JPS60177177A - Dehydrator for sheet-like material - Google Patents
Dehydrator for sheet-like materialInfo
- Publication number
- JPS60177177A JPS60177177A JP3371884A JP3371884A JPS60177177A JP S60177177 A JPS60177177 A JP S60177177A JP 3371884 A JP3371884 A JP 3371884A JP 3371884 A JP3371884 A JP 3371884A JP S60177177 A JPS60177177 A JP S60177177A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- panels
- dehydrator
- electrodes
- sheet material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
Abstract
Description
【発明の詳細な説明】 本発明はシート状材の脱水装置に関するものである。[Detailed description of the invention] The present invention relates to a dewatering device for sheet materials.
高分子プラスチックフィルムや紙等のシート状材に金属
等の物質を蒸着する場合、帯状材と蒸着層との接着力を
強める等のために、通常、シート状材にn凭水処理を施
している。When metals or other substances are vapor-deposited onto sheet-like materials such as polymeric plastic films or paper, the sheet-like material is usually treated with water in order to strengthen the adhesion between the strip material and the vapor-deposited layer. There is.
シート状材中の水分を脱水するには、従来、クライオパ
ネルが用いられている。しかしながら、このような従来
の脱水装置では接着力があまり改善されない欠点があっ
た。Cryopanels have conventionally been used to remove moisture from sheet materials. However, such conventional dewatering devices have the drawback that adhesive strength is not improved much.
本発明は、以上の欠点を改良し、シート状材とその表面
に設けられた蒸着層との接着力を向上しつるシート状材
の脱水装置の提供を目的とするものである。SUMMARY OF THE INVENTION The present invention aims to improve the above-mentioned drawbacks and to provide a dewatering device for a vine sheet material, which improves the adhesion between the sheet material and the vapor deposited layer provided on its surface.
本発明は、上記の目的を達成するために、シート状材の
水分をクライオパネルにより脱水しつるシート状材の脱
水装置において、クライオパネルを電極の一部とした放
電手段を有することを特徴とするシート状材の・脱水装
置を提供するものである。In order to achieve the above object, the present invention provides a sheet material dehydration apparatus for dehydrating the moisture in a sheet material using a cryopanel, which is characterized by having a discharge means using the cryopanel as a part of the electrode. The present invention provides a dewatering device for sheet materials.
以下、本発明を図示の実施例に基づいて説明する。Hereinafter, the present invention will be explained based on illustrated embodiments.
第1図において、1は、供給ローラニであり、高分子フ
ィルムや紙等の帯状のシート状材2が巻回されている。In FIG. 1, reference numeral 1 denotes a supply roller, around which a belt-shaped sheet material 2 such as a polymer film or paper is wound.
3は、巻取りローラーであり、供給ローラー1から送り
出されたシート状材2を最終的に巻き取るものである。3 is a winding roller, which finally winds up the sheet material 2 sent out from the supply roller 1.
4及び5は、ガイドローラーである。6及び7は、各々
供給ローラー1とガイドローラー4及び巻取りローラー
3とガイドローラー5との間に設けられた放電手段であ
り、電極の一方がクライオパネル8及び9から構成され
ている。放電ガスとしては、水よりも液化温度の低いア
ルゴンや酸素、窒素等が導入されている。4 and 5 are guide rollers. 6 and 7 are discharge means provided between the supply roller 1 and the guide roller 4 and between the take-up roller 3 and the guide roller 5, respectively, and one of the electrodes is constituted by cryopanels 8 and 9. As the discharge gas, argon, oxygen, nitrogen, etc., which have a lower liquefaction temperature than water, are introduced.
すなわち、上記実施例によれば、供給ローラー1から送
り出されたシート状材2は、クライオパネル8及び9を
通過することにより脱水される。That is, according to the above embodiment, the sheet material 2 sent out from the supply roller 1 is dehydrated by passing through the cryopanels 8 and 9.
また、このクライオパネル8及び9は電極ともなってお
り、シート状材2は、これ等のクライオパネル8及び9
等からなる放電手段6及び7により形成された放電雰囲
気中を通過する際に、その表面が活性化される。それ故
、この脱水処理後に、シート状材2の表面にアルミや亜
鉛、鉄、コバルト、ニッケル等の全屈等を蒸着して蒸着
層を形成した場合、シート状材2と蒸着mとの接着力が
より強固になる。The cryopanels 8 and 9 also serve as electrodes, and the sheet material 2
When passing through the discharge atmosphere formed by the discharge means 6 and 7, the surface thereof is activated. Therefore, if a vapor deposited layer is formed by vapor-depositing aluminum, zinc, iron, cobalt, nickel, etc. on the surface of the sheet-like material 2 after this dehydration treatment, the adhesion between the sheet-like material 2 and the vapor deposited m. power becomes stronger.
また、第2図は、本発明の他の実施例を示し、シート状
材10が周側面に走行させられる円筒状の電極11と、
この電極11の周面に相対する位置に配設された弧状の
クライオパネル12からなる電極とからなる放電手段1
3が段りられており、第1図に示した実施例と比べて装
置が小型化できる。Further, FIG. 2 shows another embodiment of the present invention, in which a cylindrical electrode 11 on which a sheet material 10 is made to run on the circumferential side,
Discharging means 1 consisting of an electrode consisting of an arc-shaped cryopanel 12 disposed at a position facing the circumferential surface of this electrode 11
3 are stepped, and the device can be made smaller compared to the embodiment shown in FIG.
以上の通り、本発明によれば、シート状材の脱水とその
表面の活性化を同時に行なえるため、蒸@層の接着力を
向上しうるシート状材の脱水装置が得られる。As described above, according to the present invention, since the dehydration of the sheet-like material and the activation of its surface can be performed simultaneously, a dehydrating apparatus for the sheet-like material can be obtained which can improve the adhesive strength of the steamed layer.
第1図は本発明の実施例の正面図、第2図は本発明の他
の実施例の正面図を示す。
2.10・・・シート状材、
特許出願人 日立コンデンサ株式会社FIG. 1 shows a front view of an embodiment of the invention, and FIG. 2 shows a front view of another embodiment of the invention. 2.10...Sheet material, patent applicant Hitachi Capacitor Corporation
Claims (1)
しつるシート状材の脱水装置において、クライオパネル
を電極の一部とした放電手段を有することを特徴とする
シー1〜状材の脱水装置。(1) A sheet material dehydration device for removing moisture from a sheet material using a cryopanel, which is characterized by having a discharge means in which the cryopanel is a part of an electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3371884A JPS60177177A (en) | 1984-02-24 | 1984-02-24 | Dehydrator for sheet-like material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3371884A JPS60177177A (en) | 1984-02-24 | 1984-02-24 | Dehydrator for sheet-like material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60177177A true JPS60177177A (en) | 1985-09-11 |
Family
ID=12394178
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3371884A Pending JPS60177177A (en) | 1984-02-24 | 1984-02-24 | Dehydrator for sheet-like material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60177177A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000003054A1 (en) * | 1998-07-10 | 2000-01-20 | Nihon Seimitsu Co., Ltd. | Method for ion plating of synthetic resin and molded synthetic resin article having ion-plated coating |
JP2002173773A (en) * | 2000-12-04 | 2002-06-21 | Toyobo Co Ltd | Roll coater type continuous sputtering apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5884972A (en) * | 1981-11-13 | 1983-05-21 | Matsushita Electric Ind Co Ltd | Surface treating device |
-
1984
- 1984-02-24 JP JP3371884A patent/JPS60177177A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5884972A (en) * | 1981-11-13 | 1983-05-21 | Matsushita Electric Ind Co Ltd | Surface treating device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000003054A1 (en) * | 1998-07-10 | 2000-01-20 | Nihon Seimitsu Co., Ltd. | Method for ion plating of synthetic resin and molded synthetic resin article having ion-plated coating |
JP2002173773A (en) * | 2000-12-04 | 2002-06-21 | Toyobo Co Ltd | Roll coater type continuous sputtering apparatus |
JP4568994B2 (en) * | 2000-12-04 | 2010-10-27 | 東洋紡績株式会社 | Roll coater type continuous sputtering equipment |
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