JPS6017317A - Device for preventing detector from malfunction - Google Patents

Device for preventing detector from malfunction

Info

Publication number
JPS6017317A
JPS6017317A JP12483483A JP12483483A JPS6017317A JP S6017317 A JPS6017317 A JP S6017317A JP 12483483 A JP12483483 A JP 12483483A JP 12483483 A JP12483483 A JP 12483483A JP S6017317 A JPS6017317 A JP S6017317A
Authority
JP
Japan
Prior art keywords
pressure
detector
signal
rate
variation factor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12483483A
Other languages
Japanese (ja)
Other versions
JPH0223809B2 (en
Inventor
Toshio Iwasaki
岩崎 敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12483483A priority Critical patent/JPS6017317A/en
Publication of JPS6017317A publication Critical patent/JPS6017317A/en
Publication of JPH0223809B2 publication Critical patent/JPH0223809B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/08Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for safeguarding the apparatus, e.g. against abnormal operation, against breakdown

Abstract

PURPOSE:To interrupt an input to a means for controlling an output from a detector precisely at the abnormal state of the detector to prevent the detector from malfunction by providing the titled device with a monitoring means of the variation factor of a signal outputted from the detector and a means for interrupting the input of the detector output to the control means. CONSTITUTION:A pressure measuring signal from a pressure transmitter 11 for a pressure gauge 5 fitted to a pressure regulated tank 2 for a vacuum equipment is inputted to a pressure alarm generator 12 and the pressure variation factor monitoring circuit 13. The pressure variation factor monitoring circuit 13 finds out the variation factor of the pressure measuring signal outputted from the pressure transmitter 11 through a differentiator, and if the variation factor signal exceeds a reference signal, turns on a contact corresponding to the prescribed value or more of the pressure variation rate. When the pressure transmitter 11 is failed, the pressure measuring signal is suddenly changed, so that a signal line closing a disconnection valve 7 by a pressure regulated tank pressure high signal outputted from the pressure alarm generator 12 is blocked and the disconnection valve 7 is kept at the opened status.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、検出器の誤動作防止装置に係り、例えば真空
設備の空気漏洩対策に好適な検出器の誤動作防止装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a detector malfunction prevention device, and more particularly, to a detector malfunction prevention device suitable for preventing air leakage in vacuum equipment, for example.

〔発明の背景〕[Background of the invention]

第1図に、本発明で対象とするシステムの一例としての
、真空設備を示す。
FIG. 1 shows vacuum equipment as an example of a system targeted by the present invention.

この第1図に示す真空設備は、ガス発生器1、ガス全一
時貯留する圧力調整槽2、ガス使用設備3、ガス発生器
1と圧力調整槽2間に設けられた圧力調整弁4、圧力調
整槽2に設けられた圧力計5、この圧力計5と圧力調整
弁4間に設けられた制御器6、圧力調整槽2とガス使用
設備3間に設けられたしゃ新井7とを備えている。前記
圧力調整弁4は、圧力計5からの信号をもとに制御器6
を介して流入ガス量を制御し、圧力調整槽2の圧力を設
定値に制御するようになっている。前記しゃ新井7は、
ガス発生器1や圧力調整槽2の異常発生時、圧力計5か
らの信号によりガス使用設備3へ異常が波及するのを防
止するようになっている。そして、この真空設備は常時
負圧で運転される真空設備で、周囲ガスである空気混入
全厳禁する必要がある。
The vacuum equipment shown in this FIG. It includes a pressure gauge 5 provided in the regulating tank 2, a controller 6 provided between the pressure gauge 5 and the pressure regulating valve 4, and a shield 7 provided between the pressure regulating tank 2 and the gas usage equipment 3. There is. The pressure regulating valve 4 is operated by a controller 6 based on a signal from a pressure gauge 5.
The amount of inflowing gas is controlled through the pressure regulating tank 2, and the pressure in the pressure regulating tank 2 is controlled to a set value. The said Sha Arai 7 is
When an abnormality occurs in the gas generator 1 or the pressure regulating tank 2, a signal from the pressure gauge 5 is used to prevent the abnormality from spreading to the gas usage equipment 3. This vacuum equipment is a vacuum equipment that is always operated under negative pressure, and it is necessary to strictly prohibit the mixing of air, which is the surrounding gas.

前記のような真空設備において、従来はガス発生器1あ
るいは圧力調整槽2における空気漏洩異常に対処するた
め、圧力計5の信号が規定値以上になった時、空気漏洩
と判断してしゃ新井7を閉鎖するようにインタロックを
施すようにしている。
In the vacuum equipment described above, conventionally, in order to deal with abnormal air leakage in the gas generator 1 or pressure adjustment tank 2, when the signal of the pressure gauge 5 exceeds a specified value, it is determined that there is an air leak and Arai An interlock is provided to close 7.

第2図に、従来技術としてのインタロックを示し、第3
図には第2図に示す圧力高の接点信号を作り出す計測回
路を示す。
Figure 2 shows an interlock as a conventional technology, and the third
The figure shows a measurement circuit that generates the high pressure contact signal shown in FIG. 2.

その第3図に示す計測回路では、圧力伝送器11の圧力
計測信号は圧力警報発生器12に入力され、予め定めら
れた圧力規定値基準信号と比較され、入力信号が基準信
号より大きくなった場合に圧力高の接点eONさせるよ
うに動作させる。
In the measurement circuit shown in FIG. 3, the pressure measurement signal from the pressure transmitter 11 is input to the pressure alarm generator 12 and compared with a predetermined pressure standard value reference signal, and when the input signal becomes larger than the reference signal. When the pressure is high, the contact e is turned on.

しかしながら、前記従来技術では検出器としての圧力計
測装置の誤動作でもしゃ新井が自動閉鎖してしまう欠点
があり、圧力計測装置の誤動作による自動閉鎖を極力避
けるため、圧力計測装置を冗長化して2アウトオブ3な
どのロジック金とって自動閉鎖するなどの措置を施して
いるが、計測装置が増加するため、経済的負担が大きく
なる問題があった。
However, the above-mentioned conventional technology has the disadvantage that the Arai will automatically close if the pressure measuring device malfunctions as a detector.In order to avoid automatic closing due to the malfunction of the pressure measuring device as much as possible, the pressure measuring device is made redundant and two outs. Measures have been taken to automatically close the system using logic fees such as Ob3, but the increase in the number of measuring devices poses a problem of increasing economic burden.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、検出器の異常時には検出器出力の制御
手段への入力を確実に阻止でき、しかも経済的に有利な
検出器の誤動作防止装置全提供するにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide an economically advantageous detector malfunction prevention device that can reliably prevent input of the detector output to the control means when the detector is abnormal.

〔発明の概要〕[Summary of the invention]

本発明の特徴は、プロセス量を測定する検出器と、検出
器出力が規定値を逸脱した時、保腰動作を自動的に行う
制御手段とを備えたシステムにおいて、前記検出器の出
力信号の変化率を監視する手段と、その変化率が予め定
められた規定値以−ヒになった時に、前記検出器出力の
制御手段への入力を阻止する手段とを設けたところにあ
り、この構成により前記目的を確実に達成することがで
きたものである。
A feature of the present invention is that in a system equipped with a detector that measures a process quantity and a control means that automatically performs a posture maintenance operation when the output of the detector deviates from a specified value, the output signal of the detector is The present invention includes means for monitoring the rate of change, and means for blocking input of the detector output to the control means when the rate of change exceeds a predetermined value. This made it possible to reliably achieve the above objective.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第1図に示す真空設備を例に
とり、さらに第4図〜第8図に示す実施例に基づいて説
明する。
Hereinafter, one embodiment of the present invention will be explained by taking the vacuum equipment shown in FIG. 1 as an example, and further based on the embodiments shown in FIGS. 4 to 8.

その第4図は、第1図に示す真空設備の圧力調整槽2に
取り付けられた検出器としての圧力計5の計測回路を示
す。すなわち、本発明の構成要素である検出器の出力信
号の変化率を監視する手段としての回路であって、変化
率が予め定められた規定値以上を示した場合に、変化率
規定値以上の接点信号’kONさせる計測回路を示す。
FIG. 4 shows a measurement circuit of a pressure gauge 5 as a detector attached to the pressure regulating tank 2 of the vacuum equipment shown in FIG. In other words, the circuit serves as a means for monitoring the rate of change of the output signal of the detector, which is a component of the present invention, and when the rate of change shows a predetermined value or more, the rate of change exceeds the specified value. A measurement circuit for turning the contact signal 'kON' is shown.

この第4図に示す計測回路では、圧力伝送器11の圧力
計測信号(プロセス量)は圧力警報発生器12と圧力変
化率監視回路13の両方に入力される。圧力警報発生器
12では、予め定められた圧力規定値基準信号と比較さ
れ、入力信号が圧力規定値基準信号より大きく々つだ場
合に、圧力高の接点をONさせる。圧力変化率監視回路
13では、圧力伝送器11からの圧力計測信号を微分器
を通して圧力計測信号の変化率をめ、その変化率信号を
予め定められた圧力変化率基準信号と比較し、その変化
率信号が圧力変化率基準信号より犬きくなった場合に、
圧力変化率規定値以上の接点をONさせる。
In the measurement circuit shown in FIG. 4, the pressure measurement signal (process amount) from the pressure transmitter 11 is input to both the pressure alarm generator 12 and the pressure change rate monitoring circuit 13. The pressure alarm generator 12 compares the input signal with a predetermined pressure standard value reference signal, and turns on the high pressure contact when the input signal is larger than the pressure standard value reference signal. In the pressure change rate monitoring circuit 13, the pressure measurement signal from the pressure transmitter 11 is passed through a differentiator to determine the change rate of the pressure measurement signal, and the change rate signal is compared with a predetermined pressure change rate reference signal to determine the change. When the rate signal becomes sharper than the pressure change rate reference signal,
Turn ON the contact whose pressure change rate is higher than the specified value.

ついで、第5図CI)は本発明の構成要素である変化率
が予め定められた規定値以上になった時に、検出器出力
の制御手段への入力を阻止する手段としての、前記変化
率規定値以上の信号で圧力高のインタロック信号をバイ
パスさせて圧力高の信号を無効とするインタロックを示
し、第5図(II)は前記インタロックを構成している
回路部分を示す。
Next, FIG. 5 CI) shows the rate of change regulation as a means for blocking input of the detector output to the control means when the rate of change, which is a component of the present invention, exceeds a predetermined value. An interlock is shown in which a high pressure interlock signal is bypassed and the pressure high signal is invalidated by a signal exceeding the above value, and FIG. 5 (II) shows a circuit portion constituting the interlock.

この第5図(II)において、(a)はAとBのいずれ
の信号でもCの信号を出るOR回路を示し、(b)はB
の信号がONしている時はAの信号はCに伝達されない
回路を示し、(C)はAの信号と逆の信号がBの信号と
して出るNOT回路を示す。
In this FIG. 5 (II), (a) shows an OR circuit that outputs a signal C from either signal A or B, and (b) shows an OR circuit that outputs a signal C from any signal A or B.
(C) shows a NOT circuit in which a signal opposite to the A signal is output as a B signal.

第5図(1)に示すインタロックでは、圧力変化率監視
回路の判定が動作する前に、圧力高の信号が動作しない
よう、圧力高の信号にはタイマで時間遅れを持たせてい
る。
In the interlock shown in FIG. 5(1), the pressure high signal is delayed by a timer so that the pressure high signal does not operate before the pressure change rate monitoring circuit operates.

次に、このインタロックを第1図に示す真空設備に関連
して、さらに詳しく説明する。
Next, this interlock will be explained in more detail in relation to the vacuum equipment shown in FIG.

しゃ新井7には、この実施例では電源断でばね力により
閉鎖する電磁弁が採用されている。しゃ新井7としては
、電動機の駆動力により開閉する電動弁であっても、空
気圧で動作する空気弁であっても、その動作回路は相違
するが目的とする動作内容は同じである。しゃ新井7の
開閉操作を行う操作スイッチは、通常しゃ断弁7を遠隔
操作する制御盤上に設置されている。
In this embodiment, the shield 7 employs a solenoid valve that closes with a spring force when the power is turned off. Whether the Sharai 7 is an electric valve that opens and closes using the driving force of an electric motor or an air valve that operates using air pressure, the operation circuit is different, but the intended operation content is the same. An operation switch for opening and closing the shutoff valve 7 is normally installed on a control panel that remotely controls the shutoff valve 7.

さらに、第1図に示す真空設備の運転に関連して説明す
ると、次のように々る。
Further, the operation of the vacuum equipment shown in FIG. 1 will be explained as follows.

すなわち、真空設備を運転開始する前にガス発生器1、
圧力調整槽2およびガス使用設備3は、ガス排気設備(
図示せず)によって規定された真空状態になるよう、真
空引きされる。この状態では、圧力調整槽2に設置され
た圧力計5の圧力指示値は低下し、圧力調整槽圧力高の
接点信号はOFF’された状態となる。また、圧力計5
の圧力変化率は小さいため、圧力調整槽圧力変化率規定
値以上の接点信号もOFFされた状態である。この状態
で、制御盤上に設置されたしゃ断弁スイッチを開位置に
するとしゃ断弁(電磁弁)7のコイルが励磁され、電磁
力がばね力に打ち勝ってしゃ断弁7は開放される。しゃ
断弁スイッチがスプリングによって中間位置に復帰して
もしゃ断弁7が開状態を維持するように制御回路は自己
保持するように構成されている。しゃ断弁スイッチを閉
位置にすると、しゃ断弁7の自己保持回路を切断するた
め、しゃ断弁7は無励磁状態となり、ばね力によってし
ゃ断弁7は閉鎖される。したがって、第1図に示す真壁
設備が規定された圧力以下の真空状態に達した状態では
、しゃ断弁7はしゃ断弁スイッチを運転員が操作するこ
とによって開・閉される。しゃ断弁7全開にして、ガス
発生器1よりガスを発生させ、規定された圧力状態を保
持しながらガス使用設備3にガスを供給する。この規定
された圧力状態を自動的に維持するように圧力調整弁4
が自動制御される。正常運転の場合には、前記状態で運
転されるが、この運転状態において圧力調整槽2の圧力
が上昇した場合には、第4図で説明したように、予め定
められた圧力規定値以上になると、圧力調整槽圧力高の
信号がONして時限要素全動作させ、規定時間経過後に
は、しゃ断弁7の自己保持を自動的にしゃ断してしゃ断
弁7を閉鎖させる。しかし、圧力伝送器11が故障した
ような場合には、圧力計測信号が急激に変化するため、
圧力変化率監視回路13の圧力変化率規定値以上の信号
も同時にONするため、圧力調整槽圧力高の信号でしゃ
断弁7が自動閉釦される信号ラインをブロックするので
、しゃ断弁7は自動閉鎖されない。
That is, before starting the operation of the vacuum equipment, the gas generator 1,
The pressure adjustment tank 2 and the gas usage equipment 3 are equipped with gas exhaust equipment (
(not shown) is evacuated to a vacuum state defined by In this state, the pressure indication value of the pressure gauge 5 installed in the pressure regulating tank 2 decreases, and the contact signal indicating the pressure in the pressure regulating tank is turned OFF'. Also, pressure gauge 5
Since the rate of change in pressure is small, the contact signal whose rate of change in pressure in the pressure regulating tank is equal to or higher than the specified value is also in an OFF state. In this state, when the cutoff valve switch installed on the control panel is set to the open position, the coil of the cutoff valve (electromagnetic valve) 7 is excited, the electromagnetic force overcomes the spring force, and the cutoff valve 7 is opened. The control circuit is configured to self-maintain so that the shutoff valve 7 remains open even when the shutoff valve switch is returned to the intermediate position by a spring. When the shutoff valve switch is set to the closed position, the self-holding circuit of the shutoff valve 7 is cut off, so the shutoff valve 7 is placed in a non-excited state, and the shutoff valve 7 is closed by the spring force. Therefore, when the Makabe equipment shown in FIG. 1 reaches a vacuum state below a specified pressure, the shutoff valve 7 is opened and closed by the operator operating the shutoff valve switch. The shutoff valve 7 is fully opened, gas is generated from the gas generator 1, and the gas is supplied to the gas usage equipment 3 while maintaining a specified pressure state. The pressure regulating valve 4 is designed to automatically maintain this specified pressure state.
is automatically controlled. In normal operation, it is operated in the above state, but if the pressure in the pressure regulating tank 2 increases during this operating state, as explained in Fig. 4, the pressure will exceed the predetermined pressure value. When this occurs, the pressure adjustment tank pressure high signal is turned on to fully operate the timer element, and after a predetermined time has elapsed, the self-holding of the shutoff valve 7 is automatically cut off and the shutoff valve 7 is closed. However, if the pressure transmitter 11 malfunctions, the pressure measurement signal will change rapidly.
Since the signal of the pressure change rate monitoring circuit 13 that is higher than the specified value of the pressure change rate is also turned on at the same time, the signal line where the shutoff valve 7 is automatically closed due to the high pressure signal of the pressure regulating tank is blocked, so the shutoff valve 7 is automatically closed. Not closed.

ついで、第6図は検出器の出力信号の変化率を監視する
手段としての前記圧力変化率監視回路と、変化率が予め
定められた規定値以上になった時に検出器出力の制御手
段への入力を阻止する手段とと しての前記インタロツ%を含む検出器の誤動作防止装置
全適用したシステムに、空気漏洩異常が発生した場合の
各構成機器の動作を示す。この第6図において、空気漏
洩異常時には、圧力計信号は同図(a)に示すように上
昇し、圧力変化率規定値以下の上昇率であるため、圧力
変化率監視回路出力は動作せず、圧力警報発生器のみが
動作して、しや断弁7は自動的に閉鎖される。
Next, FIG. 6 shows the pressure change rate monitoring circuit as means for monitoring the rate of change of the output signal of the detector, and the circuit for controlling the output of the detector when the rate of change exceeds a predetermined value. The operation of each component when an air leakage abnormality occurs in a system to which all detector malfunction prevention devices including the above-mentioned interrots % as a means for blocking input is applied will be shown. In Fig. 6, when an air leak occurs, the pressure gauge signal rises as shown in Fig. 6 (a), and the rate of increase is less than the specified pressure change rate, so the pressure change rate monitoring circuit output does not operate. , only the pressure alarm generator is activated and the sheath valve 7 is automatically closed.

次に、第7図は検出器故障(指示値高異常)が発生した
場合の各構成機器の動作全示す。
Next, FIG. 7 shows all the operations of each component when a detector failure (abnormal high reading value) occurs.

この第7図において、検出器故障により圧力計信号は急
速に上昇し、圧力管軸発生器および圧力変化率監視回路
出力はほとんど同時に動作するが、タイマで設定された
時間内に、圧力変化率監視回路出力信号が圧力警報発生
器の動作の伝達を阻止するため、しゃ断弁7は閉鎖され
ずに開状態を保持した!まにとどまる。
In Fig. 7, the pressure gauge signal rises rapidly due to a detector failure, and the pressure tube shaft generator and pressure change rate monitoring circuit output operate almost simultaneously, but within the time set by the timer, the pressure change rate Since the monitoring circuit output signal prevents the transmission of the pressure alarm generator's operation, the shutoff valve 7 was not closed but remained open! Stay in Mani.

通常、圧力計である圧力検出器の故障要因は受圧部故障
と増幅部故障に大別される。受圧部故障は徐々に指示値
を変化させる故障モードが多く、増幅部故障は出力信号
を急変させるモードが多い。
Normally, the causes of failure of a pressure sensor, which is a pressure gauge, are broadly classified into failures in the pressure receiving part and failures in the amplification part. There are many failure modes in which a failure in the pressure receiving part causes the indicated value to gradually change, and a failure mode in which the failure in the amplifier part often causes a sudden change in the output signal.

而して、本発明における図示実施例の検出器異常検出シ
ステムは、増幅部故障に対するものであり、徐々に指示
値を変化させる受圧部故障に対しては防護がされていな
い。しかし、徐々に指示値が変化する場合には、その指
示値挙動を運転員が監視し、自動インタロックが動作す
る前に、圧力検出器の異常を認知して対策処置を講する
ことができる場合が多い。
Thus, the detector abnormality detection system of the illustrated embodiment of the present invention is designed to protect against failures in the amplifier section, and is not protected against failures in the pressure receiving section that causes gradual changes in indicated values. However, if the indicated value changes gradually, the operator can monitor the indicated value behavior, recognize an abnormality in the pressure detector, and take countermeasures before the automatic interlock operates. There are many cases.

進んで、第8図は前記圧力変化率規定値以上の信号で制
御器6の制御モード全自動モードから手動モードに切り
換える状態を示す。
Next, FIG. 8 shows a state in which the control mode of the controller 6 is switched from the fully automatic mode to the manual mode in response to a signal exceeding the pressure change rate specified value.

この第8図に示すように、通常は自動モードで圧力検出
器出力をフィートノくツクさせて所定の設定値となるよ
う、PID(比例・積分・微分)制御器21を介して自
動制御されている。圧力変化率規定値以上ヒの信号が発
生した場合には、モード切換スイッチ23を自動的に自
動モードから手動設定器22による手動モードに切り換
え、異常である圧力検出器信号で自動制御するのを阻止
する。
As shown in FIG. 8, normally the pressure detector output is automatically controlled in automatic mode via a PID (proportional, integral, differential) controller 21 so that it reaches a predetermined set value. There is. If a signal indicating that the pressure change rate is higher than the specified value is generated, the mode changeover switch 23 is automatically switched from automatic mode to manual mode using the manual setting device 22, and automatic control is disabled using the abnormal pressure detector signal. prevent.

圧力検出器出力が上昇する信号を出す場合は、圧力制御
弁4は閉方向に動作するため、圧力調整槽2の圧力は低
下する方向なので、前記モード切換を緊急に自動的に行
わず、圧力変化率規定値以上の警報発生で運転員が手動
でモード切換を行っても十分である場合が多い。
When the pressure detector output output increases, the pressure control valve 4 operates in the closing direction, and the pressure in the pressure regulating tank 2 decreases. In many cases, it is sufficient for the operator to manually switch modes when an alarm occurs with a rate of change greater than the specified value.

圧力調整槽2の圧力検出器、すなわち圧力計5が異常を
起こした場合には、前述のように圧力検出器出力の制御
手段への入力を阻止して尚該異常圧力検出器をメンテナ
ンスするわけであるが、このメンテナンス時の圧力制御
弁は第1図中には図示していないがガス発生器1および
ガス設備3内にも圧力計が設置されるので、その圧力計
の指示のもとに運転することになるが、圧力検出器の故
障部を予備品と交換する等の措置により短時間で正常に
復帰できるので、運転員に対する負担はそれ程増加しな
い。
If the pressure detector of the pressure regulating tank 2, that is, the pressure gauge 5, becomes abnormal, the input of the pressure detector output to the control means is blocked as described above, and the abnormal pressure detector must be maintained. However, although the pressure control valve during this maintenance is not shown in Figure 1, pressure gauges are also installed in the gas generator 1 and gas equipment 3, so the pressure control valve is operated based on the instructions from the pressure gauge. However, by taking measures such as replacing the malfunctioning part of the pressure detector with a spare part, normal operation can be restored in a short period of time, so the burden on the operator does not increase significantly.

前述の実施例によれば、圧力計5の異常によるしゃ新井
7の誤動作を防止することができ、したがってプラント
の稼動率を向上させることができる。
According to the above-mentioned embodiment, it is possible to prevent malfunction of the shielding well 7 due to an abnormality in the pressure gauge 5, and therefore it is possible to improve the operating rate of the plant.

丑た、タンク・配管のクラック等の機器異常発生確率は
非常に小さいが、その機器異常発生に伴う危険度が大き
いため、それに対する防護手段が設けられる。その防護
手段を動作させるだめの検出器の誤動作発生確率は、ク
ラック等の機器異常発生確率より通常太きいため、前記
危険度が大きい異常に対する防護によって設備の稼動率
を低下させているが、本発明を適用すれば検出器の誤動
作を早期にかつ容易に検出でき、防護手段が動作するの
を防止できるので、検出器の誤動作によるプラント停止
の発生確率を低減させ、プラントの稼動率を向上させる
゛ことが可能となる。
Although the probability of occurrence of equipment abnormalities such as cracks in tanks and piping is very small, the risk associated with such equipment abnormalities is high, so protective measures are provided against them. The probability of a malfunction occurring in a detector that activates the protection means is usually higher than the probability of occurrence of equipment abnormalities such as cracks, so protection against the above-mentioned high-risk abnormalities reduces the equipment operating rate. By applying the invention, detector malfunctions can be detected early and easily and protective measures can be prevented from operating, reducing the probability of plant stoppages due to detector malfunctions and improving plant availability. It becomes possible to do this.

なお、本発明は長期間連続運転をし、かつプラント再起
動が容易でないプリントに適用すると、特に有効となる
Note that the present invention is particularly effective when applied to printing that operates continuously for a long period of time and in which restarting the plant is not easy.

本発明の実施例につき、真空設備を対象に説明したが、
本発明は真空設備ばかりではなく圧力容器等の設備にも
適用可能である。例えば、原子炉プラントのように、原
子炉容器を通常高圧に保持して運転しているが、圧力が
規定値以上になった場合に原子炉全自動停止させるよう
な設備に対しても、本発明は適用可能である。原子炉プ
ラントでは直接的に原子炉全保護する測定回路には法的
に冗長化が要求されるので、間接的に原子炉停止に至る
原子炉補助設備の計測・制御回路に本発明を適用すると
、その効果が犬である。
Although the embodiments of the present invention have been described with reference to vacuum equipment,
The present invention is applicable not only to vacuum equipment but also to equipment such as pressure vessels. For example, for equipment such as nuclear reactor plants, where the reactor vessel is normally maintained at high pressure and operated, the reactor is fully automatically shut down when the pressure exceeds a specified value. The invention is applicable. In a nuclear reactor plant, redundancy is legally required for the measurement circuit that directly protects the reactor, so applying the present invention to the measurement and control circuit of the reactor auxiliary equipment that indirectly leads to reactor shutdown. , the effect is a dog.

〔発明の効果〕〔Effect of the invention〕

以上説明した本発明によれば、検出器の出力信号の変化
率を監視する手段と、その変化率が予め定められた規定
値以上になった時に、検出器出力の制御手段への入力全
阻止する手段とを設け、計測対象とするプロセスの応答
特性全加味し、想定される異常時のプロセス量の変化率
以上の急激な応答を示した場合は、検出器自体の異常と
して、検出器信号を無効にするようにしている結果、検
出器の異常時に、検出器出力の制御手段への入力を確実
に阻止できる効果があり、ひいてはプラントの稼動率を
向上させ得る効果を有する外、構造が簡単なるため、経
済的にも優れた効果を有する。
According to the present invention described above, there is provided a means for monitoring the rate of change of the output signal of the detector, and when the rate of change exceeds a predetermined value, all input to the control means for the detector output is blocked. If the response characteristics of the process to be measured are taken into account, and a rapid response that exceeds the rate of change in the process quantity at the time of an assumed abnormality is detected, the detector signal is determined to be an abnormality in the detector itself. As a result, in the event of a detector abnormality, the input of the detector output to the control means can be reliably blocked, which not only has the effect of improving the operation rate of the plant, but also improves the structure. Since it is simple, it has an excellent economical effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明を適用する一つのシステムとしての真空
設備を示す図、第2図は従来技術によるインタロック金
示す図、第3図は従来技術による計測回路を示す図、第
4図は本発明の構成要素である検出器の出力信号の変化
率を監視する手段としての計測回路を示す図、第5図(
1)は本発明の構成要素である変化率が予め定められた
規定値以上になった時に、検出器出力の制御手段への入
力を阻止する手段としてのインタロックを示す図、第5
図(II ) (a)〜(C)は同インタロックを構成
している回路部分の説明図、第6図は第4図および第5
図に示す本発明の実施例において空気漏洩異常時の各構
成機器の動作説明図、第7図は同検出器故障時の各構成
機器の動作説明図、第8図は検出器の圧力変化率設定値
と制御器のモード切換との関係な示す図である。 1・・・ガス発生器、2・・・圧力調整槽、3・・・ガ
ス使用設備、4・・・圧力調整弁、5・・・検出器とし
ての圧力計、6・・・圧力制御器、7・・・しゃ断器、
11・・・圧力伝送器、12・・・圧力警報発生器、1
3・・・変化率監視回路、21・・すID制御器、22
・・・手動設定器、23・・・モード切換スイッチ。 代理人 弁理士 秋本正実 躬2図 卒3図 11 1Z ド 第6図 第−′1図 (dル蝋昨午面答 陶
Figure 1 is a diagram showing vacuum equipment as one system to which the present invention is applied, Figure 2 is a diagram showing an interlock metal according to the prior art, Figure 3 is a diagram showing a measuring circuit according to the prior art, and Figure 4 is a diagram showing a measuring circuit according to the prior art. FIG. 5 (
1) is a diagram showing an interlock as means for blocking input of the detector output to the control means when the rate of change, which is a component of the present invention, exceeds a predetermined value;
Figure (II) (a) to (C) are explanatory diagrams of the circuit parts that constitute the same interlock, and Figure 6 is the same as Figures 4 and 5.
In the embodiment of the present invention shown in the figure, an explanatory diagram of the operation of each component device when an air leakage abnormality occurs, FIG. 7 is an explanatory diagram of the operation of each component device when the same detector fails, and FIG. 8 is a pressure change rate of the detector FIG. 3 is a diagram showing the relationship between set values and mode switching of the controller. DESCRIPTION OF SYMBOLS 1... Gas generator, 2... Pressure adjustment tank, 3... Gas usage equipment, 4... Pressure regulation valve, 5... Pressure gauge as a detector, 6... Pressure controller , 7... breaker,
11...Pressure transmitter, 12...Pressure alarm generator, 1
3... Rate of change monitoring circuit, 21... ID controller, 22
...Manual setting device, 23...Mode selection switch. Agent Patent Attorney Masami Akimoto 2nd Figure 3 Figure 11 1Z Figure 6 Figure -'1

Claims (1)

【特許請求の範囲】[Claims] 1、 プロセス量を測定する検出器と、検出器出力が規
定値を逸脱した時、保護動作全自動的に行う制御手段と
を備えたシステムにおいて、前記検出器の出力信号の変
化率を監視する手段と、その変化率が予め定められた規
定値以上になった時に、前記検出器出力の制御手段への
入力を阻止する手段とを設けたこと全特徴とする検出器
の誤動作防止装置。
1. In a system equipped with a detector that measures a process quantity and a control means that automatically performs a protective action when the output of the detector deviates from a specified value, monitor the rate of change of the output signal of the detector. A device for preventing malfunction of a detector, comprising: means for preventing input of the detector output to the control means when the rate of change exceeds a predetermined value.
JP12483483A 1983-07-11 1983-07-11 Device for preventing detector from malfunction Granted JPS6017317A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12483483A JPS6017317A (en) 1983-07-11 1983-07-11 Device for preventing detector from malfunction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12483483A JPS6017317A (en) 1983-07-11 1983-07-11 Device for preventing detector from malfunction

Publications (2)

Publication Number Publication Date
JPS6017317A true JPS6017317A (en) 1985-01-29
JPH0223809B2 JPH0223809B2 (en) 1990-05-25

Family

ID=14895244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12483483A Granted JPS6017317A (en) 1983-07-11 1983-07-11 Device for preventing detector from malfunction

Country Status (1)

Country Link
JP (1) JPS6017317A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0343527A (en) * 1989-07-10 1991-02-25 Ebara Corp Monitoring device for vacuum type sewage water collecting device
JP2019200067A (en) * 2018-05-14 2019-11-21 横河電機株式会社 Measuring system, measuring method, and pressure measuring device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149032A (en) * 1979-05-08 1980-11-20 Toyo Electric Mfg Co Ltd Pressure fluctuation abnormality detector
JPS5838327A (en) * 1981-08-31 1983-03-05 Kubota Ltd Device for dealing with abnormality of engine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149032A (en) * 1979-05-08 1980-11-20 Toyo Electric Mfg Co Ltd Pressure fluctuation abnormality detector
JPS5838327A (en) * 1981-08-31 1983-03-05 Kubota Ltd Device for dealing with abnormality of engine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0343527A (en) * 1989-07-10 1991-02-25 Ebara Corp Monitoring device for vacuum type sewage water collecting device
JP2019200067A (en) * 2018-05-14 2019-11-21 横河電機株式会社 Measuring system, measuring method, and pressure measuring device
US11022512B2 (en) 2018-05-14 2021-06-01 Yokogawa Electric Corporation Measurement system, measurement method, and pressure measurement apparatus

Also Published As

Publication number Publication date
JPH0223809B2 (en) 1990-05-25

Similar Documents

Publication Publication Date Title
US5309485A (en) Core automated monitoring system
US20120310582A1 (en) Partial stroke testing system coupled with fuel control valve
JP4768855B2 (en) Safety valve drive system
JPS6017317A (en) Device for preventing detector from malfunction
JP4230638B2 (en) Steam turbine controller for nuclear power plant
JP4445190B2 (en) Gas fuel supply device
JP3715340B2 (en) Electric drive
JPH05333195A (en) Reactor remote shut down device
JPS63686B2 (en)
JP2539514B2 (en) Boiler water supply control device
JPH0221661Y2 (en)
JPH0735094A (en) Device for preventing surging of compressor
JP2863581B2 (en) Turbine steam control valve controller
JPH04225723A (en) Shuttdown control device
JPH062785A (en) Anomaly judging device for cutoff valve
JPH0416601B2 (en)
JP3095468B2 (en) Reactor scram suppression device
JPH0470600B2 (en)
JPH0574037B2 (en)
JPH0688892A (en) Equipment for protecting control rod driving mechanism
JPH0355120Y2 (en)
SU1076604A1 (en) System for regulating extraction of vapor from turbine
JPH05119189A (en) Nuclear reactor injection water flow automatic controller
JPH01111104A (en) Feed-pump turbine controller
JPS60242393A (en) Controller for output from nuclear reactor