JPS60187799A - Piezoelectric fan - Google Patents

Piezoelectric fan

Info

Publication number
JPS60187799A
JPS60187799A JP4142984A JP4142984A JPS60187799A JP S60187799 A JPS60187799 A JP S60187799A JP 4142984 A JP4142984 A JP 4142984A JP 4142984 A JP4142984 A JP 4142984A JP S60187799 A JPS60187799 A JP S60187799A
Authority
JP
Japan
Prior art keywords
plate
diaphragm
piezoelectric
extension
fan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4142984A
Other languages
Japanese (ja)
Inventor
Muneo Yorinaga
宗男 頼永
Seiji Kawaguchi
清司 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP4142984A priority Critical patent/JPS60187799A/en
Publication of JPS60187799A publication Critical patent/JPS60187799A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

PURPOSE:To permit to reduce noise without reducing the flow amount of air of the fan by a method wherein a reinforcing plate is provided on the extension of a vibration plate to provide the vibration plate with an inertia mass, reduce the resonance frequency of the plate and increase the amplitude of the plate. CONSTITUTION:When A.C. signal is impressed inbetween a lead wire 5 and supporting plates 3, 4, an piezoelectric element 1 is polarized into the direction shown by the notations 1b and bending vibration is caused in the piezoelectric element 1. In case the A.C. signal is set properly, a composite body of the extension 2a of vibration plate 2 and the reinforcing plate 2b therefor is vibrated forcibly and a large amplitude is obtained whereby the flow of air is excited. In this piezoelectric fan, the vibration of high-frequency is reduced by the reinforcing plate 2b and noise is reduced. The reinforcing plate 2b, provided on the extension 2a of the vibration plate 2, effects as the inertia mass, therefore, sound pressure is reduced due to the reduction of resonance frequency and the noise of the fan may be reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、圧電ファンに関し、特に電子機器の冷月1な
らびに空気その他の気体の黴最導入などに用いられる圧
電ファンに関りる。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric fan, and more particularly to a piezoelectric fan used for cold months 1 of electronic equipment and for introducing air or other gases into mold.

〔従来技術〕[Prior art]

電動り−9回転式ファンの代りに、最近では、電子機器
などのエアベンチレージコン用としで、圧電ファンが用
いられるようになつCいる。
Recently, piezoelectric fans have come to be used in place of electric nine-rotation fans for air ventilators of electronic devices and the like.

圧電ファンは、第1図および第2図に図示のごとく、電
極1aをそれぞれ両面に凝りだ一対の圧電素子1の間の
振動板2を、王の先端が圧電素子1の一端より延長して
突出するように挟持され、かつ圧電素子1の他端を支持
板3.4で保持して構成したものであり、電4@la間
に交流信号を印加することにより、振動板2が振動し、
凪を起づ−ようになっている。)−ビ市素子1の一端か
ら振動板を突出さけ延長部2aが形成せられているので
、これにより送風能力が高められている。
As shown in FIGS. 1 and 2, the piezoelectric fan has electrodes 1a on both sides, and a diaphragm 2 between a pair of piezoelectric elements 1, the tip of which extends from one end of the piezoelectric elements 1. The piezoelectric element 1 is sandwiched so as to protrude, and the other end of the piezoelectric element 1 is held by a support plate 3.4.By applying an AC signal between the electrodes 4@la, the diaphragm 2 vibrates. ,
It's starting to feel like a lull. ) - Since the extension part 2a is formed by protruding the diaphragm from one end of the vibration plate element 1, the air blowing capacity is enhanced.

以上の従来の圧電ファンにおいては、振動板2は、その
基本周波数の振動の他に、かなり高い周波数の振動をも
含んで動作するため、騒音の問題が生じている。さらに
+!i1mを高めるために、振動板2の19さを厚くり
ると振動板の共振動周波数が昌くなりかつ音圧も高くな
る。これにより騒音が^められることになる。通常圧電
ファンの動作周波数は、数+1−12から数百)4Zの
範囲であり、この範囲Cは、周波数が^い稈人間の聴感
感度が高くなるので、以上のごとく振動板2のI”lさ
を厚くして、IIIfFl、を多く】ることは好ましく
ない。
In the conventional piezoelectric fan described above, the diaphragm 2 operates with not only vibrations at its fundamental frequency but also vibrations at a considerably high frequency, resulting in a noise problem. Even more +! In order to increase i1m, if the thickness of the diaphragm 2 is increased, the resonant frequency of the diaphragm increases and the sound pressure also increases. This will reduce noise. Normally, the operating frequency of a piezoelectric fan is in the range from several +1-12 to several hundred) 4Z, and in this range C, the frequency is low and the audible sensitivity of humans is high, so the I'' of the diaphragm 2 is It is not preferable to thicken the thickness and increase IIIfFl.

〔発明の目的〕[Purpose of the invention]

本弁明は、上記欠点を解消するものであり、比較的多量
のff1lを発生するにもかかわらず、高周波振動を低
減さけた圧電ファンを提供覆ることである。
The present defense solves the above-mentioned drawbacks by providing a piezoelectric fan that avoids reducing high-frequency vibrations even though it generates a relatively large amount of ff1l.

1なわち本発明によれば、両面に電極を設【ノた一対の
板状圧電素子と、これら圧電素子間に挟持された振動板
と、この一対の板状圧電素子を一端で保持層る保持装置
と、上記一対の板状圧電素子の他端から外方に延在Jる
ように上記振動板を設【ノた延長部と、上記一対の板状
圧電素子の電極に交流信号を印加し、これら圧電素子を
振動させる駆動装置とをイ4りる圧電ファンにおいて、
上述延長部分に慣性質量を設iプCなる圧電ファンが提
供される。
1. That is, according to the present invention, a pair of plate-shaped piezoelectric elements having electrodes on both sides, a diaphragm sandwiched between these piezoelectric elements, and a holding layer at one end of the pair of plate-shaped piezoelectric elements are provided. The diaphragm is provided so as to extend outward from the holding device and the other end of the pair of plate-shaped piezoelectric elements, and an alternating current signal is applied to the extension part and the electrodes of the pair of plate-shaped piezoelectric elements. In a piezoelectric fan that includes a drive device that vibrates these piezoelectric elements,
A piezoelectric fan C is provided in which an inertial mass is provided in the above-mentioned extension portion.

具体的には、例えば上記ill性質tJ1は、」ニ記延
艮部分の一部の厚さを厚くすることで得られる。このよ
うに撮動板の延■4部に慣11質IIを与えることによ
り、共振周波数が低くでき、しかし−(振幅は増大りる
ので、Ill ffi自体は大きく減少りることなく騒
音を低減させることができる。
Specifically, for example, the above-mentioned ill property tJ1 can be obtained by increasing the thickness of a portion of the extension portion. In this way, by giving the 11th quality II to the 4th part of the imaging plate, the resonant frequency can be lowered, but -(the amplitude increases, so the noise can be reduced without significantly decreasing the Ill ffi itself. can be done.

〔実施例〕〔Example〕

本発明を以下に実施例の形で、第3図から第11図を参
照して、詳細に説明づる。
The invention will be explained in more detail below in the form of an example and with reference to FIGS. 3 to 11. FIG.

まず第3図から第5図を参照しで、本弁明の第1実施例
を説明りる3゜ 参照番号1で承り、例えばジルコン酸ヂタン酸鉛(P 
Z T )磁器製の)圧電素子の両面には、印刷、メッ
キ蒸着などの手段にて、A!1.Ni、へ1等の導電金
属製の諌股状電4!!!1 aが6色されCいる。
First of all, referring to FIGS. 3 to 5, the first embodiment of the present invention will be described.
Z T ) Both sides of the piezoelectric element (made of porcelain) are printed with A! 1. A cross-shaped electric conductor made of conductive metal such as Ni or 1st class 4! ! ! 1 A has 6 colors and C.

以上の圧電素子1を一対として、その間に振動板2を挟
持さけて、接着剤を用いて一体に結゛合してファン部材
を構成づ−る。振動板2は一対の圧電素子1の一端から
突出し、延長部2aが形成ぼられている。この延長部2
aの先端部にその両面に補強板2])が接着剤で接合さ
れ−(゛いる。補強板2bの材料はコバール、A1Cl
3等の金属祠11の他にボリエチレン゛テレフタラ−1
・等の樹脂月利製としても良い。
A fan member is constructed by combining the piezoelectric elements 1 described above as a pair, with the diaphragm 2 sandwiched between them, and joining them together using an adhesive. The diaphragm 2 protrudes from one end of the pair of piezoelectric elements 1, and has an extension 2a formed therein. This extension 2
A reinforcing plate 2]) is attached to the tip of a on both sides with adhesive.The material of the reinforcing plate 2b is Kovar, A1Cl.
In addition to the 3rd grade metal shrine 11, polyethylene terephthalate 1
It may also be made of resin such as ・.

上記ファン部材は、延長部分2aど反対側の端部に63
いて金属製支持板3.4で挟持し、ネジ6で締めつり(
クースフに固定りる。支持板3,4は、端子を兼用して
おり、各圧電素子1の外側電極1a+、:電気的に接続
されている。ざらに撮動板2は、各圧電素子1の内側電
極1aに電気的に接続されており、かつ振動板2の後端
部づなわち延長部2aと反対側の端部にリード線5がハ
ンダ等で接合されCいる。
The fan member has a 63.degree.
Hold it between the metal support plates 3.4 and tighten it with the screws 6 (
Fixed to Kusuf. The support plates 3 and 4 also serve as terminals, and are electrically connected to the outer electrodes 1a+, 1a+ of each piezoelectric element 1. Roughly speaking, the imaging plate 2 is electrically connected to the inner electrode 1a of each piezoelectric element 1, and has a lead wire 5 at the rear end of the diaphragm 2, that is, at the end opposite to the extension part 2a. It is joined with solder etc.

これら支持板3.4とリード線5とは駆動装置(図示U
ず)に電気的に接続されている。
These support plates 3.4 and lead wires 5 are connected to a drive device (U shown in the figure).
electrically connected to

以上の構成の第1実施例の作動を説明する。駆動装置よ
りリードmsと支持板3.4の間に交流信号を印加りる
と、+i−電累子1は、突印11)の方向に分極されて
、圧電素子1が屈曲振動りる。交流信号を適当に設定し
て振動板2の延長部2aとその補強板2bとの構成体が
強振して、大きな振幅が1qられる。このlNi勅にに
つ−〔空気の流が励起される。
The operation of the first embodiment having the above configuration will be explained. When an alternating current signal is applied between the lead ms and the support plate 3.4 from the drive device, the +i-electron 1 is polarized in the direction of the protrusion 11), causing the piezoelectric element 1 to bend and vibrate. By setting the alternating current signal appropriately, the structure consisting of the extension 2a of the diaphragm 2 and its reinforcing plate 2b vibrates strongly, and a large amplitude 1q is obtained. Due to this impulse, a flow of air is excited.

第6図に圧電ファンの振動周波数と騒音との関係を示す
。太線(・承り曲線(B)は、本実施例の圧電ファンの
特性を示し、細線C示り曲線(Δ)は、従来の圧電ファ
ンの特性を示り一7土図J:す、従来の1」−電フアン
にd3いては、基本周波数の振動による騒音の曲に、高
周波数の振動にJ、る騒音が顕@ぐある。これにスJ 
t、 T 、本弁明の圧電ファンでは、補強2bにより
畠周波の振動が減少し騒音が低下している。又振動板2
の延長部2aに補強板2bを設けTあるため、これが慣
性質量となり、共振周波数が低下し、名1i−が低下す
る。この低下した共振周波数は、人間の聴感感劇の低い
領域となり、かつ音圧も低下しているのでjii音を低
減させることができる。
FIG. 6 shows the relationship between the vibration frequency and noise of the piezoelectric fan. The thick line (B) shows the characteristics of the piezoelectric fan of this example, and the thin line C (Δ) shows the characteristics of the conventional piezoelectric fan. 1" - When playing an electric fan, there is a song that makes noise due to vibrations at the fundamental frequency, and the noise due to high frequency vibrations is noticeable.
t, T In the piezoelectric fan of the present invention, the reinforcement 2b reduces the vibration of the field frequency and reduces the noise. Also, diaphragm 2
Since the reinforcing plate 2b is provided on the extension part 2a of T, this serves as an inertial mass, which lowers the resonance frequency and lowers the frequency. This lowered resonant frequency is in a lower range of human auditory sensitivity, and the sound pressure is also lowered, so it is possible to reduce the noise.

補強板21)を設りたことにより周波数が低下づるもの
の、振幅が増入りるので、風量が?’rしく低下するこ
とはない。
Although the frequency decreases by installing the reinforcing plate 21), the amplitude increases and the air volume increases. It won't drop significantly.

実験 発明者等は、以下の実験をt+なって、本発明の圧電フ
ァンにつぎ評価した。
Experiment The inventors conducted the following experiment to evaluate the piezoelectric fan of the present invention.

第5図に示づ圧電ファンを溝成し、すなわら全長27.
5mm、幅22111m、板厚0.2mmのPZT製汁
電素子1の間に、全長55.0mm、幅221T1m、
板厚0.1mmのコバール製振動板2を、圧電素子1か
522.5mm突出しで延長部2aが構成されるように
挟持し、延長部2aの先端部に、長さ12mI!1.幅
22mmのポリエチレンテレフタクー1〜製補強板21
)をはり合せて構成した。
The piezoelectric fan shown in FIG. 5 is formed into a groove, that is, the total length is 27.
Between the PZT soup making electronic elements 1 with a length of 5 mm, a width of 22111 m, and a plate thickness of 0.2 mm, a total length of 55.0 mm, a width of 221 T1 m,
A Kovar diaphragm 2 with a plate thickness of 0.1 mm is held so that the piezoelectric element 1 protrudes by 522.5 mm to form an extension 2a, and a length of 12 mI is attached to the tip of the extension 2a! 1. Reinforcement plate 21 made of polyethylene teleftaku 1~ with a width of 22 mm
) was constructed by gluing them together.

以上の構成に83いて、補強板2bの厚さを変えて、圧
電ファンの騒音およびriutiの変化について検討し
た。その結果を第7図および第8図に示づ。
Using the above configuration, changes in the noise and riuti of the piezoelectric fan were examined by changing the thickness of the reinforcing plate 2b. The results are shown in FIGS. 7 and 8.

なJ3、圧電ファンの前方iQcmの所において、騒音
の測定を行つCいる。
J3, the noise is measured at a location iQcm in front of the piezoelectric fan.

第7図に、補強板2bの板厚と騒音の関係および第8図
に補強板2bの板厚と風量の(ν1係を示している。
FIG. 7 shows the relationship between the thickness of the reinforcing plate 2b and noise, and FIG. 8 shows the relationship between the thickness of the reinforcing plate 2b and the air volume (v1).

第7図より騒音は、補強板21)をI!jf < する
に従つ°C低下していることがl!l! iffされる
From FIG. 7, the noise is reduced by reinforcing plate 21). The temperature decreases as jf < l! l! iffed.

補強板2時を11ノく4るにつれてI!i、l司はイ1
(下するが、著しい11(下はなく、わずかな低下であ
る。
As you cross the reinforcing plate 2 o'clock by 11 times, I! i, lji is i1
(It's down, but it's not a significant 11 (down), it's a slight drop.

第7図および第8図は、補強板2bの取付c〕位置につ
いては、振動板の延長部2aの先端とづるのが最適Cあ
るが、延長部2aのいり゛れの位1Nとしても効果があ
るものである。
FIGS. 7 and 8 show that the optimal mounting position of the reinforcing plate 2b is to attach it to the tip of the extension 2a of the diaphragm, but it is also effective to install the extension 2a at a position of 1N. There is.

第9図は、本発明の第2実施例を示りbのであり、第1
実施例においでは、振動板2と振動板延長部2aとは、
一体なものとしlこが、本実施例においては、別体とな
し、延長部2aを圧1を素子1の先端に嵌め込んだもの
である。この延長部2aの材質は、金属・樹脂等とりる
と良い。
FIG. 9 shows a second embodiment of the present invention.
In the embodiment, the diaphragm 2 and the diaphragm extension 2a are:
Although it is assumed to be an integral part, in this embodiment, it is made as a separate part, and the extension part 2a is fitted into the tip of the element 1 with a pressure 1. The material of this extension part 2a is preferably metal, resin, etc.

第10図は木工し明の第3実施例を示リムので、振動板
2と振動板延長部2aは樹脂製一体形となし、振動板2
を電仲板IC間に挟持し一ζ、圧電素子1間に組込lυ
だものであり、この電極板ICと電極1aとを礎通りる
J:うにしIこものである。
FIG. 10 shows a third embodiment of the woodworking rim, so the diaphragm 2 and the diaphragm extension 2a are integrally made of resin, and the diaphragm 2
sandwiched between the electric board ICs, and inserted between the piezoelectric elements lυ
This is a J: sea urchin that passes through this electrode plate IC and the electrode 1a.

第11図は、本発明の第4実施例を示1もので、振動板
2と、振動板延長部2aが一体℃゛あるとともに、延長
部2aを設()た補強板2bも一体とじノζものである
。このような構成の振動板は、成形切削加工等e容劾に
製造することがCきる。
FIG. 11 shows a fourth embodiment of the present invention, in which the diaphragm 2 and the diaphragm extension 2a are integrated, and the reinforcing plate 2b provided with the extension 2a is also integrally bound. It is a ζ thing. A diaphragm having such a structure can be manufactured by molding, cutting, etc.

本発明を実施例の形で説明したが、本発明は、上記実施
例に限定されず、特許請求の範囲の項に記載される範囲
内で゛様々に変更可能である。
Although the present invention has been described in the form of embodiments, the present invention is not limited to the above-mentioned embodiments, and can be modified in various ways within the scope of the claims.

〔発明の効果〕〔Effect of the invention〕

従来の圧電ファンは、高周波数の不快な騒音を発生Jる
ものであったが、本発明の構成により高周数騒音がほと
んど除去され、しかしてffl量のほとんど無音の圧電
ファンを提供りることが可能となる。
Conventional piezoelectric fans generate unpleasant high-frequency noise, but the configuration of the present invention eliminates most of the high-frequency noise, thereby providing an almost silent piezoelectric fan with an FFL amount. becomes possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、従来の圧電ノ)7ンの透視図を示1図。 第2図は、第1図の圧電ファンの上面図を示1図。 第3図は、本発明の第1実施例である圧電ファンの透視
図を承り図。 f34図は、第3図の1]]電ツノ′ンの−に面図を示
1図。 第5図(;1、第3図の圧電−ノアンを組込/Llだ1
を宙ファン組立体の上面図を示1図。 第6図は、j1電ファンの1411を示リグラフ。 第7図および第8図は、第3図の圧電ファンについ(の
実験′F!1宋をj1ζり図、。 第9図から第11図は、本発明の第2、第3、第4実施
例を上面図で示りIMI 。 1・・・圧電素子、la、lc・・・電極、2・・・振
動板、2a・・・振動根延1! 74!(,2b・・・
補強板、3.4・・・支持様、5・・・リート線、6・
・・ネジ、7・・・ケース。 代Jjp人 浅 41 皓 第1図 児2図 児3閃 筒 a 数IHz) 鷺9図 乙 馬10図
FIG. 1 shows a perspective view of a conventional piezoelectric device. FIG. 2 is a top view of the piezoelectric fan of FIG. 1; FIG. 3 is a perspective view of a piezoelectric fan according to a first embodiment of the present invention. Figure f34 shows the side view at 1]] of Figure 3. Figure 5 (; 1, Incorporating the piezoelectric noise shown in Figure 3/Ll 1
Figure 1 shows a top view of the air fan assembly. FIG. 6 is a graph showing 1411 of the J1 electric fan. 7 and 8 are diagrams of the piezoelectric fan of FIG. An example is shown in a top view. IMI. 1...Piezoelectric element, la, lc...electrode, 2...diaphragm, 2a...vibration base 1!74!(,2b...
Reinforcement plate, 3.4... Support, 5... Riet wire, 6.
...screw, 7...case. Dai Jjp person Asahi 41 Ko 1 figure 2 figure 3 flash cylinder a number IHz) Heron 9 figure Otouma 10 figure

Claims (1)

【特許請求の範囲】 (1) 両面ど電極(1a)を設(プた一対の板状圧電
素子(1)と、該一対の板状圧電素子(1)の間に挟持
された振動板(2)と、該一対の板状圧電素子(1)を
その一端で保持する保持装置(3,4)と、該一対の板
状圧電素子(1)の他端から外方に延在する前記振動板
(2)の延長部(2a)と、該一対の板状圧電素子(1
)の電極(1a)に交流信号を印加し、該圧電素子(1
)を振動させる駆動装置とを有りる圧電ファンにおいて
、 前記延長部分(2a)に慣性質m(2ti>を設けたこ
とを特徴とする圧電ファン。 (2、特許請求の範囲の第1項に記載の圧電ファンにお
いて、前記慣性質!(2b)は、振動板(2)の延長部
(2a〉の一部の厚みを増大させたことを特徴とする圧
電ファン。 (3) 特許請求の範囲の第2項に記載の圧電ファンに
おいて、前記振動板〈2)と前記振動板延長部(2a)
は、別体とされ、前記一対の圧電素子(1)の先端に該
振動板延長部(2a)が勘合されていることを特徴とす
る圧電ファン。 (4) 特許請求の範囲の第2項あるいは第3項のいず
れか一項に記載の圧電ファンにおいて、前記振動板延長
部(2a)の先端に補強板(2b )を接合して前記厚
さを増大させていることを特徴とする圧電ファン。 (5) 特許請求の範囲の第4項に記載の圧電ファンに
おいて、前記振動板(2)は、合成樹脂板であり、該合
成樹脂板の両面に電極を設けたことを特徴どする圧電フ
ァン。 (6) 特許請求の範囲の第4項および第5項に記載の
圧電ファンにおいて、前記補強板(2b)と前記振動板
延長部(2a〉とは一体的に成形したことを特徴とする
圧電ファン。
[Scope of Claims] (1) A pair of plate-shaped piezoelectric elements (1) provided with electrodes (1a) on both sides, and a diaphragm (1) sandwiched between the pair of plate-shaped piezoelectric elements (1). 2), a holding device (3, 4) that holds the pair of plate-shaped piezoelectric elements (1) at one end thereof, and a holding device (3, 4) that holds the pair of plate-shaped piezoelectric elements (1) at one end; The extension part (2a) of the diaphragm (2) and the pair of plate-shaped piezoelectric elements (1)
), an AC signal is applied to the electrode (1a) of the piezoelectric element (1
), the piezoelectric fan is characterized in that the extension portion (2a) is provided with an inertial mass m (2ti>). In the piezoelectric fan described above, the inertial property (2b) is characterized in that the thickness of a part of the extension (2a) of the diaphragm (2) is increased. (3) Claims In the piezoelectric fan according to item 2, the diaphragm (2) and the diaphragm extension (2a)
A piezoelectric fan, characterized in that the diaphragm extension portion (2a) is a separate piece, and the diaphragm extension portion (2a) is fitted to the tips of the pair of piezoelectric elements (1). (4) In the piezoelectric fan according to any one of claims 2 or 3, a reinforcing plate (2b) is bonded to the tip of the diaphragm extension (2a) to increase the thickness. A piezoelectric fan characterized by increasing. (5) The piezoelectric fan according to claim 4, wherein the diaphragm (2) is a synthetic resin plate, and electrodes are provided on both sides of the synthetic resin plate. . (6) In the piezoelectric fan according to claims 4 and 5, the reinforcing plate (2b) and the diaphragm extension part (2a) are integrally molded. fan.
JP4142984A 1984-03-06 1984-03-06 Piezoelectric fan Pending JPS60187799A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4142984A JPS60187799A (en) 1984-03-06 1984-03-06 Piezoelectric fan

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4142984A JPS60187799A (en) 1984-03-06 1984-03-06 Piezoelectric fan

Publications (1)

Publication Number Publication Date
JPS60187799A true JPS60187799A (en) 1985-09-25

Family

ID=12608120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4142984A Pending JPS60187799A (en) 1984-03-06 1984-03-06 Piezoelectric fan

Country Status (1)

Country Link
JP (1) JPS60187799A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5008582A (en) * 1988-01-29 1991-04-16 Kabushiki Kaisha Toshiba Electronic device having a cooling element
WO2009034956A1 (en) * 2007-09-14 2009-03-19 Murata Manufacturing Co., Ltd. Cooling apparatus
CN101978171A (en) * 2008-03-21 2011-02-16 株式会社村田制作所 Piezoelectric fan and cooling device using piezoelectric fan
EP2844144A4 (en) * 2012-05-01 2015-05-06 Univ Dalhousie Piezoelectric beam bending actuated device for measuring respiratory system impedance

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54164008A (en) * 1977-05-26 1979-12-27 Rca Corp Fan employing high polymer piezobimorph element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54164008A (en) * 1977-05-26 1979-12-27 Rca Corp Fan employing high polymer piezobimorph element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5008582A (en) * 1988-01-29 1991-04-16 Kabushiki Kaisha Toshiba Electronic device having a cooling element
WO2009034956A1 (en) * 2007-09-14 2009-03-19 Murata Manufacturing Co., Ltd. Cooling apparatus
CN102543915A (en) * 2007-09-14 2012-07-04 株式会社村田制作所 Cooling device
JP5083322B2 (en) * 2007-09-14 2012-11-28 株式会社村田製作所 Cooling system
CN101978171A (en) * 2008-03-21 2011-02-16 株式会社村田制作所 Piezoelectric fan and cooling device using piezoelectric fan
EP2844144A4 (en) * 2012-05-01 2015-05-06 Univ Dalhousie Piezoelectric beam bending actuated device for measuring respiratory system impedance

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