される。本図
においては厩生光ビームの光路は省略しであるがP点が
再生点を示す。ディスクはy軸に垂直にr軸に沿って配
置される。物体波の光源11からは再生点Pに対して物
体波12が照射され、参照波の光源13からは再生点P
に対して参照波14が照射される。この2つの光源から
の照射を受けてディスク上にホログラムが作成される。
FIG. 3 shows a diagram similar to FIG. 2, showing the irradiation conditions when creating a hologram on a Tiskuch. Although the optical path of the stable light beam is omitted in this figure, point P indicates the reproduction point. The disks are arranged along the r-axis perpendicular to the y-axis. An object wave 12 is emitted from the object wave light source 11 to the reproduction point P, and a reference wave light source 13 irradiates the reproduction point P.
A reference wave 14 is irradiated to the target. A hologram is created on the disk by irradiation from these two light sources.

この時のf(FLIは2つの光源が発散球面波である場
合次式で与えられる。
In this case, f(FLI) is given by the following equation when the two light sources are divergent spherical waves.

ここにλ!は作成波(物体波および参照波)の波長であ
り、Rは再生点のr座標値、参照波光源はr座標が0、
y座標がfAs物体波光源はr座標がy2、y座標がf
Bであるとする。f’(R)−oとなる条件は(3)式
を微分し変形して、次に示す(4)式すなわち、(4)
式を満足するような(fA、 fn、 y21R)の条
件の時、軸ずれ許容値は最大となる。
λ here! is the wavelength of the created wave (object wave and reference wave), R is the r coordinate value of the reproduction point, the r coordinate of the reference wave light source is 0,
The object wave light source whose y coordinate is fAs has an r coordinate of y2 and a y coordinate of f
Suppose it is B. The condition for f'(R)-o is obtained by differentiating and transforming equation (3) to obtain equation (4) shown below, that is, (4)
When the condition (fA, fn, y21R) satisfies the formula, the axis misalignment tolerance becomes maximum.

(1)式を満足する条件、すなわちホログラムに対する
入射角と回折角が等しくなるためには物体波と参照波が
P点を通りy軸に平行な直線PPlに対し対称であれは
よいから、(1)式と(4)式を共に満足するためには
s fA”’Bでかつy2=2Rとなればよいことにな
る。
In order to satisfy the condition (1), that is, the angle of incidence on the hologram and the angle of diffraction are equal, the object wave and the reference wave must be symmetrical about the straight line PPl passing through point P and parallel to the y-axis. In order to satisfy both equations 1) and (4), it is sufficient that s fA'''B and y2=2R.

本発明の一実施例としての光ビーム走置方法を行う装置
のホログラム作成条件および再生光ビームの照射条件が
第4図に示される。第4図は第3図と同様な図であるが
再生光ビーム6および再生光ビームのホログラムによる
回折光路、すなわち出射光ビーム7の光路が示されてい
る。本実施例においては、直線走査を目的として、R=
60wa、fA=fB=180咽、Yg=120群、ホ
ログラム作成波長λ+=325nm、再生光ビームの波
長λ=760nmである。作成波長と再生波長が異なる
のは、直線走査をなすためである。ホログラム作成のだ
めの光源としては発散球面波であるH、 −Odレーザ
が、再生光ビームの光源としてはレーザダイオードが用
いられる。再生光ビームのホログラムディスクに対する
入射角は417度である。この時、走査幅260簡にわ
たり、直線性は±0.1 rttm以内であり、良好で
ある。又、投射角動変動許容値(±10秒以内)以内と
するには、ディスクの面ぶれは約±1分、軸ずれは±1
00μm以内と大きく許容されることがわかる。
FIG. 4 shows hologram creation conditions and reproduction light beam irradiation conditions for an apparatus that performs a light beam positioning method as an embodiment of the present invention. FIG. 4 is a diagram similar to FIG. 3, but shows the reproduction light beam 6 and the diffraction optical path of the reproduction light beam by the hologram, that is, the optical path of the output light beam 7. In this embodiment, for the purpose of linear scanning, R=
60wa, fA=fB=180mm, Yg=120 groups, hologram creation wavelength λ+=325nm, and reproduction light beam wavelength λ=760nm. The reason why the production wavelength and reproduction wavelength are different is because linear scanning is performed. A divergent spherical wave H, -Od laser is used as the light source for creating the hologram, and a laser diode is used as the light source for the reproduction light beam. The angle of incidence of the reproduction light beam on the hologram disk is 417 degrees. At this time, the linearity is within ±0.1 rttm over a scanning width of 260, which is good. In addition, in order to keep the projection angle fluctuation within the permissible value (within ±10 seconds), the disk surface runout must be approximately ±1 minute, and the axis misalignment must be ±1 minute.
It can be seen that a value within 00 μm is largely permissible.

本実施例においては、ブラッグ角入射であるため高い回
折効率が得られること(〜75%)、ホログラム干渉縞
が垂直のため、膨潤、収縮等の影響がないこと、等の利
点を有する。
This embodiment has advantages such as a high diffraction efficiency (up to 75%) due to Bragg angle incidence, and no influence of swelling, contraction, etc. since the hologram interference fringes are vertical.

また、本実施例においては作成波として発散球面波を用
いたが、球面収差を伴う球面波を用いてもよい。これは
、第5図の様に、プリズム19やレンズの様な偏向素子
によって実現できる。この球面収差波は作成波のどちら
か一方、又は両方に用いても良い。
Further, in this embodiment, a diverging spherical wave is used as the created wave, but a spherical wave accompanied by spherical aberration may also be used. This can be realized by a deflection element such as a prism 19 or a lens, as shown in FIG. This spherical aberration wave may be used for either one or both of the created waves.

また、図では円板としたが、ホログラムは球面。Also, although the figure shows a disk, the hologram is spherical.

円筒1円錐、角錐状であっても良いことは言うまでもな
い。
It goes without saying that the cylinder may be shaped like a cone or a pyramid.

発明の効果 本発明によれば、ホログラムを用いて光ビームの走査を
行うに当って、ホログラムを作成した回転物体の面ぶれ
および軸ずれの許容値を大きくすることができ、かつ光
測用効率の高いホログラムスキャナが得られ、それによ
りレーザビームによる高精度な走査を実現できる。
Effects of the Invention According to the present invention, when performing scanning with a light beam using a hologram, it is possible to increase the permissible values for surface wobbling and axis misalignment of the rotating object on which the hologram is created, and to increase the optical measurement efficiency. A hologram scanner with a high level of accuracy can be obtained, thereby realizing highly accurate scanning with a laser beam.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はホログラムを用いた光ビーム走査装置の従来例
の概略の構成を示す図、第2図は本発明の詳細な説明す
るための光ビーム走査装置の側面から見た再生光学系の
光路図、第3図は第2図と同様なホログラム作成波の光
路図、第4図は本発明の一実施例としての光ビーム走査
方法を行う装置のホログラム作成条件および再生光ビー
ムの照射条条を示す光路図、および第5図は本発明の他
の実施例を示す図である。 1・・・回転軸、 2・・・回転円板、 3・・・ホログラムファセット、 4・・・レーザ光源、 5・・・レンズ、 6・・・再生光ビーム、 7・・・出射光ビーム、 8・・・スクリーン、 11・・・物体波の光源、 12・・・物体波、 13・・・参照波の光源、 14・・・参照波、 19・・・プリズム、 P・・・再生点。 (11) 第1図 第2コ [1 粉
FIG. 1 is a diagram showing a schematic configuration of a conventional example of a light beam scanning device using a hologram, and FIG. 2 is a diagram showing the optical path of a reproduction optical system seen from the side of the light beam scanning device for explaining the present invention in detail. 3 is an optical path diagram of a hologram creation wave similar to that shown in FIG. 2, and FIG. 4 is a hologram creation condition and reproduction light beam irradiation conditions of an apparatus that performs a light beam scanning method as an embodiment of the present invention. FIG. 5 is a diagram showing another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Rotation axis, 2... Rotating disk, 3... Hologram facet, 4... Laser light source, 5... Lens, 6... Reproduction light beam, 7... Emission light beam , 8... Screen, 11... Object wave light source, 12... Object wave, 13... Reference wave light source, 14... Reference wave, 19... Prism, P... Reproduction point. (11) Figure 1, Figure 2 [1 Powder

Claims (1)

【特許請求の範囲】 1、回転体面上の複数個に分割された部分に再生点を設
定し、該再生点を通る面法線に対して対称又はほぼ対称
の位置からいずれも発散球面波である物体波と参照波を
照射して核部分にホログラ ・ムを作成し、該ホログラ
ムが作成された物体を回転し、走査をするような回折さ
れた出射光ビームを得る光ビーム走査方法。 2、回転軸、該回転軸に取付けられ、回転体面上の複数
個の形状の部分に、該形状の部分の一点である再生点を
通る面法線に対して、対称又は、はぼ対称の位置から2
つの発散球面波を照射して作成されたホログラムを備え
た回転物体、および再生光ビームを照射する再生光ビー
ム照射光源を具備し、それにより該回転物体の回転に従
って回折された出射光ビームが走査をするようにした光
ビーム走査装置。 3 該再生光ビームの再生入射角と回折角が等しいか、
又は、はぼ等しいことを特徴とする特許請求の範囲第2
項に記載の光ビーム走査装置。 4、ホログラム作成波と再生波の波長が異なることを特
徴とする特許請求の範囲第2項に記載の光ビーム走査装
置。 5、ホログラム作成波のうち、いずれか一方、又は両方
が、球面収差を有することを特徴とする特許請求の範囲
第2項に記載の光ビーム走査装置。 6 該回転物体は、円板9円錐体1球面体、角錐体、又
は円筒体であることを特徴とする特許請求の範囲第2項
に記載の光ビーム走査装置。
[Claims] 1. A reproducing point is set in a plurality of divided parts on the surface of the rotating body, and a diverging spherical wave is generated from a position symmetrical or almost symmetrical with respect to the surface normal passing through the reproducing point. A light beam scanning method in which a hologram is created at a core by irradiating an object wave and a reference wave, and the object on which the hologram is created is rotated to obtain a diffracted output light beam for scanning. 2. A rotating shaft, which is attached to the rotating shaft and has a plurality of shaped parts on the surface of the rotating body, which are symmetrical or nearly symmetrical with respect to the surface normal passing through the reproduction point, which is one point of the shaped part. 2 from position
The rotating object includes a hologram created by irradiating two divergent spherical waves, and a reproduction light beam irradiation light source that irradiates a reproduction light beam, whereby the output light beam diffracted according to the rotation of the rotating object is scanned. A light beam scanning device designed to 3. Is the reproduction incident angle and diffraction angle of the reproduction light beam equal?
Or, the second claim characterized in that they are substantially equivalent.
The optical beam scanning device described in 2. 4. The light beam scanning device according to claim 2, wherein the hologram creation wave and the reproduction wave have different wavelengths. 5. The light beam scanning device according to claim 2, wherein one or both of the hologram creation waves have spherical aberration. 6. The light beam scanning device according to claim 2, wherein the rotating object is a disk, a cone, a sphere, a pyramid, or a cylinder.
JP59048076A 1984-03-15 1984-03-15 Method and apparatus for scanning optical beam Granted JPS60194419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59048076A JPS60194419A (en) 1984-03-15 1984-03-15 Method and apparatus for scanning optical beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59048076A JPS60194419A (en) 1984-03-15 1984-03-15 Method and apparatus for scanning optical beam

Publications (2)

Publication Number Publication Date
JPS60194419A true JPS60194419A (en) 1985-10-02
JPH0311447B2 JPH0311447B2 (en) 1991-02-18

Family

ID=12793248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59048076A Granted JPS60194419A (en) 1984-03-15 1984-03-15 Method and apparatus for scanning optical beam

Country Status (1)

Country Link
JP (1) JPS60194419A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4948213A (en) * 1988-03-25 1990-08-14 Fujitsu Limited Beam scanner
US5794503A (en) * 1994-08-25 1998-08-18 Tenryu Seikyo Kabushiki Kaisha Disc cutter
JP2007212575A (en) * 2006-02-07 2007-08-23 Ricoh Co Ltd Optical diffraction element, method of scanning light beam, light scanner, and image forming apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4948213A (en) * 1988-03-25 1990-08-14 Fujitsu Limited Beam scanner
US5794503A (en) * 1994-08-25 1998-08-18 Tenryu Seikyo Kabushiki Kaisha Disc cutter
JP2007212575A (en) * 2006-02-07 2007-08-23 Ricoh Co Ltd Optical diffraction element, method of scanning light beam, light scanner, and image forming apparatus

Also Published As

Publication number Publication date
JPH0311447B2 (en) 1991-02-18

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