JPS60152928A - Divided-angle-error measuring apparatus of polygon mirror - Google Patents

Divided-angle-error measuring apparatus of polygon mirror

Info

Publication number
JPS60152928A
JPS60152928A JP970284A JP970284A JPS60152928A JP S60152928 A JPS60152928 A JP S60152928A JP 970284 A JP970284 A JP 970284A JP 970284 A JP970284 A JP 970284A JP S60152928 A JPS60152928 A JP S60152928A
Authority
JP
Japan
Prior art keywords
polygon mirror
mirror
light
reflected
angle error
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP970284A
Other languages
Japanese (ja)
Inventor
Ken Hirasawa
平沢 憲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP970284A priority Critical patent/JPS60152928A/en
Publication of JPS60152928A publication Critical patent/JPS60152928A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005Testing of reflective surfaces, e.g. mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To make the price of an apparatus low, by providing a means, which inputs parallel luminous flux into mirror surfaces with a polygon mirror being rotated, a means, which converges the reflected luminous fluxes by a converging optical system, and luminous-flux detecting means, which are provided at a converging point. CONSTITUTION:Diverging luminous flux emitted from a semiconductor laser 1 is made to be parallel luminous flux by a collimate lens 2. The parallel luminous flux is inputted to two neighboring mirror surfaces of a polygon mirror 3. The parallel luminous fluxes reflected by the two mirror surfaces are converged by converging lenses 4 and inputted to photo-detectors 5. Based on the rotation of the polygon mirror 5, the reflected luminous fluxes are detected by the two photo-detectors 5 as pulses A and B. The time difference DELTAt between the pulses A and B is caused by the divided-angle errors and the rotation irregularity of the mirror 3. The arrangement of the detectors 5 are adjusted by utilizing the reference polygon mirror, the rotation irregularity is made sufficiently small, and the error in the divided angle is obtained.

Description

【発明の詳細な説明】 (技術分野) 本発明はレーザプリンタ等に用いられる多面鏡の分割角
度誤差を低コストで、しかも、短時間で測定できるよう
にした分割角度誤差測定装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a division angle error measuring device that can measure the division angle error of a polygon mirror used in a laser printer or the like at low cost and in a short time.

(従来技術) 従来の多面鏡の分割角度の誤差測定は、高精度で回転可
能なインデックステーブル上に9分割角度誤差を測定す
る多面鏡をセットし、テニプルを回転しつつ、多面鏡の
鏡面に光源より光を入射し。
(Prior art) To measure the error in the division angle of a conventional polygon mirror, the polygon mirror for measuring the 9-division angle error is set on a highly accurate and rotatable index table, and while rotating the teniple, the polygon mirror is adjusted to the mirror surface of the polygon mirror. Light enters from the light source.

その反射光を受光し、受光した光の反射角度を読み取る
ことにより行っている。例えば、6面鏡の場合正確に製
作されていれば、60°の回転ごとに、光源からの入射
光が反射光として識別できる筈であるが、多面鏡々面に
角度誤差があれば、60°の回転角度にずれを生じるこ
とになる。
This is done by receiving the reflected light and reading the reflection angle of the received light. For example, if a six-sided mirror is manufactured accurately, the incident light from the light source should be able to be identified as reflected light every 60 degrees of rotation, but if there is an angular error in the polygon mirrors, This results in a deviation in the rotation angle of °.

しかしながら、従来の分割角度誤差測定装置は。However, the conventional split angle error measuring device.

高精度のインデックステーブルを使用するものであり、
そのため、高価格となり、かつ多面鏡の各面について、
インデックステーブルを回転させて個々に誤差を測定す
ることになるので測定時間が極めて長くなるという欠点
があった。
It uses a high-precision index table,
Therefore, the price is high, and each side of the polygon mirror is
Since the index table is rotated and errors are measured individually, there is a drawback that the measurement time is extremely long.

(発明の目的および構成) 本発明は上記に鑑みてなされたものであり、低価格な装
置を使用し、かつ短時間に多面鏡の分割角度誤差を測定
するため、誤差測定対象の多面鏡を回転しつつ、光源よ
り光を多面鏡々面に入射し。
(Objects and Structure of the Invention) The present invention has been made in view of the above, and is an object of the present invention to measure the division angle error of a polygon mirror in a short time using a low-cost device. While rotating, light from the light source is incident on the polygonal mirror surfaces.

隣接する少なくとも2つの鏡面の反射光束をフォトディ
テクターで検出し9分割角度誤差を時間差に変換し計測
するようにした。多面鏡の分割角度誤差測定装置を提供
するものである。
The reflected light beams from at least two adjacent mirror surfaces are detected by a photodetector, and the 9-division angle error is converted into a time difference for measurement. The present invention provides a division angle error measuring device for a polygon mirror.

(実施例) 以下本発明による多面鏡の分割角度誤差測定装置を詳細
に説明する。誤差測定対象物である多面鏡はモータ等に
よって一定速で回転される台上にセットされる。1つ若
しくは複数の光源から射出した光をコリメート光学系に
より平行光束として多面鏡の2つ以上の鏡面に入射させ
る。鏡面に入射し1反射した光束を集束光学系で集束し
、その集束点にフォトディテクターをおいて光を検出す
ると、鏡面に分割角度誤差があるときは、鏡面が回転し
ているので対応する鏡面への光束到達時間を測定するこ
とにより2分割角度誤差を光束のフォトディテクターへ
の到達時間差として計測することができる。本発明の多
面鏡の分割角度誤差測定装置においては光源は1つ若し
くは複数であってもよく、同時に多面鏡の2つ以上の対
応する鏡面に入射させることにより、複数の鏡面の分割
角度誤差の同時測定が可能である。第1図に実施例とし
て光源が1つであって、被測定対象で多面鏡の隣接する
2つの鏡面に光束が入射する場合について説明する。光
を射出する半導体レーザ1があり、半導体レーザより射
出された発散ビームを平行光束とするコリメートレンズ
2がある。回転できるようになっている。被測定対象で
ある多面鏡3があり、コリメートレンズ2からの光束は
分割されることなく、多面鏡3の隣接する2つの鏡面に
入射するようになっている。2つの鏡面で反射された平
行光束を夫々集束する集束光学系4がある。この集束し
た光束を多面[3の回転により横切らせるようにフォト
ディテクタ5が置かれている。光束の通過によって各フ
ォトディテクタ5がらパルス出力があるので、これを計
測するタイムインターバルカウンタ6がある。
(Example) The polygon mirror division angle error measuring device according to the present invention will be described in detail below. A polygon mirror, which is the object of error measurement, is set on a table that is rotated at a constant speed by a motor or the like. Light emitted from one or more light sources is made to enter two or more mirror surfaces of a polygon mirror as a parallel light beam by a collimating optical system. When the light beam that enters the mirror surface and is reflected once is focused by a focusing optical system and a photodetector is placed at the focusing point to detect the light, if there is a division angle error on the mirror surface, the mirror surface is rotating and the corresponding mirror surface is detected. By measuring the time the light beam reaches the photodetector, the two-division angle error can be measured as the difference in the time the light beam reaches the photodetector. In the polygon mirror division angle error measuring device of the present invention, there may be one or more light sources, and the division angle error of the plurality of mirror surfaces can be measured by making the light source simultaneously enter two or more corresponding mirror surfaces of the polygon mirror. Simultaneous measurements are possible. In FIG. 1, a case will be described as an example in which there is one light source and a light beam is incident on two adjacent mirror surfaces of a polygon mirror in the object to be measured. There is a semiconductor laser 1 that emits light, and a collimator lens 2 that converts a diverging beam emitted from the semiconductor laser into a parallel light beam. It can be rotated. There is a polygon mirror 3 to be measured, and the light beam from the collimating lens 2 is made to enter two adjacent mirror surfaces of the polygon mirror 3 without being split. There is a focusing optical system 4 that focuses the parallel light beams reflected by the two mirror surfaces. A photodetector 5 is placed so as to cross this focused light beam by rotating the multifaceted surface [3. Since each photodetector 5 generates a pulse output due to the passage of the light beam, a time interval counter 6 is provided to measure this output.

以上の構成において、多面鏡の分割角度誤差を測定する
操作を説明する。半導体レーザ1から射出された発散光
束はコリメートレンズ2により平行光束となり1回転し
ている多面鏡3の隣接する2つの鏡面に入る。2つの鏡
面から反射された平行光束は集束レンズ4により集束し
、フォトディテクタ5に入る。多面鏡3が回転すること
により。
In the above configuration, the operation of measuring the division angle error of the polygon mirror will be explained. The diverging light beam emitted from the semiconductor laser 1 is turned into a parallel light beam by the collimating lens 2 and enters two adjacent mirror surfaces of the polygon mirror 3 which is rotating once. The parallel light beams reflected from the two mirror surfaces are focused by a focusing lens 4 and enter a photodetector 5. By rotating the polygon mirror 3.

光束の通過がフォトディテクタ5によりパルスとして得
られタイムインターバルカウンタ6で計測される。第3
図は2つのフォトディテクタ5からの出力をAおよびB
として、タイムインターバルカウンタ6の計測するAと
Bの時間差Δtの変化をCとして示している。tは1つ
の面の通過時間をあられし、その値のバラツキは多面鏡
3の回転速度むらおよび分割角度誤差に依存している。
The passage of the light beam is obtained as a pulse by a photodetector 5 and measured by a time interval counter 6. Third
The figure shows outputs from two photodetectors 5, A and B.
, the change in the time difference Δt between A and B measured by the time interval counter 6 is shown as C. t represents the transit time for one surface, and the variation in its value depends on the rotation speed unevenness of the polygon mirror 3 and the division angle error.

Δtのバラツキは多面鏡3の回転むらおよび分割角度誤
差に依存するが、予め正確に製作された基準多面鏡を使
用してΔtt−tに比較して充分小さくなるように2つ
のフォトディテクタ5を配置(尚。
Although the variation in Δt depends on the rotation unevenness of the polygon mirror 3 and the division angle error, the two photodetectors 5 are arranged so that it is sufficiently small compared to Δtt−t using a reference polygon mirror that is accurately manufactured in advance. (still.

2つのフォトディテクタ5を多面鏡3を中心にして対称
配置する構成はΔtをtに比べて充分小さくする構成で
あるが、更に9例えば、第1図の破線で示すように多面
鏡の回転むらによって光束が移動するときは7へ)する
ことによって多面鏡3の回転むらによる影響を充分小さ
くできるので。
The configuration in which two photodetectors 5 are arranged symmetrically with respect to the polygon mirror 3 is a configuration that makes Δt sufficiently smaller than t, but furthermore, as shown by the broken line in FIG. 7) when the light beam moves, the influence of uneven rotation of the polygon mirror 3 can be sufficiently reduced.

調整後はΔtを計測することによって多面鏡の分割角度
誤差をめることができる。
After adjustment, the division angle error of the polygon mirror can be calculated by measuring Δt.

第2図は光源が2つで、光源からの光束が被測定対象で
ある多面鏡の隣接する2つの鏡面に入射し9反射して1
つのフォトディテクタに集束する場合を示している。光
を射出する半導体レーザ1があり、半導体レーザ1より
射出した発散光束を平行光束とするコリメート光学系2
がある。被測定対象である回転できる多面鏡3があり、
コリメート光学系2からの平行光束が多面鏡3の互いに
隣接する2つの鏡面に入射するようになっている。
In Figure 2, there are two light sources, and the light beam from the light source enters two adjacent mirror surfaces of the polygon mirror that is the object to be measured, and is reflected by 9 and 1
This shows the case where the light is focused on one photodetector. There is a semiconductor laser 1 that emits light, and a collimating optical system 2 that converts the diverging light beam emitted from the semiconductor laser 1 into a parallel light beam.
There is. There is a rotatable polygon mirror 3 which is the object to be measured.
A parallel light beam from the collimating optical system 2 is made to be incident on two mirror surfaces of the polygon mirror 3 that are adjacent to each other.

2つの鏡面で反射された平行光束を集束するため集光学
系4がある、集束した光束を多面鏡3の回転により横切
らせるように設置されたフォトディテクタ5がある。多
面鏡の角度誤差を測定する操作は第1図における場合と
同様であって、半導体レーザ1より射出された発散光束
はコリメート光学レンズ2によって平行光束とされ回転
している被測定対象である多面鏡3の互いに隣接する2
つの鏡面より反射され1次に集束レンズ4により集束さ
れ、フォトディテクタ5に入る。多面鏡3が回転するこ
とにより、光束の通過がフォトディテクタ5により対応
するパルスとして得られる。フォトディテクタ5から出
力する2つのパルス間隔Δtを測定することにより、多
面鏡の分割角度誤差がめられる。
There is a condensing system 4 for converging the parallel light beams reflected by the two mirror surfaces, and a photodetector 5 installed so that the focused light beams are traversed by the rotation of the polygon mirror 3. The operation for measuring the angular error of a polygon mirror is the same as that shown in FIG. 2 adjacent to each other in mirror 3
The light is reflected from two mirror surfaces, is focused by a focusing lens 4, and enters a photodetector 5. By rotating the polygon mirror 3, the passage of the light beam is obtained by the photodetector 5 as a corresponding pulse. By measuring the interval Δt between two pulses output from the photodetector 5, the division angle error of the polygon mirror can be determined.

(発明の効果) 以上説明した通り2本発明によるレーザプリンタ等に用
いる&面鏡の分割角度誤差測定装置によれば、多面鏡を
回転しつつ、光源より光束を多面鏡の鏡面に入射し、そ
の反射光束をフォトディテクタで検出し1分割角度誤差
を時間差に変換し計測するようにしたため、低価格の装
置で、且つ短時間に多面鏡の分割角度誤差の測定ができ
た。
(Effects of the Invention) As explained above, according to the device for measuring division angle error of a polygon mirror used in a laser printer or the like according to the present invention, a light beam from a light source is incident on the mirror surface of the polygon mirror while rotating the polygon mirror, Since the reflected light beam is detected by a photodetector and the 1-division angle error is converted into a time difference for measurement, the division angle error of the polygon mirror can be measured in a short time using a low-cost device.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は光源が1つでフォトディテクタが2つの場合の
実施例を示す説明図、第2図は光源が2つでのフォトデ
ィテクタが1つの場合の実施例を示す説明図、第3図は
タイムインターバルカウンタにおけるパルス説明図。 符号の説明 1・・・半導体レーザ。 2・・・コリメート光学系。 3・・・多面鏡。 4・・・集束光学系。 5・・・フォトディテクタ。 6・・・タイムインターバルカウンタ。 7・・・フォトディテクタ。 特許出願人 富士ゼロックス株式会社 第1図 窄 Z2.7 第2図 第3図
Figure 1 is an explanatory diagram showing an example in which there is one light source and two photodetectors, Figure 2 is an explanatory diagram showing an example in which there are two light sources and one photodetector, and Figure 3 is an explanatory diagram showing an example in which there are two light sources and one photodetector. FIG. 3 is an explanatory diagram of pulses in an interval counter. Explanation of symbols 1: Semiconductor laser. 2...Collimating optical system. 3... Polygonal mirror. 4...Focusing optical system. 5...Photodetector. 6...Time interval counter. 7...Photodetector. Patent Applicant Fuji Xerox Co., Ltd. Figure 1 Narrow Z2.7 Figure 2 Figure 3

Claims (1)

【特許請求の範囲】 レーザプリンタ等に用いる多面鏡の分割角度誤差測定装
置において。 多面鏡を回転しつつ、光源から射出した光をコリメート
光学系により平行光束とし前記多面鏡の鏡面に入射させ
る手段と。 前記鏡面に入射し1反射された光束を集束光学系により
集束させる手段と。 その集束点に設けられた光束検出手段とを有することを
特徴とする多面鏡の分割角度誤差測定装置。
[Claims] In a dividing angle error measuring device for a polygon mirror used in a laser printer or the like. Means for turning the light emitted from the light source into a parallel beam of light by a collimating optical system and making it incident on the mirror surface of the polygon mirror while rotating the polygon mirror. means for converging the light beam incident on the mirror surface and reflected by a convergence optical system; What is claimed is: 1. A polygon mirror division angle error measuring device, comprising: a light beam detection means provided at the convergence point of the polygon mirror.
JP970284A 1984-01-23 1984-01-23 Divided-angle-error measuring apparatus of polygon mirror Pending JPS60152928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP970284A JPS60152928A (en) 1984-01-23 1984-01-23 Divided-angle-error measuring apparatus of polygon mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP970284A JPS60152928A (en) 1984-01-23 1984-01-23 Divided-angle-error measuring apparatus of polygon mirror

Publications (1)

Publication Number Publication Date
JPS60152928A true JPS60152928A (en) 1985-08-12

Family

ID=11727562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP970284A Pending JPS60152928A (en) 1984-01-23 1984-01-23 Divided-angle-error measuring apparatus of polygon mirror

Country Status (1)

Country Link
JP (1) JPS60152928A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0491208A2 (en) * 1990-12-13 1992-06-24 Hofmann Werkstatt-Technik Gmbh Method and device for optical measurement of an angle and positions of structures, particularly wheel positions in automobiles
EP0495190A2 (en) * 1991-01-16 1992-07-22 Hofmann Werkstatt-Technik Gmbh Device to optically measure an angle, particularly of the wheel position on vehicles in a vertical plane
US7701564B2 (en) 2005-05-18 2010-04-20 Hitachi Global Storage Technologies Netherlands B.V. System and method for angular measurement

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0491208A2 (en) * 1990-12-13 1992-06-24 Hofmann Werkstatt-Technik Gmbh Method and device for optical measurement of an angle and positions of structures, particularly wheel positions in automobiles
EP0495190A2 (en) * 1991-01-16 1992-07-22 Hofmann Werkstatt-Technik Gmbh Device to optically measure an angle, particularly of the wheel position on vehicles in a vertical plane
US7701564B2 (en) 2005-05-18 2010-04-20 Hitachi Global Storage Technologies Netherlands B.V. System and method for angular measurement

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