JPS60168034A - Leak testing device - Google Patents

Leak testing device

Info

Publication number
JPS60168034A
JPS60168034A JP2286284A JP2286284A JPS60168034A JP S60168034 A JPS60168034 A JP S60168034A JP 2286284 A JP2286284 A JP 2286284A JP 2286284 A JP2286284 A JP 2286284A JP S60168034 A JPS60168034 A JP S60168034A
Authority
JP
Japan
Prior art keywords
compressed air
tested
pipe
connecting plate
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2286284A
Other languages
Japanese (ja)
Inventor
Toichi Onda
恩田 十一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP2286284A priority Critical patent/JPS60168034A/en
Publication of JPS60168034A publication Critical patent/JPS60168034A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE:To connect easily a body to be tested, and also to automate a device by connecting and separating a connecting plate connected to a communicating vessel, to and from the body to be tested by leading in and exhausting a compressed air to and from a compressed air pipe for surrounding the communicating vessel. CONSTITUTION:A body 11 to be tested which has a connecting seat 25 and is provided with a port 26 on its center part is placed in the inside of an outer case 1. When a compressed air is fed to a compressed air pipe 17 from a compressed air leading-in device 18, the compressed air pipe 17 extends and a connecting plate 15 descends, and the connecting plate 15 and the connecting seat 25 adhere tightly to each other. The outer case 1 and the inside of the body 11 to be tested are exhausted by vacuum pumps 2, 6. After completion of the exhaust, a gas is fed into the inside of the outer case 1 by a gas leading-in device 3 by switching stop valves 4, 5, 8 and 9, also a leak detector 7 is operated, and a leak condition of the body 11 to be tested is inspected. After completion of the inspection, the connecting plate 15 is lifted by exhausting the compressed air from the inside of the compressed air pipe 17, and the body 11 to be tested can be taken out. In this way, this device is connected easily to the body 11 to be tested and it can be automated.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明はリーク試験装置に係υ、特に真空容器として用
いられる被試験体の漏洩状態を調べるためのリーク試験
装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a leak test device, and more particularly to a leak test device for investigating the leak state of a test object used as a vacuum container.

〔発明の技術的背景〕[Technical background of the invention]

第1図は従来の外覆法(フード法)によるリーク試験装
置を示したもので、外箱/には真空ポンプJおよびHe
等のグローブガスを送るガス導入装置3がそnぞれ開閉
弁a、Sを介して並列に接続され、かつ、他の真空ポン
プtおよびリーク検出器7がそれぞれ開閉弁g、りを介
して並列に接続された連通管10が、上記外箱/を1通
して設けられている。
Figure 1 shows a leak test device using the conventional outer covering method (hood method).
A gas introduction device 3 for supplying globe gas such as the like is connected in parallel via on-off valves a and S, and another vacuum pump t and a leak detector 7 are connected in parallel via on-off valves g and ri, respectively. A communication pipe 10 connected in parallel is provided through the outer box.

このような装置においては、外箱/の内部に真空容器・
等の被試験体l/を挿入し、上記連通管10と被試験体
//とをボルト、ナツト等(図示せず)により接続する
。そして1両真空ボングコ、乙により、外箱/および沙
試験体iiの内部を真空排気した後、各真空ボンf、2
.を側のυ14閉弁グ、rを閉じ仙の開閉弁よ、りを開
いてガス導入装置3から外箱lの内部にガスを送る。被
試験体//に漏n、がある場合には、上記ガスが被試験
体//内に入り、このガスをリーク検出器7で検知する
ことにより被試験体l/の漏洩状態を詠べるようになさ
rる。
In such equipment, there is a vacuum container inside the outer box.
The communicating tube 10 and the test object // are connected with bolts, nuts, etc. (not shown). Then, after evacuating the inside of the outer box/sha test specimen ii by 1 vacuum bongco and Otsu, each vacuum bong f, 2
.. Close the υ14 valve on the side, close the valve r, and open the on-off valve on the side to send gas from the gas introduction device 3 to the inside of the outer box l. If there is a leak in the test object //, the above gas enters the test object //, and the leakage state of the test object l/ can be determined by detecting this gas with the leak detector 7. Let it be.

また、第2図は加圧′j′ロープ法(スニンファ法)に
よるリーク試験装置を示(またもので、第1図に示す装
か′のガス導入装置3とリーク検出器7とが交換して接
にメーされており、その他の部分は同様である。
Fig. 2 shows a leak test device using the pressurized rope method (sniffer method). The other parts are the same.

したがって、この装置においては外箱/および被試験体
//を真空排気した後、被試験体//内にガスを送り、
外箱/に漏れるガス量をリーク検出器3で検知するよう
になさ扛る。
Therefore, in this device, after evacuating the outer box/and the test object//, gas is sent into the test object//.
The leak detector 3 is configured to detect the amount of gas leaking into the outer box.

〔背景技術の問題点〕[Problems with background technology]

上記いずわの装置においても、被試験体/lを連通管l
Gに接続する場合にボルトおよびナツトを使用するため
、被試験体//の接続に手間がかかるという欠点を有し
ている。また、上記ボルト、ナツトの締め付けは手作業
により行なわれるため、リーク試験装置の自動化を図る
ことができないという欠点をも有している。
In the above-mentioned apparatus, the test object/l is connected to the communication tube l.
Since bolts and nuts are used when connecting to G, it has the disadvantage that it takes time and effort to connect the test object. Furthermore, since the bolts and nuts are tightened manually, there is also a drawback that the leak testing apparatus cannot be automated.

〔発明の目的〕[Purpose of the invention]

本発明は上記欠点に鑑みてなされたもので、被ド験体の
接続を容易に行なうことができ、かつ装置の自動化に対
応することのできるリーク試験装汐Yを提供することを
目的とするものである。
The present invention has been made in view of the above-mentioned drawbacks, and an object of the present invention is to provide a leak test equipment Shio Y that allows easy connection of a test object and is compatible with automation of the equipment. It is something.

〔発明の概要〕[Summary of the invention]

上記目的達成のため本発明のリーク試験装憤゛は、中央
部にボートが穿設された接続板を設け、この接続機のボ
ートに上記連通管を接続するとともに、上記連通管の周
囲に設けられ上記外箱を1通して圧縮空気導入装置に接
続される圧縮空気管を上記接続板上面に接続し、上記連
通管および圧縮空気管を蛇腺状に伸縮自在に形成してな
り、上記圧縮空気管を圧縮空気の導入ゼし出で伸縮させ
ることにより上記接続“飯の被試験体への接続および離
脱を行なうようにして構成されており、ボルトやナツト
等を用いずに接続するようになさ扛ている。
In order to achieve the above object, the leak test device of the present invention is provided with a connecting plate having a boat bored in the center thereof, the communicating pipe is connected to the boat of this connecting machine, and a connecting plate is provided around the communicating pipe. A compressed air pipe connected to the compressed air introducing device through the outer box is connected to the upper surface of the connecting plate, and the communicating pipe and the compressed air pipe are formed in a serpentine shape so as to be expandable and retractable. The above-mentioned connection is connected to and disconnected from the test object by expanding and contracting the air pipe as compressed air is introduced and discharged, and the connection can be made without using bolts or nuts. I'm embarrassed.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例を第3図を参照し、第1図および
第2図と同一部分には同一符号を付して曲、明する。
Hereinafter, an embodiment of the present invention will be explained with reference to FIG. 3, and the same parts as in FIGS. 1 and 2 are denoted by the same reference numerals.

第3図は本発明を外槙法によるリーク試験装置に適用し
た場合の実施例を示したもので、外箱/の上面にはフラ
ンジlコを有する開口13が設けらt、この開ロ/Ji
l:蓋体19により密閉されている。この蓋体/II−
には、真空ボンf乙およびリーク検tB器7をそgぞれ
開閉弁g、りを介して部列に接続した連通管10が、貫
通して設けられている。この連通管10の端部は、円板
状の接続、板15の中央部に穿設されたボート/6に接
続されている。また、」二記俗体/&には、上記連通管
10の周囲を取囲み端部が上記接続板/3の上面に接続
された圧縮空気管/7が貫通して設けらハ、この圧縮空
気管/7は外箱/の外部に設けられた圧縮空気導入装置
/ざに開閉弁19を介して接続されている。さらに、開
閉弁20を介して直空?ンゾ2/に接続されて蓋体/l
を貫通する排気管工か設けられており、この排気管nは
上記接続板枕板/Sの下inl側に板状に設けられた#
l、気而n面開にするように接続板/jを1通して接続
畑fでいる。上記述’3j7I管10.圧縮空気管/7
、排気管工は、ステンレス等の金属で形成されかつ接u
i、、 & isと蓋体/弘との11.の部分を蛇腹状
に形成し伸縮自在とさnている。上記接続板/36’)
排気@力の両側には0リング等の封止部相、2り、24
Lが設けらnている。
FIG. 3 shows an embodiment in which the present invention is applied to a leak test device using the Sotomaki method. Ji
l: Closed by the lid body 19. This lid/II-
A communication pipe 10 is provided through the pipe 10, through which a vacuum cylinder f and a leak detector 7 are connected to the parts via on-off valves g and ri, respectively. The end of this communication pipe 10 is connected to a disk-shaped connection, a boat/6 bored in the center of the plate 15. In addition, a compressed air pipe /7 that surrounds the communication pipe 10 and whose end is connected to the upper surface of the connection plate /3 is provided through the "2-note common /&"; The air pipe 7 is connected to a compressed air introduction device provided outside the outer box via an on-off valve 19. Furthermore, direct air? Connected to the housing 2/ and the lid body/l
An exhaust pipework is provided that passes through the #
1. Pass one connection plate /j through so that it is open on the n side, and connect it to the connection field f. Above description '3j7I tube 10. Compressed air pipe/7
, the exhaust pipe is made of metal such as stainless steel and has no connections.
11. with i,, & is and lid body/Hiroshi. The part is formed into a bellows shape so that it can be expanded and contracted. Above connection plate/36')
There are sealing parts such as O rings on both sides of the exhaust @ force, 2 holes, 24
L is provided.

上記装「tにおいては、上面に突出形成さノ1.た接続
座Jを有しこの接続座Jのほぼ中央部にボートJが設け
られた被試験体7ノを、外箱/の内部に配置し、圧縮空
気導入装置/ざを作動させる。そして、圧縮空気導入装
置/ざから圧縮空気管/7へ圧縮空気が込らnると、圧
縮空気管/7が伸び′を接続機15が下降し、接続板1
5ど被試験体//の接続座Jとが密接する。このように
接続板/Sと接続座5とを密接させた状態で、真空ボン
71″λ、乙により外箱/および被試験体//の内部の
真空排気を行なう。真空排気終了後、開閉弁≠、夕1g
、りを切換えて、ガス導入装置3によシ外箱/の内部に
ガスを送るとともにリーク検出器7を作動させ、被試験
体/lの漏洩状態を検査する。このとき、真空ボンダ2
/を作動させてV;気guから排気淘幻の排気を行なう
ことにより、接続板15と接続座5との間から侵入する
ガスが排気されるので、被試験体l/を通るガスのみを
検出することができ検出精度がより向」ニする。
In the above case, the test object 7, which has a connecting seat J formed protrudingly on the upper surface and a boat J provided approximately in the center of the connecting seat J, is placed inside the outer box. Then, when compressed air enters the compressed air pipe 7 from the compressed air introduction device 7, the compressed air pipe 7 extends and the connecting device 15 Descend and connect plate 1
5. The connection seat J of the test object// is in close contact. With the connection plate /S and the connection seat 5 in close contact with each other in this way, the inside of the outer box / and the test object // is evacuated using the vacuum bong 71''λ, B. After the evacuation is completed, open and close it. Ben≠, Yu 1g
, the gas introduction device 3 sends gas to the inside of the outer box, and the leak detector 7 is activated to inspect the leakage state of the test object. At this time, vacuum bonder 2
By activating / to perform exhaust and purification from V; gas, the gas entering from between the connecting plate 15 and the connecting seat 5 is exhausted, so that only the gas passing through the test object l is exhausted. Detection accuracy is improved.

そして、リーク試験が終了した後、すべての装置を停止
させ、圧縮空気管/7の内部から圧縮空気を排出させる
ことにより、接続板15を上昇略せ被試験体l/を取り
出すようになされる。この場合、上記接続板15の昇降
移動奮:は約1071174程度であるが、被試験体/
lの出し入れに際し側ら不都合はない。
After the leak test is completed, all the devices are stopped and the compressed air is discharged from the inside of the compressed air pipe /7, so that the connection plate 15 is lifted and the test object 1/7 is taken out. In this case, the lifting force of the connection plate 15 is about 1071174, but the
There are no inconveniences for the parties when putting in and taking out l.

上記装置によれば、リーク試験を容易に行なうことが可
能となυ、各装置および開閉弁等をコンビーータ等によ
り制御することによりリーク試験を自動的に行ガうこと
も可能となる。
According to the above-mentioned apparatus, it is possible to easily perform a leak test, and it is also possible to conduct a leak test automatically by controlling each device, on-off valve, etc. with a conbeater or the like.

なお、本実施例においては外稜法に適用した場合の例の
みを示したが、加圧グローブ法等その他のリーク試験装
置にも適用できることはもちろんである。
In this embodiment, only an example in which the method is applied to the external ridge method is shown, but it goes without saying that it can also be applied to other leak test devices such as the pressurized globe method.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明に係るリーク試験装憤は、連通
管に接続された接続板を、上記述通憤の周囲を取囲む圧
縮空気管に圧縮空気を禮1人、排出することにより移動
させて、上記接続板を被試験体に接続およびms、させ
るようにしたので、ボルト、ナツト等を用いることなく
容易に被試験体への接続を行なうことができ、被試験体
との接続に要する手間を省き、作梨時間の大幅な短縮を
図ることができる。1だ、圧縮空気導入装置宿・全自動
的に制御することによp自動的にリーク試験を行なうこ
とがb」能となる等の効果を奏する。
As described above, the leak test device according to the present invention moves the connecting plate connected to the communication pipe by discharging compressed air into the compressed air pipe surrounding the communication pipe. Since the connection plate is connected to the device under test, it is possible to easily connect the connection plate to the device under test without using bolts, nuts, etc. It is possible to save time and effort and to significantly shorten the time required to cultivate pears. 1. By fully automatically controlling the compressed air introduction device, it is possible to perform a leak test automatically.

4/6 図面の簡単な説明 第1図および第2図はそれぞれ従来のリーク試験装置を
示す概略格成図、第3図は本発明の一実施例を示′1−
檀略榊成図である。
4/6 Brief Description of the Drawings Figs. 1 and 2 are schematic diagrams showing a conventional leak test device, respectively, and Fig. 3 shows an embodiment of the present invention.
This is a sketch of Sakaki Seizu.

/・・・外箱、コ、t、2/・・・真空ボンダ、3・・
・ガス導入装儀″、グ、j、ざ、5’、/9.呵・・υ
′r]閉弁、7・・・リーク検出器、/C・・・連通管
、l/・・・被試験体、/2・・・フラン六/J・=・
開口、/41・・・蓋体、15・・・接続板、/6.ふ
・・・ポート5/7・・・圧縮空気管、/ざ・・・圧縮
空気導入装置、ユコ・・・排気管、J・・・排気Wtr
、21・・・、制止部イA 、 、2.5・・・1シづ
井づト座。
/...outer box, ko, t, 2/...vacuum bonder, 3...
・Gas introduction equipment'', gu, j, za, 5', /9.呵・・υ
'r] Valve closed, 7... Leak detector, /C... Communication pipe, l/... Test object, /2... Fran6/J.=...
Opening, /41... Lid body, 15... Connection plate, /6. Fu...Port 5/7...Compressed air pipe, /za...Compressed air introduction device, Yuko...Exhaust pipe, J...Exhaust Wtr
, 21..., restraint part A, , 2.5...1 position.

出願人代片人 猪 股 清 ち1目 名2図One applicant: Kiyoshi Inomata 1st eye Name 2 illustration

Claims (1)

【特許請求の範囲】[Claims] 装置の外箱と、この外箱を貫通して該外箱の内部に配置
された被試験体に接続される連通管とのどちらか一方に
真空ポンプおよびリーク検出器を並列に接続するととも
に他方に別の真空ポンプおよびガス導入装置を並列に接
続し、上記ガス導入装置から送られるガスが上記被試験
体から漏れる量を上記リーク検出器により検出するよう
にしてなるリーク試験装置において、中央部にポートが
穿設された接続板を設け、この接続板のポートに上記連
通管を接続するとともに、上記連通管の周囲に設けられ
上記外箱を1j辿して圧縮空気導入装埴に接続される圧
縮空気管を上記接続板上面に接続し、上記連通管および
圧縮空気管を蛇麹状に伸縮自在に形成してなり、上記圧
縮空気管を圧縮9勿の導入排出予伸縮させることにより
上記接続板の被試験体への接続および離脱を竹なうよう
にしたことを%徴とするリーク試験装置。
A vacuum pump and a leak detector are connected in parallel to one of the outer box of the device and a communication pipe that passes through the outer box and connects to the test object placed inside the outer box, and the other. In the leak testing apparatus, a central part is connected to another vacuum pump and a gas introduction device in parallel, and the leak detector detects the amount of gas sent from the gas introduction device leaking from the test object. A connecting plate with a port bored therein is provided, and the communicating pipe is connected to the port of this connecting plate, and the connecting pipe is provided around the communicating pipe and is connected to the compressed air introduction equipment by tracing the outer box 1j. A compressed air pipe is connected to the upper surface of the connecting plate, and the communicating pipe and the compressed air pipe are formed to be expandable and contractible in the shape of a serpentine mold. A leak test device whose characteristic is that the connection plate connects and disconnects from the test object in a circular manner.
JP2286284A 1984-02-13 1984-02-13 Leak testing device Pending JPS60168034A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2286284A JPS60168034A (en) 1984-02-13 1984-02-13 Leak testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2286284A JPS60168034A (en) 1984-02-13 1984-02-13 Leak testing device

Publications (1)

Publication Number Publication Date
JPS60168034A true JPS60168034A (en) 1985-08-31

Family

ID=12094517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2286284A Pending JPS60168034A (en) 1984-02-13 1984-02-13 Leak testing device

Country Status (1)

Country Link
JP (1) JPS60168034A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4605812A (en) * 1984-06-05 1986-08-12 Phillips Petroleum Company Process for removal of arsenic from gases

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762013A (en) * 1980-09-30 1982-04-14 Ricoh Co Ltd Focusing detecting circuit
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JPS593339B2 (en) * 1979-10-09 1984-01-24 京阪セロフアン株式会社 Automatic bag degassing device
JPS5762013A (en) * 1980-09-30 1982-04-14 Ricoh Co Ltd Focusing detecting circuit

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* Cited by examiner, † Cited by third party
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