JPS60189317U - 廃ガスの吸着浄化装置における切替ダンパ−装置 - Google Patents

廃ガスの吸着浄化装置における切替ダンパ−装置

Info

Publication number
JPS60189317U
JPS60189317U JP7635084U JP7635084U JPS60189317U JP S60189317 U JPS60189317 U JP S60189317U JP 7635084 U JP7635084 U JP 7635084U JP 7635084 U JP7635084 U JP 7635084U JP S60189317 U JPS60189317 U JP S60189317U
Authority
JP
Japan
Prior art keywords
waste gas
adsorption purification
gas adsorption
switching damper
damper device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7635084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0233863Y2 (enrdf_load_stackoverflow
Inventor
木幡　輝雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyobo Co Ltd filed Critical Toyobo Co Ltd
Priority to JP7635084U priority Critical patent/JPS60189317U/ja
Publication of JPS60189317U publication Critical patent/JPS60189317U/ja
Application granted granted Critical
Publication of JPH0233863Y2 publication Critical patent/JPH0233863Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
  • Separation Of Gases By Adsorption (AREA)
JP7635084U 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置 Granted JPS60189317U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7635084U JPS60189317U (ja) 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7635084U JPS60189317U (ja) 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置

Publications (2)

Publication Number Publication Date
JPS60189317U true JPS60189317U (ja) 1985-12-14
JPH0233863Y2 JPH0233863Y2 (enrdf_load_stackoverflow) 1990-09-11

Family

ID=30618405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7635084U Granted JPS60189317U (ja) 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置

Country Status (1)

Country Link
JP (1) JPS60189317U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006132318A1 (ja) * 2005-06-10 2009-01-08 東京エレクトロン株式会社 弁体、バルブ、切替えバルブおよびトラップ装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310431U (enrdf_load_stackoverflow) * 1976-07-09 1978-01-28
JPS5382663A (en) * 1976-12-28 1978-07-21 Toyobo Co Ltd Combinated adsorption and desorption apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310431U (enrdf_load_stackoverflow) * 1976-07-09 1978-01-28
JPS5382663A (en) * 1976-12-28 1978-07-21 Toyobo Co Ltd Combinated adsorption and desorption apparatus

Also Published As

Publication number Publication date
JPH0233863Y2 (enrdf_load_stackoverflow) 1990-09-11

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