JPS60160384A - Piezoelectric motor - Google Patents

Piezoelectric motor

Info

Publication number
JPS60160384A
JPS60160384A JP59013600A JP1360084A JPS60160384A JP S60160384 A JPS60160384 A JP S60160384A JP 59013600 A JP59013600 A JP 59013600A JP 1360084 A JP1360084 A JP 1360084A JP S60160384 A JPS60160384 A JP S60160384A
Authority
JP
Japan
Prior art keywords
rotor
piezoelectric
ceramics
piezoelectric motor
reciprocation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59013600A
Other languages
Japanese (ja)
Other versions
JPH0534908B2 (en
Inventor
Katsumi Fujimoto
克己 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP59013600A priority Critical patent/JPS60160384A/en
Publication of JPS60160384A publication Critical patent/JPS60160384A/en
Publication of JPH0534908B2 publication Critical patent/JPH0534908B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/105Cycloid or wobble motors; Harmonic traction motors

Abstract

PURPOSE:To improve the reproducibility of rotating speed of a piezoelectric motor by converting the deformation of an electrostrictive element to the reciprocation of a rotor, and converting the reciprocation to the rotary motion of the rotational shaft, thereby reducing the variation in the torque. CONSTITUTION:Columnar piezoelectric ceramics 2a-2d are disposed at an angular interval of 90 deg. each other on the outer periphery of a rotor 1. When a voltage is applied between the electrodes of the ceramics 2a-2d, the ceramics 2a- 2d elongate or contract proportionally to the magnitude, and the rotor 1 reciprocates. The inner periphery of the circular hole 5 of the rotor 1 always contacts the peripheral surface of the shaft 3 by the reciprocation, thereby rotatably driving the shaft 3 by the friction therebetween or the engagement of the gears.

Description

【発明の詳細な説明】 (技術分野) 本発明は電歪素子の変形を回転軸の回転運動に変換する
圧電モータに関する。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a piezoelectric motor that converts deformation of an electrostrictive element into rotational motion of a rotating shaft.

(従来技術) 従来、この種の圧電モータとしては、具体的には図示し
ないが、電歪素子とロータに摩擦を持たせて、このロー
タの回転と電歪素子の直線往復運動を合成して得られる
楕円状の運動の繰り返しにより上記ロータの回転を維持
するようにしたちのが一般に提案されでいる。
(Prior art) Conventionally, this type of piezoelectric motor, although not specifically shown, has been designed to have friction between an electrostrictive element and a rotor, and to combine the rotation of the rotor with the linear reciprocating motion of the electrostrictive element. It has generally been proposed to maintain the rotation of the rotor by repeating the resulting elliptical motion.

ところで、上記圧電モータでは、電歪素子のロータへの
接触圧の変化やこれら電歪素子およびロータの摩耗によ
り、トルク変動や回転数の再現性が劣化し、信頼性が低
いという問題があった。
By the way, the piezoelectric motor described above has a problem in that the reproducibility of torque fluctuations and rotational speed deteriorates due to changes in the contact pressure of the electrostrictive element to the rotor and wear of the electrostrictive element and the rotor, resulting in low reliability. .

(発明の目的) 本発明は」二記問題を解消すべくなされたものであって
、その目的は、圧電モータにおいて、電歪素子を周囲に
配置したロータを少なくとも2つの方向に往復動させて
ロータ中心の円孔の内周面をこの円孔に遊嵌する回転軸
に接触させて回転軸を回転駆動することにより、電歪素
子の変形をいったん変換の容易なロータの往復動に変換
した後に回転軸の回転運動に変換し、圧電モータのトル
ク変動を無くすとともに、回転数の再現性を向上させ、
信頼性の向上を図ることである。
(Object of the Invention) The present invention has been made to solve the problems mentioned in 2.The purpose of the present invention is to reciprocate in at least two directions a rotor in which an electrostrictive element is arranged around a piezoelectric motor. By bringing the inner peripheral surface of the circular hole at the center of the rotor into contact with the rotating shaft that loosely fits into this circular hole and driving the rotating shaft to rotate, the deformation of the electrostrictive element is temporarily converted into reciprocating motion of the rotor, which is easy to convert. Later, it is converted into the rotational motion of the rotating shaft, eliminating torque fluctuations of the piezoelectric motor and improving the reproducibility of the rotation speed.
The goal is to improve reliability.

(発明の構成) このため、本発明は、ロータの周囲に配置された複数対
の電歪素子の変形で上記ロータが少なくとも2つの方向
に往復駆動され、このロータの中右部を貫通する円孔に
遊嵌する回転軸が1−記ロータの往復動でその円孔の内
周面に接触して上記回転軸が回転駆動されることを特徴
としている。
(Structure of the Invention) Therefore, the present invention provides a method for reciprocating the rotor in at least two directions by deforming a plurality of pairs of electrostrictive elements disposed around the rotor, and for driving a circle passing through the middle right portion of the rotor. The rotary shaft loosely fitted into the hole contacts the inner circumferential surface of the circular hole by the reciprocating motion of the rotor, and the rotary shaft is rotationally driven.

(実施例) 以下、添付図面を参照して本発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

第1図および第2図において、1はロータ、2a+21
1、2c、 2dは電歪素子としての圧電セラミック、
3は回転軸、4はモータケースである。
In Figures 1 and 2, 1 is the rotor, 2a+21
1, 2c, and 2d are piezoelectric ceramics as electrostrictive elements,
3 is a rotating shaft, and 4 is a motor case.

四角形状を有する上記ロータ1は、たとえばセラミック
のように、電気絶縁性および剛性を有する材料からなる
ものである。上記ロータ1は、その中心部に回転軸3の
直径よりも充分大トな内径の円孔5を有する一方、この
円孔5を取り囲む西側面には上記圧電セラミック2a、
2b、2cおよび2dの先端部が嵌入する溝6a、6b
、6cおよび6dが形成されている。
The rotor 1, which has a rectangular shape, is made of a material having electrical insulation and rigidity, such as ceramic. The rotor 1 has a circular hole 5 at its center with an inner diameter sufficiently larger than the diameter of the rotating shaft 3, while the piezoelectric ceramic 2a, on the west side surrounding the circular hole 5,
Grooves 6a, 6b into which the tips of 2b, 2c and 2d fit
, 6c and 6d are formed.

上記ロータ1の外周部には相互に90度の角度間隔をお
いて円柱状の圧電セラミック2a、 2b。
Cylindrical piezoelectric ceramics 2a and 2b are arranged on the outer periphery of the rotor 1 at an angular interval of 90 degrees from each other.

2cおよび2dが配置されている。これら圧電セー3= ラミック2a、2b、2cおよび2dはいずれも先端部
および後端部に夫々電極(図示せず。)を有しており、
これら電極間に印加される電圧にほり比例してその軸方
向に伸縮する。
2c and 2d are arranged. These piezoelectric sensors 3 = ramics 2a, 2b, 2c, and 2d each have an electrode (not shown) at the tip and rear end, respectively.
It expands and contracts in its axial direction in proportion to the voltage applied between these electrodes.

上記圧電セラミック2a、 2+]、 2Cおよび2d
はその各後端部が横断面形状が円形のモータケース4の
内壁面に90度の角度間隔をおいて設けられた固定台座
7a、7b、7cおよび7dに夫々固定され、その各先
端部はロータ1の各溝6a、 613゜6cおよび6d
に夫々垂直に嵌入している。」―記圧電セラミック2a
、2b、2cおよび2dはその」二記各先端部とロータ
1の各溝6a、 611.6Cおよび6dの底面との間
にはスペーサ8a、 8b、 8cおよび8dが介装さ
れている。
The piezoelectric ceramics 2a, 2+], 2C and 2d
are fixed to fixing pedestals 7a, 7b, 7c and 7d, which are provided at 90 degree intervals on the inner wall surface of the motor case 4, which has a circular cross-sectional shape. Each groove 6a, 613° 6c and 6d of rotor 1
They are inserted vertically into each. ” - piezoelectric ceramic 2a
, 2b, 2c and 2d have spacers 8a, 8b, 8c and 8d interposed between their respective tips and the bottom surfaces of the grooves 6a, 611.6C and 6d of the rotor 1.

上記ロータ1の円孔5には、モータケース4の軸受部4
aおよび41〕に回転自在に取着された回転軸3が遊嵌
している。この回転軸3は、上記圧電セラミック2a、
2b、2cおよび2dの各先端部と各後端部との間の電
極(図示せず。)に電圧が印加されておらず、上記圧電
セラミック2a、 21+。
The circular hole 5 of the rotor 1 has a bearing portion 4 of the motor case 4.
a and 41], the rotary shaft 3 rotatably attached is loosely fitted. This rotating shaft 3 includes the piezoelectric ceramic 2a,
No voltage is applied to the electrodes (not shown) between each tip and rear end of piezoelectric ceramics 2a, 21+ of 2b, 2c, and 2d.

=4− 2cおよび2dに伸縮がないときには、上記回転軸3の
軸心がロータ1の円孔5の中心に一致している。
=4- When there is no expansion or contraction in 2c and 2d, the axis of the rotating shaft 3 coincides with the center of the circular hole 5 of the rotor 1.

なお、上記ロータ1の円孔5の内周面とこの内周面に対
向する回転軸3の周面ば摩擦係数の大きな材料でライニ
ングするかギヤーを切っておくことが好ましい。
It is preferable that the inner circumferential surface of the circular hole 5 of the rotor 1 and the circumferential surface of the rotating shaft 3 facing the inner circumferential surface be lined with a material having a large coefficient of friction or be geared.

上記のような構成を有する圧電モータにおいて、圧電セ
ラミック2a、2b、2cおよび2dの上記電極間には
、第3図に示すような電圧Ea=Asinωi、、 E
b =AcosωL+ Ec =Asin(ωt+π)
およびEd =Acos(ωt+π)の電圧が夫々印加
される。
In the piezoelectric motor having the above configuration, a voltage Ea=A sin ωi, E as shown in FIG.
b = AcosωL+ Ec = Asin(ωt+π)
and Ed=Acos(ωt+π) are applied, respectively.

圧電セラミック2a、 21)、 2cおよび2dの上
記電極間に、このような電圧Ea、Eb、EcおよびE
dが印加されると、その大きさに比例して上記圧電セラ
ミック2a、 2+3.2cおよび2dは伸縮し、ロー
タ1は、圧電セラミック2a、 2+]、 2cおよび
2dの上記電極間に電圧Ea、Eb、 EcおよびEc
lが印加されていない第4図(a)に示す状態か呟第3
図の時刻Lll L21 L3およびt4において夫々
第4図(l])、第4図(C)、第4図(d)および第
4図(e)に示すように変位し、この変位によってロー
タ1の円孔5の内周面か回転軸3の周面に絶えず接触し
、その間の摩擦もしくはギヤーの噛合により、」−配回
転軸3が回転する。
Such voltages Ea, Eb, Ec and E are applied between the electrodes of the piezoelectric ceramics 2a, 21), 2c and 2d.
When d is applied, the piezoelectric ceramics 2a, 2+3.2c and 2d expand and contract in proportion to the magnitude thereof, and the rotor 1 generates a voltage Ea between the electrodes of the piezoelectric ceramics 2a, 2+], 2c and 2d. Eb, Ec and Ec
The state shown in Fig. 4(a) where l is not applied is the third state.
At times Lll L21 L3 and t4 in the figure, the rotor 1 is displaced as shown in FIG. 4 (l]), FIG. 4 (C), FIG. 4 (d), and FIG. The inner circumferential surface of the circular hole 5 is in constant contact with the circumferential surface of the rotary shaft 3, and the rotary shaft 3 rotates due to friction therebetween or meshing of gears.

上記圧電モータでは、圧電セラミック2a、 2+]。In the piezoelectric motor described above, the piezoelectric ceramics 2a, 2+].

2cおよび2dの伸縮が単純なロータ1の往復動に変換
され、このロータの動トが回転軸3の回転に変換される
ため、圧電セラミック2a、 2+)、 2cおよび2
dとa−夕1との間の摩擦係数の変化等によってトルク
変動が発生したり回転数の再現性が低下するといったこ
ともなくすことがでとる。
The expansion and contraction of piezoelectric ceramics 2a, 2+), 2c and 2 are converted into simple reciprocating motion of the rotor 1, and this rotor's movement is converted into rotation of the rotating shaft 3.
This also eliminates the occurrence of torque fluctuations and decreases in the reproducibility of the rotational speed due to changes in the friction coefficient between d and a-1.

上記実施例において、圧電セラミック2a、 2)+。In the above embodiment, the piezoelectric ceramic 2a, 2)+.

2cおよび2dのうも、たとえば第5図に示すように、
圧電セラミック2aおよび2dに夫々対向する圧電セラ
ミック2bおよび2cとしてコイルバ・ネ11および1
2を使用するようにしてもよい。
2c and 2d, for example, as shown in FIG.
Coil springs 11 and 1 serve as piezoelectric ceramics 2b and 2c facing piezoelectric ceramics 2a and 2d, respectively.
2 may be used.

このようにすれば、圧電モータは2相の電圧EaとEd
により駆動することがでトる。
In this way, the piezoelectric motor has two phase voltages Ea and Ed.
It can be driven by torsion.

また、圧電セラミック2a、 211.20および2d
の伸縮量が小さい場合は、第6図に示すよ゛うに、油圧
シリンダ13内に圧電セラミック2a、 21)。
Also, piezoelectric ceramics 2a, 211.20 and 2d
If the amount of expansion and contraction is small, the piezoelectric ceramics 2a, 21) are placed inside the hydraulic cylinder 13, as shown in FIG.

2cおよび2dを浸漬しこの油圧シリンダ13の小径部
13aに出没自在に取り付けたピストン14によってロ
ータ1を駆動することもでトる。
It is also possible to drive the rotor 1 by means of a piston 14 which is immersed in the pistons 2c and 2d and is attached to the small diameter portion 13a of the hydraulic cylinder 13 so as to be retractable.

次に、本発明のいま一つの実施例を第7図および第8図
に示す。
Next, another embodiment of the present invention is shown in FIGS. 7 and 8.

第7図および第8図に示す圧電モータは、第1図および
第2図において説明した圧電モータlこおいて、圧電セ
ラミック2a、2+)、2cおよび2dに代えで電圧を
印加することによりベンディングか゛発生する圧電バ′
イモルア15a、15b、IScおよびl5clを電歪
素子として使用したもので、重複を避けるために第1図
および第2図に対応する部分には同一の符号を付してそ
の説明は省略する。
The piezoelectric motors shown in FIGS. 7 and 8 can be bent by applying a voltage to the piezoelectric ceramics 2a, 2+), 2c, and 2d instead of the piezoelectric motors described in FIGS. 1 and 2. Piezoelectric bar generated
Immolars 15a, 15b, ISc and l5cl are used as electrostrictive elements, and to avoid duplication, parts corresponding to those in FIGS. 1 and 2 are given the same reference numerals and their explanations will be omitted.

上記圧電バイモルフ15a、ISb、15cおよび15
dはいずれもその後端部がモータケース4に固定され、
そのベンディングによって先端部がロータ1を、第4図
(、)から第4図(e)を使用して説明したのと全く同
様に往復駆動し、回転軸3を回転させることかできる。
The piezoelectric bimorphs 15a, ISb, 15c and 15
d has its rear end fixed to the motor case 4,
By bending, the tip portion can reciprocate the rotor 1 in exactly the same manner as described using FIGS. 4(a) to 4(e), and rotate the rotating shaft 3.

以上の実施例において、ロータ1を四角形から6角形、
8角形、・・・等の多角形として多相の電圧で駆動する
こともでトる。
In the above embodiments, the rotor 1 has a rectangular shape to a hexagonal shape,
It is also possible to form a polygon such as an octagon, etc. and drive it with multiphase voltages.

(発明の効果) 以上、詳述したことからも明らかなように、本発明は、
電歪素子を使用した圧電モータにおいて、電歪素子の変
形を単純なロータの往復動に変換した後このロータの往
復動を回転軸の回転運動に変換するようにしたか呟回転
軸の回転が電歪素子とロータとの間の摩擦等に殆ど影響
されることはなく、トルク変動が少なく、回転数の再現
性の良好な信頼性の高い圧電モータを得ることがでとる
(Effects of the Invention) As is clear from the detailed description above, the present invention has the following effects:
In a piezoelectric motor using an electrostrictive element, the deformation of the electrostrictive element is converted into a simple reciprocating motion of the rotor, and then this reciprocating motion of the rotor is converted into the rotational motion of the rotating shaft. This can be achieved by obtaining a highly reliable piezoelectric motor that is almost unaffected by friction between the electrostrictive element and the rotor, has little torque fluctuation, and has good rotation speed reproducibility.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る圧電モータの一実施例の縦断面図
、第2図は第1図のII−II線方向断面図、第3図は
第1図の圧電モータの駆動電圧波形図、第4図(a)、
第4図(b)、第4図(C)、第4図(d)および第4
図(e)は夫々第1図の圧電モータの動作説明図、第5
図は第1図の圧電モータの変形例の説明図、第6図は油
圧を使用する実施例の油圧シリンダ、ピストンおよび圧
電セラミック部分の説明図、第7図は本発明に係るいま
一つの実施例の縦断面図、第8図は第7図の1v−iv
線方向断面図である。 1 =−o−夕、2a、2b、2c、2d−圧電セラミ
ック、訃・・回転軸、4・・・モータケ−人、5・・・
円孔、11.12・・・コイルバネ、13・・・油圧シ
リンダ、14・・・ピストン、15a、 15b、15
c、 15d ・・−圧電バイモルフ。 特許出願人 株式会社村田製作所 代理 人 弁理士前 山 葆 ばか2名8− 第5図 8d 2d 2 a C C 520 第7図 15)0 2o(2b)(2cX2d)
FIG. 1 is a longitudinal cross-sectional view of an embodiment of the piezoelectric motor according to the present invention, FIG. 2 is a cross-sectional view along the line II-II of FIG. 1, and FIG. 3 is a drive voltage waveform diagram of the piezoelectric motor of FIG. 1. , Figure 4(a),
Figure 4(b), Figure 4(C), Figure 4(d) and Figure 4
Figure (e) is an explanatory diagram of the operation of the piezoelectric motor in Figure 1 and Figure 5, respectively.
The figure is an explanatory diagram of a modified example of the piezoelectric motor shown in Figure 1, Figure 6 is an explanatory diagram of a hydraulic cylinder, piston, and piezoelectric ceramic part of an embodiment using hydraulic pressure, and Figure 7 is another embodiment according to the present invention. The vertical cross-sectional view of the example, FIG. 8 is 1v-iv of FIG.
It is a line direction sectional view. 1 =-o-Yu, 2a, 2b, 2c, 2d-Piezoelectric ceramic, deceased...Rotating shaft, 4...Motorket, 5...
Circular hole, 11. 12... Coil spring, 13... Hydraulic cylinder, 14... Piston, 15a, 15b, 15
c, 15d...-Piezoelectric bimorph. Patent Applicant: Murata Manufacturing Co., Ltd. Agent: Former Patent Attorney 2 Baka 8- Figure 5 8d 2d 2 a C C 520 Figure 7 15) 0 2o (2b) (2cX2d)

Claims (1)

【特許請求の範囲】[Claims] (1)ロータの周囲に配置された複数対の電歪素子の変
形で上記ロータが少なくとも2つの方向に往復駆動され
、このロータの中心部を貫通する円10こ遊嵌する回転
軸が上記ロータの往復動でその円孔の内周面に接触して
上記回転軸が回転駆動されるようにしたことを特徴とす
る圧電モータ。
(1) The rotor is reciprocated in at least two directions by deformation of a plurality of pairs of electrostrictive elements arranged around the rotor, and a rotating shaft loosely fitted in a circle passing through the center of the rotor is connected to the rotor. A piezoelectric motor characterized in that the rotary shaft is rotationally driven by contacting the inner circumferential surface of the circular hole through reciprocating motion of the piezoelectric motor.
JP59013600A 1984-01-28 1984-01-28 Piezoelectric motor Granted JPS60160384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59013600A JPS60160384A (en) 1984-01-28 1984-01-28 Piezoelectric motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59013600A JPS60160384A (en) 1984-01-28 1984-01-28 Piezoelectric motor

Publications (2)

Publication Number Publication Date
JPS60160384A true JPS60160384A (en) 1985-08-21
JPH0534908B2 JPH0534908B2 (en) 1993-05-25

Family

ID=11837701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59013600A Granted JPS60160384A (en) 1984-01-28 1984-01-28 Piezoelectric motor

Country Status (1)

Country Link
JP (1) JPS60160384A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01128075U (en) * 1988-02-26 1989-08-31
US5079471A (en) * 1990-06-04 1992-01-07 Martin Marietta Corporation High torque harmonic traction motor
WO2007144277A1 (en) 2006-06-13 2007-12-21 Siemens Aktiengesellschaft Solid-state actuator drive apparatus control device, method for driving a solid-state actuator drive apparatus and solid-state actuator drive apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022477A (en) * 1983-07-15 1985-02-04 Teijin Seiki Co Ltd Step motor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022477A (en) * 1983-07-15 1985-02-04 Teijin Seiki Co Ltd Step motor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01128075U (en) * 1988-02-26 1989-08-31
US5079471A (en) * 1990-06-04 1992-01-07 Martin Marietta Corporation High torque harmonic traction motor
WO2007144277A1 (en) 2006-06-13 2007-12-21 Siemens Aktiengesellschaft Solid-state actuator drive apparatus control device, method for driving a solid-state actuator drive apparatus and solid-state actuator drive apparatus

Also Published As

Publication number Publication date
JPH0534908B2 (en) 1993-05-25

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