JPS60164142A - Feeder equipment for clean room - Google Patents

Abstract

PURPOSE:To prevent the intrusion of fine particles in the running pipeline into a clean room by providing a shutter device to isolate the pipeline for cargo work from the other pipeline and also a cleaner for the pipeline for cargo work. CONSTITUTION:A pipeline L for running a truck is extended into a clean room, and a door 2 is provided for the opening 1 for cargo work of the pipeline (l) for cargo work positioned in the clean room among the pipeline L. In such a feeder equipment for clean room, a shutter device G to shut out the pipeline (l) for cargo work in an almost or completely enclosed state for the other pipeline is provided, and a cleaner K for the pipeline (l) for cargo work is also provided. The pipeline for cargo work is isolated from the other pipeline by the device G, fine particles in the pipeline for cargo work are removed out by the cleaner K, the opening 1 for cargo work is opened, and cargo work is performed. The intrusion of fine particles in the pipeline L into the clean room can thus be suppressed.

Description

DETAILED DESCRIPTION OF THE INVENTION According to the present invention, a running pipe for a bogie extends into a clean room, and opens into a part of the running pipe located in the clean room. This invention relates to clean room transport equipment equipped with a door that opens and closes a cargo handling port.

This type of conveyance equipment allows goods to be conveyed while running the trolley through a running conduit that is blocked from between external windows. Although this method can prevent fine particles such as dust and microorganisms from entering the clean room, it has the following disadvantages.

In other words, although the running conduit suppresses the intrusion of fine particles from the outside as described above, abrasion powder is generated due to slipping of the bogie running inside the conduit, and is supplied to the wheel shaft support of the bogie. A considerable amount of fine particles tend to be present due to the scattering of lubricating oil and the scattering of metal powder caused by rust occurring on the truck or running pipe. As a result, there was a risk that fine particles in the running pipe would enter the clean room when the port for any purpose was opened, and there was room for improvement.

The present invention has been made in view of the above-mentioned circumstances, and its first purpose is to prevent fine particles in the running pipeline from entering the clean room during cargo handling, simplify the equipment, and improve work efficiency. In addition to the first purpose mentioned above, the second purpose is to simplify the conveyance equipment by making the cart transfer be carried out by airflow, and also to make the airflow transfer effective. Accordingly, we will further improve the equipment to prevent particulates from entering the clean room in the running pipe by effectively utilizing the air-blocking gate that is originally provided for stopping and starting the bogie. The aim is to simplify the process.

The characteristic configuration of the clean room conveyance equipment according to the first aspect of the present invention is that a shutter device is provided to shut off the cargo handling pipe section from other pipe sections in a sealed or nearly sealed state; The point is that a purifying device that acts on the water is provided, and its effects are as follows.

In other words, the cargo handling pipe section is quickly cut off from other pipe sections using a shutter device, and after the particulates in the cargo handling pipe section are removed using a purification device, the cargo handling port is opened to allow cargo handling work to be carried out. This makes it possible to prevent particulates in the running pipe from entering the clean room.

By purifying only the cargo handling pipe section, which is a part of the traveling pipe, it is possible to suppress fine particles in the traveling pipe from entering the clean 2 frame. , compared to purifying the entire inside of the travel pipeline during cargo handling, a smaller capacity purifier can be used, and the equipment can be simplified. The time required for purification can be minimized, and cargo handling operations can be carried out efficiently.

Therefore, it is possible to effectively suppress the intrusion of particulates into the clean room while simplifying the equipment and improving work efficiency, thereby minimizing the intrusion of particulates into the clean room. The present invention has led to the development of lean room transport equipment that is extremely useful for transporting goods in various factories such as semiconductor manufacturing plants, medical equipment, etc., where necessary.

The characteristic configuration of the clean room conveyance equipment according to the second invention is that the running pipe is provided with airflow for transporting the trolley so that it can freely flow, and a pair of airflow blocking pipes are provided to block the pipe for stopping and starting the trolley. The main feature is that the distribution pipes are located on both sides of the cargo handling port, and a purifying device that acts on the cargo handling pipe section is provided, and its effects are as follows.

That is, not only can the same effect as in the first invention be obtained, but also the trolley can be moved by airflow, thereby simplifying the trolley transfer equipment. Utilizing a pair of airflow blocking gates that are originally provided to stop and start the truck, the cargo handling pipe section is connected to other pipe sections by these gates. This makes it possible to purify the cargo handling pipe section while blocking the air.

Therefore, not only can the same advantages as the first invention described above be obtained, but also the equipment for transporting the trolley and the equipment for suppressing the intrusion of fine particles can be simplified. The above advantages have led to the acquisition of conveying equipment for lean rooms.

Embodiments of the present invention will be described below based on the drawings.

As shown in Figures 1 and 2, a rectangular cylindrical bogie running pipe (Ll) is formed in a closed loop between a pair of clean room prisoners, and passes through each clean room. At the same time, as shown in FIGS. 8 to 9, a trolley (G) is provided which is driven by the transfer air flow flowing in the running pipe fLl, and The cargo handling conduit section located in the clean room (i) is equipped with a sliding door (2) to open and close the cargo handling port (1). (3) From the clean room prisoner on one side to the clean room on the other side (
4) It is configured so that it can be used when transporting various items into a clean room domestically.

To configure the clean room, a HEPA filter (Fl) is installed on the ceiling side, a gunching (3) for floor formation is installed, and a HEPA filter (IF) is installed to form the floor.
A blower (4) is provided that circulates air up and down while blowing air downward through I, thereby making purified air flow from the ceiling side to the rice side, so that it is configured in a so-called Dakun flow type.

Said trolley-1t-41! In other words, the article storage section with the top open is provided with Vc between a pair of front and rear pressure receiving plates (5), and two sets of left and right rollers (6) running on the bottom wall of the conduit are installed in the front and back direction of the trolley. Four pairs of auxiliary rollers (7) are provided at intervals on the lateral side walls of the conduit, and four sets of auxiliary rollers (7) are provided on the rectangular portions of the bogie (Bl), and buffer protrusions (8) are provided on the vehicle body. These are provided at the front and rear ends of the .

A pair of front and rear frames (9) that support left and right wheels (6) at the front and rear, respectively, are pivotally mounted around a vertical axis (P1 circumference) and are rotated on the horizontal side wall of the conduit. A long frame body supporting a pair of steering wheels (10) slidably in the width direction of the vehicle body (VcJIX attached at both ends of IIJ, a pair of front and rear wheels supporting frames (9)) Arms that protrude from each other (
The free end of 9A) is locked and connected to the elongated frame (Il) so as to move integrally therewith, and as shown in FIG. Occasionally,
The front and rear right and left rotation wheels (61, +61) can be operated to change their orientation so as to follow the pipe bending direction.

To explain the door (2), as shown in the fourth to FIG. A rotatable disc-shaped member (I) driven by an electric motor is interlocked and connected to the door (2) via a push-pull rod, and the door (2) is connected as the disc-shaped member α rotates. It is constructed so that it can be opened and closed.

A U-shaped seal contacts each of the door closing side edge and both side edge edges along the door opening/closing direction of the plate member (16) forming the cargo handling opening (1) in the closed state. rubber 97), and an elongated sealing rubber (I9) @:, which contacts the square shaft-like member ff& on the wall of the running conduit tLl on the door opening side in the closed state (I9), the door (11).
The bolts are fixed to the bottom side of the case so that the closed part can be sealed tightly.

However, it is possible to form each of the lateral edges along the door opening/closing direction into an inclined shape so that the door closing side is located at the internal force, so that the sealing rubber Q7) can be reliably joined by a wedge action. It is possible to do so.

To explain the operation configuration of the trolley for stopping and starting the cargo handling conduit section (I), see FIG. 8, FIG. 4, and FIGS. 11 (A) to (S). As shown in FIG.
An electric motor ( Mt), (M2) From Vc, separate swingable VCs are provided, and a suction flow path (
8) is connected to the conduit portion on the upper side of the conveyance side than the first air flow cutoff (Gl), and the first and second discharge flow paths (rl), (,,) are connected to the blower (b). , respectively, to the conduit portion on the downstream side of the conveyance from the second airflow blocking gate (G2), the first airflow blocking gate (Gl), and the cargo handling port f.
i+ and the first and second discharge channels (r,) respectively connected to conduit portions located between them.

(r2) respectively, vJl and the second goo) (G1)
.

As you close (G2), the goo) (Gl)
.

It is provided so that it can be discharged at (G,), and further,
Dolly iB) stopped on the upper side of the transport port of cargo handling port fl) 1
A pair of left and right conveyors are provided below the cargo handling opening (fl), and a pair of left and right conveyors (goods) are provided to transport the cargo (frVc) corresponding to the lower side of the cargo handling opening (fl), and a conveyor belt is provided to restrict the range of movement of the cart FB+ to the lower side of the transport. The first stopper (S□) and the second stopper (S2) that restricts the movement of the trolley tBl received by the first stopper (Sl) to the upper side of the conveyance are controlled by an electric motor, etc. A drive device is provided with a swingable VC which can be switched to the receiving release position separately, and each gate (G1), (Gg), conveyor gate η, and each stopper (Sl), (St) are sequentially operated. The structure is such that the trolley IBI can be stopped and started by manual operation.

To be more specific, as shown in FIG. 11(a), the cart u3) in the second or similar state is transferred by the conveyor 211, and then, as shown in FIG. ．． The second airflow blocking gate (G1'), d1 (which closes both gates), and both stoppers (St).

(While the trolley fBl is held on the
As shown in Figures (C) and 2), the first airflow blocking gate (G
1), open the door (2+1), and use the suction pressure of the blower to flow the domestic air in the clean room into the cargo handling pipe section (1), and then open the goods. Supply or 1lt) D. Perform discharge. Then, as shown in FIGS.
), and the closing operation of the second airflow cutoff and the opening operation of (Gz) are performed sequentially to start the trolley tB), and then, as shown in Fig. 11 (force, (!j)VC), The opening operation of the second airflow cutoff (G) (G, ) and the closing operation of the first airflow cutoff (G+) are performed to accept the next trolley (G)).

As shown in FIG. 11 (b), the first. By closing the second airflow blocking gates (GL) and (Ga), the cargo handling pipe section (1) can be closed off from other pipe sections in a sealed or nearly sealed state. As shown in Figures 8 and 4, the cargo handling pipe section (
1) Suction port (28a) in the blower installed below
) Exhaust hole (84a) t, cargo handling pipe section <
1) at the bottom of the side wall of the blower (A).
8b) An elongated air supply hole (24b) that communicates with K is formed in the upper part of the lateral wall of the cargo handling pipe section (J), and is further provided in the communication channel between the discharge port C28b) and the air supply hole (24b). A HEPA filter @51 is provided to constitute a purification device (2) which acts on the cargo handling pipe section (f).

Therefore, after purifying the inside of the cargo handling pipe (ll), the door (2)
), it is possible to prevent fine particles in the running pipe tLl from entering the clean room.

Note that the timing for starting the purification device (6) is the 11th
As shown in figure (A), the trolley (G) is
) to start when moving to 1st, or to start when moving to 11th
As shown in Figure (B) K, 1st 1. Second airflow cutoff gate (
a,)-(r,-)&藺do m /Fs l Imako' L
The Vr mode may also be activated.

In addition, the bar in Fig. 3 is a plate-like body that comes into contact with the free end of the first air flow cutoff gate (Gl) in the closed state, and directs the conveyor gate below the plate-like body (to). It is guided by the rollers so that it detours and rotates.

Next, capsule (3) is transported by trolley tBl.
12 to 14, the cargo handling equipment for transferring the capsules stored on the shelf CDI K to the shelf CDI K or the capsules stored on the shelf CDI K to the trolley tBl will be explained.

An article suspension frame (
C) is provided on the upper part of the VCC conduit section (r) that can swing around the vertical axis (P1 and can be freely moved up and down, and the capsule receiver is also (29a) on the shelf p). The article tray, which can be driven to slide in the horizontal direction and can be driven up and down, is driven in the direction of egress and retraction with respect to the shelf (4) on the frame (4). 11 I$ A flexible VC is provided, and the trolley t is installed using the article hanging frame (c).
Capsule supply or capsule/L/removal for Bl can be performed, and the article receiver is arranged between the frames.
The capsules (1) supplied from the end of the article hanging frame are placed on the shelf (b).
The capsules (3) stored in the racks can be stored in the racks, or the capsules (3) stored in the racks can be fed to the article hanging frame (c).

Next, another example will be described.

In addition to using airflow to run the trolley (inside the trolley),
A drive device such as an electric motor for running drive may be provided on the +, or a so-called linear motor may be used, with the side of the bogie (old bogie) serving as the secondary conductor, and the running conduit (LJ side serving as the primary coil part). Various changes can be made, such as making the vehicle run by moving the vehicle.

In addition, in order to make the trolley run using airflow, the method shown in Fig. 15 (
As shown in (a) to (e), each flow path (8).

Valves (Vl, (
V□).

(V□) may be provided and X may be applied. To be more specific, the first
As shown in Figure 5 (a), the first airflow blocking gate (G□)
Then, the old trolley (old) is stopped by the air cushion effect, and the trolley (old) is transferred by the conveyor @ as shown in Figure 15 (b) IC. In the state shown, the inside of the cargo handling pipe section (1) is purified, and then, as shown in Figure 1g15, goods are supplied or taken out while opening and closing the door (2).
As shown in FIG.
Bl may be started. In that case, as shown in Figure 16 (a) to (e),
The conveyor control may be omitted. - Connect the auxiliary suction flow path (RO) that communicates with the blower (E) to the pipe section located between the second air flow cutoff gate (Gt) and the cargo handling port (ll), and A valve (■.) is provided to open and close the auxiliary suction channel (Ro), and as shown in FIG. 16 (B), the carriage (
B) may be configured to be transferred to the cargo handling port fl) side.

To stop the trolley (g) at the location corresponding to the loading port fl) Vc, first. 2nd stopper (S□), (St)
If the position of the trolley IB) is determined using When supplying or taking out goods, first.
Second stopper (St).

(S may be omitted.

When providing the door (2), the structure for opening and closing can be changed in various ways, such as a sliding enclosure type or a swinging type, and the opening/closing operation configuration can also be changed in various ways.

In the above embodiment, the first and second airflow blocking gates (Gl
), (G2), cargo handling pipe section C1) VC
Although the case of configuring the shutter device (G) for
Same as the above Gu) (G□), CG2)
It is preferable that the shutter device fGl is configured by providing a flow path blocking door in the J type or slide type.

The base structure of the purification device (6) can be modified in various ways, such as by making air flow across the pipe from the soil wall to the bottom wall.

Fig. 17 shows an example of a case in which the cart (G) is run by applying the suction pressure of the blower (To), and the exhaust air from the blower is guided and discharged outside the clean room (4). In addition, there is a suction port that communicates with the domestic clean room (
Air is supplied into the traveling conduit (6) by the pipe (m)K equipped with 80 m) to purify the inside of the traveling conduit (6) as much as possible.

[Brief explanation of drawings]

The drawings show an embodiment of the clean room conveyance equipment according to the present invention, FIG. 1 is a schematic plan view of the conveyance equipment, FIG. 2 is a longitudinal sectional front view of the clean room, and FIG. 8 is a side view showing a cargo handling pipe section. , FIG. 4 is a view taken along the line 1f-ff in FIG. 8, FIG. 5 is a partially cutaway plan view of the #-tI4 attachment part, and each of FIGS. 6 and 7 is a view taken along the line ■-■ in FIG. and ■-■ line arrow view, Figure 8 is a partially cutaway plan view of the truck, Figure 9 is a bottom view of the truck, Figure 10 is a schematic bottom view of the truck, and Figures 11 (A) to (S). 12 to 14 are front views, plan views, and side views of the cargo handling equipment, and FIGS. 15 (a) to (e) and 16 Figures (A) to (E) are schematic diagrams of other embodiments.
FIG. 7 is a schematic side view of yet another embodiment. +11... Cargo handling port, (2)... Door,
Prisoner...Clean room, (g))...
Base jlL, (Gl... Shutter device, (G
Engineering)...Air flow blocking gate, (5)...
・Purification device, (Ll... traveling pipe, (A')
...Cargo handling pipe section. Agent Patent Attorney Osamu Kitamura Figure 11 (a) Figure 11 (f) Figure 12] 3 ■ Figure 14

Claims (1)

[Claims] ■ The running pipe for the bogie tBl is
4), and extends into the cargo handling pipe portion (of the traveling pipe (Ll) located inside the clean room).
1) The door (211
The conveyance equipment for clean and small size cargoes is provided with a shutter device IGI that shuts off the cargo handling pipe section (1) from other pipe sections in a sealed or nearly sealed state. Conveyance equipment for a clean room that is equipped with a purification device (transfer) that acts on the pipe section (A') and K. ■ The running pipe tLl of the bogie (G) is extended into the clean room country, and the cargo handling pipe portion of the running pipe (Ll) located in the clean room country (
It is a clean room transport equipment equipped with a door (2) that opens and closes at the loading/unloading port (1) at the entrance to the chrysanthemum. A pair of airflow cutoff gates (Gs) and (G2) that cut off the pipeline for stopping and starting the bogie (Bl) are installed on both sides of the cargo handling port fl. A clean room conveyance facility equipped with a purification device (transfer) that acts on the pipe section (1).