JPS60157255A - Photosemiconductor device - Google Patents

Photosemiconductor device

Info

Publication number
JPS60157255A
JPS60157255A JP59012965A JP1296584A JPS60157255A JP S60157255 A JPS60157255 A JP S60157255A JP 59012965 A JP59012965 A JP 59012965A JP 1296584 A JP1296584 A JP 1296584A JP S60157255 A JPS60157255 A JP S60157255A
Authority
JP
Japan
Prior art keywords
light guide
ring
light
optical semiconductor
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59012965A
Other languages
Japanese (ja)
Inventor
Kazuhiko Niwayama
和彦 庭山
Moichi Yoshida
吉田 茂一
Toyohiko Kiyohara
豊彦 清原
Tsutomu Nakagawa
勉 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59012965A priority Critical patent/JPS60157255A/en
Publication of JPS60157255A publication Critical patent/JPS60157255A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4202Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Thyristors (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE:To obtain the titled device excellent in oscillation resistance without the positional shift of a light guide off the photo receiving plane by a method wherein a ring that fixes the light guide by positioning is fixed around the photo receiving plane of a photosemiconductor element. CONSTITUTION:The titled device is provided with the ring 21 fixed around the photo receiving plane 9 of said element and then guiding the light guide 10. After the element is formed by using the ring 21, e.g. of mortar form in the top and with a hole-diameter D of the degree that the light emission end of the guide 10 is tightly fitted, the ring 21 is fixed around the photo receiving plane 9 of the element with adhesive or the like and then connected to the guide 10, resulting in the completion of assembly. Thereby, since the ring 21 is of mortar form in the top and the element is guided and fixed so that the light guide 10 may be fitted to a circle of the hole-diameter D during assembly, the assembly becomes facilitated. Besides, this device has the structure of holding the light emission surfaces of the light guide 10 at an optimum position, and of fixing and supporting them at a required position after assembly, and is therefore highly resistant to a lateral oscillation.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、光半導体エンメントの受光面とライトガイ
ドの位置合せt容易にして所定位置に固定する光半導体
装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an optical semiconductor device in which the light receiving surface of an optical semiconductor element and a light guide are easily aligned and fixed in a predetermined position.

〔従来技術〕[Prior art]

第1図はごく一般的な光トリガサイリスタの模式断面図
である。この図において、1は陰極、2は陰極フランジ
、3は光結合端子、4は絶縁筐体、5は陽極フランジ、
6は陽極で、上記1〜6の各部でパッケージを構成する
。7は所定の処理ケ受けたシリコンウェハ、8は前記シ
リコンウェハTにろう材により接着された金属補強板で
、上記7゜8で光トリガサイリスタエレメント(以下単
にエンメントと呼ぶ)を構成する。9は前記エンメント
の受光面、10はライトガイドで、例えば石英ガラスで
できており、一方の端は光結合端子3でパッケージに固
着され、その端面ばパッケージ外部に露出しており、他
方の端面はエンメントの受光面9と対面している。以下
、上記光トリガサイリスクの組立てについて説明する。
FIG. 1 is a schematic cross-sectional view of a very common optical trigger thyristor. In this figure, 1 is a cathode, 2 is a cathode flange, 3 is an optical coupling terminal, 4 is an insulating casing, 5 is an anode flange,
6 is an anode, and each of the parts 1 to 6 above constitutes a package. Reference numeral 7 denotes a silicon wafer which has been subjected to a predetermined treatment, and 8 a metal reinforcing plate bonded to the silicon wafer T using a brazing material. Reference numeral 9 denotes a light receiving surface of the enment, 10 a light guide made of, for example, quartz glass, one end of which is fixed to the package through an optical coupling terminal 3, one end surface of which is exposed outside the package, and the other end surface of which is fixed to the package through an optical coupling terminal 3. faces the light-receiving surface 9 of the enment. Hereinafter, the assembly of the above-mentioned optical trigger scissor will be explained.

まず、陰極1を陰極フランジ2を介して絶縁筺体4に固
着し、ライトガイド10’&元結合端子3を介して絶縁
筐体4に固着する。以上のようにしてできた陰極1.陰
極フランジ21元結合端子3およびライトガイド10の
付いた絶縁筺体4の中に、ヨ(知られた方法により製造
されたエンメントを受光面9とライトガイド10の一方
の端面が対面するように位置合せを行い適当な方法で固
定し、しかる後に陽極6を陽極フランジ5を介して絶縁
筐体4に固着し光トリガサイリスタが完成する。以上の
ように構成された光トリガサイリスクは、光結合端子3
に接続された光源より光信号を受け、ライトガイド10
をとおしてエンメントの受光面9に上記光信号を供給す
ることによりターンオンさせることができ、光信号によ
りターンオンさせることt除げは電気トリガサイリスタ
と同様の機能を有する。ところが、元信号でトリガさせ
るためにライトガイド1oの光出射面とエンメントの受
光面9の精密な位置合せが必要で、それが電気トリガサ
イリスクに比べて光トリガサイリスタの組立ケ困難にし
ている。例えは、上述のような組立においては、エンメ
ントの受光面9が存在する面と陰極1が対面しているた
め、位置合せの際受光面9およびライトガイド1oか陰
極1の陰に隠れてしまい目視での位置合せが困難となっ
ている。また、このようにしてつくられた光トリガサイ
リスタも内部のライトガイド1oがその一方の端で絶縁
筐体4に固着されているだけで、例えば光トリガサイリ
スクに横方向の振動を加えると、ライトガイド1oの他
方の端が振動し、瞬間的に元の出射端面と受光面9との
位置ずれが起きてしまう。このため、振動が起きる可能
性のある場所での光トリガサイリスクの使用可能性か閉
ざされてしまう等の欠点があった。
First, the cathode 1 is fixed to the insulating casing 4 via the cathode flange 2, and then fixed to the insulating casing 4 via the light guide 10' and the original coupling terminal 3. Cathode made as above 1. In an insulating housing 4 with a cathode flange 21, a connecting terminal 3, and a light guide 10, an enment (manufactured by a known method) is placed so that the light-receiving surface 9 and one end surface of the light guide 10 face each other. The optical trigger thyristor is completed by fitting the anode 6 and fixing it by an appropriate method, and then fixing the anode 6 to the insulating casing 4 via the anode flange 5. terminal 3
The light guide 10 receives an optical signal from a light source connected to the
It can be turned on by supplying the optical signal to the light receiving surface 9 of the element through the light receiving surface 9 of the element, and has the same function as an electric trigger thyristor except that it is turned on by the optical signal. However, in order to trigger with the original signal, precise alignment of the light emitting surface of the light guide 1o and the light receiving surface 9 of the element is required, which makes assembly of the optical trigger thyristor more difficult than that of the electric trigger thyristor. . For example, in the assembly described above, since the cathode 1 faces the surface where the light receiving surface 9 of the enment exists, the light receiving surface 9 and the light guide 1o may be hidden behind the cathode 1 during alignment. Visual alignment is difficult. In addition, the optical trigger thyristor made in this way also has an internal light guide 1o fixed to the insulating casing 4 at one end; for example, when applying lateral vibration to the optical trigger thyristor, The other end of the light guide 1o vibrates, causing instantaneous positional deviation between the original light emitting end surface and the light receiving surface 9. For this reason, there have been drawbacks such as the possibility of using the optically triggered sensor in places where vibration may occur.

〔発明の概要〕[Summary of the invention]

この発明は、以上のような従来のものの欠点を除去する
ためになされたもので、光トリガサイリスタのエンメン
トの受光面の周囲の上にライトガイド位置合せ用のリン
グを接層固定することにより、ライトガイドと受光面の
位置合せを容易にする光半導体装置を提供するものであ
る。
This invention was made in order to eliminate the drawbacks of the conventional ones as described above, and by fixing a light guide alignment ring in contact with the periphery of the light receiving surface of the enement of a light trigger thyristor, The present invention provides an optical semiconductor device that facilitates alignment of a light guide and a light receiving surface.

〔発明の実施例〕[Embodiments of the invention]

第2図(a)、(b)はこの発明の一冥加例な示す平面
図および断面図である。これらの図で、21は前記ライ
トガイド10Y誘導するリングで、上面がすりばち状と
なっている。このリング210穴径りはライトガイド1
0の光の出射端がぴったりはまる程度の大きさである。
FIGS. 2(a) and 2(b) are a plan view and a sectional view showing an additional example of the present invention. In these figures, 21 is a ring that guides the light guide 10Y and has a dome-like upper surface. This ring 210 hole diameter is light guide 1
The size is such that the output end of the 0 light fits perfectly.

このリング21の材質は実施例ではアルミニウム合金を
用いたが、特に材質の指定はなく電気絶縁が要求される
場合には磁器を用いてもよい。以下第3図を参照しなが
ら装置の組立てについて説明する。
Although aluminum alloy is used as the material for the ring 21 in the embodiment, there is no particular specification of the material, and if electrical insulation is required, porcelain may be used. The assembly of the device will be explained below with reference to FIG.

エンメントが形成された後、リング21をエンメントの
受光面9の周囲の上に接着材等で固着しライトガイド1
0と接続し組立てを完了する。
After the enment is formed, the ring 21 is fixed around the light receiving surface 9 of the enment with an adhesive or the like, and the light guide 1 is attached.
0 and complete the assembly.

この発明によるリング21は、その上面がすりばち状と
なっており、組立の際ライトガイド10が穴径りの円に
はまるようにニレメントラ誘導し固定してくれるので、
組立が容易になる。しかも、ライトガイド10の光の出
射端面を最適位置に保持し、組立後も所定位置に固定支
持する構造となっているため、上述の横振動に対しても
強い耐性をもつ。
The ring 21 according to the present invention has a dovetail-shaped upper surface, and when assembled, the light guide 10 is guided and fixed so that it fits into the circle of the hole diameter.
Assembly becomes easier. Moreover, since the light guide 10 has a structure in which the light emitting end face is held at an optimal position and fixedly supported at a predetermined position even after assembly, it has strong resistance to the above-mentioned lateral vibration.

第4図(a)、(b)はこの発明の他の実施例欠本す平
面図および断面図である。これらの図で、22は前記ラ
イトガイド10ン誘導するリングで、上面および固着面
はすりばち状となっている。このリング220穴径りは
ライトガイド10の光の出射端がぴったりはまる程度の
大きさである。23は前記ライトガイド10とエンメン
トとの光結合効率ケ高める屈折率整合剤で、第5図に示
されるようにリング22の固着面と受光面9との間に入
れられる。
FIGS. 4(a) and 4(b) are a plan view and a cross-sectional view, with parts omitted, of another embodiment of the present invention. In these figures, reference numeral 22 denotes a ring that guides the light guide 10, and its upper surface and fixing surface are in the shape of a dovetail. The hole diameter of this ring 220 is large enough to fit the light emitting end of the light guide 10. Reference numeral 23 is a refractive index matching agent that increases the optical coupling efficiency between the light guide 10 and the enment, and is inserted between the fixed surface of the ring 22 and the light receiving surface 9 as shown in FIG.

この発明によるリング22は屈折率整合剤23を使用し
、リング22にライトガイド10を接続する場合に発生
するライトガイド10と屈折率整合剤23との間の気泡
を抑さえられるため、光結合効率なより高めることがで
きる形状となっている。また、リング21.22のすり
ばち状の部分に7ツン樹脂、例えばテフ席−卜すれは、
その部分の摩擦係数が減少しすべりがよくなり、ライト
ガイド10vよりスムーズに受光面9に一致させること
ができる。さらに、リング22の固着面はリング21に
比べて大きくとっであるため、取り付は場所が限定され
ない。
The ring 22 according to the present invention uses the refractive index matching agent 23 and can suppress air bubbles between the light guide 10 and the refractive index matching agent 23 that occur when the light guide 10 is connected to the ring 22, so that optical coupling is possible. It has a shape that can increase efficiency. In addition, the ring 21 and 22 are made of resin, for example, a Teflon seat.
The coefficient of friction at that portion is reduced, the sliding is improved, and the light guide 10v can be brought into alignment with the light receiving surface 9 more smoothly than the light guide 10v. Furthermore, since the fixing surface of the ring 22 is larger than that of the ring 21, the attachment is not limited to any location.

なお、上記実施例では光トリガサイリスタを例にとって
説明したが、これに限定されることはな(、エンメント
、ライトガイド、パッケージを備えた光半導体装置であ
れば何でもよい。
Note that although the above embodiments have been explained using an optical trigger thyristor as an example, the present invention is not limited to this; any optical semiconductor device may be used as long as it includes an element, a light guide, and a package.

〔発明の効果〕〔Effect of the invention〕

以上説明(、たように、この発明は光半導体エンメント
の受光面の周囲に、ライトガイドを位置決めし固定する
リングを固着させたので、ライトガイドと受光面の位置
ずれがなくなり、耐振性に優れた装置が得られる。また
、このリングの固着面とライトガイドが誘導される面と
をリングの内径と同心ですりばち状とし、さらにこの面
に7ツン樹脂をコーティングしたので、摩擦抵抗が減少
され、ライトガイドと受光面との位置合せが容易にでき
る等の利点を有する。
As explained above, in this invention, a ring for positioning and fixing the light guide is fixed around the light-receiving surface of the optical semiconductor element, so there is no misalignment between the light guide and the light-receiving surface, and it has excellent vibration resistance. In addition, since the fixed surface of this ring and the surface on which the light guide is guided are concentric with the ring's inner diameter and have a beveled shape, and these surfaces are coated with 7-tsun resin, the frictional resistance is reduced. , the light guide and the light-receiving surface can be easily aligned.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の光トリガサイリスタの模式断面図、第2
図(a)、(b)はこの発明の一実施例ヶ示す平面図お
よび断面図、第3図は第2図(a)、(b)のリングを
適用した光トリガサイリスクの模式断面図、第4図(a
)、(b)はこの発明の他の実施例を示す平面図および
断面図、第5図は第4図(a)。 (b)のリング火適用した光トリガサイリスクの模式図
である。 図中、1は陰極、2は陰極フランジ、3は光結合端子、
4は絶縁筐体、5は陽極フランジ、6は陽極、7はシリ
コンウェハ、8は金椙補強板、9は受光面、10はライ
トガイド、21.22はリング、23は屈折率整合剤で
ある。 なお、図中の同一符号は同一または相当部分乞示す。 代理人 大巻 増雄 (外2名) 第1図 第2図 第4図
Figure 1 is a schematic cross-sectional view of a conventional optically triggered thyristor;
Figures (a) and (b) are a plan view and a cross-sectional view showing one embodiment of the present invention, and Figure 3 is a schematic cross-sectional view of an optical trigger cyrisk to which the ring of Figures 2 (a) and (b) is applied. , Figure 4 (a
) and (b) are a plan view and a sectional view showing another embodiment of the present invention, and FIG. 5 is FIG. 4(a). (b) is a schematic diagram of a light-triggered cyrisk to which a ring fire is applied. In the figure, 1 is a cathode, 2 is a cathode flange, 3 is an optical coupling terminal,
4 is an insulating casing, 5 is an anode flange, 6 is an anode, 7 is a silicon wafer, 8 is a reinforcing plate, 9 is a light receiving surface, 10 is a light guide, 21 and 22 are rings, and 23 is a refractive index matching agent. be. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent Masuo Ohmaki (2 others) Figure 1 Figure 2 Figure 4

Claims (1)

【特許請求の範囲】 (])党により信号欠受は所定の動作をする光半導体エ
ンメントと、この光半導体エンメン)Y包み保護するパ
ッケージと、このパッケージの外部から前記光半導体エ
ンメン)−&駆動させるための光信号を受け前記光半導
体エンメントの受光部まで伝送するライトガイドとを備
えた光半導体装置忙おいて、前記光半導体エンメントの
受光面の周囲に固着され、前記ライトガイドを誘導する
リングを設けたことt特徴とする光半導体装置。 (2) リングの固着面とライトガイドを誘導する面を
前記リングの内径と同心のすりばち状にしたことン特徴
とする特許請求の範囲第(1)項記載の光半導体装置。 (3) リングのライトガイドを誘導する面は、フッ素
樹脂がコーティングされたことを特徴とする特許請求の
範囲第(11項記載の光半導体装置。
[Claims] () An optical semiconductor element that performs a predetermined operation to prevent signal loss/reception, a package that protects the optical semiconductor element), and a package that protects the optical semiconductor element from the outside of this package. an optical semiconductor device comprising a light guide that receives an optical signal to transmit the optical signal to a light receiving section of the optical semiconductor element, and a ring that is fixed around the light receiving surface of the optical semiconductor element and guides the light guide; An optical semiconductor device characterized by providing: (2) The optical semiconductor device according to claim (1), wherein the fixing surface of the ring and the surface for guiding the light guide are formed into a dome shape concentric with the inner diameter of the ring. (3) The optical semiconductor device according to claim 11, wherein the surface of the ring that guides the light guide is coated with a fluororesin.
JP59012965A 1984-01-26 1984-01-26 Photosemiconductor device Pending JPS60157255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59012965A JPS60157255A (en) 1984-01-26 1984-01-26 Photosemiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59012965A JPS60157255A (en) 1984-01-26 1984-01-26 Photosemiconductor device

Publications (1)

Publication Number Publication Date
JPS60157255A true JPS60157255A (en) 1985-08-17

Family

ID=11819959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59012965A Pending JPS60157255A (en) 1984-01-26 1984-01-26 Photosemiconductor device

Country Status (1)

Country Link
JP (1) JPS60157255A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4905075A (en) * 1986-05-05 1990-02-27 General Electric Company Hermetic semiconductor enclosure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157273A (en) * 1979-05-25 1980-12-06 Toshiba Corp Photo-driven semiconductor device
JPS5662379A (en) * 1979-10-29 1981-05-28 Toshiba Corp Optical operated semiconductor
JPS58151059A (en) * 1982-03-02 1983-09-08 Toshiba Corp Photo-driven type semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157273A (en) * 1979-05-25 1980-12-06 Toshiba Corp Photo-driven semiconductor device
JPS5662379A (en) * 1979-10-29 1981-05-28 Toshiba Corp Optical operated semiconductor
JPS58151059A (en) * 1982-03-02 1983-09-08 Toshiba Corp Photo-driven type semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4905075A (en) * 1986-05-05 1990-02-27 General Electric Company Hermetic semiconductor enclosure

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