JPS6015517U - クリ−ン・ル−ム用還気用仕切パネル - Google Patents

クリ−ン・ル−ム用還気用仕切パネル

Info

Publication number
JPS6015517U
JPS6015517U JP10789783U JP10789783U JPS6015517U JP S6015517 U JPS6015517 U JP S6015517U JP 10789783 U JP10789783 U JP 10789783U JP 10789783 U JP10789783 U JP 10789783U JP S6015517 U JPS6015517 U JP S6015517U
Authority
JP
Japan
Prior art keywords
panel
return air
partition panel
clean room
air partition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10789783U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0144655Y2 (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html
Inventor
柿崎　治郎
鈴木　昭一
高田　五郎
大場　規美雄
義郎 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takenaka Corp
Original Assignee
Takenaka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takenaka Corp filed Critical Takenaka Corp
Priority to JP10789783U priority Critical patent/JPS6015517U/ja
Publication of JPS6015517U publication Critical patent/JPS6015517U/ja
Application granted granted Critical
Publication of JPH0144655Y2 publication Critical patent/JPH0144655Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices For Use In Laboratory Experiments (AREA)
  • Ventilation (AREA)
JP10789783U 1983-07-12 1983-07-12 クリ−ン・ル−ム用還気用仕切パネル Granted JPS6015517U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10789783U JPS6015517U (ja) 1983-07-12 1983-07-12 クリ−ン・ル−ム用還気用仕切パネル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10789783U JPS6015517U (ja) 1983-07-12 1983-07-12 クリ−ン・ル−ム用還気用仕切パネル

Publications (2)

Publication Number Publication Date
JPS6015517U true JPS6015517U (ja) 1985-02-01
JPH0144655Y2 JPH0144655Y2 (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) 1989-12-25

Family

ID=30251933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10789783U Granted JPS6015517U (ja) 1983-07-12 1983-07-12 クリ−ン・ル−ム用還気用仕切パネル

Country Status (1)

Country Link
JP (1) JPS6015517U (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989328A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
JPH0989329A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989328A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
JPH0989329A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造

Also Published As

Publication number Publication date
JPH0144655Y2 (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) 1989-12-25

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