JPS60156561U - 洗浄用治具 - Google Patents

洗浄用治具

Info

Publication number
JPS60156561U
JPS60156561U JP1984045608U JP4560884U JPS60156561U JP S60156561 U JPS60156561 U JP S60156561U JP 1984045608 U JP1984045608 U JP 1984045608U JP 4560884 U JP4560884 U JP 4560884U JP S60156561 U JPS60156561 U JP S60156561U
Authority
JP
Japan
Prior art keywords
plate
cleaning jig
object support
jig
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984045608U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638902Y2 (enExample
Inventor
潔文 山田
津金　勉
Original Assignee
ホ−ヤ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ホ−ヤ株式会社 filed Critical ホ−ヤ株式会社
Priority to JP1984045608U priority Critical patent/JPS60156561U/ja
Publication of JPS60156561U publication Critical patent/JPS60156561U/ja
Application granted granted Critical
Publication of JPS638902Y2 publication Critical patent/JPS638902Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP1984045608U 1984-03-29 1984-03-29 洗浄用治具 Granted JPS60156561U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984045608U JPS60156561U (ja) 1984-03-29 1984-03-29 洗浄用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984045608U JPS60156561U (ja) 1984-03-29 1984-03-29 洗浄用治具

Publications (2)

Publication Number Publication Date
JPS60156561U true JPS60156561U (ja) 1985-10-18
JPS638902Y2 JPS638902Y2 (enExample) 1988-03-16

Family

ID=30559254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984045608U Granted JPS60156561U (ja) 1984-03-29 1984-03-29 洗浄用治具

Country Status (1)

Country Link
JP (1) JPS60156561U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010110679A (ja) * 2008-11-05 2010-05-20 Alps Electric Co Ltd 基板洗浄用ラック
JP2013518404A (ja) * 2010-01-22 2013-05-20 エルジー シルトロン インコーポレーテッド ウエハー洗浄装備用カセットジグ及びこれを備えたカセットアセンブリ
JP2016087570A (ja) * 2014-11-07 2016-05-23 日本電気硝子株式会社 ガラス板収容治具

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010110679A (ja) * 2008-11-05 2010-05-20 Alps Electric Co Ltd 基板洗浄用ラック
JP2013518404A (ja) * 2010-01-22 2013-05-20 エルジー シルトロン インコーポレーテッド ウエハー洗浄装備用カセットジグ及びこれを備えたカセットアセンブリ
JP2016087570A (ja) * 2014-11-07 2016-05-23 日本電気硝子株式会社 ガラス板収容治具

Also Published As

Publication number Publication date
JPS638902Y2 (enExample) 1988-03-16

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