JPS60190812A - 位置検出器 - Google Patents

位置検出器

Info

Publication number
JPS60190812A
JPS60190812A JP22391684A JP22391684A JPS60190812A JP S60190812 A JPS60190812 A JP S60190812A JP 22391684 A JP22391684 A JP 22391684A JP 22391684 A JP22391684 A JP 22391684A JP S60190812 A JPS60190812 A JP S60190812A
Authority
JP
Japan
Prior art keywords
light
grating
diffraction grating
light beams
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22391684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126005B2 (en, 2012
Inventor
Shigeo Moriyama
森山　茂夫
Tatsuo Harada
原田　達男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22391684A priority Critical patent/JPS60190812A/ja
Publication of JPS60190812A publication Critical patent/JPS60190812A/ja
Publication of JPH0126005B2 publication Critical patent/JPH0126005B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP22391684A 1984-10-26 1984-10-26 位置検出器 Granted JPS60190812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22391684A JPS60190812A (ja) 1984-10-26 1984-10-26 位置検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22391684A JPS60190812A (ja) 1984-10-26 1984-10-26 位置検出器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP10295690A Division JPH032520A (ja) 1990-04-20 1990-04-20 位置検出器

Publications (2)

Publication Number Publication Date
JPS60190812A true JPS60190812A (ja) 1985-09-28
JPH0126005B2 JPH0126005B2 (en, 2012) 1989-05-22

Family

ID=16805720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22391684A Granted JPS60190812A (ja) 1984-10-26 1984-10-26 位置検出器

Country Status (1)

Country Link
JP (1) JPS60190812A (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163926A (ja) * 1986-01-14 1987-07-20 Canon Inc リニアエンコ−ダ−
US4930895A (en) * 1987-06-15 1990-06-05 Canon Kabushiki Kaisha Encoder for forming interference fringes by re-diffracted lights from an optical type scale and photoelectrically converting the interference fringes to thereby detect the displacement of the scale
US5102226A (en) * 1989-01-12 1992-04-07 Matsushita Electric Works, Ltd. Optical measurement system for determination of an object profile
JP2013160760A (ja) * 2012-02-01 2013-08-19 Dr Johannes Heidenhain Gmbh 位置測定装置及び複数の位置測定装置を備えた装置
WO2013161428A1 (ja) * 2012-04-26 2013-10-31 株式会社ニコン 計測方法及びエンコーダ装置、並びに露光方法及び装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5104225A (en) * 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3630622A (en) * 1968-08-08 1971-12-28 Philips Corp Apparatus for determining the relative movement of an object by means of a grating mechanically connected to the object
US3756723A (en) * 1970-01-27 1973-09-04 Leitz Ernst Gmbh Method of measuring the displacement of an object and arrangement therefor
GB1367886A (en) * 1971-10-29 1974-09-25 Ti Group Serivces Ltd Measuring apparatus
JPS5174659A (en, 2012) * 1974-12-24 1976-06-28 Nippon Electric Co
JPS5245225A (en) * 1975-10-07 1977-04-09 Fujitsu Ltd Memory device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3630622A (en) * 1968-08-08 1971-12-28 Philips Corp Apparatus for determining the relative movement of an object by means of a grating mechanically connected to the object
US3756723A (en) * 1970-01-27 1973-09-04 Leitz Ernst Gmbh Method of measuring the displacement of an object and arrangement therefor
GB1367886A (en) * 1971-10-29 1974-09-25 Ti Group Serivces Ltd Measuring apparatus
JPS5174659A (en, 2012) * 1974-12-24 1976-06-28 Nippon Electric Co
JPS5245225A (en) * 1975-10-07 1977-04-09 Fujitsu Ltd Memory device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163926A (ja) * 1986-01-14 1987-07-20 Canon Inc リニアエンコ−ダ−
US4930895A (en) * 1987-06-15 1990-06-05 Canon Kabushiki Kaisha Encoder for forming interference fringes by re-diffracted lights from an optical type scale and photoelectrically converting the interference fringes to thereby detect the displacement of the scale
US5102226A (en) * 1989-01-12 1992-04-07 Matsushita Electric Works, Ltd. Optical measurement system for determination of an object profile
JP2013160760A (ja) * 2012-02-01 2013-08-19 Dr Johannes Heidenhain Gmbh 位置測定装置及び複数の位置測定装置を備えた装置
WO2013161428A1 (ja) * 2012-04-26 2013-10-31 株式会社ニコン 計測方法及びエンコーダ装置、並びに露光方法及び装置
JPWO2013161428A1 (ja) * 2012-04-26 2015-12-24 株式会社ニコン 計測方法及びエンコーダ装置、並びに露光方法及び装置

Also Published As

Publication number Publication date
JPH0126005B2 (en, 2012) 1989-05-22

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