JPS60192385A - Developing unit for printed circuit board - Google Patents

Developing unit for printed circuit board

Info

Publication number
JPS60192385A
JPS60192385A JP4704084A JP4704084A JPS60192385A JP S60192385 A JPS60192385 A JP S60192385A JP 4704084 A JP4704084 A JP 4704084A JP 4704084 A JP4704084 A JP 4704084A JP S60192385 A JPS60192385 A JP S60192385A
Authority
JP
Japan
Prior art keywords
tank
organic solvent
circuit board
printed circuit
developing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4704084A
Other languages
Japanese (ja)
Inventor
小出 敏夫
嶋崎 威
塚原 伸一郎
山寺 利夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Construction Co Ltd
Hitachi Ltd
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Plant Construction Co Ltd
Hitachi Ltd
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Construction Co Ltd, Hitachi Ltd, Hitachi Plant Technologies Ltd filed Critical Hitachi Plant Construction Co Ltd
Priority to JP4704084A priority Critical patent/JPS60192385A/en
Publication of JPS60192385A publication Critical patent/JPS60192385A/en
Pending legal-status Critical Current

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  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、現像槽と水洗槽との間に雰囲気槽を設け、現
像に悪影響を及ぼす水洗水の有機溶剤への混入を防止し
た現像装置に係り、特に高密度および高精度印刷回路板
のフォトレジストの現像に1好適な現像装置に関する。
[Detailed Description of the Invention] [Field of Application of the Invention] The present invention provides a developing device in which an atmosphere tank is provided between a developing tank and a washing tank to prevent washing water from mixing with an organic solvent, which has an adverse effect on development. The present invention relates to a development apparatus particularly suitable for developing photoresists for high density and high precision printed circuit boards.

〔発明の背景〕[Background of the invention]

従来の印刷回路板の未露光フォトレジストの現像は、印
刷回路板を搬送しながら両面に有機溶剤をスプレーして
現像し、現像後は直ちに水洗用の、。
Conventionally, unexposed photoresist on a printed circuit board is developed by spraying an organic solvent on both sides while the printed circuit board is being transported, and immediately washed with water after development.

水を回路板にスプレーし、定着を行なっていた。Water was sprayed onto the circuit board to fix it.

現像仮定着を行なう水洗までの時間か長い場合、印刷回
路板上の有機溶剤か蒸発し、有機溶剤中に溶解していた
フォトレジストが印刷回路板上に残留するという問題か
あった。特に次の工程でエツチングにて除去すべき銅の
上にフォトレジストか残留すると、その部分がエツチン
グされず銅か残ってし韮ういわゆるショートとなる欠陥
が発生する。従って現像後は、印刷回路板の表面に有機
溶剤か蒸発しないで残っている状態で水洗を行なわねば
ならず、そのため現像槽と水洗槽は構造上距離をあけて
設けることができない。そこで従来の現像装置は、現像
後の回路板の水洗を直ちに行なうために、現像槽と水洗
槽の槽壁をしきり板とし、現像槽の出口および水洗槽の
入口に液切りローラーを設け、さらにローラーにカバー
を設けることにより、水洗槽の水洗水が現像槽に混入す
るのを防止する構造であった。
If the time required for washing before development and pre-adhesion is long, the organic solvent on the printed circuit board evaporates and the photoresist dissolved in the organic solvent remains on the printed circuit board. In particular, if photoresist remains on copper that is to be removed by etching in the next step, the copper will remain in that area without being etched, resulting in a so-called short-circuit defect. Therefore, after development, it is necessary to wash the printed circuit board with water while the organic solvent remains on the surface without evaporating, and for this reason, the developing tank and the washing tank cannot be provided with a distance from each other due to the structure. Therefore, in order to immediately wash the circuit board with water after development, conventional developing devices use partition plates between the walls of the developer tank and the washing tank, and provide drain rollers at the outlet of the developer tank and the inlet of the washing tank. By providing a cover on the roller, the structure was such that washing water from the washing tank was prevented from entering the developing tank.

第1図は従来の現像装置の側面図である。スプレー現像
槽1は有機溶剤をスアレーンスル6からコンベア5によ
って搬送される印刷回路板の両面に噴射してこれを現像
する装置、スプレー現像槽2およびスプレーリンス槽3
もスプレー現像槽1と同じく、有機溶剤をスプレーノズ
ル6から印刷回路板50両面に噴射してさらに現像を進
めかつ仕上げをする装置、水洗スプレー槽4は印刷回路
板上の有機溶剤をスプレーノズル6から噴射する水によ
って除去し定着する装置、液切りローラー7は、印刷回
路板上の有機溶剤を除去して液切りを行うためのローラ
、カバー8はスプレーノズル・6から1貢射される有機
溶剤または水が隣りの槽に混入しないように保護するた
めのカバーである。
FIG. 1 is a side view of a conventional developing device. A spray developing tank 1 is a device for developing a printed circuit board by spraying an organic solvent onto both sides of a printed circuit board conveyed by a conveyor 5 from a sampler 6, a spray developing tank 2, and a spray rinsing tank 3.
Similar to the spray developing tank 1, the washing spray tank 4 is a device that sprays an organic solvent onto both sides of the printed circuit board 50 from the spray nozzle 6 to further advance development and finish the process. A liquid removal roller 7 is a device for removing and fixing organic solvents with water sprayed from a printed circuit board, and a cover 8 is a roller for removing and fixing organic solvents from a printed circuit board. This is a cover to prevent solvent or water from entering the adjacent tank.

上記のような構造の現像装置では、印刷回路板がこの液
切りローラー7の部分を通過するとき、水洗スプレー槽
4の水洗水が印刷回路板を伝わつ・て隣のスプレーリン
ス槽3へ流れ込むのを完全に防止することができず、ま
た、液切りローラー7の間にすき間が生じ、そのすき間
から水洗スプレー槽4でスプレーされた水洗水か現像槽
へ飛散するのを完全に防止することかできない。液切り
ローラー7の材質、形状および液切りローラーのカバー
8の形状を工夫してもこの問題は解決できなかった。有
機溶剤に水洗水が混入すると、現像槽で有機溶剤をスプ
レーしながら現像を行なっているときに、混入した水洗
水が回路板にスプレーされ、一時的に定着されてしすう
ため、現像に悪影響を及ぼすことが判明しており、有機
溶剤中への水洗水の混入は絶対に避けねばならないこと
である。しかし、一定時間以上運転を行なうと、現像槽
へ水洗水が混入し、現像に影響が出るため、一時的に運
転を停止して有機溶剤中に混入した水洗水を排除する必
要があり、連続運転にとって支障が生じるという欠点が
あった。
In the developing device having the above structure, when the printed circuit board passes through the drain roller 7, the washing water in the washing spray tank 4 flows through the printed circuit board and into the adjacent spray rinse tank 3. In addition, it is possible to completely prevent the occurrence of a gap between the liquid draining rollers 7 and the splashing of the washing water sprayed from the washing spray tank 4 into the developing tank through the gap. I can't do it. Even if the material and shape of the drain roller 7 and the shape of the cover 8 of the drain roller were modified, this problem could not be solved. If washing water gets mixed into the organic solvent, when developing is performed while spraying the organic solvent in the developing tank, the mixed washing water will be sprayed onto the circuit board and temporarily fixed, causing a negative effect on the development. It has been found that the mixing of washing water into organic solvents must be avoided at all costs. However, if the operation is continued for more than a certain period of time, washing water gets mixed into the developer tank and affects the development, so it is necessary to temporarily stop the operation and remove the washing water mixed into the organic solvent. This has the disadvantage that it poses a problem for driving.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、現像槽の有機溶剤への水洗水の混入を
防止し、かつ印刷回路板上の有機溶剤が揮発しないで残
っている状態で現像槽から水洗槽へ印刷回路板を搬送で
きる構造を有する現像装置を提供することにある。
An object of the present invention is to prevent washing water from mixing with the organic solvent in the developing tank, and to transport the printed circuit board from the developing tank to the washing tank while the organic solvent on the printed circuit board remains without being volatilized. An object of the present invention is to provide a developing device having a structure.

〔発明の概要〕[Summary of the invention]

印刷回路板の現像を行なう有機溶剤は、現像に悪影響を
及ぼす水洗水の混入が許されないため、現像装置はその
現像槽と水洗槽とを切り離す構造にする必要があるが、
印刷回路板を搬送中に切り離した部分で印刷回路板上の
有機溶剤が揮発してし才い、溶解したフォトレジストだ
けが残留する不具合か生ずる。そこで、有機溶剤が揮発
しない状態にしておけば、スプレー処理のようQこ現1
象が進行することなく、かつ印刷回路板上の有機溶剤が
揮発するのを防止できると考えた。また、現像・・・部
と水洗部を切り離したことにより、水洗部の水洗水が現
像部に混入するのを防止できる。
The organic solvent used to develop printed circuit boards cannot be mixed with washing water, which has a negative effect on development, so the developing device must have a structure that separates the developing tank from the washing tank.
The organic solvent on the printed circuit board evaporates at the portion where the printed circuit board is separated during transportation, resulting in a problem in which only the dissolved photoresist remains. Therefore, if you keep the organic solvent in a state where it does not volatilize, you can avoid problems like spray treatment.
We thought that this would prevent the organic solvent on the printed circuit board from volatilizing without the problem progressing. Further, by separating the developing section and the washing section, it is possible to prevent washing water from the washing section from entering the developing section.

すなわち、本発明は、現像槽と水洗槽との間に現像用の
有機溶剤の微粒子で充満させた雰囲気槽を設けた印刷回
路板の現像装置を特徴とする。
That is, the present invention is characterized by a printed circuit board developing device in which an atmospheric tank filled with fine particles of an organic solvent for development is provided between a developing tank and a washing tank.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第2図により説明する。本実
施例の現像装置は、スプレー現像槽1、スプレー現鐵槽
2、スプレーリンス槽3、有機溶剤の雰囲気槽9、水洗
スプレー槽4およびコンベア5より構成される。スプレ
ー現像槽1、スプレー現像槽2およびスプレーリンス槽
3は、各々図示シていないポンプにより有機溶剤かスプ
レーノズル6へ供給され、コンベア5に向けてスプレー
されている。また水洗スプレー槽4は、図示していない
ポンプにより水洗水かスプレーノズル6へ供給され、コ
ンベア5に向けてスプレーされている。有機溶剤の雰囲
気槽9は、本発明によって追加された檀であり、スプレ
ーリンス槽3と水洗スプレー槽4との間に設けてあり、
図示しでいない・ポンプにより有機溶剤が微鳴物ノズル
10へ供給され、有機溶剤の雰囲気槽9の中は有機溶剤
の徹れ2子で充満されている。
An embodiment of the present invention will be described below with reference to FIG. The developing device of this embodiment is composed of a spray developing tank 1, a spray developing iron tank 2, a spray rinsing tank 3, an organic solvent atmosphere tank 9, a washing spray tank 4, and a conveyor 5. Spray developing tank 1, spray developing tank 2, and spray rinsing tank 3 are each supplied with an organic solvent to a spray nozzle 6 by a pump (not shown), and is sprayed toward a conveyor 5. Further, in the washing spray tank 4, washing water is supplied to a spray nozzle 6 by a pump (not shown), and is sprayed toward the conveyor 5. The organic solvent atmosphere tank 9 is added according to the present invention, and is provided between the spray rinse tank 3 and the washing spray tank 4.
An organic solvent is supplied to the nozzle nozzle 10 by a pump (not shown), and the inside of the organic solvent atmosphere tank 9 is filled with two particles of organic solvent.

本実施例の現@! ’Jj置は、コンベア5により印刷
回路板を搬送しながら、スプレー現像槽1、スブ。
Current status of this example @! In the 'Jj' position, while the printed circuit board is being conveyed by the conveyor 5, the spray developing tank 1 and the spray developer tank 1 are loaded.

レー現像槽2才っよひスプレーリンス槽3で印刷回路板
の両面に有機溶剤をスプレーし、現像Iを行なう。次に
有機溶剤の舅i囲気槽9へ印刷回路板を搬送する。この
有機溶剤の雰囲気槽9には、御噴霧ノズル10から有機
溶剤の微粒子が噴射されているため、槽内には有機溶剤
の微粒子が充満しており、有機溶剤の雰囲気槽9を印刷
回路板か通過しているときには、印刷回路板上の有機溶
剤は揮発することなく残留している。沫だ有機溶剤を印
刷回路板に強制的にスプレーしないため、現像はほとん
と進行しない。従って、印刷回路板は有機溶剤の雰囲気
槽9を出るときには入ったときき同じ状態に雑持される
ことになる。そこで次に水洗スプレー槽4へ印刷回路板
を搬送し、水洗を行なうので印刷回路板上の有機溶剤を
レジストか溶解してい・る状態で洗い流すことができる
Spray an organic solvent on both sides of the printed circuit board in the spray rinse tank 3 and perform development I. The printed circuit board is then transported to an organic solvent enclosure 9. The organic solvent atmosphere tank 9 is injected with organic solvent fine particles from the spray nozzle 10, so the tank is filled with organic solvent fine particles. While the organic solvent is passing through the printed circuit board, the organic solvent remains without being volatilized. Because droplets of organic solvent are not forcibly sprayed onto the printed circuit board, development hardly progresses. Therefore, when the printed circuit board leaves the organic solvent atmosphere bath 9, it is left in the same state as when it entered. Then, the printed circuit board is transferred to the washing spray tank 4 and washed with water, so that the organic solvent on the printed circuit board can be washed away while the resist remains dissolved.

茨だ有機溶剤の雰囲気槽9を設けたことにより水洗スプ
レー槽4の水洗水は有機溶剤の雰囲気槽9には入り込む
が、スプレーリンス槽3にまでは入り込まない。有機溶
剤の雰囲槃槽9の有機溶剤。
Since the organic solvent atmosphere tank 9 is provided, the washing water in the washing spray tank 4 enters the organic solvent atmosphere tank 9, but does not enter the spray rinse tank 3. Organic solvent atmosphere in organic solvent tank 9.

の循環系統をスプレー現像槽1、スプレー現像槽2およ
びスプレーリンス槽3の循環系統と別系統とすれは、有
機溶剤の雰囲気槽9に混入したボ洗水は現像を行なう有
機溶剤中には混入しないため、安定した現像ができる。
The circulation system is separate from the circulation systems for spray developing tank 1, spray developing tank 2, and spray rinsing tank 3, in order to prevent the washing water mixed into the organic solvent atmosphere tank 9 from being mixed into the organic solvent used for development. Therefore, stable development is possible.

なお従来の現像装置では、水洗槽に隣接する現像槽の有
機溶剤中に水洗槽の水洗水が水滴となって溜まり、現像
槽の有機溶剤中の水分含有量も飽和状態であったが、本
発明の現像装置では、現像槽の有機溶剤中に水滴は見当
らす、上記水分含有量も大巾に低減された。
In conventional developing devices, the washing water from the washing tank becomes water droplets and collects in the organic solvent in the developing tank adjacent to the washing tank, and the water content in the organic solvent in the developing tank is also saturated. In the developing device of the invention, water droplets were found in the organic solvent in the developing tank, and the water content was also significantly reduced.

〔発明の効果〕〔Effect of the invention〕

本発明によれは、水洗槽の水洗水が現像槽の有機溶剤へ
混入するのを防止できるとともに、印刷回路板上の有機
溶剤が揮発しないで残ったま丈の状態で現像槽から水洗
槽へ印刷回路板を搬送できる構造であるので、常に安定
した現像条件で現像ができるとともに、現像に起因する
欠陥の発生もなくすることができる。
According to the present invention, it is possible to prevent the washing water in the washing tank from mixing with the organic solvent in the developing tank, and to print from the developing tank to the washing tank while the organic solvent on the printed circuit board remains unvolatilized. Since the structure is such that the circuit board can be transported, development can always be carried out under stable development conditions, and defects caused by development can be prevented from occurring.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の現像装置の構造を示す側面図、第2図は
本発明の一実施例である担保装置の構造を示す側面図で
ある。 1・・・スプレー現像槽 2・・・スプレー現像槽3・
・・スプレーリンス槽4・・・水洗スプレー槽5・・・
コンベア 6・・・スプレーノズル7・・・液切りロー
ラー 8・・・カバー9・・・雰囲気槽 10・・・頷
噴霧ノズル代理人弁理士 高 橋 明 夫 第 ノ L冒と■ 第2 Z
FIG. 1 is a side view showing the structure of a conventional developing device, and FIG. 2 is a side view showing the structure of a securing device which is an embodiment of the present invention. 1... Spray developer tank 2... Spray developer tank 3.
...Spray rinse tank 4...Wash spray tank 5...
Conveyor 6...Spray nozzle 7...Draining roller 8...Cover 9...Atmosphere tank 10...Nod Spray Nozzle Representative Patent Attorney Akio Takahashi No. 2 Z

Claims (1)

【特許請求の範囲】[Claims] 印刷回路板の未露光フォトレジストを有機浴剤によって
溶解除去する現像槽と現像後の定着□を行なう水洗槽と
を有する現像装置において、前記現像槽と前記水洗槽と
の間に前記有機溶剤の微粒子で充満させた雰囲気槽を設
けることを特徴とする印刷回路板の現像装置。
In a developing device having a developing tank for dissolving and removing unexposed photoresist on a printed circuit board with an organic bath agent and a washing tank for fixing after development, the organic solvent is present between the developing tank and the washing tank. A developing device for a printed circuit board, characterized by being provided with an atmosphere tank filled with fine particles.
JP4704084A 1984-03-14 1984-03-14 Developing unit for printed circuit board Pending JPS60192385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4704084A JPS60192385A (en) 1984-03-14 1984-03-14 Developing unit for printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4704084A JPS60192385A (en) 1984-03-14 1984-03-14 Developing unit for printed circuit board

Publications (1)

Publication Number Publication Date
JPS60192385A true JPS60192385A (en) 1985-09-30

Family

ID=12764047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4704084A Pending JPS60192385A (en) 1984-03-14 1984-03-14 Developing unit for printed circuit board

Country Status (1)

Country Link
JP (1) JPS60192385A (en)

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