JPS60194259U - temperature control device - Google Patents

temperature control device

Info

Publication number
JPS60194259U
JPS60194259U JP8242884U JP8242884U JPS60194259U JP S60194259 U JPS60194259 U JP S60194259U JP 8242884 U JP8242884 U JP 8242884U JP 8242884 U JP8242884 U JP 8242884U JP S60194259 U JPS60194259 U JP S60194259U
Authority
JP
Japan
Prior art keywords
control device
temperature control
temperature
controlled part
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8242884U
Other languages
Japanese (ja)
Inventor
友明 林
Original Assignee
ヤマト科学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヤマト科学株式会社 filed Critical ヤマト科学株式会社
Priority to JP8242884U priority Critical patent/JPS60194259U/en
Publication of JPS60194259U publication Critical patent/JPS60194259U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、本考案の一実施例を示す回路ブロックの構成
図である。 １．３・ｉ・センサ、５・・・温調機、７・・・液化二
酸化　　　　′要素噴射制御装置。FIG. 1 is a configuration diagram of a circuit block showing an embodiment of the present invention. 1.3・i・sensor, 5...temperature controller, 7...liquefied dioxide' element injection control device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被制御部の温度を所望の温度に制御する装置において、
被制御部の温度を検出するセンサを少なくとも２個設、
けたことを特徴とする温度制御装置。In a device that controls the temperature of a controlled part to a desired temperature,
Install at least two sensors to detect the temperature of the controlled part,
Temperature control device characterized by digits.
JP8242884U 1984-06-05 1984-06-05 temperature control device Pending JPS60194259U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8242884U JPS60194259U (en) 1984-06-05 1984-06-05 temperature control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8242884U JPS60194259U (en) 1984-06-05 1984-06-05 temperature control device

Publications (1)

Publication Number Publication Date
JPS60194259U true JPS60194259U (en) 1985-12-24

Family

ID=30630132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8242884U Pending JPS60194259U (en) 1984-06-05 1984-06-05 temperature control device

Country Status (1)

Country Link
JP (1) JPS60194259U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017083171A (en) * 2011-03-04 2017-05-18 ブルックス オートメーション インコーポレイテッド Helium management control system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5055023A (en) * 1973-09-12 1975-05-15
JPS5146748A (en) * 1974-10-18 1976-04-21 Hitachi Ltd HAISUISHORISOCHI
JPS5824646B2 (en) * 1979-07-25 1983-05-23 テクナル、アンテルナシヨナル、ソシエテ、アノニム Joints for assembling shape materials

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5055023A (en) * 1973-09-12 1975-05-15
JPS5146748A (en) * 1974-10-18 1976-04-21 Hitachi Ltd HAISUISHORISOCHI
JPS5824646B2 (en) * 1979-07-25 1983-05-23 テクナル、アンテルナシヨナル、ソシエテ、アノニム Joints for assembling shape materials

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017083171A (en) * 2011-03-04 2017-05-18 ブルックス オートメーション インコーポレイテッド Helium management control system
US10113781B2 (en) 2011-03-04 2018-10-30 Brooks Automation, Inc. Helium management control system
US10900699B2 (en) 2011-03-04 2021-01-26 Edwards Vacuum Llc Helium management control system

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