JPS60180180A - 赤外線検出素子 - Google Patents
赤外線検出素子Info
- Publication number
- JPS60180180A JPS60180180A JP59036568A JP3656884A JPS60180180A JP S60180180 A JPS60180180 A JP S60180180A JP 59036568 A JP59036568 A JP 59036568A JP 3656884 A JP3656884 A JP 3656884A JP S60180180 A JPS60180180 A JP S60180180A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin
- substrate
- mixed
- infrared absorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 24
- 239000010408 film Substances 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000011358 absorbing material Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 13
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- 239000003822 epoxy resin Substances 0.000 abstract description 5
- 229910052697 platinum Inorganic materials 0.000 abstract description 5
- 229920000647 polyepoxide Polymers 0.000 abstract description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract description 2
- 239000000395 magnesium oxide Substances 0.000 abstract description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 abstract description 2
- 230000003190 augmentative effect Effects 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003415 peat Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/81—Structural details of the junction
- H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
- H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
Landscapes
- Radiation Pyrometers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59036568A JPS60180180A (ja) | 1984-02-27 | 1984-02-27 | 赤外線検出素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59036568A JPS60180180A (ja) | 1984-02-27 | 1984-02-27 | 赤外線検出素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60180180A true JPS60180180A (ja) | 1985-09-13 |
| JPH0476235B2 JPH0476235B2 (enrdf_load_stackoverflow) | 1992-12-03 |
Family
ID=12473363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59036568A Granted JPS60180180A (ja) | 1984-02-27 | 1984-02-27 | 赤外線検出素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60180180A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63313023A (ja) * | 1987-06-16 | 1988-12-21 | Matsushita Electric Ind Co Ltd | 焦電型赤外線アレイセンサ及びその製造方法 |
| JPH0436265U (enrdf_load_stackoverflow) * | 1990-07-24 | 1992-03-26 | ||
| DE10009593A1 (de) * | 2000-02-29 | 2001-09-13 | Bosch Gmbh Robert | Strukturkörper, insbesondere Infrarot-Sensor und Verfahren zur Erzeugung einer Mikrostruktur aus einem Funktionswerkstoff |
| CN113375813A (zh) * | 2020-03-10 | 2021-09-10 | 高尔科技股份有限公司 | 红外线感测器 |
-
1984
- 1984-02-27 JP JP59036568A patent/JPS60180180A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63313023A (ja) * | 1987-06-16 | 1988-12-21 | Matsushita Electric Ind Co Ltd | 焦電型赤外線アレイセンサ及びその製造方法 |
| JPH0436265U (enrdf_load_stackoverflow) * | 1990-07-24 | 1992-03-26 | ||
| DE10009593A1 (de) * | 2000-02-29 | 2001-09-13 | Bosch Gmbh Robert | Strukturkörper, insbesondere Infrarot-Sensor und Verfahren zur Erzeugung einer Mikrostruktur aus einem Funktionswerkstoff |
| CN113375813A (zh) * | 2020-03-10 | 2021-09-10 | 高尔科技股份有限公司 | 红外线感测器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476235B2 (enrdf_load_stackoverflow) | 1992-12-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |