JPS60163221A - Thin film head for vertical magnetic recording and reproducing - Google Patents
Thin film head for vertical magnetic recording and reproducingInfo
- Publication number
- JPS60163221A JPS60163221A JP1832284A JP1832284A JPS60163221A JP S60163221 A JPS60163221 A JP S60163221A JP 1832284 A JP1832284 A JP 1832284A JP 1832284 A JP1832284 A JP 1832284A JP S60163221 A JPS60163221 A JP S60163221A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- recording
- thin film
- reproducing
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、垂直磁気記録再生用薄膜ヘッドに係り、特に
高い記＠密度を有し、記録再生特性の良好な薄膜磁気ヘ
ッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thin film head for perpendicular magnetic recording and reproducing, and particularly to a thin film magnetic head having a high recording density and good recording and reproducing characteristics.
［発明の背景〕
従来から提案されている代表的な垂直磁気記録再生用薄
膜ヘッドの主要部断面図および主要部見取り図を、第１
図（ａ）、（ｂ）に示す。同図で、１１は、記録再生を
行なうための主磁極、１２は。[Background of the Invention] A sectional view and a sketch of the main parts of a typical thin film head for perpendicular magnetic recording and reproducing that has been conventionally proposed are shown in the first part.
Shown in Figures (a) and (b). In the figure, 11 is a main magnetic pole for recording and reproducing, and 12 is a main magnetic pole.
閉磁路を形成させるための補助磁極、１３は、主磁極１
１と導体コイル１４間の電気的絶縁を行なうための有機
絶縁層、１５は、補助磁極１２と導体コイル１４の電気
的絶縁を行なうための無機絶ｌ＃層であり、補助磁極１
２は、主磁極１１に対して平行に位置している。垂直磁
気記録再生用薄膜ヘッドとしては、主磁極部のみで記録
再生を行なわせる目的で、補助磁極部の厚みｔを、主磁
極部の厚みＳに比べて大きくする事により、主磁極部に
磁束を集中させて、補助磁極部では、磁束を分散させて
いる。しかしながら１発明者らの研究によれば、第１図
（ａ）、（ｂ）の構造をもつ薄膜ヘッドによって、記録
再生を行なうと、記録再生は、主磁極部のみならず補助
磁極先端部でも行なわれることがわかった。そのため、
相互に影響を及ぼしあって、第２図に示す再生出力ｅの
記録密度りに対する依存性において、いくつかのピーク
を生じ、記録再生周波数によって、出力が異なるという
欠点があることがわかった。Auxiliary magnetic pole 13 for forming a closed magnetic path is main magnetic pole 1
An organic insulating layer 15 is an inorganic insulating layer for electrically insulating between the auxiliary magnetic pole 12 and the conductor coil 14;
2 is located parallel to the main magnetic pole 11. In a thin film head for perpendicular magnetic recording and reproducing, in order to perform recording and reproducing only with the main magnetic pole, the thickness t of the auxiliary magnetic pole is made larger than the thickness S of the main magnetic pole, so that magnetic flux is transferred to the main magnetic pole. The auxiliary magnetic pole part disperses the magnetic flux. However, according to research by the inventors, when recording and reproducing are performed using a thin film head with the structure shown in FIGS. I found out that it was done. Therefore,
It has been found that, due to mutual influence, several peaks occur in the dependence of the reproduction output e on the recording density shown in FIG. 2, and the output differs depending on the recording and reproduction frequency.
本発明の目的は、上記欠点を解決し、記録再生特性の良
好な垂直磁気記録用薄膜ヘッドを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned drawbacks and provide a thin film head for perpendicular magnetic recording with good recording and reproducing characteristics.
本発明者らは、再生出力の記録密度依存性における再生
出力の波立ち現象が、水平磁気記録ヘッドにおける空隙
損失と同様の理由でおこるものと考えた。すなわち、主
磁極と補助磁極先端部間の距離が記録波長の整数倍の時
は、主磁極と補助磁極先端部位置に対応する媒体位置で
の磁化が一致し、再生時の磁路内部を通る磁束が打ち消
されるために、再生出力の低下がみられると考えた。１
つの解決策として、補助磁極で記録再生が行なわれない
ように、補助磁極の厚さを充分に大きくして補助磁極部
の磁束を分散させることが考えられる。しかし、補助磁
極を厚くする事には技術的な限界があり、補助磁極先端
部での記録再生は防げない。そこで、発明者らは、主磁
極と補助磁極とを非平行とすることにより、補助磁極先
端部が記録波長の数倍以上の媒体記録領域にかかるよう
にした。そうする事によって補助磁極先端部での記録再
生の影響を平均化して打ち消すようにした。The present inventors considered that the ripple phenomenon of the reproduction output in the recording density dependence of the reproduction output occurs for the same reason as the air gap loss in a horizontal magnetic recording head. In other words, when the distance between the main magnetic pole and the auxiliary magnetic pole tip is an integral multiple of the recording wavelength, the magnetization at the medium position corresponding to the main magnetic pole and auxiliary magnetic pole tip position coincides, and the magnetization passes through the inside of the magnetic path during playback. It was thought that a decrease in the reproduction output was observed because the magnetic flux was canceled out. 1
One possible solution is to make the auxiliary magnetic pole sufficiently thick to disperse the magnetic flux in the auxiliary magnetic pole so that no recording or reproduction is performed using the auxiliary magnetic pole. However, there is a technical limit to increasing the thickness of the auxiliary magnetic pole, and recording and reproducing at the tip of the auxiliary magnetic pole cannot be prevented. Therefore, the inventors made the main magnetic pole and the auxiliary magnetic pole non-parallel so that the tip of the auxiliary magnetic pole spans the medium recording area several times the recording wavelength or more. By doing so, the influence of recording and reproducing at the tip of the auxiliary magnetic pole is averaged out and canceled out.
このような構造は、いわゆるバルク型のヘッドにおいて
は機械加工によって容易に得られるが、バルク型のヘッ
ドは高記録密度領域では記録再生効率が劣化してしまう
ことが知られており、垂直磁気記録方式にはむいていな
い。超高記録密度を達成するための垂直磁気記録用とし
ては、半導体技術と同様の技術によって作製する簿膜磁
気ヘッドを用いる必要があると考えられる。薄膜型のヘ
ッドで補助磁極と主磁極とを非平行とするためには特別
な工夫が必要であり、本発明によって初めて達成できる
。Such a structure can be easily obtained by machining in a so-called bulk type head, but it is known that the recording and reproducing efficiency of bulk type heads deteriorates in high recording density areas, and perpendicular magnetic recording It is not suitable for the method. For perpendicular magnetic recording to achieve ultra-high recording density, it is considered necessary to use a film magnetic head manufactured using a technology similar to semiconductor technology. In order to make the auxiliary magnetic pole and the main magnetic pole non-parallel in a thin-film head, special measures are required, and this can be achieved for the first time with the present invention.
以下実施例によって本発明を説明する。 The present invention will be explained below with reference to Examples.
実施例１
第３図（ａ）、（ｂ）は、本実施例における垂直磁気記
録再生用薄膜ヘッド主要部の縦断面図及び、見取り図を
示す。第３図において、２１は板を兼ねた補助磁極であ
り、Ｍ ｎ −Ｚ ｎフェライトが用いられている。基
板２１のトラック幅方向中央部にＶ字形の溝２２を形成
し、傘状の補助磁極を実現する。溝２２には、ガラスを
埋め込んだあと研摩して平坦な面を得る。溝の深さはこ
こでは２０μｍとした。記録再生特性上最適な深さはト
ラック幅によって異なるが、後で示すように少なくとも
１μｍ以上の深さが必要である。２３は、Ｓｉｎ、のス
パッタ法によって形成された空隙層であり、その膜厚は
３μｍとする。４体コイル２４は、ＡＱを蒸着法によっ
て形成し、ここでは、導体断面が幅２μｍ、高さ３μｍ
の５ターンのスパイラル型多巻きコイルとした。２５は
、導体コイル２４と、主磁ｔ７ｉｉ２６間の電気的絶縁
および、５タ一ンマルチコイル上面部の平坦化のために
用いたポリイミド系樹脂などの有機絶縁物層である。Embodiment 1 FIGS. 3(a) and 3(b) show a vertical sectional view and a sketch of the main part of a thin film head for perpendicular magnetic recording and reproduction in this embodiment. In FIG. 3, 21 is an auxiliary magnetic pole that also serves as a plate, and Mn-Zn ferrite is used. A V-shaped groove 22 is formed in the center of the substrate 21 in the track width direction to realize an umbrella-shaped auxiliary magnetic pole. Glass is embedded in the groove 22 and then polished to obtain a flat surface. The depth of the groove was here 20 μm. The optimal depth in terms of recording and reproducing characteristics varies depending on the track width, but as will be shown later, a depth of at least 1 μm or more is required. Reference numeral 23 denotes a gap layer formed by a sputtering method of Sin, and its film thickness is 3 μm. The four-body coil 24 is formed of AQ by a vapor deposition method, and here, the conductor cross section has a width of 2 μm and a height of 3 μm.
This is a 5-turn spiral multi-turn coil. Reference numeral 25 denotes an organic insulating layer such as polyimide resin used for electrical insulation between the conductor coil 24 and the main magnet t7ii 26 and for flattening the upper surface of the five-tank multi-coil.
絶縁層２５の厚さは、６μｍとした。主磁極２６は、７
７．５ ｗ ｔ％Ｎ ｉ −２２，５ｗ ｔ％Ｆｅ組成
のターゲットを用いたスパッタ法によって形成した。The thickness of the insulating layer 25 was 6 μm. The main magnetic pole 26 is 7
It was formed by a sputtering method using a target having a composition of 7.5 wt%Ni-22,5wt%Fe.
その時の記録媒体対向面における膜厚は、０．５μｍと
した。以上のヘッド作製工程ではパターンニングはホト
リソグラフィ技術を用いて行ない、切断、研削、研摩等
の工程を経て最賀的なヘット形状に仕上げた。このよう
な構造のヘッドは、Ｍ ｎ −Ｚ ｎフェライト基板に
あらかじめ加工を行なうことによって容易に作製でき大
量生産にむいているという特徴がある。これらの技術お
よびヘッド主要部以外の構造は、従来公知のものと同様
であるのでここでは省略した。記録再生に寄与する補助
磁極先端部が、主磁極に対して、傘状になっている上記
のような薄膜ヘッドで、記録再生を行なうと、第４図に
おいて実線で示した再生出力記録密度依存性が得られた
。At that time, the film thickness on the surface facing the recording medium was 0.5 μm. In the head manufacturing process described above, patterning was performed using photolithography technology, and the final head shape was completed through processes such as cutting, grinding, and polishing. A head having such a structure is characterized in that it can be easily manufactured by processing a Mn-Zn ferrite substrate in advance and is suitable for mass production. These techniques and the structure other than the main part of the head are the same as those conventionally known, so they are omitted here. When recording and reproducing are performed using a thin film head such as the one described above, in which the tip of the auxiliary magnetic pole that contributes to recording and reproducing is shaped like an umbrella with respect to the main magnetic pole, the reproducing output depends on the recording density as shown by the solid line in Figure 4. I got sex.
実施例２
第５図（ａ）、（ｂ）は、本実施例における垂直磁気記
録再生用薄膜ヘッド主要部の縦断面及び、見取り図を示
す。図において、３１は非磁性基板であり、ここではホ
トセラム（コーニング社製）を用いた。３２は、主磁極
であり、パーマロイあるいはＦｅＳｉを、スパッタ法に
よって形成し、その記録媒体対向面における膜厚を０．
２μｍとした。Embodiment 2 FIGS. 5(a) and 5(b) show a vertical cross section and a sketch of the main part of a thin film head for perpendicular magnetic recording and reproducing in this embodiment. In the figure, 31 is a nonmagnetic substrate, and here, Photoceram (manufactured by Corning Inc.) was used. Reference numeral 32 denotes a main magnetic pole, which is formed of permalloy or FeSi by sputtering, and has a film thickness of 0.05 mm on the surface facing the recording medium.
It was set to 2 μm.
３３は、スパッタ法で形成されたＳｉｎ、の空隙層であ
り、その膜厚は３μｍである。導体コイル３４は、ＡＱ
を蒸着法によって形成し、導体断面が幅２μｍ、高さ３
μｍの５ターンスパイラル型多巻きコイルとした。３５
は、補助磁極３７を主磁極３７に対して傘状に形成する
ための土台となる空隙層である。ここでは、傘の高さと
なるＳｉｎ、の厚みＷを変えて、スパッタ法によって形
成し１周知のウェットエツチング法あるいは、反応性イ
オンエツチング、反応性イオンミリングによるテーパエ
ツチング法により、エツチングパターン側面に傾斜をつ
けて主磁極と補助磁極とを非平行とした。このようなヘ
ッドは、実施例１のヘッドに比較して主磁極と補助磁極
とを非平行に精度良く加工することが多少難しくなるが
、記録再生特性に重要な役割を果たす主磁極を平坦な基
板上に形成できるので記録再生特性上有利である。Reference numeral 33 denotes a void layer of Sin formed by sputtering, and its film thickness is 3 μm. The conductor coil 34 is AQ
was formed by vapor deposition, and the cross section of the conductor was 2 μm wide and 3 μm high.
It was a 5-turn spiral multi-turn coil of μm. 35
is a gap layer that serves as a base for forming the auxiliary magnetic pole 37 in an umbrella shape with respect to the main magnetic pole 37. Here, the thickness W of Sin, which is the height of the umbrella, is changed, and the etching pattern is formed by a sputtering method.The etching pattern is etched with a slope on the side surface by a taper etching method using a well-known wet etching method, reactive ion etching, or reactive ion milling. The main magnetic pole and the auxiliary magnetic pole were made non-parallel. In such a head, compared to the head of Example 1, it is somewhat difficult to precisely machine the main pole and the auxiliary pole to make them non-parallel, but the main pole, which plays an important role in recording and reproducing characteristics, can be made flat. Since it can be formed on a substrate, it is advantageous in terms of recording and reproducing characteristics.
傘の形成は、正確なへ型でなくてもよく、平行部が少な
ければ のような形であってもよい。３６は、導体コイ
ル３４と、補助磁極３７を電気的に絶縁し、かつ５タ一
ンマルチターンコイル上面の平坦化のために用いたポリ
イミド系樹脂などの有機絶縁物層である。絶縁物層３６
の厚さは、６へμｍとした。補助磁極３７は、７６ａｔ
％Ｃｏ−１２ａｔ％Ｃｒ１２ａｔ％Ｚｒなる非晶質合金
を約２０μｍの厚さに、マスクスパッタ法で形成した。The shape of the umbrella does not have to be a precise hemlock; it can be shaped like this, as long as there are few parallel parts. 36 is an organic insulating layer such as polyimide resin used to electrically insulate the conductor coil 34 and the auxiliary magnetic pole 37 and to flatten the top surface of the five-turn multi-turn coil. Insulator layer 36
The thickness was 6 μm. The auxiliary magnetic pole 37 is 76at
An amorphous alloy of %Co-12at%Cr12at%Zr was formed to a thickness of about 20 μm by mask sputtering.
以上のヘッド作製工程ではパターニングはホトリソグラ
フィ技術を用いウェハを切断・研磨・研削して最終形状
にしあげた。これらの技術およびヘッド主要部以外の構
造は、従来公知のものと同様であるので、ここでは省略
した。本実施例でｗ＝３μｍとしたとき、実施例１と同
様に第４図の実線で示されると同様の波立ちのないなめ
らかな再生出力と、記録密度依存性が得られた。Ｗを変
えて実験した結果、一般に記録再生特性の波山ちが無視
できるためには、Ｗ≧１μｍ、すなわち、補助磁極と主
磁極とを非平行としたとき、その最も接近する距離と最
も離れる距離との差が１μｍ以上あることが必要なこと
がねがった。In the above head manufacturing process, patterning was performed by cutting, polishing, and grinding the wafer using photolithography technology to achieve the final shape. These techniques and the structure other than the main part of the head are the same as those conventionally known, so they are omitted here. In this example, when w=3 μm, a smooth reproduction output without ripples and recording density dependence similar to that shown by the solid line in FIG. 4 were obtained as in Example 1. As a result of experiments with different W, in general, in order for the peak-to-peak difference in the recording and reproducing characteristics to be ignored, W ≥ 1 μm, that is, when the auxiliary magnetic pole and the main magnetic pole are made non-parallel, the closest distance and the farthest distance between them are required. It was requested that there should be a difference of 1 μm or more.
本発明によれば、再生出力と記録密度依存性曲線におい
て、波打ち現象を防ぐことができ、垂直磁気記録再生用
薄膜ヘッドの記録再生特性を向上させる効果がある。According to the present invention, it is possible to prevent the waving phenomenon in the reproduction output and recording density dependence curve, and there is an effect of improving the recording and reproduction characteristics of a thin film head for perpendicular magnetic recording and reproduction.
第１図（ａ）、（ｂ）は従来の垂直磁気記録再生用薄膜
ヘッドの縦断面図、および見取り図、第２図は従来の垂
直磁気記録再生用薄膜ヘッドで記録再生した時の、再生
出力の記録密度依存性を示すグラフ、第３図（ａ）、（
ｂ）は本発明の一実施例における垂直磁気記録再生用薄
膜ヘッドの縦断面図、および見取り図、第４図は本発明
の一実施例におけね垂直磁気記録用ｖ＃、膜ヘットで記
録再生した時の、再生出力の記録密度依存性を示すグラ
フ、第５図（ａ）、（ｂ）は本発明の他の実施例におけ
る垂直磁気記録再生用薄膜ヘッドの縦断面図および見取
り図である。
１１・・・主磁極、１２・・・補助磁極、１３・・有機
絶縁層、１４・・・導体コイル、１５・・・無機絶縁層
、２１・・・補助磁極、２２・・・傘状絶縁層、２３・
・・無機絶縁層、２４・・・導体コイル、２５・・・有
機絶縁層、２Ｇ・・・主磁極、３１・・・非磁性基板、
３２・・・主磁極、３３・・・無機絶縁層、３４・・・
導体コイル、３５・・・傘芋１図
竿 ２ 図
ｋ ａ％＊ Ｄ （＊ＢＰＪ）
ヌ３０
（＋
３
竿牛図
３乙 金製 １ 廐 ｐ（庭８Ｆ１）
茅 ５図Figures 1 (a) and (b) are a vertical cross-sectional view and a sketch of a conventional thin film head for perpendicular magnetic recording and reproduction, and Figure 2 is the reproduction output when recording and reproduction is performed with a conventional thin film head for perpendicular magnetic recording and reproduction. Graph showing the recording density dependence of
b) is a vertical cross-sectional view and a sketch of a thin film head for perpendicular magnetic recording and reproducing according to an embodiment of the present invention, and FIG. FIGS. 5(a) and 5(b) are graphs showing the dependence of the reproducing output on the recording density when the readout is performed. FIGS. 5(a) and 5(b) are a vertical cross-sectional view and a sketch of a thin film head for perpendicular magnetic recording and reproducing according to another embodiment of the present invention. DESCRIPTION OF SYMBOLS 11... Main magnetic pole, 12... Auxiliary magnetic pole, 13... Organic insulating layer, 14... Conductor coil, 15... Inorganic insulating layer, 21... Auxiliary magnetic pole, 22... Umbrella-shaped insulation Layer, 23・
... Inorganic insulating layer, 24... Conductor coil, 25... Organic insulating layer, 2G... Main magnetic pole, 31... Nonmagnetic substrate,
32... Main magnetic pole, 33... Inorganic insulating layer, 34...
Conductor coil, 35... Umbrella potato 1 figure Pole 2 figure k a% * D (*BPJ) Nu 30 (+ 3 Pole figure 3 Otsu Gold 1 Tsuro p (Yard 8F1) Thatch 5 figure
Claims (1)
的に導通のある補助磁極、該主磁極と該補助磁極を磁気
的に絶縁する絶縁層および該絶縁層内に形成された信号
の入出力用コイルを具備した薄膜磁気ヘッドにおいて、
該主磁極と該補助磁極とが平行にならないように補助磁
極の空隙構成面を構成することを特徴とする垂直磁気記
録再生用薄膜ヘッド。 ２、特許請求の範囲第１項記載の薄膜磁気ヘットにおい
て、溝入れ加工を行なった非磁性基板上に該補助磁極を
形成するか、あるいは、該補助磁極を基板材とし、これ
に溝入れ加工したものを基板とし、該主磁極を該絶縁層
上に形成することを特徴とする垂直磁気記録再生用薄膜
ヘッド。 ３、特許請求の範囲第１項記載の薄膜ヘッドにおいて、
基板上に該主磁極を形成し、該補助磁極を該絶縁層上に
形成することを特徴とする垂直磁気記録再生用薄膜ヘッ
ド。 ４、媒体対向面において非平行な該補助磁極と該主磁極
が最も接近する距離と最も離れる距離との差が１μｍ以
上であることを特徴とする特許請求の範囲第１項乃至第
３項のいずれかの項に記載の垂直磁気記録再生用薄膜ヘ
ッド。[Scope of Claims] 1. A main magnetic pole for magnetic recording or reproduction, an auxiliary magnetic pole that is magnetically conductive with the main magnetic pole, an insulating layer that magnetically insulates the main magnetic pole and the auxiliary magnetic pole, and the insulating layer. In a thin film magnetic head equipped with a signal input/output coil formed in a layer,
1. A thin film head for perpendicular magnetic recording and reproducing, characterized in that a gap forming surface of the auxiliary magnetic pole is configured so that the main magnetic pole and the auxiliary magnetic pole are not parallel to each other. 2. In the thin film magnetic head according to claim 1, the auxiliary magnetic pole is formed on a non-magnetic substrate that has been subjected to grooving, or the auxiliary magnetic pole is used as a substrate material and the auxiliary magnetic pole is formed on a non-magnetic substrate that is grooved. 1. A thin film head for perpendicular magnetic recording and reproducing, characterized in that the main magnetic pole is formed on the insulating layer. 3. In the thin film head according to claim 1,
1. A thin film head for perpendicular magnetic recording and reproducing, characterized in that the main magnetic pole is formed on a substrate, and the auxiliary magnetic pole is formed on the insulating layer. 4. The difference between the closest distance and the distance between the non-parallel auxiliary magnetic pole and the main magnetic pole on the medium facing surface is 1 μm or more. A thin film head for perpendicular magnetic recording and reproduction according to any one of the items.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1832284A JPS60163221A (en) | 1984-02-06 | 1984-02-06 | Thin film head for vertical magnetic recording and reproducing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1832284A JPS60163221A (en) | 1984-02-06 | 1984-02-06 | Thin film head for vertical magnetic recording and reproducing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60163221A true JPS60163221A (en) | 1985-08-26 |
Family
ID=11968370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1832284A Pending JPS60163221A (en) | 1984-02-06 | 1984-02-06 | Thin film head for vertical magnetic recording and reproducing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60163221A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63195818A (en) * | 1987-02-09 | 1988-08-12 | Fujitsu Ltd | Thin film magnetic head |
| US5455730A (en) * | 1993-02-18 | 1995-10-03 | International Business Machines Corporation | Contact magnetic recording disk file with a magnetoresistive read sensor |
| US7268974B2 (en) * | 2004-04-30 | 2007-09-11 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic write head having a notched yoke structure with a trailing shield and method of making the same |
| US7343667B2 (en) | 2004-09-30 | 2008-03-18 | Hitachi Global Storage Technologies Netherlands B.V. | Methods of making a side-by-side read/write head with a self-aligned trailing shield structure |
| US7377024B2 (en) | 2005-03-25 | 2008-05-27 | Hitachi Global Storage Technologies Netherlands B.V. | Method of making a magnetic write head with trailing shield throat pad |
| US8230583B2 (en) | 2007-03-08 | 2012-07-31 | Hitachi Global Storage Technologies Netherlands B.V. | Method for manufacturing a magnetic write head |
| JP2012518864A (en) * | 2009-02-24 | 2012-08-16 | シーゲイト テクノロジー エルエルシー | Recording head for magnetic recording assisted by heat |
-
1984
- 1984-02-06 JP JP1832284A patent/JPS60163221A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63195818A (en) * | 1987-02-09 | 1988-08-12 | Fujitsu Ltd | Thin film magnetic head |
| US5455730A (en) * | 1993-02-18 | 1995-10-03 | International Business Machines Corporation | Contact magnetic recording disk file with a magnetoresistive read sensor |
| US7268974B2 (en) * | 2004-04-30 | 2007-09-11 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic write head having a notched yoke structure with a trailing shield and method of making the same |
| US7343667B2 (en) | 2004-09-30 | 2008-03-18 | Hitachi Global Storage Technologies Netherlands B.V. | Methods of making a side-by-side read/write head with a self-aligned trailing shield structure |
| US7377024B2 (en) | 2005-03-25 | 2008-05-27 | Hitachi Global Storage Technologies Netherlands B.V. | Method of making a magnetic write head with trailing shield throat pad |
| US8230583B2 (en) | 2007-03-08 | 2012-07-31 | Hitachi Global Storage Technologies Netherlands B.V. | Method for manufacturing a magnetic write head |
| US8634162B2 (en) | 2007-03-08 | 2014-01-21 | HGST Netherlands B.V. | Perpendicular write head having a stepped flare structure and method of manufacture thereof |
| US8797685B2 (en) | 2007-03-08 | 2014-08-05 | HGST Netherlands B.V. | Perpendicular write head having a stepped flare structure and method of manufacture thereof |
| JP2012518864A (en) * | 2009-02-24 | 2012-08-16 | シーゲイト テクノロジー エルエルシー | Recording head for magnetic recording assisted by heat |
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