JPS60185074U - 真空ポンプの消音装置 - Google Patents

真空ポンプの消音装置

Info

Publication number
JPS60185074U
JPS60185074U JP7362484U JP7362484U JPS60185074U JP S60185074 U JPS60185074 U JP S60185074U JP 7362484 U JP7362484 U JP 7362484U JP 7362484 U JP7362484 U JP 7362484U JP S60185074 U JPS60185074 U JP S60185074U
Authority
JP
Japan
Prior art keywords
outlet
vacuum pump
lid body
chamber
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7362484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332936Y2 (enrdf_load_stackoverflow
Inventor
田川　喜義
郁夫 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orion Machinery Co Ltd
Original Assignee
Orion Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orion Machinery Co Ltd filed Critical Orion Machinery Co Ltd
Priority to JP7362484U priority Critical patent/JPS60185074U/ja
Publication of JPS60185074U publication Critical patent/JPS60185074U/ja
Application granted granted Critical
Publication of JPS6332936Y2 publication Critical patent/JPS6332936Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Exhaust Silencers (AREA)
JP7362484U 1984-05-19 1984-05-19 真空ポンプの消音装置 Granted JPS60185074U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7362484U JPS60185074U (ja) 1984-05-19 1984-05-19 真空ポンプの消音装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7362484U JPS60185074U (ja) 1984-05-19 1984-05-19 真空ポンプの消音装置

Publications (2)

Publication Number Publication Date
JPS60185074U true JPS60185074U (ja) 1985-12-07
JPS6332936Y2 JPS6332936Y2 (enrdf_load_stackoverflow) 1988-09-02

Family

ID=30613165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7362484U Granted JPS60185074U (ja) 1984-05-19 1984-05-19 真空ポンプの消音装置

Country Status (1)

Country Link
JP (1) JPS60185074U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6332936Y2 (enrdf_load_stackoverflow) 1988-09-02

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