JPS6017947U - ポリシング装置の洗浄用ブラシ - Google Patents

ポリシング装置の洗浄用ブラシ

Info

Publication number
JPS6017947U
JPS6017947U JP1983111248U JP11124883U JPS6017947U JP S6017947 U JPS6017947 U JP S6017947U JP 1983111248 U JP1983111248 U JP 1983111248U JP 11124883 U JP11124883 U JP 11124883U JP S6017947 U JPS6017947 U JP S6017947U
Authority
JP
Japan
Prior art keywords
cleaning brush
polishing equipment
polishing
workpiece
sun gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983111248U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0212041Y2 (enrdf_load_stackoverflow
Inventor
川上　英雄
正美 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1983111248U priority Critical patent/JPS6017947U/ja
Publication of JPS6017947U publication Critical patent/JPS6017947U/ja
Application granted granted Critical
Publication of JPH0212041Y2 publication Critical patent/JPH0212041Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1983111248U 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ Granted JPS6017947U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983111248U JPS6017947U (ja) 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983111248U JPS6017947U (ja) 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ

Publications (2)

Publication Number Publication Date
JPS6017947U true JPS6017947U (ja) 1985-02-06
JPH0212041Y2 JPH0212041Y2 (enrdf_load_stackoverflow) 1990-04-04

Family

ID=30258391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983111248U Granted JPS6017947U (ja) 1983-07-18 1983-07-18 ポリシング装置の洗浄用ブラシ

Country Status (1)

Country Link
JP (1) JPS6017947U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0379268A (ja) * 1989-08-11 1991-04-04 Wacker Chemitronic Ges Elektron Grundstoffe Mbh ケモメカニカル研摩に用いられた研摩布を処理する方法および装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54112091A (en) * 1978-02-22 1979-09-01 Fujikoshi Kikai Kogyo Kk Lap surface compensator of lapping machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54112091A (en) * 1978-02-22 1979-09-01 Fujikoshi Kikai Kogyo Kk Lap surface compensator of lapping machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0379268A (ja) * 1989-08-11 1991-04-04 Wacker Chemitronic Ges Elektron Grundstoffe Mbh ケモメカニカル研摩に用いられた研摩布を処理する方法および装置

Also Published As

Publication number Publication date
JPH0212041Y2 (enrdf_load_stackoverflow) 1990-04-04

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