JPS60187839A - 漏洩検出装置 - Google Patents

漏洩検出装置

Info

Publication number
JPS60187839A
JPS60187839A JP4294684A JP4294684A JPS60187839A JP S60187839 A JPS60187839 A JP S60187839A JP 4294684 A JP4294684 A JP 4294684A JP 4294684 A JP4294684 A JP 4294684A JP S60187839 A JPS60187839 A JP S60187839A
Authority
JP
Japan
Prior art keywords
container
outflow pipe
differential pressure
leakage
back pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4294684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH024847B2 (en:Method
Inventor
Takashi Kato
敬 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JGC Corp
Original Assignee
JGC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JGC Corp filed Critical JGC Corp
Priority to JP4294684A priority Critical patent/JPS60187839A/ja
Publication of JPS60187839A publication Critical patent/JPS60187839A/ja
Publication of JPH024847B2 publication Critical patent/JPH024847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
JP4294684A 1984-03-08 1984-03-08 漏洩検出装置 Granted JPS60187839A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4294684A JPS60187839A (ja) 1984-03-08 1984-03-08 漏洩検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4294684A JPS60187839A (ja) 1984-03-08 1984-03-08 漏洩検出装置

Publications (2)

Publication Number Publication Date
JPS60187839A true JPS60187839A (ja) 1985-09-25
JPH024847B2 JPH024847B2 (en:Method) 1990-01-30

Family

ID=12650175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4294684A Granted JPS60187839A (ja) 1984-03-08 1984-03-08 漏洩検出装置

Country Status (1)

Country Link
JP (1) JPS60187839A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7416998B2 (en) 2002-12-03 2008-08-26 Kondoh Industries, Ltd. Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system
CN112504573A (zh) * 2021-01-11 2021-03-16 石家庄中琛硅宇贸易有限公司 一种袋装液体密封性检测装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7416998B2 (en) 2002-12-03 2008-08-26 Kondoh Industries, Ltd. Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system
CN112504573A (zh) * 2021-01-11 2021-03-16 石家庄中琛硅宇贸易有限公司 一种袋装液体密封性检测装置

Also Published As

Publication number Publication date
JPH024847B2 (en:Method) 1990-01-30

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