JPS60188620A - Fluid bearing - Google Patents

Fluid bearing

Info

Publication number
JPS60188620A
JPS60188620A JP4293684A JP4293684A JPS60188620A JP S60188620 A JPS60188620 A JP S60188620A JP 4293684 A JP4293684 A JP 4293684A JP 4293684 A JP4293684 A JP 4293684A JP S60188620 A JPS60188620 A JP S60188620A
Authority
JP
Japan
Prior art keywords
fluid
storage section
heating element
valve
fluid storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4293684A
Other languages
Japanese (ja)
Inventor
Kunihiko Morita
森田 邦彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Thompson Co Ltd
Original Assignee
Nippon Thompson Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Thompson Co Ltd filed Critical Nippon Thompson Co Ltd
Priority to JP4293684A priority Critical patent/JPS60188620A/en
Publication of JPS60188620A publication Critical patent/JPS60188620A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

PURPOSE:To form an economical fluid bearing with high performance by heating fluid in a fluid reservoir at the inside of a driven member constituted from a high heat resisting property material to float the driven member and a fixed member with heightened pressure. CONSTITUTION:An outer tube 1 of heat resisting material is formed on the inner peripheral surface with a peripheral groove to provide a fluid reservoir 1a for reserving fluid 2, and a heating unit 3 is attached to the inside of the outer tube 1 of the reservoir 1a. The fluid in the reservoir 1a is blocked from outflow to the outside by a flange 1b on the axial end of the outer tube 1. Since this fluid bearing is constituted to utilize the thermal expansion of air or liquid used, an economical and stable fluid bearing is formed by a simple construction.

Description

【発明の詳細な説明】 本発明は空気や液体を用いる流体軸受に関するものであ
る。最近、セラミック等の新材料を用いた新しいすべり
軸受や転がり軸受が提案されている。本発明はセラミッ
ク等の耐熱性材料を用いて安価で高性能な流体軸受を提
供することをその目的とする。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a hydrodynamic bearing using air or liquid. Recently, new sliding bearings and rolling bearings using new materials such as ceramics have been proposed. An object of the present invention is to provide an inexpensive and high-performance fluid bearing using a heat-resistant material such as ceramic.

本発明はセラミック等の耐熱性の高い材料を被移動部材
や固定部材として使用し、被移動部材の内面には流体保
留部が形成され、該流体保留部内の流体を加熱すること
により、流体保留部内の流体が高圧となり、この圧力に
よって被移動部材と固定部材とを浮遊させるようにした
構成からなる軸受である。
In the present invention, a highly heat-resistant material such as ceramic is used as a moving member and a fixed member, a fluid retention portion is formed on the inner surface of the moving member, and the fluid is retained by heating the fluid in the fluid retention portion. This bearing has a structure in which the fluid inside the bearing has a high pressure, and this pressure causes the moving member and the fixed member to float.

以下図面について本発明の2,3の例を説明する。第1
図は最も構造簡単な安価な例であって、外筒1にセラミ
ック等の耐熱材料を用い、外筒内周面に周溝を形成して
流体保留部1aとなして流体2を保留し、流体保留部1
aの外筒内面に接して発熱体3を装着する。発熱体3は
銅合金、セラミック製ヒータ等の熱伝導率が高く加熱し
やすい公知なものでよい。外筒1の軸方向端にはフラン
ジ部1bが形成され、この内面で流体保留部1a内での
流体の外部への流出を阻止する構造にするが、このシー
ル構造も各種公知技術を用いてもよい。軸受外部には軸
受内の発熱体3を加熱する加熱装置4が設置されており
、加熱装置4と発熱体3は電線等で接続されている。5
は軸である。
A few examples of the present invention will be explained below with reference to the drawings. 1st
The figure shows the simplest and cheapest example of the structure, in which the outer cylinder 1 is made of a heat-resistant material such as ceramic, and a circumferential groove is formed on the inner peripheral surface of the outer cylinder to form a fluid retention section 1a to retain the fluid 2. Fluid storage part 1
The heating element 3 is attached in contact with the inner surface of the outer cylinder of a. The heating element 3 may be a known heater that has high thermal conductivity and is easy to heat, such as a heater made of copper alloy or ceramic. A flange portion 1b is formed at the axial end of the outer cylinder 1, and the inner surface of the flange portion 1b is structured to prevent the fluid from flowing out to the outside within the fluid storage portion 1a.This sealing structure is also constructed using various known techniques. Good too. A heating device 4 that heats the heating element 3 inside the bearing is installed outside the bearing, and the heating device 4 and the heating element 3 are connected with an electric wire or the like. 5
is the axis.

図示してないが、流体保留部内の温度又は圧力を測定し
、この測定値により加熱装置の稼動を0N−OFFする
制御装置も必要に応じて設置することは可能である。尚
第1図(C)の様に鋼製の軸5に内筒1′を嵌合して軸
の高温化を防止することもでき、更に、軸自体をセラミ
ック等の耐熱性材料で製してもよい。
Although not shown, it is also possible to install a control device that measures the temperature or pressure inside the fluid storage section and turns the heating device ON/OFF based on the measured value, if necessary. As shown in Fig. 1(C), it is also possible to fit the inner cylinder 1' to the steel shaft 5 to prevent the shaft from becoming too hot.Furthermore, the shaft itself can be made of a heat-resistant material such as ceramic. It's okay.

第2図は第1図の改善例である。荷重が大きくなれば、
流体保留部内の流体の圧力を高くする必要があり、外筒
フランジ部1aから流体2が漏れやすくなる。流体が漏
れれば流体保留部1a内の圧力が低下してしまうので、
弁6を有する流入管を流体保留部1a内に貫通結合させ
、弁6を開いて流体を流入させ、その後押6を閉じて加
熱する。
FIG. 2 is an improved example of FIG. 1. If the load increases,
It is necessary to increase the pressure of the fluid in the fluid storage portion, and the fluid 2 tends to leak from the outer cylinder flange portion 1a. If the fluid leaks, the pressure inside the fluid storage section 1a will drop, so
An inflow pipe having a valve 6 is connected through the fluid storage part 1a, the valve 6 is opened to allow fluid to flow in, and the pusher 6 is closed to heat the fluid.

この断続的動作も前記のような制御装置に行なわせるこ
とも可能である。
It is also possible to have the above-mentioned control device perform this intermittent operation.

第3図は、平面上を直線運動する流体軸受に実施した例
であって、基本構造は第2図のものと同一である。これ
は耐熱材料をテーブル7とベッド8に用いたもので、テ
ーブル7の内面には流体保留部7aが複数列形成されて
おり、又外面には流体流入孔7bが複数個設けられてい
る。この例では、流体保留部が複数列形成されているの
で、例えば、上面の後列と前列の第1番目と第3番目の
流入孔7b+、7baの弁6を開き、流体を流体保留部
へ流入して弁を閉じ、一定時間後、第2番目と第4番目
の流入管から流体を流入させるように、二つ以上のグル
ープに分は各グループの負荷荷重のバランスを取るよう
にすれば、軸受としての負荷能力が安定するといった方
法が実施でき、円滑で運動精度のよい軸受となる。尚9
は台座部材で、取付ボルト10によりベッド8を固定し
ている。
FIG. 3 shows an example of a hydrodynamic bearing that moves linearly on a plane, and the basic structure is the same as that of FIG. 2. This uses heat-resistant materials for the table 7 and the bed 8, and the table 7 has a plurality of rows of fluid retaining portions 7a formed on its inner surface, and a plurality of fluid inlet holes 7b provided on its outer surface. In this example, since a plurality of rows of fluid retention sections are formed, for example, the valves 6 of the first and third inflow holes 7b+ and 7ba in the rear and front rows of the upper surface are opened to allow fluid to flow into the fluid retention sections. The valve is closed, and after a certain period of time, the fluid is allowed to flow in from the second and fourth inflow pipes, so that the load of each group is balanced between two or more groups. It is possible to implement a method that stabilizes the load capacity of the bearing, resulting in a bearing with smooth movement and high accuracy. Sho 9
is a pedestal member, which fixes the bed 8 with mounting bolts 10.

第4図は、第3図の変形例である。この例では発熱体3
が軸受外部に設置される。発熱体3と加熱装@4を有す
る高1〈高圧)タンク11内でタンク内の流体2が加熱
されて熱膨張し、高圧化する。高温(高圧)タンク11
は弁12を有する流入管により、一定圧タンク13と連
通され、更に一定圧タンク13は流入管を通じて耐熱材
製のテーブル7の内面に形成された流体保留部7aと連
通されている。流体保留部7a内の流体が徐々に軸受外
に流出し、一定圧タンク13の圧力が低下すると圧力調
整用の弁12が開き、高温(高圧)タンク11内の流体
が一定圧タンク13へ流入して、必要圧力まで圧力が増
加する。適当な圧力まで一定タンク13の圧力が増加す
ると弁12が閉じる。逆に高温(高圧)タンク11内の
圧力が低下するので、弁14を開き流体を補充し、弁1
4を閉じてから再び発艮体3を加熱して高温(高圧)タ
ンク11内の圧力を増加させる。
FIG. 4 is a modification of FIG. 3. In this example, heating element 3
is installed outside the bearing. In a high-pressure tank 11 having a heating element 3 and a heating device @4, the fluid 2 in the tank is heated, thermally expanded, and has a high pressure. High temperature (high pressure) tank 11
is communicated with a constant pressure tank 13 through an inflow pipe having a valve 12, and the constant pressure tank 13 is further communicated with a fluid retention portion 7a formed on the inner surface of the table 7 made of a heat-resistant material through the inflow pipe. When the fluid in the fluid storage part 7a gradually flows out of the bearing and the pressure in the constant pressure tank 13 decreases, the pressure adjustment valve 12 opens, and the fluid in the high temperature (high pressure) tank 11 flows into the constant pressure tank 13. The pressure increases to the required pressure. When the pressure in constant tank 13 increases to the appropriate pressure, valve 12 closes. Conversely, the pressure inside the high temperature (high pressure) tank 11 decreases, so the valve 14 is opened and fluid is replenished, and the valve 1
4 is closed, the sprout 3 is heated again to increase the pressure inside the high temperature (high pressure) tank 11.

以上の圧力調整用の動作を前記の様に自動制御する技術
は公知技術で十分可能となる。
The technology for automatically controlling the above-described pressure adjustment operation as described above is fully possible with known technology.

尚、これらの実施例は一例にすぎず、本発明は公知の各
種軸受構造に実施出来るものである。
It should be noted that these embodiments are merely examples, and the present invention can be implemented in various known bearing structures.

本発明は上述の如く空気や液体を使って、その熱膨張を
利用するだけで流体軸受を構成するものであるから、従
来の様な大型のコンプレッサーや、複雑な形状の軸受部
材を必要とせず、簡単な構造で安定した流体軸受を安価
に提供することができる。
As described above, the present invention constructs a fluid bearing simply by utilizing air or liquid and its thermal expansion, so there is no need for a large compressor or a bearing member with a complicated shape as in the past. , it is possible to provide a stable hydrodynamic bearing with a simple structure at low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(A)、(B)は本発明実施第1例を示す1部縦
断面図、横断面図であり、(C)はその変形例を示す1
部縦断面図である。第2図は実施第2例を示す1部縦断
面図、第3図(A)、(B)は実施第3例を示す断面図
、斜視図、第4図は第3図の変形例を示す断面図である
。 図中の符号はそれぞれ下記部材を示す。 1: 外筒 2: 流体 3: 発熱体 4: 加熱装置 5 : 軸 6 : 弁 7: テーブル 8: ベッド 9: 台座部材 10: 取付ボルト 11: 高温(高圧)タンク 12: 弁 13: 一定圧タンク 14:弁 特許出願人 日本トムソン 株式会社 矛 11!1 (A) 矛2 図 矛 3 図 (A) 矛4 図
FIGS. 1(A) and 1(B) are a partial vertical sectional view and a horizontal sectional view showing a first embodiment of the present invention, and FIG. 1(C) is a partial longitudinal sectional view and a horizontal sectional view showing a modification thereof
FIG. Fig. 2 is a partial longitudinal sectional view showing the second embodiment, Figs. 3 (A) and (B) are sectional views and perspective views showing the third embodiment, and Fig. 4 is a modification of Fig. 3. FIG. The symbols in the drawings indicate the following members, respectively. 1: Outer cylinder 2: Fluid 3: Heating element 4: Heating device 5: Shaft 6: Valve 7: Table 8: Bed 9: Pedestal member 10: Mounting bolt 11: High temperature (high pressure) tank 12: Valve 13: Constant pressure tank 14: Valent patent applicant Nippon Thomson Co., Ltd. 11!1 (A) Spear 2 Illustration 3 Figure (A) Spear 4 Figure

Claims (1)

【特許請求の範囲】 1、セラミック等の耐熱性の高い材料を被移動部材や固
定部材として使用し、被移動部材又は固定部材の内面に
は流体保留部が形成され、該流体保留部内の流体を加熱
することにより、流体保留部内の流体が高圧となり、こ
の圧力によって被移動部材と固定部材とを浮遊させるよ
うにしたことを特徴とする流体軸受。 2、軸と嵌合する外向の内周面に周溝を形成して流体保
留部となし、該流体保留部の外筒内面に接して発熱体を
装着すると共に該発熱体用の加熱装置を設けたことを特
徴とする特許請求の範囲第1項に記載の流体軸受。 3、軸と嵌合する外筒の内周面に周溝を形成して流体保
留部となし、該流体保留部の外筒内面に接して発熱体を
装着すると共に該発熱体用の加熱装置を設け、更に前記
流体保留部と連通ずる弁付きの流入管を設けた・ことを
特徴とする特許請求の範囲第1項に記載の流体軸受。 4、ベッドと嵌合するテーブルの内周面に溝を形成して
流体保留部となし、該流体保留部のテーブル内面に接し
て発熱体を装着すると共に該発熱体用の加熱装置及び前
記流体保留部と連通する弁付きの流入管を設けたことを
特徴とする特許請求の範囲第1項に記載の流体軸受。 5、ベッドと嵌合するテーブルの内周面に溝を形成して
流体保留部となし、該流体保留部と流入管を介して連通
する一定圧タンクと更に該一定圧タンクに圧力調整用の
弁付きの流入管を介して連通する高温(高圧)タンクを
設け、該高温(高圧)タンクに発熱体及びその加熱装置
を設けたことを特徴とする特許請求の範囲第1項に記載
の流体軸受。 6゜前記圧力調整用の弁付きの流入管に於ける弁を開い
て流体保留部に流体を導入したのち咳弁を閉じ、その後
前記加熱装置を作動させるように操作するようになし、
該操作を行なう手動又は自動の制御装置を設けたことを
特徴とする特許請求の範囲第1項、第3項、第4項及び
第5項に記載の流体軸受。
[Claims] 1. A highly heat-resistant material such as ceramic is used as the moving member or the fixed member, and a fluid retention portion is formed on the inner surface of the moving member or the fixed member, and the fluid in the fluid retention portion is 1. A fluid bearing, characterized in that by heating the fluid, the fluid in the fluid storage section becomes high pressure, and this pressure causes the moving member and the fixed member to float. 2. A circumferential groove is formed on the outward inner circumferential surface that fits with the shaft to form a fluid storage section, and a heating element is attached in contact with the inner surface of the outer cylinder of the fluid storage section, and a heating device for the heating element is installed. A hydrodynamic bearing according to claim 1, characterized in that a hydrodynamic bearing is provided. 3. Forming a circumferential groove on the inner circumferential surface of the outer cylinder that fits with the shaft to form a fluid retention part, mounting a heating element in contact with the inner surface of the outer cylinder of the fluid retention part, and a heating device for the heating element. 2. The fluid bearing according to claim 1, further comprising: an inflow pipe with a valve that communicates with the fluid storage section. 4. A groove is formed on the inner circumferential surface of the table that fits with the bed to form a fluid storage section, and a heating element is mounted in contact with the inner surface of the table of the fluid storage section, and a heating device for the heating element and the fluid are installed. The fluid bearing according to claim 1, further comprising an inflow pipe with a valve that communicates with the storage section. 5. A groove is formed on the inner circumferential surface of the table that fits into the bed to form a fluid storage section, and a constant pressure tank is connected to the fluid storage section via an inflow pipe, and a pressure adjustment tank is further provided in the constant pressure tank. The fluid according to claim 1, characterized in that a high temperature (high pressure) tank is provided which communicates through an inflow pipe with a valve, and the high temperature (high pressure) tank is provided with a heating element and a heating device for the same. bearing. 6. After opening the valve in the inflow pipe equipped with a pressure adjustment valve to introduce fluid into the fluid storage section, the cough valve is closed, and then the heating device is operated;
The hydrodynamic bearing according to claims 1, 3, 4, and 5, characterized in that a manual or automatic control device for performing the operation is provided.
JP4293684A 1984-03-08 1984-03-08 Fluid bearing Pending JPS60188620A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4293684A JPS60188620A (en) 1984-03-08 1984-03-08 Fluid bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4293684A JPS60188620A (en) 1984-03-08 1984-03-08 Fluid bearing

Publications (1)

Publication Number Publication Date
JPS60188620A true JPS60188620A (en) 1985-09-26

Family

ID=12649897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4293684A Pending JPS60188620A (en) 1984-03-08 1984-03-08 Fluid bearing

Country Status (1)

Country Link
JP (1) JPS60188620A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2606473A1 (en) * 1986-11-07 1988-05-13 Vibrachoc Sa Sliding support allowing the applied load to be lightened
FR2626633A1 (en) * 1988-02-03 1989-08-04 Coutret Jean Francois Device making it possible to hang moving equipment under a fixed pane
KR100730595B1 (en) 2005-03-09 2007-06-20 정우섭 air bearing and apparatus for maintaining gap thereof
CN111996578A (en) * 2019-05-27 2020-11-27 株式会社荏原制作所 Wet substrate processing apparatus and automatic grease supply system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723420B2 (en) * 1975-02-10 1982-05-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723420B2 (en) * 1975-02-10 1982-05-18

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2606473A1 (en) * 1986-11-07 1988-05-13 Vibrachoc Sa Sliding support allowing the applied load to be lightened
FR2626633A1 (en) * 1988-02-03 1989-08-04 Coutret Jean Francois Device making it possible to hang moving equipment under a fixed pane
KR100730595B1 (en) 2005-03-09 2007-06-20 정우섭 air bearing and apparatus for maintaining gap thereof
CN111996578A (en) * 2019-05-27 2020-11-27 株式会社荏原制作所 Wet substrate processing apparatus and automatic grease supply system
JP2020193358A (en) * 2019-05-27 2020-12-03 株式会社荏原製作所 Wet type substrate treatment device
CN111996578B (en) * 2019-05-27 2024-04-26 株式会社荏原制作所 Wet substrate processing apparatus and automatic grease supply system

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