JPS60176241U - vacuum container - Google Patents

vacuum container

Info

Publication number
JPS60176241U
JPS60176241U JP1984064684U JP6468484U JPS60176241U JP S60176241 U JPS60176241 U JP S60176241U JP 1984064684 U JP1984064684 U JP 1984064684U JP 6468484 U JP6468484 U JP 6468484U JP S60176241 U JPS60176241 U JP S60176241U
Authority
JP
Japan
Prior art keywords
vacuum container
shroud
vacuum
wall
refrigerant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984064684U
Other languages
Japanese (ja)
Inventor
憲二 尾高
雄一 石川
主人 高橋
宗雄 古瀬
秀明 蒲原
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP1984064684U priority Critical patent/JPS60176241U/en
Publication of JPS60176241U publication Critical patent/JPS60176241U/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、冷却用シュラウドを有する真空容器の主要部
の縦断面の斜視図、第２図は、従来例を示す縦断面図、
第３図は、本考案の一実施例の縦断面図である。 １・・・真空容器、２・・・排気ダクト、３・・・バル
ブ、６・・・シュラウド外壁、７・・・シュラウド外壁
、８・・・冷媒貯溜空間、９・・・冷媒供給パイプ、１
０・・・冷媒排出パイプ、１１外部加熱装置、１２・・
・熱媒搬送パイプ、１３・・・熱媒排出パイプ、１４・
・・パイプの接続器、１５・・・メクラブタ、１６・・
・熱媒導入口。FIG. 1 is a vertical cross-sectional perspective view of the main part of a vacuum vessel having a cooling shroud, and FIG. 2 is a vertical cross-sectional view showing a conventional example.
FIG. 3 is a longitudinal sectional view of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Vacuum container, 2... Exhaust duct, 3... Valve, 6... Shroud outer wall, 7... Shroud outer wall, 8... Refrigerant storage space, 9... Refrigerant supply pipe, 1
0... Refrigerant discharge pipe, 11 external heating device, 12...
・Heat medium conveyance pipe, 13...Heat medium discharge pipe, 14・
・・Pipe connector, 15・・Mechanical clutch, 16・・
・Heating medium inlet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 冷媒を貫流、あるいは貯溜、蒸発させることによって壁
面を冷却する冷却シュラウド及び真空壁とより成る真空
容器において、該シュラウド内に加熱流体を貫流できる
ようにしたことを特徴とする真空容器。A vacuum vessel comprising a vacuum wall and a cooling shroud that cools a wall surface by flowing, storing or evaporating a refrigerant, characterized in that a heating fluid can flow through the shroud.
JP1984064684U 1984-05-04 1984-05-04 vacuum container Pending JPS60176241U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984064684U JPS60176241U (en) 1984-05-04 1984-05-04 vacuum container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984064684U JPS60176241U (en) 1984-05-04 1984-05-04 vacuum container

Publications (1)

Publication Number Publication Date
JPS60176241U true JPS60176241U (en) 1985-11-21

Family

ID=30595997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984064684U Pending JPS60176241U (en) 1984-05-04 1984-05-04 vacuum container

Country Status (1)

Country Link
JP (1) JPS60176241U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01203033A (en) * 1988-02-08 1989-08-15 Mitsubishi Electric Corp Transport container device and transport method using same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01203033A (en) * 1988-02-08 1989-08-15 Mitsubishi Electric Corp Transport container device and transport method using same

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