JPS60181266A - Apparatus for melting metal - Google Patents

Apparatus for melting metal

Info

Publication number
JPS60181266A
JPS60181266A JP3830384A JP3830384A JPS60181266A JP S60181266 A JPS60181266 A JP S60181266A JP 3830384 A JP3830384 A JP 3830384A JP 3830384 A JP3830384 A JP 3830384A JP S60181266 A JPS60181266 A JP S60181266A
Authority
JP
Japan
Prior art keywords
crucible
heating means
crucibles
heating
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3830384A
Other languages
Japanese (ja)
Other versions
JPH0211667B2 (en
Inventor
Masahiro Hanai
正博 花井
Teruo Ina
伊奈　照夫
Tateo Motoyoshi
本吉　健郎
Kenichiro Yamanishi
山西　健一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3830384A priority Critical patent/JPS60181266A/en
Publication of JPS60181266A publication Critical patent/JPS60181266A/en
Publication of JPH0211667B2 publication Critical patent/JPH0211667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the heating efficiency of a heating means when metal is melted by heating in a crucible, by enclosing the heating means with crucibles and the crucibles with a heat insulator. CONSTITUTION:When vacuum deposition or other method is applied, solid metal in a crucible 5 is melted by heating with a filament as a heating means 4, and metallic vapor is generated by evaporation and spouted from spouting holes 5a. At this time, the heating means 4 is enclosed with plural crucibles 5, and the crucibles 5 are enclosed with a heat insulator 7. All of the heat from the filament 4 as the heating means is transferred to the crucibles 5, so metal in the crucibles 5 is heated and evaporated with very high thermal efficiency.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明けるつぼで金属を溶融する金属溶融装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a metal melting apparatus for melting metal in a crucible.

〔従来技術〕[Prior art]

従来、常温固体状の物質全加熱して蒸発させ、被蒸着材
上に蒸着して薄膜全形成する真空蒸着においては、特公
昭５４−９５９２号公＠に示されているように、常温固
体状の物質全入力たるつぼの外側に加熱手段を配置する
構成であった。即ち、第１図において、ｉｌｌに噴出孔
（１ａ）か設けらねたるつぼで、常温固体状の金属部材
が収容される。（２）け電源、（３ｊけるつぼｉｌｌ’
を囲繞したフィラメントからなる加熱手段で、るつぼ１
ｌ１７ｉ−囲繞するように配置さねている。なお、加熱
手段（３１としては、ジュール加ＭＥよるもの、あるい
は加速させた電子をるつぼｉｌｌに衝突させて、電子の
運動エネルギーを熱に変換させるもの等が採用さねでい
る。Conventionally, in vacuum evaporation in which a substance that is solid at room temperature is completely heated to evaporate and then deposited on the material to be deposited to form a thin film, as shown in Japanese Patent Publication No. 54-9592, The structure was such that the heating means was placed outside the crucible into which all the substances were input. That is, in FIG. 1, a metal member that is solid at room temperature is housed in a crucible whose illumination is provided with an ejection hole (1a). (2) Power source, (3j)
A heating means consisting of a filament surrounding the crucible 1.
l17i - arranged in a surrounding manner. In addition, as the heating means (31), one based on Joule addition ME, or one that causes accelerated electrons to collide with a crucible ill and converts the kinetic energy of the electrons into heat, etc. is adopted.

上記構成ＫＬると、加熱手段の外周部から放出さねる熱
置けるつぼの加熱には寄与しないので、熱損失が大きい
という欠点があった。The above configuration KL has the disadvantage that heat loss is large because the heat emitted from the outer circumference of the heating means does not contribute to heating the pot.

〔発明の概要〕[Summary of the invention]

この発明けるつぼで加熱手段を囲繞し、るつぼの外周を
断熱材で囲むことによって、加熱手段から発生する熱量
ケ効率工〈利用できる金属溶融装置を提供する。By surrounding the heating means with the crucible of the present invention and surrounding the outer periphery of the crucible with a heat insulating material, a metal melting apparatus that can efficiently dissipate the amount of heat generated from the heating means is provided.

〔発明の実施例〕[Embodiments of the invention]

以下、図について説明する。第２図において、１４１け
フィラメントからなる加熱手段、＋５１は加熱手段（４
）を囲繞したるつぼで、金属蒸気の噴出孔（５ａ）が設
けらねている。＋６１ｔｒｉ電源で、加熱手段（４）と
るつぼ（５）との間に接銃貞ねでいる。（７）は断熱材
で、るつぼ（５１を囲繞する構造となっている。The figures will be explained below. In Figure 2, the heating means consists of 141 filaments, +51 is the heating means (4
) is surrounded by a crucible and is equipped with a metal vapor ejection hole (5a). A +61tri power source is installed between the heating means (4) and the crucible (5). (7) is a heat insulating material, which has a structure surrounding the crucible (51).

次に動作を説明する。第２図において、加熱手段（４）
でるつぼ（５１ヲ加熱すると、加熱手段１４）から発生
した熱量けそのほとんどがるつぼ（５１の加熱に畜与す
る。そして、るつぼ（５；の加熱手段（４）に近い側力
）ら外周部に向って温度が低くなる。Next, the operation will be explained. In Figure 2, heating means (4)
When heating the crucible (51), most of the heat generated from the heating means 14 is used to heat the crucible (51). The temperature decreases towards

さらに、るつぼ（５１ケ囲繞する断熱材（７）のために
、るつぼ（５１に接する面から外周部に向って温度が低
くなる。Furthermore, because of the heat insulating material (7) surrounding the crucible (51), the temperature decreases from the surface in contact with the crucible (51) toward the outer periphery.

第２図はるつぼ（５１の内部が分かｔ７ているが、底部
あるいはｌ１１１ＩＩｆｉが両内部に通じていても効果
は同じである、 上１ゼ央飾例において、るつぼ（５１は複数個に分割し
ても同様の効果が期待はねる。Figure 2 shows that the inside of the crucible (51 is divided), but the effect is the same even if the bottom or l111IIfi communicates with both insides. However, the same effect is not expected.

〔発明の効果〕〔Effect of the invention〕

この発呼ＪＫｆると、加熱手段をるつぼで囲繞し、さら
にるつぼケ断熱材で囲繞することによって、加熱手段か
ら発生する熱量のほとんどケるつぼの加熱に利用できる
ので、熱損失を低減できる。When this call is made, by surrounding the heating means with the crucible and further surrounding it with a crucible heat insulating material, most of the heat generated from the heating means can be used to heat the crucible, so that heat loss can be reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の金属浴融装置の構成図、第２図はこの発
明の一美細例ケ不す構成図である。 図において、１４）に加熱手段、（５１はるつぼである
。 代理人　大　岩　増　雄 ｏｏｏｏ。FIG. 1 is a block diagram of a conventional metal bath melting apparatus, and FIG. 2 is a block diagram of a detailed example of the present invention. In the figure, 14) is a heating means, and (51 is a crucible. Agent Masuo Oiwaoooo).

Claims (1)

【特許請求の範囲】 ＋１１　金属を溶融させる加熱手段ケるつぼで囲繞し、
上１已るつぼの外周全断熱千オで囲繞した金属溶融装置
。 （２）　るつぼＶｉ複数個で構成されていることケ特徴
とする特許請求の範囲第１項記載の金属浴融装置。[Claims] +11 Surrounded by a heating means crucible for melting metal,
A metal melting device with a one-length crucible surrounded entirely by insulation. (2) The metal bath melting apparatus according to claim 1, characterized in that it is composed of a plurality of crucibles Vi.
JP3830384A 1984-02-28 1984-02-28 Apparatus for melting metal Granted JPS60181266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3830384A JPS60181266A (en) 1984-02-28 1984-02-28 Apparatus for melting metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3830384A JPS60181266A (en) 1984-02-28 1984-02-28 Apparatus for melting metal

Publications (2)

Publication Number Publication Date
JPS60181266A true JPS60181266A (en) 1985-09-14
JPH0211667B2 JPH0211667B2 (en) 1990-03-15

Family

ID=12521530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3830384A Granted JPS60181266A (en) 1984-02-28 1984-02-28 Apparatus for melting metal

Country Status (1)

Country Link
JP (1) JPS60181266A (en)

Also Published As

Publication number Publication date
JPH0211667B2 (en) 1990-03-15

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