JPS60161664U - クリ−ンル−ム内の荷搬送設備 - Google Patents
クリ−ンル−ム内の荷搬送設備Info
- Publication number
- JPS60161664U JPS60161664U JP5097984U JP5097984U JPS60161664U JP S60161664 U JPS60161664 U JP S60161664U JP 5097984 U JP5097984 U JP 5097984U JP 5097984 U JP5097984 U JP 5097984U JP S60161664 U JPS60161664 U JP S60161664U
- Authority
- JP
- Japan
- Prior art keywords
- air
- duct
- transport equipment
- cargo
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5097984U JPS60161664U (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ム内の荷搬送設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5097984U JPS60161664U (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ム内の荷搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60161664U true JPS60161664U (ja) | 1985-10-26 |
JPH031334Y2 JPH031334Y2 (enrdf_load_stackoverflow) | 1991-01-16 |
Family
ID=30569616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5097984U Granted JPS60161664U (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ム内の荷搬送設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60161664U (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7665403B2 (en) | 2006-01-26 | 2010-02-23 | Murata Kikai Kabushiki Kaisha | Carrying system |
-
1984
- 1984-04-06 JP JP5097984U patent/JPS60161664U/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7665403B2 (en) | 2006-01-26 | 2010-02-23 | Murata Kikai Kabushiki Kaisha | Carrying system |
Also Published As
Publication number | Publication date |
---|---|
JPH031334Y2 (enrdf_load_stackoverflow) | 1991-01-16 |
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