JPS60155042U - 真空吸着テ−ブル - Google Patents

真空吸着テ−ブル

Info

Publication number
JPS60155042U
JPS60155042U JP3984284U JP3984284U JPS60155042U JP S60155042 U JPS60155042 U JP S60155042U JP 3984284 U JP3984284 U JP 3984284U JP 3984284 U JP3984284 U JP 3984284U JP S60155042 U JPS60155042 U JP S60155042U
Authority
JP
Japan
Prior art keywords
vacuum suction
elastic member
suction table
annular groove
silicone material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3984284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240611Y2 (en:Method
Inventor
国雄 山宮
啓成 児玉
省二 吉川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP3984284U priority Critical patent/JPS60155042U/ja
Publication of JPS60155042U publication Critical patent/JPS60155042U/ja
Application granted granted Critical
Publication of JPH0240611Y2 publication Critical patent/JPH0240611Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP3984284U 1984-03-20 1984-03-20 真空吸着テ−ブル Granted JPS60155042U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3984284U JPS60155042U (ja) 1984-03-20 1984-03-20 真空吸着テ−ブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3984284U JPS60155042U (ja) 1984-03-20 1984-03-20 真空吸着テ−ブル

Publications (2)

Publication Number Publication Date
JPS60155042U true JPS60155042U (ja) 1985-10-16
JPH0240611Y2 JPH0240611Y2 (en:Method) 1990-10-30

Family

ID=30548167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3984284U Granted JPS60155042U (ja) 1984-03-20 1984-03-20 真空吸着テ−ブル

Country Status (1)

Country Link
JP (1) JPS60155042U (en:Method)

Also Published As

Publication number Publication date
JPH0240611Y2 (en:Method) 1990-10-30

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