JPS60169121A - Manufacture of magnetic medium - Google Patents

Abstract

PURPOSE:To produce a magnetic medium stably without requiring precise control of the N2 concentration, by spattering an FeCo target containing 5- 50atom% Co in the atmosphere where 10-10<4>ppm N2 gas is mixed in Ar gas. CONSTITUTION:A spattering source 4 has a target 6 made of Fe95-50 Co5-50 alloy wherein a Co concentration is selected to be 5-50atom%. After evacuating a bell jar 1, argon Ar gas mixed with nytrogen N2 gas is introduced into the bell jar 1 so as to create a required gas pressure therein. Under this condition, DC spattering is carried out with the target 6 used as a cathode while the substrate 3 is rotated. The Ar gas should contain 10-10,000ppm nitrogen N2 gas.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a magnetic medium having a magnetic film made of an amorphous (non-crystalline) alloy of %K*Fe-Cobal;
For example, for the production of various magnetic media such as magneto-optical recording media, such as magneto-optical disks, in which recording and reproduction are performed by irradiation with light, and ordinary magnetic recording media, in which recording and reproduction are performed by magnetic heads, etc., using ordinary electromagnetic induction. It relates to the manufacturing method of magnetic media that can be applied.

In a magnetic medium, such as a magneto-optical recording medium, the minimum diameter d of a recorded bit is given by d, E and -Ms, Hc. Here, Ms is the magnitude of magnetization, He is the coercive force, and Bw is given by the domain wall energy, so the larger the magnetization magnitude, Ms, the smaller the diameter d of the information bit can be. Therefore, it is desirable that the magnitude of magnetization Ms in the magnetic medium be as large as possible because it is possible to achieve high density.

On the other hand, when a nitrogen atom N is bonded to iron Fe as a magnetic material, its saturation magnetization Ms is known to increase compared to the case of iron alone. It is conceivable that various magnetic media including magneto-optical recording media may be constructed using iron-Fe magnetic films.

In the present invention, the saturation side LM is higher than that of the magnetic medium made of the iron-Fe magnetic film bonded with nitrogen atoms N described above.
The object of the present invention is to provide a method for manufacturing a magnetic medium, which can obtain a magnetic medium having excellent magnetic properties in a stable manner and with good reproducibility.

Further, other advantages and features of the present invention will become apparent from the detailed description of the present invention below.

That is, in the present invention, especially Co is 5 on the substrate.
~50 at% FeCo magnetic material was KI in argon gas.
A magnetic film is formed by sputtering in an atmosphere mixed with nitrogen gas of 0 to 110,000 pp.

An example of the manufacturing method of the present invention will be explained.

FIG. 1 shows the line configuration of an example of a sputtering apparatus for carrying out the manufacturing method of the present invention.
) in the axis, i! A base that rotates around 1o-o (2
) is provided, for example, on the lower surface thereof, a glass plate or acrylic plate constituting a target magnetic medium, for example, a magneto-optical recording medium,
A base body (3) made of a polycarbonate plate or the like is placed.

A sputter source (41) is disposed opposite to this base (3). (5) is a sputter source (41) provided between the sputter source (4) and the base (2), that is, the base (3). This sputtering source (4) has a target (6) made of an FeCo alloy plate having the above-mentioned required composition, that is, an alloy plate of Fe, 5-5oCo5-5o, with Co selected to be 5-50 at%. (8; each indicates a gunnet. After this is once exhausted inside the bell jar (1), a gas containing nitrogen N2 gas mixed in argon Ar gas is fed to the required gas pressure. DC sputtering is performed with the target (6) on the negative electrode side while rotating the substrate (3).In this case, the Ar in the bell jar (1)
The atmosphere inside Belljar (1) is 5X10 Torr.
After evacuating to a degree of vacuum, Ar is introduced at a pressure of about 5 x 10 Torr, and this Ar gas contains 10 to 11
00001) I) Contains nitrogen N2 gas.

In the magnetic films of each composition obtained in this manner, N2 in the Ar gas mentioned above during sputtering was used.
The results of measuring the term cod hi Ms when changing the concentration are shown in the second
Show to the prisoner. In Fig. 2, curves +211 (2a, tn and (c) are respectively Feg5CO5+Feg□C01o+
FegoCO1gFe70”o301 and Fe5oCo
The measurement results of the N2 concentration in the Ar gas and the magnetization Ms during sputtering are shown for each of the 5o magnetic films. As is clear from these curves, it can be seen that the magnetization Ms tends to increase when N2 gas is mixed, compared to when sputtering is performed in an atmosphere of Ar alone.

For example, when Feg5Co5 is formed in an Ar gas atmosphere, the magnetization is 1780 G/cc, but 1
When formed by mixing 100pp of N2, 1860
G/cc, and in Feg6CO1g, Ar
When sputtering in a single gas 1. MS+ is 18
It was 60G/cc, but when 11000pp of N2 was mixed in, it became 1960G/cc. In addition, in FIG. 2, the relationship with curve (2) Ms is measured. This curve (to) and curve c! It is clear from the comparison with D-(c) that FeCo
In the case of 5 to 5o, the magnetization becomes large, and the N2 content in Ar exhibits stable high magnetization over a wide range of 10 to iooooppm. This means that strict control of the concentration of N2 in Ar is not required, and in the actual production of magnetic films, that is, in the manufacture of magnetic media, magnetic media with stable, reproducible, and excellent characteristics can be obtained. This is an important benefit.

As described above, in the present invention, the FeCoWIi film is formed by sputtering in an atmosphere containing N2 in Ar, and by doing so, a magnetic film with high magnetization Ms can be stably obtained. It is possible.

Incidentally, methods for forming magnetic films include resistance heating, electron beam or ion beam bombardment, etc.
In the case of the resistance heating method or the vapor deposition method using electron beam bombardment, each is performed under a high degree of vacuum of about 10 Torr, and in the case of the ion beam method,
This is done at approximately 0 Torr. In contrast, in the case of the sputtering method, since it is carried out at about 10-2 to 10 Torr, it is possible to effectively bond with nitrogen when sputtering one evaporated particle. It seems likely that

In addition, in practice, when using Ar single gas for sputtering, the power of sputtering becomes large;
When N2 gas is mixed in, the power can be reduced because it is more active than Ar.
Mixing FeCo2 is itself industrially advantageous, and furthermore, FeCo has an odor of 5 to 50 pprr, and its magnetic properties are stable with respect to the N2 concentration, and as mentioned above, the KH2 concentration can be adjusted to 10 to 10,000 pprr.
Being able to choose L from a wide range is extremely advantageous industrially.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of a sputtering apparatus for carrying out the manufacturing method of the present invention, and FIG. 2 shows measurement results of magnetization Ms with respect to N2 concentration in the sputtering atmosphere. (1) is a bell jar, (3) is a substrate, and (41 is a sputtering source).

Claims (1)

[Claims] On the substrate, a FeCo magnetic material containing 5 to 50% of Co is placed on the substrate.
1. A method for manufacturing a magnetic medium, comprising forming a magnetic film by sputtering in an atmosphere in which 10 to 110,000 pp of nitrogen gas is mixed in argon gas.