JPS60164143A - Battery exchange apparatus of haulage car for clean room - Google Patents

Abstract

PURPOSE:To prevent the pollution of a clean room by a method in which a battery storage rack where batteries are electrically charged while being stored is provided below the clean room and a battery feeder to freely feed batteries between the rack and a haulage car is also provided. CONSTITUTION:In the exchange apparatus for a battery 9 to be provided to a haulage car B running in a down-flow type clean room A, a battery storage rack D where the battery 9 supplied is electrically charge while being stored is provided below the room A, and a battery feeder E to freely feed the battery 9 between the rack D and the haulage car B stopped at the battery exchanging position is also provided. Since the floor space for the room A is not reduced, the battery 9 can be exchanged while preventing the pollution of the room A by exhaust gas by means of the device E.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to battery replacement equipment for a transport vehicle for transporting goods in a clean room in a semiconductor manufacturing factory, medical equipment, etc. This article relates to battery replacement equipment installed in cars.

Transport vehicles may be equipped with batteries as a power source for the travel drive device or cargo handling drive device, or as a power source for control circuits and various control devices that are installed to perform travel control or cargo handling control. Then, the battery will be replaced with a charged battery at the appropriate time.

The equipment for this purpose generally includes a storage shelf that stores and charges the supplied batteries, and also allows batteries to be freely transferred between the battery storage shelf and a transport vehicle parked at the battery replacement position. A battery transfer device will be provided. In order to install such equipment in a clean room complete with Down 70, the present inventor considered a method of installing a battery storage shelf in the clean room. Due to the need to provide installation space, there is a disadvantage that the floor area of the clean room is narrow, and in order to avoid the problem, the clean room itself has to be large.
There was a risk that exhaust gas such as hydrogen gas generated from the battery storage shelf during charging would contaminate the inside of the clean room.
By the way, in order to avoid contamination from exhaust gas, we will install a cover to cover the battery storage shelf and a duct to guide and release the exhaust gas from the Shichiriki outside the clean room, but in the unlikely event that the cover or duct is removed. However, if exhaust gas leaks, it immediately contaminates the inside of the clean room, so there is a lack of reliability in avoiding pollution caused by exhaust gas.

Furthermore, when a battery storage shelf is installed in a clean room, a battery transfer device must be installed that can be raised and lowered over a large range within the clean room, and the operation of the battery transfer device is difficult. There was also the inconvenience that the inside of the clean room was contaminated by fine particles such as abrasion powder generated by this process.

The present invention has been made in view of the above-mentioned circumstances, and its purpose is to prevent the clean room from being contaminated by exhaust gas without reducing the floor area of the clean room. Another object of the present invention is to provide a clean room battery exchange facility that allows battery exchange to be performed while suppressing contamination of the clean room by a battery transfer device.

The characteristic configuration of the battery exchange equipment for clean room 8 vehicles according to the present invention is that a battery storage shelf for storing and charging supplied batteries is provided below the clean room, and a position between the battery storage shelf and the battery exchange equipment is provided. The present invention is characterized by the provision of a battery transfer device that can freely transfer the battery between the vehicle and the stopped vehicle, and its functions and effects are as follows.

In other words, since the battery storage shelf is provided below the clean room, the floor area of the clean room will not be reduced due to the battery storage shelf.
Furthermore, it is possible to prevent the exhaust gas from the pantry storage shelf from immediately contaminating the inside of the clean room. In other words, not only can the battery storage shelf be placed outside the air circulation channel formed at the bottom of the clean room, but also the battery storage shelf can be placed in a duct that guides and discharges exhaust gas outside the air circulation channel. Even in the case where the air circulation passage is covered with an extended cover,
The air in the air circulation channel is purified by a purification function that is not inherently provided in a clean room.
U 11-no pano-mu-ko V heat Yumiso
7 41 λ 1, θ) 1 line, so even if exhaust gas were to leak from the cover or the duct, the inside of the clean room would not be contaminated immediately.

Furthermore, the battery transfer device moves up and down between the battery storage shelf at the bottom of the clean room and the transport vehicle located on the floor and wall of the clean room, so it does not protrude significantly upward into the clean room. It is possible to prevent the fine particles generated from the mounting equipment from inhibiting the clean room as much as possible. In other words, when the battery transfer device operates while protruding into the clean room, there is a risk of contaminating the clean room.
As mentioned above, the battery multi-loading device can be protruded close to the floor wall in the clean room, and the Dakunflo set can quickly remove fine particles generated from the battery transfer device on the floor and wall due to the air flow inside the lean room. This synergistic effect with the fact that it can be discharged outside the clean room makes it possible to suppress contamination of the clean room due to the battery transfer device.

Therefore, while making effective use of the clean room floor space and effectively utilizing the clean room's original configuration, it is possible to suppress contamination of the clean room by exhaust gas from the battery storage shelves and particulates from the battery transfer equipment. This makes it possible to replace the battery, thereby providing a battery replacement facility for a lean room transport vehicle that has practical advantages.

Embodiments of the present invention will be described below based on the drawings.

As shown in Fig. 1, a HEPA filter (F) is installed on the ceiling side, a grating 11) for floor formation is installed, and a blower ( 2) to make purified air flow from the ceiling side to the floor side, forming a so-called Gukkun 70 complete clean room (5). ) and the goods storage section (3) provided on the vehicle body.
The transport vehicle (B) equipped with 4) is stacked so that it can run freely along the floor and wall surface, so that it can transport various goods, such as transporting a quefer storage capsule (x) in a semiconductor manufacturing factory. It is composed. However, in the figure (tJ)l
d. Capsule transport equipment into the clean room (3).

As shown in FIGS. 1 to 4, the transport vehicle (B) is provided with a pair of left and right propulsion wheels (6) each driven by a variable-speed electric motor, and a pair of front and rear propulsion wheels (6). A pair of idle wheels (6) are provided so as to be freely rotatable around the vertical axis, and the left and right propulsion wheels (5) are configured to be able to be steered by varying their rotational speeds. -1, a laser generator (7) that projects a vertically slit-shaped laser beam (6) along the transport vehicle travel path is fixedly installed in the clean room pronation, and a Radhe beam receiving element such as 7 Otodio 9 Seed is installed. A tracking sensor (8) in which a plurality of tracking sensors (8) are arranged in the width direction of the vehicle body is provided on the wall of the casing facing the laser generator (7) in the transport vehicle (B). The rotational speed of the left and right propulsion wheels (6) is automatically changed so that the central one of the light receiving elements receives light.
The transport vehicle (B) is configured to automatically travel along a travel route.

However, although not shown as an example, a controller that outputs various information such as destination data and cargo handling work instructions is fixedly installed, and a stop position for stopping the transport vehicle (B) at a cargo handling position or a battery replacement position is displayed. Marks are provided on the traveling road surface, and a receiver that transmits information from the controller to the control box on the vehicle body side and a mark reading sensor that transmits the bogie stop position to the control box are installed on the transport vehicle (B). Installed on the side, transport vehicle (B)
to stop the cargo handling robot (4) at a desired position for cargo handling, to operate the cargo handling robot (4), and to transport the cargo vehicle (B) after cargo handling.
to start the vehicle toward the next stop position, and to start the transport vehicle (B
) at the battery replacement position and starting the transport vehicle (B) after the pantry replacement is performed based on the information from the controller.

Next, the battery exchange equipment will be explained in detail.

An air circulation channel (r) formed in the lower part of the clean room (5) is used to store and charge the storage case (lO) of the supplied patch (January 9).
), and a cover integrated with the cover (oi) that covers the battery storage IJI (D), and a door that guides and discharges exhaust gas such as hydrogen gas from the battery storage IJI (D) to the outside of the air circulation flow path. .

duct (12+) and a duct (fan θ3 that blows air toward the exhaust gas) inside the cover (11), and are stopped at the battery storage shelf (D) and the battery exchange position. The battery transfer device (E) allows for complete transfer of the patch stored in the case (10) across the storage area of the transport vehicle (B) (I ()).
K equipped, carrying vehicle (B) Patch 1 equipped with K
9) and supply it to the battery storage shelf (D), and at the same time supply the fully charged batch 9) stored in storage a (D) to the transport vehicle (B), perform battery replacement work. It is configured so that it can be used.

However, (14) in the figure is a sliding door that opens and closes the opening θ0 formed in the clean room floor wall for insertion and removal of the battery transfer device (@),
It can be opened and closed freely.

The battery storage m (D) includes a plurality of charging shelves (a) arranged in the vertical direction, and a water supply S
7 of the battery storage cases (10) are provided below the charging shelf (a), and as shown in FIG. A charging terminal (T) into which the provided electric terminal (S) fits, and a recessed member (1 frame) into which the vertically sliding locking member (I7) provided in the battery storage case (10) engages. In addition, the integrated cover (II) covers all but the front surface on the battery insertion/removal side, and the upper surface and both sides of the battery storage case (10) are provided at each entrance of the charging S section (a). A rubber film-like body Q9) is provided which comes in contact with the lateral side surface. However, a pair of left and right cuts (
C) to allow smooth insertion and removal of the battery storage case (1o).

As shown in FIG. 5, the battery storage section on the transport vehicle side includes a power receiving terminal (s) into which the electric terminal (s) is fitted.
Ta) and the recessed member (with which the lock member (lη) engages)
18a).

To configure the battery transfer device (E), as shown in FIGS. 3 to 6, a U-shaped battery holder in front view is placed along a stand (20) along a vertical guide frame @11K. The battery push/pull operation frame □□□, which can be moved up and down by the drive and supported so that it can move up and down with respect to its cradle (A), is driven forward and backward by an electric morph. A retaining piece (22) is provided on the Panteri push-pull operation frame (22
A), a pair of left and right posture correction suppression rods (22B) placed on both sides of the retention piece (22A) and elastically biased toward the battery storage case; A rod (22C) for pushing the pantel storage case is provided, and the battery receiver is placed on the stand (
The locking member a7) can be unlocked by raising the lock member a7), and in this state, the push/pull operation frame can be moved to the retracting side to move the battery compartment (H) or the battery storage The battery storage case (lO) located on the shelf (D) can be pulled and moved toward the battery tray (20) side, and when the battery holder is pulled, the left and right pressing rods (22B) are used to move the battery storage case (lO) to the pantel storage case. In addition, by operating the push-pull operation frame to the protruding side, the pantries storage section (H) 6 can be opened while being pressed by the push-in operation rod (22C). is battery storage a
(It is configured so that the battery storage case (10) can be pushed into the DJ.

To explain further, as the battery push/pull operation frame (goods) is retracted, the battery storage case (10) is received on the side of the battery holder, and in this state, the battery holder lifts and lowers the pedestal (goods). The battery storage case (
lol Go to the battery compartment (H) Battery storage I
The procedure for supplying batteries into JI (D) is such that the battery transfer work can be carried out, and the battery receiver is made to operate the locking member θ by effectively utilizing the lifting and lowering function of the platform. It's Nishide.

However, the battery storage case (10) K is equipped with a fluid level detector □□□ that lights up when the battery fluid drops below a set level, and a display that lights up after detecting the sound of the 2-yen lighting operation. holder), and the battery holder is the pedestal (
An IVc is provided to notify the operator that water is required for charging. In other words, when performing battery replacement work while operating the battery transfer device (width), if it is confirmed that water supply is required, place the battery storage case (lO) taken out from the transport vehicle on the water supply shelf. (b) Let me keep K.
After water is supplied manually or automatically, it is supplied to the charging shelf (a).

In the above embodiment, the operation of the battery transfer device (E) is performed manually, and is also based on the detection information of the presence or absence of batteries in the charging shelf (a), the detection information of the charged battery, the battery fluid detection information, etc. It may also be possible to operate the vehicle automatically.

Next, another example will be described.

The specific configuration of the clean room (A) can be changed in various ways, and in short, it may be of any type as long as it allows purified air to flow from the ceiling side to the floor side.

The transport vehicle (B) has an article storage section (3) on the vehicle body itself.
), various configurations can be used, such as a type equipped with a trolley for storing articles, and a type that pulls a trolley portion for storing goods.

The specific configuration of Panpuri storage a (D) can be changed in various ways, and the specific configuration of the battery transfer device (with) can also be changed in various ways depending on the configuration of battery storage m (D) and transport vehicle (B). can.

[Brief explanation of the drawing]

The drawings show an embodiment of the battery exchange equipment for a clean room transport vehicle according to the present invention, and FIG. 1 is a cutaway front view of the part, and FIG. 6 is a plan view showing a state in which the battery is taken out to the transfer device side. FIG. 7 is a cutaway side view of the charging shelf. (9)...Battery, (11!...Cover integrated, H...Duct, (8)...Clean room, (B)...Transportation car, (D)...
-Battery storage shelf, (E)...Battery transfer device, (r)...Air circulation channel. Agent Patent Attorney Shuko Kitamura 1

Claims (1)

[Claims] ■ A battery (9) replacement facility installed in a transport vehicle (CB) that travels in a down 70 complete clean room (8), which charges the supplied battery (9) while storing it. Store the storage shelf (D) in the clean room (8).
), the battery transfer device (9) is provided below the battery storage shelf (D) and the transport vehicle (B) stopped at the battery exchange position and can freely transfer the battery (9).
E) Battery replacement equipment for clean room transport vehicles. ■ The battery storage a(f)) is located in the air circulation channel (r) formed at the bottom of the clean room (A), and a cover is integrated (ll'l) that covers the battery storage shelf (D). , and a duct N+2 for guiding and discharging exhaust gas from the air circulation flow path to the outside of the air circulation flow path.