JPS60187839A - 漏洩検出装置 - Google Patents
漏洩検出装置Info
- Publication number
- JPS60187839A JPS60187839A JP4294684A JP4294684A JPS60187839A JP S60187839 A JPS60187839 A JP S60187839A JP 4294684 A JP4294684 A JP 4294684A JP 4294684 A JP4294684 A JP 4294684A JP S60187839 A JPS60187839 A JP S60187839A
- Authority
- JP
- Japan
- Prior art keywords
- container
- outflow pipe
- differential pressure
- leakage
- back pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4294684A JPS60187839A (ja) | 1984-03-08 | 1984-03-08 | 漏洩検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4294684A JPS60187839A (ja) | 1984-03-08 | 1984-03-08 | 漏洩検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60187839A true JPS60187839A (ja) | 1985-09-25 |
JPH024847B2 JPH024847B2 (enrdf_load_stackoverflow) | 1990-01-30 |
Family
ID=12650175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4294684A Granted JPS60187839A (ja) | 1984-03-08 | 1984-03-08 | 漏洩検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60187839A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7416998B2 (en) | 2002-12-03 | 2008-08-26 | Kondoh Industries, Ltd. | Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system |
CN112504573A (zh) * | 2021-01-11 | 2021-03-16 | 石家庄中琛硅宇贸易有限公司 | 一种袋装液体密封性检测装置 |
-
1984
- 1984-03-08 JP JP4294684A patent/JPS60187839A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7416998B2 (en) | 2002-12-03 | 2008-08-26 | Kondoh Industries, Ltd. | Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system |
CN112504573A (zh) * | 2021-01-11 | 2021-03-16 | 石家庄中琛硅宇贸易有限公司 | 一种袋装液体密封性检测装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH024847B2 (enrdf_load_stackoverflow) | 1990-01-30 |
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