JPS60157060A - Transducer - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a transducer that converts between a wave and electrical energy, and a method for manufacturing the same.
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The transducer according to the present invention converts between stress waves and electrical energy, and includes data regarding the presence or position of a specific device, that is, the object, as well as the characteristics of the object. This is a transducer necessary for the equipment e1 (hereinafter referred to as "specific device") for providing data regarding the object.

The configuration of one example of such a specific device consists of the following combination.

(a) Stress wave energy transmitted to the visual field (hereinafter referred to as "transmission signal"),
(b) means for receiving at least a portion of the energy reflected from the object when the object is illuminated by the signal and an image is formed in the viewing area; (C) at least one of the relevant parameters imparts predetermined characteristics to at least a portion of the signal forming the image so as to contain data of the desired object; (d) means for analyzing the image obtained from the stress wave energy;

Here, the above-mentioned "image" refers to the existence, position,
The aspect or its dimensions, or the shape or extent of the object viewed from any direction, displayed chronologically, side by side, separately, or collectively. contains a large number of signals (readable by human vision or machine).

The means for imparting predetermined characteristics to the image-forming signal in one example of a specific device vary depending on the data regarding the object to which the received signal is primarily intended. Thus, if one of the characteristics for which an image is to be displayed is the distance or range of an object or a part thereof with respect to a predetermined point, e.g. modulates the stress wave transmission signal such that the difference in frequency between the transmitted signal and the received signal due to the passage of time between the time of initial emission of said signal and the time of receiving reflection is indicative of said distance or range. Frequency means. In this case, the means for imparting the predetermined characteristic imparts to the transmitted signal a waveform of linear or non-linear, preferably sawtooth frequency.

When the required object data is information regarding the lateral position or angular position of the object at a predetermined position, for example, the angular width of the object at a point l~ where the transmission means is located, the predetermined characteristics are The means for providing includes means for transmitting and/or receiving signals to be radiated and/or received in a beam, said beam having a radius vector centered at a predetermined point; It is conveniently shown as a polar diagram in which the region is the maximum value and the two opposite sides with respect to the reference plane are the minimum values.

Also, in some cases, the transmitting and/or receiving means is provided such that the beam is focused on a region remote from an axis extending opposite the viewing area. It is preferable to do so.

The means for imparting predetermined characteristics to the transmitted and/or received stress wave signal may include an angular transmission via the viewing area (e.g. azimuth plane, front or side plane, or rain sound plane) that falls between the boundaries of the viewing area. The method may include means for skillening the beam.

A transducer converting between stress wave energy and electrical energy is required to be incorporated into the transmitting means and the receiving means.

A transducer common to both means is also used.

The speeds or frequencies required to perform such modes of operation often preclude attachment means that would change the transducer's position to provide different angular positions.

The arrayed transducer elements are sent to the output element of the power amplifier or the transmission means or the input element of the receiving means, or to the transducer.
By using a transducer connected through each channel, the transducer includes means for providing a phase or time difference in the signals emitted by the transducer,
It is already known that the beam can be moved or scanned angularly and that the angular deflection of the beam can be performed electronically.

However, arranging a large number of individual transducer elements has an adverse effect on the performance of the transducer; therefore, the present invention eliminates this disadvantage and, moreover! ! The objective is to provide a transducer that is easy to manufacture and has low manufacturing costs.

In order to cause the beam to focus the transmitting and/or receiving means on a region that is spaced apart from an axis extending in the direction of the field of view, the configuration of the individual transducer elements becomes complex and the manufacturing The drawbacks are that the cost is high and it is difficult to reduce the size of the transducer.

According to the present invention, a large number of transducer elements are assembled and arranged, each of these transducer elements 1 to 1 is provided with opposing electrode means and a dielectric element, and the dielectric element comprises: A transducer for converting stress wave energy and electrical energy is provided, characterized in that it comprises a thin film (first thin film) common to the transducer elements.

One of the aforementioned counter electrodes includes another R film (second thin film) common to transducer element j.

In one embodiment of the transducer of the present invention, which is implemented using airborne stress wave energy, a number of electrode elements are arranged with each surface being coplanar;
a sheet of dielectric material overlaid on the plurality of electrode elements, with an electrically conductive film or electrically conductive coating provided on a surface remote from the electrode element 1-; Means for superimposing and supporting the same plane surfaces of the side electrode elements without being fixed from above; having a width dimension "-" wide compared to the thickness of said sheet, each of said electrode elements Separating gear 1
Aerial stress wave energy and electricity, characterized in that it is equipped with a seam that overlaps the adjacent electrode elements and a gear that eliminates or reduces the shear stress transmitted to each part. The energy conversion (j is now a transducer.

The 1-transducer of the present invention can include an S-interval delay means, and the means is arranged between the 1-transducer and the 1-transducer.
All channels or some channels or conductors are connected to each of the electrodes 1 to 1 to form a beam that is focused by the time R.

Further, the transducer of the present invention can include a time delay means and a means for scanning the beam by changing the time delay value, and the time delay means includes 1 to 1.
It is connected to all or some of the channels or conductors that connect to each of the electrode elements in the lance diffuser.

The first membrane is a sheet of dielectric (electrically insulating) material and the second membrane is an electrically conductive film or coating.

Further, according to the present invention, a sheet of dielectric material is stacked on the same plane of a plurality of conductive electrode means arranged two-dimensionally at m intervals from each other, and a sheet of a dielectric material is stacked on the same plane of the plurality of conductive electrode means arranged in a plane with a distance of m from each other. A multi-channel transducer for converting airborne stress wave energy and electrical energy, characterized in that the sheet is fixed and a conductive electrode means is provided on a surface of the sheet opposite to the electrode element. A manufacturing method is provided.

Conductive electrodes include thin films (i2 thin films) formed as electrically conductive films or coatings.

Acoustic detection systems operating in the air for blind assistance included in said specific devices generally use solid dielectric transducers for transmitting and receiving ultrasonic waves. One such method is the one described by the inventor.
"Radio and Electronic Engineering" Vol. 44, No. 11, published in November 19974, 605-62
As illustrated on page 7, for the transducer:
There is an explanation on page 610. The transmit and receive fields of this transducer are fixed away from the active face, and the transducer can be physically moved.
The field is immovable.

The transducer arrangement described above is used to generate a radiated electromagnetic field by suitably connecting it by means of an electrical network. When all the signals a3 at the terminals of the transducer are in phase, a narrower beam is formed perpendicular to the plane of the transducer electrode element 1. By utilizing the phase delay between each electrode element, the beam can be deflected and reflected from the vertical direction by m due to this phase delay. Furthermore, by utilizing the time delay between each electrode element, the beam can be deflected and reflected from the vertical direction. Such beam deflection or beam deflection
The method of scanning is the principle used in radar, sonar or ultrasound testing of solid objects or body tissues.

In the embodiment of the present invention, the array of electrode elements is described as a single; however, each element has channel access.
It is very effective to incorporate the arranged transducer elements 1 to 1 to the above-mentioned specific device or other devices, and manufacturing is very simple and economical. Performance regarding beam deflection and beam scanning can be improved without moving ~.

Embodiment In the illustrated embodiment, a number of conductive electrode elements 1
0 is set. These electrodes are made of conductive metal,
It is made of conductive plastics or plastics (insulators) coated with conductive metal, and from the viewpoint of manufacturing, it usually has a cubic shape, as shown in the example shown in Figure 1. The height dimension shown in FIG. 2 and the width dimension shown in FIG. 2 do not necessarily have to be equal.

As shown in FIG. 2, the 174 elements 10 are arranged in an orderly manner on the top surface 11 of the 174 elements 10 in a grid pattern as shown in FIG.
The lower surface is supported by the substrate 12 via an intervening body 13 made of an insulating material.

The substrate 12 may be formed integrally with the outer frame 14,
The upper surface of the outer frame 14 is flush with the upper surface 11 of the electrode element 10. The outer frame 14 and the substrate 12 are made of a desired material, such as metal or plastic (insulating).

Holes corresponding to the respective electrode elements 1-10 are bored in the substrate, and conductors 15 are passed through these holes to be connected to the respective electrode elements 10. The electrode element 10 is made of a conductive metal or conductive plastic, or optionally an insulating material whose upper surface is coated with a conductive coating, and when the electrode element 1o is made of an insulating material, the conductive coating is applied. A conductor 15 is connected to the top surface.

On the upper surface 11 of the N-pole element 1o, rMyyl
A sheet made of a dielectric material such as arJ (trademark) (hereinafter referred to as "first thin film") is laid down, and a layer of, for example, aluminum or gold is placed on the upper surface of the first thin film away from the electrode elements 1 to 10. conductive film (hereinafter referred to as “
A second thin film) is deposited thereon.

In the drawings, for convenience, these first and second thin films are
It is shown as one piece, not separated, and is designated by sheet 16.

Sheets 1 to 16 made up of first and second thin films are adhered and fixed to the upper surface of the outer frame 14. Therefore, the upper surface of the outer frame 14 has a rough surface. Further, the upper surface of each electrode element 1o may also be roughened 21 (in the drawing, only two surfaces are roughened). An air layer exists between the sheet 16 and the upper surface of the electrode element 10 on this rough surface.
Determine the frequency response characteristics of the transducer over the high frequency range from 11z to 300)tIfz. Although the roughening of the upper surface of the electrode element and the upper surface of the outer frame as described above is not essential, there is an advantage that they can be performed at the same time. Due to the frequency response characteristics required for lance 1, abrasive grains with a size of 60 to 280 are used for rough surface finishing. The upper surface of the electrode element is also mechanically polished into a grooved surface 20.

Such a narrow groove surface controls the frequency response characteristic in a low frequency range, such as from 30 to 100 Ilz, for example. Such fine groove surface finishing is preferably done in addition to rough surface finishing, but in the illustrated example, for convenience, rough surface finishing and
A fine groove surface finish is applied to the upper surface of each separate electrode element.

Similarly, the upper surface of the outer frame is also finished with a fine groove surface, either separately from the rough surface finish or at the same time.

The rough and grooved surface finishes on the electrode elements are applied to the top surface of all or selected electrode elements, depending on the frequency response characteristics to be achieved.

The thickness of Sheets 1-16 (first and second membranes) is 5.0 microns in a typical example, and the thickness of the film or coating of conductive material is 5.0 microns in a typical example. , 0.05 micron.

Apply adhesive to the upper surface of the outer frame 14 and place the sheet 16 on top of it.
When laying the sheet, the sheet is pulled under tension depending on the required frequency response characteristics. In some cases, said sea.

In some cases, the tensile force acting on 1 to 1 may be sufficient to cause no wrinkles in the sheet. A protective clamp 19 is provided on the periphery of the sheet 16 and the outer frame 14, and the S electric thin film-second g
electrically connected to the membrane.

Each of the electrode elements 10 is electrically insulated by gaps 17, 18 provided vertically and horizontally between them, and these gaps are either empty or filled with insulating material. It may be filled.

The sheet 16 is not fixed to the upper surface of the electrode element 10, nor is it attached to the area above said gap 17, 18 which is in a free state or filled with insulation material. . However, the sheets 1-16 freely face the flush top surfaces of the electrode elements while maintaining an air layer between the top surface of each electrode element and the sheet. , electrode element 1
The boundary of the air layer is defined by the rough surface and the groove surface of 0 and the lower surface of the sheet.

Since the tabs 17 and 18 are arranged in a blank manner and have the same width and depth, it is preferable that the tabs 17 and 18 be thicker than the thickness of the sheet 16.

The thickness of the sheet 16 is typically 5 microns, as mentioned above, and each of the gaps 17.18 is 500 microns thick.
A typical value is microns. In order to set such a value, the range from 30 old 1z to 30 subtraction < 111, if necessary, 1
Satisfactory operation of the transdecoder is obtained in the frequency range from 00 KHz to 200 KIIz.

Each electrode element 10 emits or receives signals individually or independently, and the radiation action is directed to or from the upper surface of the electrode element 10. Since the elements 1c and 1c move in a deformable manner, it is considered natural that the dielectric sheath I is clamped to the grips 17 and 18 between each said element. However, dielectric sea! It is a feature of the present invention that the ? is not clamped in the gap, and this feature reduces the difficulty in manufacturing and makes it possible to reduce the v1 cost.

By making the width of the gap 17.18 larger than the thickness of the dielectric sheet, the gap 17.18 can be formed through the dielectric sheet.
The shearing force acting on each electrode element 10. weakens to a negligible extent. ffff1 above the element
Eliminates and reduces stress coupling between the sheet and a film or coating on the top surface of said sheet (second Jt9M).

In the illustrated embodiment, the m-pole element 1- is arranged in a single plane, but a sheet 1- such as a sheet 16 is placed above the electrode element by an air layer (rough surface and narrow groove surface). )
6. The arrangement is such that it can be laid in a stretched state through the cable. Therefore, the upper surfaces of the electrode elements 10 may be collectively formed into a convex dome shape, and the above-described embodiment of flush or coplanar surfaces also includes such an embodiment.

The invention can also be applied to a transducer for producing a convergent or focused beam, which transducer comprises time delay means connected in series with each or several of the conductors 15, the electrodes The gain of the time delay in the emission or reception of wave energy by the Nilemene h 10 is given to the entire electrode element.

Also, for scanning purposes, each conductor 15 or some of them may be provided with variable time delay means. Such variable time delay means are preferably electronically actuated to provide a quick scanning cycle of the beam and to establish a scanning field of view.

[Brief explanation of drawings]

1 is a cross-sectional view taken along the line A--A in FIG. 2, and FIG. 2 is a cross-sectional view taken along the line B--B in FIG. 1, in an embodiment of the present invention. 10... Electrode element 11... Upper surface 12 of electrode element 1~
... Substrate 14 ... Outer frame 15 ... Conductor 16 ... Sheet 1 consisting of the first thin film and the second a film
7. Gap 20 for 18... Narrow groove surface 21... Rough surface finish

Claims (3)

[Claims] (1) A large number of transducer elements are assembled and arranged, each of the transducer elements is provided with opposing electrode means and a dielectric element, and the dielectric element A lance ducer for converting stress wave energy and electrical energy, characterized in that it comprises a common pre-installation (first B film) to the Usa Niremen 1-. (2) A large number of electrode elements arranged with each surface being the same plane: a conductive film or a conductive coating is provided on a surface remote from the electrode element 1-, and the large number of electrode elements a sheet made of a dielectric material to be flown over; a means for supporting the sheet by stacking it under tension on the same plane surfaces of the side electrode elements without being fixed from above; and a thickness of the sheet; a gap separating each of the electrode elements, the gap having a width dimension sufficiently wide compared to the width of the electrode element, the gap separating each of the electrode elements so as to eliminate or reduce shear stress transmitted to each of the sheet portions overlapping the adjacent electrode elements; A transducer for converting airborne stress wave energy and electrical energy, characterized by comprising: (3) A sheet 1 of a dielectric material is stacked on the same plane of a large number of conductive electrode means spaced apart from each other and arranged in a plane, and the sheet is fixed around the arranged electrode elements. A method for manufacturing a multi-channel transducer for converting air stress wave energy and electrical energy, characterized in that conductive electrode means is provided on a surface of the sheet remote from the electrode element. .