JPS6019034A - 複合プラズマを使用する化学反応方法及びその装置 - Google Patents
複合プラズマを使用する化学反応方法及びその装置Info
- Publication number
- JPS6019034A JPS6019034A JP58126795A JP12679583A JPS6019034A JP S6019034 A JPS6019034 A JP S6019034A JP 58126795 A JP58126795 A JP 58126795A JP 12679583 A JP12679583 A JP 12679583A JP S6019034 A JPS6019034 A JP S6019034A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- torch
- reaction
- reactant
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 70
- 239000002131 composite material Substances 0.000 title claims description 22
- 230000006698 induction Effects 0.000 claims abstract description 13
- 238000002347 injection Methods 0.000 claims abstract description 9
- 239000007924 injection Substances 0.000 claims abstract description 9
- 239000000126 substance Substances 0.000 claims abstract description 8
- 230000007797 corrosion Effects 0.000 claims abstract description 6
- 238000005260 corrosion Methods 0.000 claims abstract description 6
- 239000000376 reactant Substances 0.000 claims description 61
- 239000007789 gas Substances 0.000 claims description 42
- 239000002994 raw material Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 239000000615 nonconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 2
- 229910004014 SiF4 Inorganic materials 0.000 claims 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 claims 1
- 238000001816 cooling Methods 0.000 abstract description 13
- 239000007795 chemical reaction product Substances 0.000 abstract description 10
- 230000015572 biosynthetic process Effects 0.000 abstract description 7
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 230000009916 joint effect Effects 0.000 abstract 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 239000011521 glass Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 239000000498 cooling water Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 229930195733 hydrocarbon Natural products 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 238000006722 reduction reaction Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000011882 ultra-fine particle Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910002110 ceramic alloy Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000295 fuel oil Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58126795A JPS6019034A (ja) | 1983-07-12 | 1983-07-12 | 複合プラズマを使用する化学反応方法及びその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58126795A JPS6019034A (ja) | 1983-07-12 | 1983-07-12 | 複合プラズマを使用する化学反応方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6019034A true JPS6019034A (ja) | 1985-01-31 |
| JPS6234416B2 JPS6234416B2 (enrdf_load_stackoverflow) | 1987-07-27 |
Family
ID=14944132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58126795A Granted JPS6019034A (ja) | 1983-07-12 | 1983-07-12 | 複合プラズマを使用する化学反応方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6019034A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56110176A (en) * | 1980-02-06 | 1981-09-01 | Canon Inc | Electronic apparatus |
| JPH06108221A (ja) * | 1990-05-29 | 1994-04-19 | Electroplasma Inc | 熱噴射式プラズマ装置 |
| US7905805B2 (en) | 2008-04-11 | 2011-03-15 | Shimano Inc. | Tension device of bicycle derailleur |
| CN102101669A (zh) * | 2011-04-07 | 2011-06-22 | 应盛荣 | 一种以四氟化硅为原料生产高纯碳化硅和氟化氢的方法 |
| WO2014002695A1 (ja) * | 2012-06-28 | 2014-01-03 | 日清エンジニアリング株式会社 | 炭化チタン微粒子の製造方法 |
-
1983
- 1983-07-12 JP JP58126795A patent/JPS6019034A/ja active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56110176A (en) * | 1980-02-06 | 1981-09-01 | Canon Inc | Electronic apparatus |
| JPH06108221A (ja) * | 1990-05-29 | 1994-04-19 | Electroplasma Inc | 熱噴射式プラズマ装置 |
| US7905805B2 (en) | 2008-04-11 | 2011-03-15 | Shimano Inc. | Tension device of bicycle derailleur |
| CN102101669A (zh) * | 2011-04-07 | 2011-06-22 | 应盛荣 | 一种以四氟化硅为原料生产高纯碳化硅和氟化氢的方法 |
| WO2014002695A1 (ja) * | 2012-06-28 | 2014-01-03 | 日清エンジニアリング株式会社 | 炭化チタン微粒子の製造方法 |
| JPWO2014002695A1 (ja) * | 2012-06-28 | 2016-05-30 | 日清エンジニアリング株式会社 | 炭化チタン微粒子の製造方法 |
| US9751769B2 (en) | 2012-06-28 | 2017-09-05 | Nisshin Engineering Inc. | Method for production of titanium carbide nanoparticles |
| KR20190132568A (ko) * | 2012-06-28 | 2019-11-27 | 닛신 엔지니어링 가부시키가이샤 | 탄화티탄 미립자의 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6234416B2 (enrdf_load_stackoverflow) | 1987-07-27 |
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