JPS60170808U - Control device for plasma processing equipment - Google Patents
Control device for plasma processing equipmentInfo
- Publication number
- JPS60170808U JPS60170808U JP5584184U JP5584184U JPS60170808U JP S60170808 U JPS60170808 U JP S60170808U JP 5584184 U JP5584184 U JP 5584184U JP 5584184 U JP5584184 U JP 5584184U JP S60170808 U JPS60170808 U JP S60170808U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- processing equipment
- control device
- mainly performs
- mainly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は、本考案によるプラズマ処理装置用制御装置の一
実施例を示すブロック図である。
１・・・パーソナルコンピュータ、２０・・・マイクロ
コンピュータ、５０・・・シーケンサ。The drawing is a block diagram showing an embodiment of a control device for a plasma processing apparatus according to the present invention. 1...Personal computer, 20...Microcomputer, 50...Sequencer.
Claims (1)
サと、アナログ量・パルス量を主に制御スルマイクロコ
ンピュータト、マン−マシン・インターフェイス、デー
タ管理を主に行うパーソナルコンピュータとで構成した
ことを特徴とするプラズマ処理装置用制御装置。It is characterized by consisting of a sequencer that mainly performs on/off control of plasma processing equipment, a microcomputer that mainly controls analog and pulse amounts, a human-machine interface, and a personal computer that mainly performs data management. Control device for plasma processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5584184U JPS60170808U (en) | 1984-04-18 | 1984-04-18 | Control device for plasma processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5584184U JPS60170808U (en) | 1984-04-18 | 1984-04-18 | Control device for plasma processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60170808U true JPS60170808U (en) | 1985-11-12 |
Family
ID=30578891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5584184U Pending JPS60170808U (en) | 1984-04-18 | 1984-04-18 | Control device for plasma processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60170808U (en) |
-
1984
- 1984-04-18 JP JP5584184U patent/JPS60170808U/en active Pending
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