JPS60161819U - Deviation measuring device - Google Patents
Deviation measuring deviceInfo
- Publication number
- JPS60161819U JPS60161819U JP4945584U JP4945584U JPS60161819U JP S60161819 U JPS60161819 U JP S60161819U JP 4945584 U JP4945584 U JP 4945584U JP 4945584 U JP4945584 U JP 4945584U JP S60161819 U JPS60161819 U JP S60161819U
- Authority
- JP
- Japan
- Prior art keywords
- movable element
- measuring device
- deviation measuring
- detectors
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Arrangements For Transmission Of Measured Signals (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は本考案による偏倚量測定装置の一例を示す路線
的側面図、第2図は他の実施例を示す路線的側面図、第
3図は特性曲線図である。
5は可動子、6a、6bは検出子、9a及び9 bは
発振器、10は演算回路である。FIG. 1 is a side view showing an example of the deflection measuring device according to the present invention, FIG. 2 is a side view showing another embodiment, and FIG. 3 is a characteristic curve diagram. 5 is a mover, 6a and 6b are detectors, 9a and 9b are oscillators, and 10 is an arithmetic circuit.
Claims (1)
に、上記可動子と共働して、該可動子の偏倚を電磁的又
(ま静電的検出する検出子を夫々装置し、これら一対の
検出子よりの信号に基いて得られる夫々の発振周波数の
尊を検出することによリ、上記可動子の偏倚量を検出す
ることを特徴とする偏倚量測定装置。Detectors that work together with the movable element to electromagnetically or electrostatically detect the deflection of the movable element are installed at symmetrical positions with the movable element being biased by pressure applied, and a pair of these detectors are installed. 1. A deflection amount measuring device characterized in that the deflection amount of the movable element is detected by detecting the amplitude of each oscillation frequency obtained based on the signal from the detector.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4945584U JPS60161819U (en) | 1984-04-04 | 1984-04-04 | Deviation measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4945584U JPS60161819U (en) | 1984-04-04 | 1984-04-04 | Deviation measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60161819U true JPS60161819U (en) | 1985-10-28 |
Family
ID=30566671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4945584U Pending JPS60161819U (en) | 1984-04-04 | 1984-04-04 | Deviation measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60161819U (en) |
-
1984
- 1984-04-04 JP JP4945584U patent/JPS60161819U/en active Pending
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